Liquid regulating valve, module, chuck temperature regulating system and liquid regulating valve control method

The design of a multi-channel liquid regulating valve solves the problem of inaccurate liquid mixing ratio adjustment in the existing technology, realizes stepless adjustment of the chuck temperature and stable control of the total flow rate, and improves the adjustment accuracy and output stability.

CN120667554APending Publication Date: 2025-09-19SHENZHEN SICARRIER IND MACHINES CO LTD
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Patent Information

Application Number
CN202510864263.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-25
Publication Date
2025-09-19

AI Technical Summary

Technical Problem

In the prior art, three-way proportional valves and two-way proportional valves cannot achieve stepless adjustment of flow ratio and stable control of total volume when controlling the liquid mixing ratio, resulting in inaccurate chuck temperature adjustment.

Method used

A multi-channel liquid regulating valve is designed. By setting two groups of liquid channels in the valve body and a regulating unit on the valve core, stepless regulation of liquid flow and stable control of the total amount are achieved. The movement of the valve core is used to change the liquid ratio to ensure precise regulation of the chuck temperature.

Benefits of technology

It realizes stepless adjustment of the chuck temperature and stable control of the total flow, improves the adjustment accuracy and output stability, and reduces response delay and control deviation.

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Abstract

The liquid adjusting valve is used for adjusting the proportion of liquid conveyed to a chuck by two liquid sources and comprises a valve body and a valve element, a through sliding valve cavity is formed in the valve body, two first liquid channels are arranged, and each first liquid channel comprises a first liquid inlet channel and a first liquid outlet channel; the first liquid inlet channel and the first liquid outlet channel are both communicated with the sliding valve cavity, the first liquid inlet channel is communicated with a corresponding liquid source, the first liquid outlet channel is communicated with the chuck, and the valve element moves in the sliding valve cavity; each group of first adjusting units is matched with the corresponding first liquid channel in the movement process of the valve core to form a complementary opening degree, so that after liquid input from each first liquid inlet channel passes through each corresponding first adjusting unit, the total amount of liquid converged to the chuck from each first liquid outlet channel is constant; the liquid supply proportion of the two liquid sources is adjusted in a stepless mode, and stepless temperature adjustment of the chuck is achieved.
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