Radio frequency device, thin film deposition equipment and electric field control method
By using a power divider and phase adjustment module in the radio frequency device of the thin film deposition equipment, the precise allocation and phase control of the radio frequency signal is solved, and the problem of inability to flexibly control the electric field distribution in the prior art is solved, and the precise adjustment of the thin film deposition process parameters is achieved.
CN119710637APending Publication Date: 2025-03-28PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information
- Application Number
- CN202411908489.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-03-28
AI Technical Summary
Technical Problem
The prior art cannot achieve flexible and precise control of the electric field distribution in thin film deposition equipment, and cannot meet the deposition process needs under specific needs.
Method used
By introducing a power divider and a phase adjustment module into the radio frequency device, uniform or proportional distribution of the RF signal power and independent control of the phase angle of the RF signal are achieved, thereby accurately adjusting the electric field distribution.
Benefits of technology
It realizes flexible and precise control of the internal electric field distribution of thin film deposition equipment, and can adjust process parameters such as thickness distribution and density distribution of thin film to meet specific needs.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention provides a radio frequency device for thin film deposition equipment, the thin film deposition equipment and an electric field control method of the thin film deposition equipment. A radio frequency generator of the radio frequency device for the thin film deposition equipment is connected with an upper electrode, the radio frequency device comprises a power divider arranged between the radio frequency generator and the upper electrode, and a plurality of output ends of the power divider are respectively connected with a plurality of feed-in points uniformly distributed on the upper electrode. The power distribution unit is used for uniformly or proportionally distributing the power of a radio frequency signal generated by a radio frequency generator to a plurality of feed-in points; and the plurality of phase adjusting modules are respectively arranged between the plurality of output ends of the power divider and the plurality of feed-in points of the upper electrode, and the phase adjusting modules are used for independently controlling phase angles of the radio frequency signals distributed to the feed-in points. The radio frequency device for the thin film deposition equipment can realize accurate electric field distribution control based on a deposition process under specific requirements, so that process parameters such as thickness distribution and density distribution of a thin film are adjusted.
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