A horizontal micro-motion platform

Abstract

The present application relates to a horizontal micro-motion platform, comprising: a base plate, two groups of guide rail assemblies extending in the X-axis and Y-axis directions respectively, an intermediate plate arranged on the base plate, and can be displaced on the base plate in the X-axis direction through one group of guide rail assemblies, a carrier plate arranged on the intermediate plate, and can be displaced on the carrier plate in the Y-axis direction through another group of guide rail assemblies, a buffer pressurizing assembly capable of releasing a buffer is provided inside the guide rail assembly, which is used to buffer the impact of the guide rail assembly perpendicular to its own length direction and lubricate the guide rail assembly. A buffer pressurizing assembly is provided inside the two groups of guide rail assemblies, and the buffer pressurizing assembly can release a buffer to play a role in lubricating the guide rail assembly, reducing the wear of the device during use, and the buffer can also reduce the impact on the guide rail assembly when the carrier plate moves to the end of the stroke.

Description

Technical Field

[0001] The present application relates to the technical field of micro-motion platforms, and in particular to a horizontal micro-motion platform. Background Art

[0002] The micro-motion platform is a device that can achieve precise displacement, positioning and pointing control, and is widely used in optics, mechanics, biomedicine, materials science and other fields.

[0003] The micro-motion platform, also known as the micro-displacement platform, is a micro-displacement mechanism with high precision, high resolution and small stroke. It is used to achieve micro-feed and error compensation in precision machining, micro-adjustment in precision testing, micro-alignment in fiber optic docking, etc.

[0004] The existing micro-motion platform uses a cross-ball guide to enable the platform to run smoothly and at the same time make the height of the platform lower. However, in the long-term frequent reciprocating movements, the micro-motion platform uses a conventional cross-ball guide to move, and when it moves to the end of the stroke, the impact force on the guide may cause increased wear of the guide, resulting in bending, deformation, and insufficient displacement accuracy. Summary of the invention

[0005] The present application provides a horizontal micro-motion platform, which can solve the problem of reduced precision caused by wear of the platform guide rails due to impact force during use of the horizontal micro-motion platform.

[0006] The technical solution of the present application is as follows: A horizontal micro-motion platform, comprising:

[0007] Base plate;

[0008] Two sets of guide rail assemblies, the two sets of guide rail assemblies extend along the X-axis and Y-axis directions respectively;

[0009] An intermediate plate, disposed on the bottom plate, and capable of being displaced along the X-axis direction on the bottom plate through one set of the guide rail assemblies;

[0010] A carrier plate, which is disposed on the intermediate plate and can be displaced along the Y-axis direction on the carrier plate by another set of the guide rail assemblies;

[0011] A buffer pressurizing assembly capable of releasing a buffer is provided inside the guide rail assembly, which is used to buffer the impact perpendicular to the length direction of the guide rail assembly and lubricate the guide rail assembly.

[0012] By adopting the above scheme, since the two sets of guide rail assemblies are respectively arranged between the bottom plate and the middle plate and between the carrier plate and the middle plate, and are placed perpendicular to each other, the carrier plate can move along the x-axis and y-axis directions on the horizontal plane. At the same time, since a buffer pressurizing assembly is arranged inside it, the buffer pressurizing assembly can release a buffer to lubricate the guide rail assembly, thereby reducing the wear of the device during use. At the same time, the buffer can also reduce the impact on the guide rail assembly when the carrier plate moves to the end of the stroke.

[0013] In one embodiment of the present application, the guide rail assembly is provided in two groups and is respectively provided on the upper surface of the bottom plate and the middle plate, and each group of the guide rail assembly includes:

[0014] Two sets of fixing platforms, the two sets of fixing platforms are respectively arranged on both sides of the upper surface of the bottom plate or the middle plate;

[0015] Two guide rails arranged opposite to each other, the guide rails are assembled on the side where the two sets of fixed platforms are close to each other, a cavity is arranged inside the guide rail, the buffer is arranged inside the cavity, and the buffer pressurizing assembly is arranged horizontally, one end of which extends into the cavity, and the other end passes through the fixed platform and extends to the outer side of the guide rail;

[0016] Two groups of roller members, the two groups of roller members are assembled on the other side of the guide rail at intervals, and form a strip-shaped roller gap along the length direction of the guide rail, and each group of roller members includes a plurality of rollers arranged at intervals along the length direction of the guide rail;

[0017] A slide bar, wherein the slide bar is arranged at the other side of the guide rail and extends along the length direction of the guide rail, the slide bar is connected and fixed to the lower surface of the intermediate plate or the carrier plate, and a side of the slide bar close to the guide rail is fixedly connected to a limiting clip strip, the limiting clip strip extends along the length direction of the guide rail and is arranged between the roller gaps.

