A thermal shock testing apparatus, system, and method for SiC coated graphite articles

Abstract

This invention provides a thermal shock testing device, system, and method for SiC-coated graphite parts. The thermal shock testing device for SiC-coated graphite parts includes a heating chamber, a transition chamber, and a cooling chamber. The transition chamber is equipped with a moving mechanism for mounting the graphite part and switching it between the heating and cooling chambers. The heating chamber is equipped with an induction coil for heating the graphite part. The cooling chamber is used to spray a cooling substance onto the graphite part; the cooling substance is a mixture of liquid inert gas and silica-encapsulated paraffin phase change microcapsules. This invention solves problems such as insufficient upper limit of heating temperature, poor heating uniformity of irregularly shaped parts, weight loss due to water cooling, and high-temperature heat loss of graphite parts.

Description

Technical Field

[0001] This invention relates to the field of thermal shock testing technology for SiC-coated graphite parts, and particularly to a thermal shock testing device, system, and method for SiC-coated graphite parts. Background Technology

[0002] SiC-coated graphite components are core materials in third-generation semiconductor manufacturing (such as MOCVD equipment substrates and single-crystal silicon crystal growth furnace crucibles), and their thermal shock resistance directly determines the quality of epitaxial wafers and the lifespan of components. Thermal shock resistance is a crucial property of graphite. When a material is suddenly heated (or cooled) and expands (or contracts), thermal stress is generated due to the mutual constraints of deformation in its various parts. When this thermal stress exceeds the material's ultimate strength, it will crack, peel, or fracture, leading to failure. Besides being affected by heat transfer conditions, the thermal shock resistance of a material mainly depends on its coefficient of thermal expansion, thermal conductivity, fracture toughness, specific heat, and strength. Therefore, thermal shock resistance testing is frequently required in material research.

[0003] Current thermal shock performance testing mainly relies on muffle furnaces. A muffle furnace is an indirect heating device that converts electrical energy into heat energy through resistance wires. Graphite samples are placed in the muffle furnace and heated to the target temperature. After holding at that temperature, they are removed and transferred to a water tank or air to cool. Failure is assessed by weighing or visually observing the coating peeling.

[0004] In actual use, SiC-coated graphite parts were placed in a muffle furnace and heated to 1000℃. After holding at that temperature for 15 minutes, they were transferred to room temperature water for cooling. After 15 cycles of testing, it was found that the SiC coating oxidized and gained weight in the early stage of thermal shock, and cracks appeared in the later stage, resulting in mass loss. It was impossible to accurately monitor its weight loss rate.

[0005] Furthermore, the semiconductor industry requires testing SiC-coated graphite components under simulated real-world conditions, such as repeated exposure to high temperatures of 1600-2200℃ followed by rapid cooling, and operation in an inert gas atmosphere. However, existing muffle furnaces are insufficient to meet the ultra-high temperature testing requirements above 1600℃.

[0006] Furthermore, existing heating methods cannot effectively and uniformly heat irregularly shaped or large parts (such as crucibles and curved bases). In addition, even in environments with inert gas protection, both water cooling and air cooling present problems. Water cooling has the following drawbacks: at high temperatures, reactions SiC + 2H₂O → SiO₂ + CH₄ (weight gain) and C + H₂O → CO + H₂ (weight loss) occur, causing the graphite matrix and silicon carbide coating to react with deionized water at high temperatures, resulting in mass loss and result deviations. Air cooling has the following drawbacks: the cooling rate is slow, unsuitable for ultra-high temperature rapid cooling, and air cooling of irregularly shaped parts creates dead zones in the airflow, leading to temperature differences of over 300°C between different areas of the sample; argon's specific heat capacity is only 0.52 J / g·K, requiring 8MPa high pressure to achieve a cooling rate of 100°C / s, and dead zone temperature differences still exist.

[0007] Furthermore, regarding the professional terms involved in this case, those skilled in the art would generally agree as follows:

[0008] Thermal shock testing: Thermal shock testing is a key method for evaluating the performance stability of materials under rapid temperature changes. It simulates a cycle of high-temperature environment and rapid cooling (such as water cooling) to test the material's resistance to crack initiation and propagation. The test setup typically includes a high-temperature resistance furnace, a cooling system, and automated temperature control equipment. Evaluation indicators cover the number of cracks, propagation rate, and thermal shock life (i.e., the number of cycles before failure). This test is particularly important for ceramics and fiberglass insulation materials used in high-temperature applications, as it can reveal the failure mechanism of materials under thermal stress. Relevant standards include GB / T2423.5 and IEC60068-2-14.

