Method, device, equipment, system and medium for monitoring residual amount of reagent in reagent bottle

By monitoring the gas pressure and chemical reagent outflow rate in the test reagent bottle, combining density and influence factor, the remaining height of the reagent in the reagent bottle is calculated, and the problem of inaccurate monitoring of weight changes caused by the tilt placement of the reagent bottle in the prior art is solved, and efficient and sensitive reagent margin monitoring is achieved.

CN119714467APending Publication Date: 2025-03-28SHANGHAI INTEGRATED CIRCUIT EQUIPMENT & MATERIALS INDUSTRY INNOVATION CENTER CO LTD
0 Cites 0 Cited by

Patent Information

Application Number
CN202311280230.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-09-28
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

The prior art is difficult to effectively monitor the balance of chemical reagents in the test reagent bottle, especially when the reagent bottle is placed in an inclined manner, it is difficult to obtain accurate data on the weight change monitoring method.

Method used

By obtaining the gas pressure leading to the gas in the reagent bottle and the flow rate in the chemical reagent flow out of the pipeline, combining the chemical reagent density and the influence factor of the inner wall of the pipeline on the flow rate, the first partial pressure affecting the flow rate of the chemical reagent is calculated, and the remaining height of the reagent in the reagent bottle is determined based on the gas pressure and density.

Benefits of technology

It realizes sensitive and efficient monitoring of the reagent residue in the reagent bottle, the data is more realistic, and there is no direct contact with the reagent, avoiding contamination.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The invention relates to the technical field of semiconductor integrated circuit manufacturing processes, and discloses a method, a device, equipment and a system for monitoring the remaining amount of a reagent in a reagent bottle and a medium. Acquiring the flow velocity of the chemical reagent in the pipeline when the chemical reagent flows out of the reagent bottle; determining a first partial pressure influencing the flow velocity of the chemical reagent in the pipeline according to the flow velocity, the density of the chemical reagent and the influence factor of the inner wall of the pipeline on the flow velocity; and determining the residual height of the chemical reagent in the reagent bottle according to the first partial pressure, the air pressure and the density of the chemical reagent. By determining the height of the residual liquid in the reagent bottle, the amount of the residual chemical reagent in the reagent bottle can be monitored more effectively and sensitively, data are more real, meanwhile, the chemical reagent in the reagent bottle cannot be directly contacted in the monitoring process, and additional pollution is avoided.
Need to check novelty before this filing date? Find Prior Art