[0018] A cavity with a buffer stored inside is provided, and a roller that can protrude from the cavity is provided inside the cavity. When the roller rotates inside the cavity, the buffer can adhere to the buffer and be carried to the outside of the guide rail. When the limit strip contacts the roller, the buffer can also play a lubricating role. When the carrier plate moves to the end of the stroke, an impact force perpendicular to the length direction of the guide rail is generated. After the roller is subjected to the impact force, the buffer can also buffer part of the impact force, thereby reducing damage to the guide rail.

[0019] In one embodiment of the present application, the cavity comprises:

[0020] A strip-shaped cavity, which is arranged inside a side of the guide rail away from the roller and extends along the length direction of the guide rail;

[0021] A plurality of piston cavities are provided inside one side of the guide rail close to the roller, the plurality of piston cavities are provided in two rows spaced apart from each other and extending along the length direction of the guide rail, each piston cavity extends in a direction perpendicular to the length direction of the guide rail, the rollers are provided in the piston cavities one by one, one side protrudes to the outside of the piston cavities, and the buffer is provided inside the piston cavity.

[0022] By adopting the above scheme, multiple piston cavities are set, and rollers are set inside the piston cavities. After the spherical roller is impacted perpendicular to the length direction of the guide rail, it can automatically retract along the length direction of the piston cavity, thereby compressing the internal buffer, so that the buffer can reduce the impact force of the carrier plate on the guide rail when it moves to the end of the stroke to a certain extent.

[0023] In one embodiment of the present application, the buffer pressurizing component includes:

[0024] A bolt, wherein the bolt is arranged transversely, one end of the bolt passes through the fixing platform and the guide rail and is threadedly connected with the fixing platform and the guide rail, and the other end of the bolt extends into the interior of the cavity;

[0025] A movable plate, which is arranged inside the strip-shaped cavity and extends along the length direction of the strip-shaped cavity, and the other end of the bolt is rotatably connected to the movable plate;

[0026] A plurality of columnar piston blocks are divided into two rows extending along the length direction of the guide rail, the columnar piston block is arranged on the side of the movable plate close to the roller member, one end of the columnar piston block is fixedly assembled on the movable plate, and the other end extends into the piston cavity one by one.

[0027] By adopting the above scheme, as the roller continues to rotate, when the buffer solution inside the piston chamber cannot guarantee sufficient pressure on the roller, by turning the bolt, the bolt can drive the columnar piston block to squeeze the buffer solution inside the piston chamber during the process of screwing in, so that the buffer solution can always generate sufficient pressure on the roller. At the same time, the pressure of the buffer solution inside the piston chamber can also be adjusted according to the impact force generated when the carrier plate moves to the end of the stroke.

[0028] In one embodiment of the present application, the length d3 of the bolt and the sum d4 of the wall thickness of the fixing platform and the guide rail satisfy: d4 <d3。

[0029] By adopting the above solution, the length of the bolt and the wall thickness of the fixed platform and the guide rail are limited, so that when the movable plate is adjusted in position, the bolt has enough length to adjust the movable plate and move it to any position of the strip cavity.

[0030] In one embodiment of the present application, the sum of the thickness d1 of the moving plate and the columnar piston block and the width d2 of the strip cavity satisfy: d2 <d1。

[0031] By adopting the above scheme, the thickness of the movable plate and the columnar piston block and the width of the strip cavity are limited, so that when the movable plate moves to the side of the strip cavity away from the piston cavity and is tightly attached to the inner wall of this side, the columnar piston block can still block the piston cavity, thereby avoiding the leakage of buffer solution inside the piston cavity and causing insufficient pressure inside the piston cavity.

[0032] In one embodiment of the present application, each group of roller elements comprises:

[0033] Ball bearings;

[0034] The concentric rings are sleeved on the outside of the ball, and a limiting gap is formed between the concentric rings located on two adjacent sides of the roller gap. The side of the limiting clip close to the roller gap is provided with an abutment section that can be engaged with the limiting gap.