[0009] Coating and Substrate: The bonding performance between the coating and the substrate depends on multiple mechanisms, including mechanical interlocking, chemical bonding, and diffusion. Mechanical interlocking enhances the anchoring effect through substrate surface roughening (e.g., sandblasting); chemical bonding achieves strong connections through covalent or ionic bonds between atoms, such as the application of silane coupling agents in glass substrates; diffusion forms a new bonding layer through interatomic interpenetration at the interface. Optimization strategies include substrate surface pretreatment (grinding, chemical etching) and introducing gradient interface designs to reduce thermal stress. These methods can significantly improve coating adhesion and corrosion resistance, especially in high-temperature or corrosive environments.

[0010] Silicon carbide-coated graphite materials: These materials combine the electrical and thermal conductivity of graphite with the high-temperature resistance (>1600℃) and oxidation resistance of silicon carbide by depositing a silicon carbide protective layer on the surface of a graphite substrate (commonly using CVD or PVD techniques). This coating prevents direct contact between graphite and oxygen, acids, and alkalis, significantly extending its service life. It is particularly suitable for consumables such as substrates and etching rings in semiconductor MOCVD equipment. Under extreme conditions (such as high-frequency thermal cycling), its thermal shock resistance and wear resistance are significantly superior to pure graphite.

[0011] Argon protection: As an inert gas, argon is widely used to isolate oxygen and protect graphite materials during processing. In welding and metal smelting, argon covering can prevent high-temperature oxidation. Semiconductor manufacturing (such as MOCVD equipment) requires high-purity argon (99.999%) to maintain an oxygen-free environment to avoid sample contamination and abnormal discharge; in materials analysis (such as high-temperature tensile testing), argon ensures test accuracy. Summary of the Invention

[0012] The purpose of this invention is to provide a thermal shock testing device, system, and method for SiC-coated graphite parts, which solves problems such as insufficient upper limit of heating temperature, poor heating uniformity of irregularly shaped parts, weight loss due to water cooling, and heat loss of graphite parts at ultra-high temperatures.

[0013] The technical solution of the present invention is: a thermal shock testing device for SiC coated graphite parts, comprising a heating chamber, a transition chamber and a cooling chamber, wherein the transition chamber is provided with a moving mechanism for mounting the graphite parts and switching the graphite parts between the heating chamber and the cooling chamber;

[0014] The heating chamber is equipped with an induction coil for heating the graphite part;

[0015] The cooling chamber is used to spray a cooling substance onto the graphite part. The cooling substance is a mixture of liquid inert gas and silica-encapsulated paraffin phase change microcapsules. Preferably, the thermal shock testing device for SiC-coated graphite parts includes a thermal shock chamber and an intelligent control system for controlling the operation of the thermal shock chamber and collecting its operational data. The thermal shock chamber has a door on one side, and inside the thermal shock chamber, starting from the door, are a heating chamber, a transition chamber, and a cooling chamber in sequence. Each of the heating chamber, transition chamber, and cooling chamber is equipped with an argon gas pipe for introducing argon gas.

[0016] Preferably, the cooling chamber is provided with an annular jet for spraying cooling material onto the graphite parts; the heating chamber and the transition chamber are provided with a heat insulation layer on their exterior.

[0017] Preferably, an inner door is provided between the heating chamber and the transition chamber, and between the transition chamber and the cooling chamber. Preferably, the moving mechanism includes a slide rail, a robotic arm that slides on the slide rail, and a clamp located at the end of the robotic arm for holding the graphite part, wherein the slide rail is installed in the transition chamber.

[0018] Preferably, the slide rail is equipped with a weighing instrument for measuring the weight of the graphite parts and transmitting it to the intelligent control system.

[0019] Preferably, the thermal shock testing device for SiC-coated graphite parts further includes an in-situ detection system located in the cooling chamber for collecting surface temperature change data of the graphite parts and transmitting it to the intelligent control system.

[0020] Preferably, the phase transition initiation temperature of the silica-encapsulated paraffin phase transition microcapsules is 50°C, and the phase transition termination temperature is 25°C.

