Operation of robotic devices within rectangular hosts
By designing a dual-terminal receiver robot device, the flexible operation of the terminal receiver is achieved using the rotating shaft and coupling structure, the flexibility and efficiency of the robot equipment operating in the rectangular host in the prior art is solved, and efficient substrate processing is achieved.
Patent Information
- Application Number
- CN202380062144.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-08-16
- Filing Date
- 2023-08-25
- Publication Date
- 2025-04-04
AI Technical Summary
Existing robotic equipment is difficult to operate effectively within a rectangular host, especially when maintaining a constant span and avoiding operation beyond the sweep diameter specification.
A dual-terminal reactor robot device is designed, including a lower arm, an upper arm, a first blade and a second blade. The flexible extension and retraction of the terminal reactor is achieved through the rotating shaft and the coupling structure to ensure operational flexibility and efficiency within the rectangular host.
Flexible substrate processing in a rectangular host is realized, and can operate in single and dual substrate processing modes, maintain a constant span and avoid operation exceeding the sweep diameter, improving processing yield and operation reliability.