[0035] By adopting the above solution, by arranging concentric rings on the outside of the ball, the annular gap formed between two adjacent concentric rings can fit together with the abutment section, so that the limit clip can be embedded in the annular gap, so as to further improve the stability of the limit clip when moving between the two rollers.

[0036] In one embodiment of the present application, first magnetic strips are respectively installed at two ends of one side of the guide rail close to the slide bar, and the first magnetic strips extend along the length direction of the guide rail;

[0037] The two ends of the slide bar on one side close to the guide rail are respectively equipped with second magnetic strips, the second magnetic strips extend along the length direction of the slide bar and repel each other with the first magnetic strips.

[0038] By arranging the first magnetic strip and the second magnetic strip that magnetically repel each other on the side where the slide bar and the guide rail are close to each other, when the carrier plate moves to the end of the stroke, the first magnetic strip and the magnetic strip can also effectively reduce the impact force on the guide rail. The repulsive force between the first magnetic strip and the second magnetic strip can also reduce the pressure on the roller when the limit card strip moves in the roller gap, thereby reducing wear.

[0039] In one embodiment of the present application, the slide bar further includes a rotating roller, a rectangular groove is provided below the slide bar, and the rotating roller is rotatably assembled in the rectangular groove.

[0040] By adopting the above scheme, by setting the rotating roller and the supporting effect of the rotating roller, the load capacity of the device for heavy products is improved. At the same time, by utilizing the rolling friction, the resistance encountered during movement can be reduced compared with the sliding friction.

[0041] In one embodiment of the present application, the slide bar and the limit card strip are integrally formed, and the interiors of the slide bar and the limit card strip are both hollow, and liquid medium is provided inside the slide bar and the limit card strip.

[0042] By adopting the above technical solution, the slide bar and the limit card bar are integrated and a liquid medium is arranged inside, so that the noise generated when the slide bar slides on one side of the guide rail is absorbed by the liquid medium. At the same time, the liquid medium can effectively absorb the heat generated during frequent sliding to reduce heat loss.

[0043] In summary, the present application includes at least one of the following beneficial technical effects:

[0044] 1. By setting up a buffer pressurizing component, when the roller inside the piston cavity rotates, the buffer inside the piston cavity can be brought out, thereby lubricating the slide bar and the guide rail. In addition, the attachment of the buffer can also effectively reduce the noise generated when the slide bar slides on one side of the guide rail. At the same time, when the carrier moves to the end of the stroke or the guide rail is subjected to an impact force perpendicular to its own length direction, the buffer with a certain pressure can effectively reduce the impact on the guide rail.

[0045] 2. By setting a movable plate and a bolt, and rotating the bolt, the bolt drives the movable plate to move inside the strip cavity, thereby driving the columnar piston block to move inside the piston cavity. The columnar piston block can squeeze the buffer inside the piston cavity, thereby adjusting the pressure of the buffer on the roller, and then adjusting the buffering performance of the device.

[0046] 3. By providing a roller with a concentric ring on the outside, using two concentric rings arranged up and down to clamp the limit clip, and providing a smooth abutment section on the limit clip, so that the abutment section can fit with the side wall of the concentric ring, the device can improve the limiting ability of the slide bar to a certain extent, and the slide bar can be more stable when moving between the two roller parts.

[0047] 4. By setting the first magnetic strip and the second magnetic strip, the repulsive force between the first magnetic strip and the second magnetic strip is utilized so that when the slider approaches the guide rail or is close to the guide rail, the repulsive force between the first magnetic strip and the second magnetic strip can further improve the ability of the device to buffer the vertical impact force exerted on the guide rail.

[0048] 5. By setting the slide bar and the limit card bar as an integrally formed component, setting both to be hollow, and setting a liquid medium inside, when the slide bar slides on the guide rail, the vibration generated will be absorbed by the internal liquid medium, thereby reducing the noise generated when sliding occurs. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1It is a main exploded view of a horizontal micro-motion platform provided in the first embodiment of the present application;

[0050] Figure 2 is a front cross-sectional view of a horizontal micro-motion platform provided in the first embodiment of the present application;

[0051] Figure 3 This is a front view of a slider of a horizontal micro-motion platform provided in the first embodiment of the present application;

[0052] Figure 4 is a front cross-sectional view of a horizontal micro-motion platform provided in the first embodiment of the present application;