[0021] The present invention also provides a thermal shock testing system for SiC-coated graphite parts, comprising:

[0022] The heating system uses an electromagnetically coupled thermal field combined with an alternating magnetic field to generate eddy current heating in the SiC-coated graphite part itself.

[0023] The cooling system involves suspending silica-encapsulated paraffin phase change microcapsules in a liquid inert gas, which is then sprayed onto the surface of the graphite part through an injector to cool the graphite part.

[0024] A moving mechanism is used to send a graphite part that has been heated in the heating system into a cooling system for cooling.

[0025] An intelligent control system is used to coordinate the operation of the heating system, cooling system, and moving mechanism.

[0026] Preferably, the testing system further includes an in-situ detection system, which is used to monitor the surface temperature field and morphology changes of the graphite part during the cooling process and send the monitoring data to the intelligent control system.

[0027] The present invention also provides a method for performing thermal shock testing using the above-mentioned thermal shock testing device, comprising:

[0028] The graphite parts are clamped onto the moving mechanism;

[0029] The moving mechanism is activated to place the graphite part clamped on it into the heating chamber; the heating chamber uses a combination of electromagnetic coupling thermal field and alternating magnetic field to generate eddy current heating in the graphite part itself;

[0030] After heating is completed, the moving mechanism is activated to transport the graphite part to the cooling chamber. The cooling chamber generates a mixed spray of silica-encapsulated paraffin phase change microcapsules and liquid inert gas. The spray is applied to the surface of the graphite part to achieve zero-water-intervention cooling; the test is then completed.

[0031] Preferably, before cooling, the starting temperature and ending temperature of the silica-encapsulated paraffin phase change microcapsules are set; during cooling, the temperature of the graphite part is obtained; if the obtained temperature is greater than the set starting temperature, the silica-encapsulated paraffin phase change microcapsules are triggered to melt and absorb heat; if the obtained temperature is less than the set ending temperature, the silica-encapsulated paraffin phase change microcapsules are solidified and purged with argon gas for recovery.

[0032] Preferably, the phase transition initiation temperature of the silica-encapsulated paraffin phase transition microcapsules is set at 50°C, and the phase transition termination temperature of the silica-encapsulated paraffin phase transition microcapsules is set at 25°C.

[0033] Compared with related technologies, the beneficial effects of the present invention are as follows:

[0034] I. This invention enables SiC-coated graphite parts to self-heat through the electromagnetic eddy current effect, eliminating the limitations of physical heating elements. According to Joule's law Q=I²Rt, a high-frequency magnetic field induces strong eddy currents in the SiC coating, with a measured heating rate ≥300℃ / min. This breakthrough achieves an ultra-high temperature environment of 1600~2200℃, accurately simulating the real working conditions of semiconductor thermal field.

[0035] II. This invention completely solves the problem of thermal field distortion in large crucibles / curved bases through electromagnetic coupling self-heating, and can effectively and uniformly heat irregularly shaped and large parts.

[0036] Third, this invention uses silica to encapsulate paraffin phase change microcapsules, which have a latent heat of 200 J / g (384 times the sensible heat of argon). By controlling the particle size (5-20 μm), ultra-large area heat exchange is achieved. The liquid argon carrier isolates oxidation and achieves rapid cooling (target cooling rate ≥100℃ / s).

[0037] Fourth, this invention innovatively uses a mixture of liquid inert gas and silica-encapsulated paraffin phase change microcapsules as a cooling substance in thermal shock testing, avoiding chemical reactions similar to water cooling and improving the accuracy of thermal shock test results; at the same time, silica-encapsulated paraffin phase change microcapsules can be recycled and reused, which helps to reduce usage costs. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the thermal shock testing device for SiC-coated graphite parts provided by the present invention.

[0039] In the attached diagram: 1. Thermal shock chamber; 11. Door; 12. Heating chamber; 13. Transition chamber; 14. Cooling chamber; 15. Induction coil; 16. Insulation layer; 17. Annular ejector; 18. Moving mechanism; 181. Slide rail; 182. Robotic arm; 183. Clamp; 19. Argon gas pipe; 110. Inner door; 2. In-situ detection system; 3. Intelligent control system; 31. Control cabinet; 32. Computer; 10. Heating system; 20. Cooling system; 30. Graphite component. Detailed Implementation

[0040] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described herein can be combined with each other. For ease of description, the terms "upper," "lower," "left," and "right" used below only indicate that they correspond to the upper, lower, left, and right directions in the accompanying drawings and do not limit the structure.

