Crystal growing furnace
By designing a crystal growth furnace with multiple seed rods and multiple crucibles, continuous production and replacement is achieved using the suspension mechanism and clamping mechanism, the problem of low production efficiency in the prior art is solved and efficient crystal growth is achieved.
CN119710896APending Publication Date: 2025-03-28GUANGZHOU YUESHENG SEMICON EQUIP CO LTD
0 Cites 0 Cited by
Patent Information
- Application Number
- CN202411761013.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-03-28
AI Technical Summary
Technical Problem
Existing crystal growth furnaces need to re-exchange the crucible and seed rod after each crystal generation, resulting in lower production efficiency.
Method used
A crystal growth furnace with multiple seed rods and multiple crucibles is designed. The continuous production and replacement of multiple seed rods and multiple crucibles is achieved through the suspension mechanism and the clamping mechanism, reducing the frequent replacement of single seed rods and crucibles.
Benefits of technology
The production efficiency of the crystal growth furnace is improved, continuous production and replacement is achieved, and repeated vacuum extraction and opening of the cavity are reduced, thereby improving the overall production efficiency.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention relates to the technical field of semiconductor crystals, and particularly discloses a crystal growing furnace which comprises an upper cavity, a middle cavity and a lower cavity, a liftable seed crystal shaft is arranged in the upper cavity, a suspension mechanism is arranged in the upper cavity, a plurality of seed crystal rods are suspended on the suspension mechanism, and the seed crystal rods are arranged in the middle cavity. A clamping mechanism for clamping a seed crystal rod on the suspension mechanism and connecting the seed crystal rod with a seed crystal shaft is also arranged in the upper cavity, a crucible heating assembly is arranged in the middle cavity, a crucible placing assembly is arranged in the lower cavity, a plurality of crucibles are arranged on the crucible placing assembly, a crucible lifting assembly is arranged in the lower cavity, and the crucible lifting assembly is connected with the crucible heating assembly. A crucible clamping device used for clamping and placing the crucible in the crucible placing assembly into the crucible lifting assembly is further arranged in the lower cavity, the whole process of producing a plurality of crystals is continuous production, repeated vacuumizing and re-cooling and re-heating of the cavities are not needed, and the production efficiency is greatly improved.
Need to check novelty before this filing date? Find Prior Art