A method for detecting a tilt wavefront of a dual-fiber interference arm by infrared interference
By employing a tilted wavefront infrared interferometry detection method with dual fiber interferometer arms, and utilizing fiber arrays to generate multi-directional tilted point sources, the problem of efficient detection of large-diameter aspherical components is solved, achieving high-precision and wide-range aspherical surface shape measurement.
CN120368873BActive Publication Date: 2026-07-24NANJING UNIV OF SCI & TECH
4 Cites 0 Cited by
Patent Information
- Application Number
- CN202510492077.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-18
- Publication Date
- 2026-07-24
- Estimated Expiration
- 2045-04-18
AI Technical Summary
Technical Problem
Existing technologies are difficult to efficiently detect large-aperture and aspherical components with large gradient changes, resulting in low light utilization and large errors introduced by mechanical movement.
Method used
The tilted wavefront infrared interferometry detection method using dual fiber interferometer arms utilizes a fiber array to generate multi-directional tilted point sources, improving light utilization. The beam is also transmitted through the fiber to reduce mechanical movement errors, and the dynamic measurement range is improved by combining infrared light.
Benefits of technology
It enables the detection of high-precision, large-diameter aspherical components, reduces mechanical errors, and improves light utilization and measurement range.
✦ Generated by Eureka AI based on patent content.
Abstract
The application discloses a kind of tilting wave surface infrared interference detection methods of double optical fiber interference arm, it is related to the field of optical precision measurement.The light emitted by wavelength tunable laser passes through coupler and is divided into two beams, one is directly output by polarization maintaining optical fiber as reference light, the other is incident to optical fiber array and outputs multiple standard spherical waves with different tilt angles as test light, compensates the surface gradient of different regions of the measured surface, thereby reducing the interference fringe density.Both the reference arm and the test arm of the system use optical fiber as an ideal point source generator, which can control the on-off of the point source and reduce the system error introduced by the use of lenses.The light emitted by the test arm optical fiber is all used as test light, which improves the utilization rate of the point source, increases the aperture of the measured surface, and realizes surface shape detection without moving the interference device, reducing the error introduced by mechanical movement.The system uses infrared light as the measurement beam to improve the dynamic measurement range, which can meet the detection of more gradient-changing large-aperture components.
Need to check novelty before this filing date? Find Prior Art