[0041] like Figure 1 As shown, the thermal shock testing device for SiC coated graphite parts provided in this embodiment includes a thermal shock chamber 1, an in-situ detection system 2, and an intelligent control system 3.

[0042] The thermal shock chamber 1 has a door 11 on one side. The thermal shock chamber 1 has a heating chamber 12, a transition chamber 13 and a cooling chamber 14 arranged sequentially from the door 11. The transition chamber 13 is provided with a moving mechanism 18 for mounting a graphite component 30 and switching the graphite component 30 between the heating chamber 12 and the cooling chamber 14.

[0043] The moving mechanism 18 includes a slide rail 181, a robotic arm 182 sliding on the slide rail 181, and a clamp 183 located at the end of the robotic arm 182 for holding the graphite part 30. The slide rail 181 is installed in the transition chamber 13. The slide rail 181 is equipped with a weighing instrument for measuring the weight of the graphite part 30, calculating the weight loss rate, and transmitting the data to the intelligent control system 3.

[0044] An induction coil 15 is installed inside the heating chamber 12. An annular jet injector 17 is installed inside the cooling chamber 14. A heat insulation layer 16, made of corundum, is installed outside the heating chamber 12 and the transition chamber 13. An inner hatch 110 is provided between the heating chamber 12 and the transition chamber 13, and between the transition chamber 13 and the cooling chamber 14. The inner hatch 110 is opened and closed by an intelligent control system 3.

[0045] The heating chamber 12, transition chamber 13, and cooling chamber 14 are all equipped with argon gas pipes 19 that allow argon gas to be introduced and provide argon gas protection. The intelligent control system 3 includes a control cabinet 31 and a computer 32. The control cabinet 31 contains a PLC + industrial computer dual system, safety fuses, etc. The computer 32 is used to view and store data such as photos, videos, and tables.

[0046] The cooling chamber 14 is equipped with an in-situ detection system 2 for collecting surface temperature change data of the graphite part 30 and transmitting it to the intelligent control system 3.

[0047] The intelligent control system 3 is used to coordinate the operation of the heating system 10, the cooling system 20 and the moving mechanism 18, and to collect test data during operation.

[0048] The present invention also provides a thermal shock testing system for SiC-coated graphite parts, including a heating system 10, a cooling system 20, a moving mechanism 18, an intelligent control system 3, and an in-situ detection system 2.

[0049] The heating system 10 uses a high-frequency electromagnetic coupling thermal field generator, which generates eddy current heating in the SiC coated graphite part through an alternating magnetic field (frequency 10-50kHz), achieving non-contact temperature rise (heating rate ≥300℃ / min), breaking through the upper limit of the physical heating element temperature, and achieving the semiconductor operating condition requirements of 1600~2200℃.

[0050] The cooling system 20 suspends silica-encapsulated paraffin phase change microcapsules (particle size 5-20 μm) in liquid argon gas, and then encapsulates the graphite part 30 through a spray system. When the temperature of the graphite part 30 exceeds 50°C, the microcapsules absorb heat and melt, with a latent heat absorption of up to 200 J / g. When the temperature is below 25°C, the high-pressure argon gas flow instantly purges away the residual microcapsules (recovery rate > 99%), achieving zero-water-intervention cooling.

[0051] Using silica-encapsulated paraffin phase change microcapsules in thermal shock testing of graphite parts can fully utilize their material properties and avoid chemical reactions during graphite cooling, which could lead to quality loss and data deviation.

[0052] The silica-encapsulated paraffin phase change microcapsules have three core characteristics: high-efficiency absorption, chemical inertness, and controllable particle size.

[0053] (i) High latent heat absorption capacity: The latent heat of phase change of paraffin reaches 200 J / g (384 times the sensible heat absorption capacity of argon), which can efficiently absorb 30% of the heat of graphite parts during the phase change process (solid → liquid) to achieve rapid cooling (target cooling rate ≥100℃ / s).

[0054] (ii) Chemical stability: The SiO2 outer shell isolates the paraffin from the high-temperature SiC coating / graphite matrix, avoiding water-cooled chemical reactions (such as SiC + 2H2O → SiO2 + CH4 or C + H2O → CO + H2); the paraffin core does not decompose in an inert argon environment and does not react with graphite or SiC.

