Air floatation device related to substrate working area
By adopting a combination of positive pressure and negative pressure in the airfloating device in the substrate working area and combining the design of the throttling structure, the problems of high suspension stability and cost of the existing airfloating device in the substrate working area are solved, and the stability and cost of the substrate flight height are achieved.
Patent Information
- Application Number
- CN202411934555.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2044-12-26
AI Technical Summary
The existing airfloating devices have high suspension stability requirements in the substrate working area, but their complex structure leads to high manufacturing costs and are difficult to meet the requirements of the substrate working area at the micron level.
An airfloating device involving the substrate working area is designed, and a positive pressure air outlet, a negative pressure air inlet, a positive pressure throttling structure, a negative pressure throttling structure, a positive pressure air duct and a negative pressure air duct are distributed on the airfloating platform. The throttling structure is located on the layer plate to reduce the thickness of the device.
The stability of the substrate flight height is achieved, the cost of the air float device is reduced, and the structure is simple and easy to produce and manufacture.