MEMS controller and MEMS device
By designing a MEMS controller, the vibration of the diaphragm and cantilever beam structure is used to realize unidirectional flow control of the fluid, solving the problem of difficult to control the unidirectional movement of the fluid in the prior art, and is suitable for the application of radiators and speakers.
CN119706731AActive Publication Date: 2025-03-28AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD
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Patent Information
- Application Number
- CN202411919144.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2044-12-24
AI Technical Summary
Technical Problem
The prior art is difficult to effectively control the unidirectional movement of fluids.
Method used
A MEMS controller is designed, including a control unit, cantilever beam structure, diaphragm and packaging structure. Through the vibration of the diaphragm and the gap of the cantilever beam structure, one-way flow control of the fluid is realized.
Benefits of technology
It realizes one-way flow control of fluid, suitable for radiator and speaker applications, and improves the efficiency of fluid flow rate and sound demodulation.
✦ Generated by Eureka AI based on patent content.
Abstract
The embodiment of the invention provides an MEMS controller and an MEMS device, and the MEMS controller comprises at least one control unit, and the control unit comprises a first gap between adjacent first anchor point structures; the cantilever beam structures correspond to the first anchor point structures, the first end of each cantilever beam structure is located on the top face of the corresponding first anchor point structure, and the second ends of the two adjacent cantilever beam structures of the same control unit face each other and are provided with a second gap. The vibrating diaphragm covers the top surfaces of the two second anchor point structures; the packaging structure comprises a bottom plate, a side plate and a top plate which are connected in sequence. Wherein the bottom plate is provided with a first flow channel opening penetrating through the bottom plate, the first flow channel opening corresponds to the control unit, and the first flow channel opening is communicated with a first gap of the corresponding control unit; the top plate is spaced from the cantilever beam structure and the top surface of the vibrating diaphragm, and the top plate is provided with a second flow channel opening penetrating through the top plate. And one-way flow of fluid can be controlled.
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