[0053] Figure 5 This is a front view of an abutment section of a horizontal micro-motion platform provided in the second embodiment of the present application;

[0054] Figure 6 It is a concentric ring front view of a horizontal micro-motion platform provided in the second embodiment of the present application;

[0055] Figure 7 This is a front view of a first magnetic strip and a second magnetic strip of a horizontal micro-motion platform provided in the third embodiment of the present application;

[0056] Figure 8 It is a front cross-sectional view of a rotating roller of a horizontal micro-motion platform provided in the fourth embodiment of the present application;

[0057] Fig. 9 It is a front cross-sectional view of a liquid medium of a horizontal micro-motion platform provided in the fifth embodiment of the present application.

[0058] Explanation of the reference numerals in the accompanying drawings: 1. bottom plate; 2. guide rail assembly; 21. buffer pressurizing assembly; 211. bolt; 212. movable plate; 213. columnar piston block; 22. fixed platform; 23. guide rail; 231. cavity; 2311. strip cavity; 2312. piston cavity; 232. buffer; 233. first magnetic strip; 24. roller member; 241. roller gap; 242. roller; 243. ball; 244. concentric ring; 245. limit gap; 25. slide bar; 251. limit card strip; 2511. abutment section; 252. second magnetic strip; 253. rotating roller; 254. rectangular groove; 255. liquid medium; 3. intermediate plate; 4. carrier plate. DETAILED DESCRIPTION

[0059] The following is combined with Figure 1-9 A horizontal micro-motion platform provided in the present application is described in further detail.

[0060] A horizontal fine motion platform provided in an embodiment of the present application includes: a horizontal fine motion platform including: a base plate 1, a guide rail assembly 2, an intermediate plate 3 and a carrier plate 4.

[0061] See also Figure 1 and Figure 2 The guide rail assembly 2 is arranged in two groups, and the two groups of guide rail assemblies 2 extend along the X-axis and Y-axis directions respectively, and are arranged on the bottom plate 1, and can be displaced along the X-axis direction on the bottom plate 1 through one group of guide rail assemblies 2, and are arranged on the middle plate 3, and can be displaced along the Y-axis direction on the carrier plate 4 through the other group of guide rail assemblies 2. A buffer pressurizing assembly 21 capable of releasing a buffer 232 is arranged inside the guide rail assembly 2, which is used to buffer the impact perpendicular to the length direction of the guide rail assembly 2 and lubricate the guide rail assembly 2. Two groups of guide rail assemblies 2 arranged perpendicularly to each other are adopted to realize the micro-movement of the carrier plate 4 in the horizontal direction. At the same time, the buffer pressurizing assembly 21 can reduce the impact perpendicular to the length direction of the guide rail assembly 2, and continuously lubricate the guide rail 23 and the slide bar 25 to reduce resistance and noise.

[0062] In this embodiment, the buffer 232 may be a lubricating fluid.

[0063] See also Figure 2 and Figure 3 The guide rail assembly 2 is set in two groups and is respectively arranged on the upper surface of the bottom plate 1 and the middle plate 3. Each group of guide rail assembly 2 includes: a fixed platform 22, a guide rail 23, a roller member 24 and a slide bar 25; the fixed platform 22 is set in two groups, and the two groups of fixed platforms 22 are respectively arranged on both sides of the upper surface of the bottom plate 1 or the middle plate 3. The guide rails 23 are two relatively arranged, and the guide rails 23 are assembled on the side where the two groups of fixed platforms 22 are close to each other. A cavity 231 is provided inside the guide rail 23, and a buffer 232 is provided inside the cavity 231. The buffer pressurizing assembly 21 is arranged horizontally, one end of which extends into the cavity 231, and the other end passes through the fixed platform 22 and extends to one side of the outside of the guide rail 23. The roller member 24 is set in two groups, and the two groups of roller members 24 are assembled on the other side of the guide rail 23 at intervals up and down, and extend along the length direction of the guide rail 23. The two groups of roller members 2 4 parts protrude from the other side of the guide rail 23 and form a strip-shaped roller gap 241. Each group of roller members 24 includes a plurality of rollers 242 arranged at intervals along the length direction of the guide rail 23. The slide bar 25 is arranged at the other side of the guide rail 23 and extends along the length direction of the guide rail 23. The slide bar 25 is fixedly connected to the lower surface of the middle plate 3 or the carrier plate 4. A side of the slide bar 25 close to the guide rail 23 is fixedly connected to a limit card strip 251. The limit card strip 251 extends along the length direction of the guide rail 23 and is arranged between the roller gaps 241. When the roller 242 rotates inside the cavity 231, it can adhere to the buffer 232 and carry it to the outside of the guide rail 23, thereby playing a lubricating role. At the same time, after the roller 242 is subjected to impact force, the buffer 232 can also buffer part of the impact force, thereby reducing damage to the guide rail 23.

