Semiconductor laser annealing machine LSA101LP light path pre-calibration tool and light path
By using the spot sensor and sensor fixing frame in the LSA101LP optical path precalibration tool of the semiconductor laser annealing machine, combined with the calibration methods of low-energy laser and high-energy laser, the problems of insufficient accuracy, fast target disc loss and high personal injury in the existing optical path adjustment technical solutions are solved, and the optical path calibration with high accuracy, low consumption and high safety is achieved.
CN119688255APending Publication Date: 2025-03-25CHAOKE SEMICONDUCTOR TECHNOLOGY (NANTONG) CO LTD
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Patent Information
- Application Number
- CN202411773376.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-03-25
AI Technical Summary
Technical Problem
The existing optical path adjustment technical solutions have problems such as insufficient accuracy, fast target disc loss and high risk of personal injury.
Method used
The semiconductor laser annealing machine LSA101LP optical path precalibration tool, including a spot sensor and a sensor fixing frame, is used to precalibrate by low-energy laser, and then calibrate with high-energy laser to reduce the frequency of use of high-energy lasers, and replace the target disk with a spot sensor to improve calibration accuracy.
Benefits of technology
The calibration accuracy is improved to 0.01 mm, reducing the consumption of the target disk and the frequency of high-energy laser use, and significantly improving safety.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention discloses a semiconductor laser annealing machine LSA101LP light path pre-calibration tool and a light path, and the tool comprises a light spot sensor and a sensor fixing frame, and the light spot sensor and the sensor fixing frame are used in cooperation. The sensor fixing frame comprises a fixing frame body, a circular positioning hole is formed in the fixing frame body, an insertion opening is formed in the side face of the fixing frame body and communicated with the circular positioning hole, a cover plate is arranged on the side face of the fixing frame body by arranging a pin shaft and a torsional spring, and the cover plate is used for opening and closing the insertion opening. After the light spot sensor is embedded from the insertion opening, the circle center of the circular photosensitive view window of the light spot sensor coincides with the circle center of the circular positioning hole of the fixed frame body. The low-energy laser is used for pre-calibration, then the high-energy laser is used, the use frequency of the high-energy laser is reduced, the safety is improved, and the consumption of the target disc is reduced; the light spot sensor is adopted to replace a target disc, so that the calibration precision is improved, and the precision can reach 0.01 mm.
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