Fault prediction method, device and equipment for turbo molecular pump and medium
By preprocessing the operating data of the turbomolecular pump and calculating health indicators, a fault prediction model is established, which solves the problem of failure in the existing technology that failure is not discovered in time, and timely and accurate prediction of the fault status of the turbomolecular pump is achieved, reducing maintenance costs and equipment downtime.
CN119692549APending Publication Date: 2025-03-25KYKY TECH
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Patent Information
- Application Number
- CN202411790767.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-06
- Publication Date
- 2025-03-25
AI Technical Summary
Technical Problem
The existing technology cannot detect potential faults of turbomolecular pumps in a timely manner, resulting in high maintenance costs and affecting production progress.
Method used
By collecting operation data of turbomolecular pumps, performing data preprocessing and health indicator calculations, establishing fault prediction models, and using machine learning algorithms and data analysis technology to make predictions.
Benefits of technology
It realizes timely and accurate prediction of the fault status of turbomolecular pumps, reduces maintenance costs and equipment downtime, and improves production efficiency.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention relates to the technical field of molecular pumps, and discloses a fault prediction method, device, equipment and medium for a turbo molecular pump, the method comprises the following steps: collecting operation data of the turbo molecular pump according to a set sampling frequency, and transmitting the operation data through a data transmission network; performing data cleaning, denoising, normalization and format conversion processing on the historical operation data; the health index value of the turbo molecular pump is calculated according to the processed historical operation data, whether the turbo molecular pump breaks down or not is judged according to the health index value, and historical fault data are obtained; according to the method, the fault prediction model is established based on the historical fault data and the real-time operation data, the fault state of the turbo molecular pump is predicted through the fault prediction model, the fault prediction model is established to predict possible faults of the turbo molecular pump, and therefore potential fault hidden dangers can be found timely and accurately, and the fault state of the turbo molecular pump can be predicted. And a more reliable basis is provided for the maintenance decision of the turbo molecular pump.
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