Apparatus for processing substrate and method for processing substrate

By designing equipment for processing substrates, including smoke collection and cooling units, the problems of fluid passage blockage and equipment pollution caused by smoke are solved, and efficient collection and removal of smoke is achieved, ensuring the normal operation of the equipment.

CN119725149APending Publication Date: 2025-03-28SYSTEM ENGINEERING MEGA SOLUTION CO LTD
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Patent Information

Application Number
CN202411281890.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-09-26
Filing Date
2024-09-13
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

In substrate heat treatment processes, the generated smoke and mixed gases may cause fluid passage blockage and equipment contamination, especially the smoke may cool and settle during cooling, blocking the inlet portion.

Method used

An apparatus for processing substrates is designed, including a heating unit, a smoke collection unit, a vacuum unit and a cooling unit. The smoke collection unit introduces the smoke mixture gas through the inlet portion and discharges the smoke removal gas through the outlet portion. The cooling unit selectively cools the smoke collection unit through a bypass fluid channel, and the controller controls the supply of coolant according to the supply of the substrate and the state of the vacuum unit.

Benefits of technology

It effectively prevents smoke from cooling and solidifying in the inlet part, avoids passage blockage, improves smoke collection performance, and ensures the normal operation of the equipment and pollution control.

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Abstract

The invention relates to an apparatus for processing a substrate and a method for processing a substrate. The apparatus for processing a substrate includes: a heating unit that heats the substrate and includes a hot plate having a vacuum hole; a smoke collection unit including a housing, an inlet portion connected to the vacuum hole and introducing a mixed gas including smoke generated when the substrate is heated into an inner space of the housing, and an outlet portion discharging a gas from which the smoke has been removed to an outer space of the housing; the vacuum unit is connected to the smoke collecting unit and is used for sucking the substrate onto the hot plate in a vacuum manner when the substrate is heated; and a cooling unit including a cooling body, a coolant inflow fluid passage introducing a coolant into the cooling body, a coolant discharge fluid passage discharging the coolant from the cooling body, and a bypass fluid passage connecting the coolant inflow fluid passage and the coolant discharge fluid passage.
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