Quality evaluation method of electron microscopic image, product and equipment

By extracting pixel gradient values ​​in electron microscopic image quality evaluation, calculating the pixel proportion of the region of interest, and selecting the pixel gradient set in the prior art, the problem of inaccurate gradient calculation and weakening of feature region scores is solved, and a more efficient and accurate image quality evaluation is achieved.

CN119723306APending Publication Date: 2025-03-28DONGFANG JINGYUAN ELECTRON LTD
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Patent Information

Application Number
CN202411797724.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-06
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

The existing electron microscopic image quality evaluation method only uses the gradient in the horizontal and vertical direction when calculating the pixel gradient, resulting in inaccuracy; at the same time, the full-picture features are used as the mass score, weakening the score of the region of interest with obvious characteristics.

Method used

The gradient value of each pixel in the electron microscope image is extracted, the pixel proportion of the region of interest is calculated, and the pixel gradient set of the region of interest is selected through the pixel proportion, and the pixel gradient average is finally calculated based on the pixel gradient set as the quality fraction of the image.

Benefits of technology

Improves the accuracy of image quality evaluation, can be closer to the actual gradient value, reduces the calculation amount and processing time, and locks the optimal focus position and parameters without reference to the image.

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Abstract

The invention provides a quality evaluation method of an electron microscopic image, a product and equipment. The method comprises the following steps: acquiring an electron microscopic image to be evaluated; extracting a gradient value corresponding to each pixel in the electron microscopic image; according to the gradient value, calculating to obtain a pixel proportion of the region of interest in the electron microscopic image; a pixel gradient set of the region of interest is obtained through pixel proportion selection; and calculating a pixel gradient mean value according to the pixel gradient set, and taking the pixel gradient mean value as the mass fraction of the electron microscopic image. According to the method, the most important focusing position in the electron microscopic image can be locked without referring to the electron microscopic image, so that accurate automatic focusing is realized, and the calculation efficiency and accuracy are greatly improved; and the pixel gradient mean value of the region of interest is used as the mass fraction of the electron microscopic image, so that the quality of the electron microscopic image can be further ensured, and the calculation amount and the processing time required for evaluating the quality of the electron microscopic image can be reduced.
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