[0055] (III) Particle size controllability (5~20μm): Micron-sized particles can form an ultra-large specific surface area, improving heat exchange efficiency. Small particles can uniformly coat the surface of irregularly shaped parts, avoiding temperature differences caused by dead airflow (the temperature difference in different areas of the device can reach >300℃ in traditional air cooling).

[0056] The specific solid-state correlation between silica-encapsulated paraffin phase change microcapsules and the temperature of graphite components is shown in Table 1:

[0057] Table 1: Specific solid-state correlation parameters of silica-encapsulated paraffin phase change microcapsules and temperature of graphite components

[0058]

[0059] The moving mechanism 18 is used to transfer the graphite sample, which has been heated in the heating system 10, into the cooling system 20 for cooling. The moving mechanism 18 is a robotic arm 182 made of SiC-coated carbon fiber through weaving and sintering, mounted on a slide rail 181, and capable of moving along the slide rail 181. The robotic arm 182 has strong high-temperature resistance, oxidation resistance, and excellent mechanical properties. Equipped with a low-heat-capacity clamp 183, and through the dual-station design of the slide rail 181, it can realize the rapid transfer of graphite sample between the high-temperature zone and the cooling zone.

[0060] The in-situ detection system 2 includes an infrared thermal imager, an optical microscope camera, and an analytical electronic balance to monitor the changes in the surface temperature field distribution of the graphite part during the cooling process, record the surface morphology evolution of the graphite part 30, and monitor the quality of the graphite part 30 in real time.

[0061] The intelligent control system 3 adopts a dual system of PLC and industrial computer, which can precisely control parameters such as heat preservation temperature, heat preservation time, transfer rate, cooling rate, and number of cycles through programming, realizing full automation of the thermal shock test process. The intelligent control system 3 also introduces a safety fuse mechanism, which automatically shuts down when the temperature difference exceeds 5% or the infrared energy suddenly increases, protecting the safety of the equipment and the test personnel.

[0062] The present invention also provides a method for performing thermal shock testing using the above-described thermal shock testing device for SiC-coated graphite parts, comprising:

[0063] S1, open hatch 11, clamp graphite part 30 onto clamp 183 of moving mechanism 18, and close hatch 11.

[0064] S2, start the robotic arm 182 and place the graphite part 30 clamped on it into the heating chamber 12; and adjust the distance between the induction coil 15 and the graphite part 30 (5-15cm, the specific distance can be adjusted according to the size of the graphite part sample) by raising and lowering the robotic arm 182 to achieve uniform heating.

[0065] S3, the heating chamber 12 uses a combination of electromagnetic coupling thermal field and alternating magnetic field to make the graphite part 30 generate eddy current heating.

[0066] S4. After heating is complete, open the inner door 110 and drive the robotic arm 182 to slide along the slide rail 181 to transport the graphite part 30 to the cooling chamber 14.

[0067] In step S5, a mixed spray of silica-encapsulated paraffin phase change microcapsules and liquid inert gas is generated in cooling chamber 14. This spray is applied to the surface of the graphite part 30, achieving zero-water-intervention cooling. When the temperature of the graphite sample is >50°C, the microcapsules melt, the paraffin absorbs latent heat, and the liquid argon carrier evaporates simultaneously, carrying away sensible heat, achieving dual cooling. When the temperature of the graphite part drops below 25°C, the paraffin solidifies, and the microcapsules regain their rigidity. High-pressure argon gas of 0.5~1 MPa is then introduced to peel the solidified microcapsules from the sample surface. Gas-solid separation through multi-stage filters allows for recovery.

[0068] S6, the graphite part 30 is weighed during the cooling process, and the weighing data is transmitted to the intelligent control system 3 to calculate the weight loss rate.

[0069] S7: During the cooling process of graphite part 30, data on the surface temperature field and morphological changes of graphite part 30 are collected and transmitted to computer 32 for collection.

[0070] S8, based on the collected data and in accordance with relevant standards, output the thermal shock test results for graphite part 30. Test complete.

[0071] This invention targets SiC-coated graphite semiconductor materials, providing a thermal shock heating and cooling method combining "high-frequency electromagnetic coupling + phase change microcapsules." By utilizing the electromagnetic eddy current effect, the SiC-coated graphite component generates its own heat, eliminating the limitations of physical heating elements. According to Joule's law Q=I²Rt, the high-frequency magnetic field induces strong eddy currents in the SiC coating, achieving a measured heating rate ≥300℃ / min. This breakthrough achieves an ultra-high temperature environment of 1600~2200℃, accurately simulating the real-world thermal conditions of semiconductors.