[0064] See also Figure 2, the buffer pressure component 21 includes: a bolt 211, a moving plate 212, and a columnar piston block 213. The bolt 211 is horizontally arranged. One end of the bolt 211 penetrates through the fixed platform 22 and the guide rail 23 and is threadedly connected to the fixed platform 22 and the guide rail 23. The other end extends into the cavity 231. The moving plate 212 is arranged inside the strip-shaped cavity 2311 and extends along the length direction of the strip-shaped cavity 2311. The other end of the bolt 211 is rotatably connected to the moving plate 212. A plurality of columnar piston blocks 213 are provided. The plurality of columnar piston blocks 213 are divided into two rows extending along the length direction of the guide rail 23. The columnar piston blocks 213 are arranged on the side of the moving plate 212 close to the roller member 24. One end of the columnar piston block 213 is fixedly assembled on the moving plate 212, and the other end extends into the piston cavity 2312 one by one. By rotating the bolt 211, during the process of the bolt 211 being screwed in, it can drive the columnar piston block 213 to squeeze the buffer liquid 232 inside the piston cavity 2312, thereby adjusting the pressure of the buffer liquid 232 inside the piston cavity 2312.

[0065] Please continue to refer to Figure 2 , the length d3 of the bolt 211 and the sum d4 of the wall thicknesses of the fixed platform 22 and the guide rail 23 satisfy: d4 < d3. By setting a bolt 211 with a sufficient length, the moving plate 212 can be stably stationary at any position in the strip-shaped cavity 2311, so as to ensure the pressure of the buffer liquid 232 on the roller 242.

[0066] Please refer to Figure 4 , the cavity 231 includes: a strip-shaped cavity 2311 and a piston cavity 2312. The strip-shaped cavity 2311 is arranged inside the side of the guide rail 23 away from the roller 242 and extends along the length direction of the guide rail 23. A plurality of piston cavities 2312 are provided. The piston cavities 2312 are arranged inside the side of the guide rail 23 close to the roller 242. The plurality of piston cavities 2312 are arranged in two rows at intervals up and down and extend along the length direction of the guide rail 23. Each piston cavity 2312 extends along the direction perpendicular to the length direction of the guide rail 23. The rollers 242 are arranged in the piston cavities 2312 one by one, with one side protruding outside the piston cavity 2312. The buffer liquid 232 is provided inside the piston cavity 2312. By providing the buffer liquid 232 inside the piston cavity 2312, the buffer liquid 232 can, to a certain extent, slow down the impact force generated on the guide rail 23 when the carrier plate 4 moves to the end of the stroke.

[0067] Please refer to Figure 4 , the sum d1 of the thicknesses of the moving plate 212 and the columnar piston block 213 and the width d2 of the strip-shaped cavity 2311 satisfy: d2 < d1. By setting the sum of the thicknesses of the columnar piston block 213 and the moving plate 212, even when the moving plate 212 moves to the side away from the roller 242, the columnar piston block 213 can still block the piston cavity 2312, preventing the buffer liquid 232 inside the piston cavity 2312 from leaking.

[0068] Example 2

[0069] See also Figure 5 and Figure 6 Each group of roller components 24 includes: balls 243 and concentric rings 244. The concentric rings 244 are sleeved on the outside of the balls 243. A limiting gap 245 is formed between the concentric rings 244 located on the adjacent two sides of the roller gap 241. A contact section 2511 that can be engaged with the limiting gap 245 is provided on the side of the limiting clip 251 close to the roller gap 241. By providing a roller component 24 with the concentric rings 244 sleeved on the outside, the two concentric rings 244 are brought close to each other and abut against the contact section 2511 of the limiting clip 251, so that the limiting clip 251 can move more smoothly in the roller gap 241.

[0070] Example 3

[0071] See also Figure 7 The two ends of the guide rail 23 close to the slide bar 25 are respectively equipped with first magnetic strips 233, and the first magnetic strips 233 extend along the length direction of the guide rail 23. The two ends of the slide bar 25 close to the guide rail 23 are respectively equipped with second magnetic strips 252, and the second magnetic strips 252 extend along the length direction of the slide bar 25 and repel each other with the first magnetic strip 233. By arranging the first magnetic strip 233 and the second magnetic strip 252 between the guide rail 23 and the slide bar 25, the repulsive force between the two is utilized, so that the slide bar 25 can provide further buffering when it is close to the guide rail 23.

[0072] Example 4

[0073] See also Figure 8 The slide bar 25 also includes a rotating roller 253. A rectangular groove 254 is opened below the slide bar 25. The rotating roller 253 is rotatably assembled in the rectangular groove 254. The rotating roller 253 is used and arranged below the slide bar 25 to ensure the smooth movement of the slide bar 25 while further improving the support capacity of the carrier plate 4.

[0074] Example 5

[0075] See also Fig. 9 The slide bar 25 and the limit card strip 251 are integrally formed, and the interior of the slide bar 25 and the limit card strip 251 are both set to be hollow. Liquid medium 255 is provided inside the slide bar 25 and the limit card strip 251. By providing the liquid medium 255, when the carrier plate 4 slides, the liquid medium 255 can effectively absorb vibration, thereby reducing the noise generated by the carrier plate 4 when sliding. At the same time, kerosene or alcohol solution can also absorb excess heat generated by friction caused by relative movement.

[0076] In this embodiment, the liquid medium 255 may be kerosene or an alcohol solution.

[0077] In summary, when the carrier plate 4 moves along the x-axis direction, the carrier plate 4 drives the middle plate 3 to move along one set of the guide rail assemblies 2 extending in the x-axis direction. When it moves to the end of the x-axis, it will generate an impact perpendicular to the x-axis direction on the guide rail assemblies 2 extending in the y-axis direction. After the roller 242 on the guide rail assemblies 2 extending in the y-axis direction is impacted, it moves along the piston cavity 2312. After the buffer 232 is squeezed, it can effectively reduce the impact force on the guide rail assemblies 2 extending in the y-axis direction.

[0078] In addition, when the carrier plate 4 drives the middle plate 3 to move along the x-axis direction, the roller 242 rotates inside the piston cavity 2312, bringing out part of the buffer 232, thereby lubricating the limit card strip 251, further reducing the resistance during movement, and reducing the generation of noise;

[0079] When the carrier plate 4 moves along the y-axis direction, its movement process is the same as that along the x-axis direction, so it will not be described here in detail.

[0080] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A horizontal micro-motion platform, characterized in that: include: Bottom plate (1); Two sets of guide rail assemblies (2), the two sets of guide rail assemblies (2) extending along the X-axis and Y-axis directions respectively; An intermediate plate (3) is arranged on the bottom plate (1) and can be displaced along the X-axis direction on the bottom plate (1) through one set of the guide rail assemblies (2); A carrier plate (4) is arranged on the intermediate plate (3) and can be displaced along the Y-axis direction on the carrier plate (4) through another set of guide rail assemblies (2); A buffer pressurizing component (21) capable of releasing a buffer (232) is provided inside the guide rail component (2) to buffer the impact perpendicular to the length direction of the guide rail component (2) and lubricate the guide rail component (2); The guide rail assembly (2) is provided in two groups and is respectively provided on the upper surface of the bottom plate (1) and the middle plate (3), and each group of the guide rail assembly (2) comprises: Two groups of fixing platforms (22), the two groups of fixing platforms (22) being respectively arranged on both sides of the upper surface of the bottom plate (1) or the middle plate (3); Two guide rails (23) arranged opposite to each other, the guide rails (23) being mounted on the sides of the two sets of fixed platforms (22) close to each other, a cavity (231) being provided inside the guide rail (23), a buffer (232) being provided inside the cavity (231), the buffer pressurizing assembly (21) being arranged transversely, one end of which extends into the cavity (231), and the other end of which penetrates the fixed platform (22) and extends to the outside of the guide rail (23); Two groups of roller members (24), the two groups of roller members (24) are assembled on the other side of the guide rail (23) at intervals, and extend along the length direction of the guide rail (23); the two groups of roller members (24) partially protrude from the other side of the guide rail (23) and form a strip-shaped roller gap (241); each group of roller members (24) includes a plurality of rollers (242) arranged at intervals along the length direction of the guide rail (23); A slide bar (25), wherein the slide bar (25) is arranged at the other side of the guide rail (23) and extends along the length direction of the guide rail (23), the slide bar (25) is connected and fixed to the lower surface of the intermediate plate (3) or the carrier plate (4), and a limit clamping strip (251) is fixedly connected to one side of the slide bar (25) close to the guide rail (23), and the limit clamping strip (251) extends along the length direction of the guide rail (23) and is arranged between the roller gaps (241).

2. A horizontal micro-motion platform according to claim 1, characterized in that: The cavity (231) comprises: a strip-shaped cavity (2311), the strip-shaped cavity (2311) being arranged inside a side of the guide rail (23) away from the roller (242) and extending along the length direction of the guide rail (23); A plurality of piston cavities (2312), wherein the piston cavities (2312) are arranged inside one side of the guide rail (23) close to the roller (242), and the plurality of piston cavities (2312) are arranged in two rows spaced apart from each other and extending along the length direction of the guide rail (23), and each of the piston cavities (2312) extends along the length direction perpendicular to the guide rail (23), and the rollers (242) are arranged in the piston cavities (2312) one by one, with one side protruding outside the piston cavities (2312), and the buffer (232) is provided inside the piston cavities (2312).

3. A horizontal micro-motion platform according to claim 2, characterized in that: The buffer pressurizing component (21) comprises: A bolt (211), wherein the bolt (211) is arranged transversely, one end of the bolt (211) passes through the fixing platform (22) and the guide rail (23) and is threadedly connected to the fixing platform (22) and the guide rail (23), and the other end of the bolt (211) extends into the interior of the cavity (231); a movable plate (212), the movable plate (212) being arranged inside the strip-shaped cavity (2311) and extending along the length direction of the strip-shaped cavity (2311), and the other end of the bolt (211) being rotatably connected to the movable plate (212); A plurality of columnar piston blocks (213), wherein the plurality of columnar piston blocks (213) are divided into two rows extending along the length direction of the guide rail (23), wherein the columnar piston blocks (213) are arranged on a side of the movable plate (212) close to the roller member (24), and one end of the columnar piston block (213) is fixedly mounted on the movable plate (212), and the other end thereof extends into the interior of the piston cavity (2312) in a one-to-one correspondence.

4. A horizontal micro-motion platform according to claim 3, characterized in that: The length d3 of the bolt (211) and the sum d4 of the wall thickness of the fixing platform (22) and the guide rail (23) satisfy: d4 <d3。 5. The horizontal micro-motion platform according to claim 3, characterized in that: The sum d1 of the thickness of the moving plate (212) and the columnar piston block (213) and the width d2 of the strip cavity (2311) satisfy: d2 <d1。 6. The horizontal micro-motion platform according to claim 1, characterized in that: Each group of roller elements (24) comprises: Ball (243); A concentric ring (244) is sleeved on the outside of the ball (243), and a limiting gap (245) is formed between the concentric rings (244) located on two adjacent sides of the roller gap (241), and a contact section (2511) that can be mutually engaged with the limiting gap (245) is provided on a side of the limiting clamping strip (251) close to the roller gap (241).

7. The horizontal micro-motion platform according to claim 1, characterized in that: The two ends of one side of the guide rail (23) close to the slide bar (25) are respectively equipped with first magnetic strips (233), and the first magnetic strips (233) extend along the length direction of the guide rail (23); The two ends of the slide bar (25) on one side close to the guide rail (23) are respectively equipped with second magnetic strips (252), and the second magnetic strips (252) extend along the length direction of the slide bar (25) and repel each other with the first magnetic strip (233).

8. The horizontal micro-motion platform according to claim 1, characterized in that: The slide bar (25) further comprises a rotating roller (253). A rectangular groove (254) is provided below the slide bar (25), and the rotating roller (253) is rotatably assembled in the rectangular groove (254).

9. The horizontal micro-motion platform according to claim 1, characterized in that: The slide bar (25) and the limit clamping strip (251) are integrally formed, and the interiors of the slide bar (25) and the limit clamping strip (251) are both arranged to be hollow, and liquid medium (255) is provided inside the slide bar (25) and the limit clamping strip (251).

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