[0072] This invention solves the problem of thermal distortion caused by existing heating methods, which result in the heating intensity of the corner areas of irregularly shaped parts being 3-5 times higher than that of the planar areas. The invention uses electromagnetic coupling self-heating to solve the problem of thermal distortion caused by existing heating methods.

[0073] This invention utilizes microcapsules with a latent heat of phase change of 200 J / g (384 times the sensible heat of argon gas), and achieves ultra-large area heat exchange through particle size control (5-20 μm). The liquid argon carrier isolates oxidation, solving the problems associated with water cooling and gas cooling.

[0074] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A thermal shock testing apparatus for a SiC coated graphite article, characterized by, It includes a heating chamber (12), a transition chamber (13) and a cooling chamber (14). The transition chamber (13) is provided with a moving mechanism (18) for mounting a graphite part and switching the graphite part between the heating chamber (12) and the cooling chamber (14). The heating chamber (12) is provided with an induction coil (15) for heating the graphite part. The cooling chamber (14) is used to spray a cooling substance onto the graphite part. The cooling substance is a mixture of liquid inert gas and silica-encapsulated paraffin phase change microcapsules.

2. The thermal shock testing apparatus for SiC coated graphite articles of claim 1, wherein, It also includes a thermal shock chamber (1) and an intelligent control system (3) for controlling the operation of the thermal shock chamber (1) and collecting the working data of the thermal shock chamber (1). The thermal shock chamber (1) has a door (11) on one side. The thermal shock chamber (1) has a heating chamber (12), a transition chamber (13) and a cooling chamber (14) arranged in sequence from the door (11). The heating chamber (12), the transition chamber (13) and the cooling chamber (14) are all equipped with argon gas pipes (19) that can be introduced into argon gas.

3. The apparatus for thermal shock testing of SiC coated graphite articles of claim 1, wherein, The moving mechanism (18) includes a slide rail (181), a robotic arm (182) sliding on the slide rail (181), and a clamp (183) located at the end of the robotic arm (182) for holding graphite parts. The slide rail (181) is installed in the transition chamber (13).

4. The apparatus for thermal shock testing of SiC coated graphite articles of claim 3, wherein, The slide rail (181) is equipped with a weighing instrument for measuring the weight of the graphite parts and transmitting it to the intelligent control system (3).

5. The thermal shock testing device for SiC-coated graphite parts according to claim 1, characterized in that, It also includes an in-situ detection system (2) located in the cooling chamber (14) for collecting data on the surface temperature change of the graphite parts and transmitting it to the intelligent control system (3).

6. The apparatus for thermal shock testing of SiC coated graphite articles of claim 1, wherein, The phase transition initiation temperature of the silica-encapsulated paraffin phase transition microcapsules is 50℃, and the phase transition termination temperature is 25℃.

7. A thermal shock testing system for SiC coated graphite articles, characterized by, include: The heating system (10) uses an electromagnetically coupled thermal field combined with an alternating magnetic field to generate eddy current heating in the SiC-coated graphite part itself. Cooling system (20) suspends silica-encapsulated paraffin phase change microcapsules in liquid inert gas and sprays them onto the surface of the graphite part through injector (17) to cool the graphite part; The moving mechanism (18) is used to send the graphite part that has been heated in the heating system (10) into the cooling system (20) for cooling; The intelligent control system (3) is used to control the coordinated operation of the heating system (10), the cooling system (20) and the moving mechanism (18).

8. The thermal shock testing system for SiC coated graphite articles of claim 7, wherein, It also includes an in-situ detection system (2), which is used to monitor the temperature field and morphology changes of the graphite part surface during the cooling process and send the monitoring data to the intelligent control system (3).

9. A method for performing thermal shock testing on SiC-coated graphite parts using the thermal shock testing apparatus as described in any one of claims 1-6, characterized in that, include: The graphite part (30) is clamped onto the moving mechanism (18); The moving mechanism (18) is activated to place the graphite part (30) clamped thereon into the heating chamber (12); the heating chamber (12) uses a combination of electromagnetic coupling thermal field and alternating magnetic field to make the graphite part (30) generate eddy current heating. After heating is completed, the moving mechanism (18) is activated to transport the graphite part (30) to the cooling chamber (14). The cooling chamber (14) generates a mixed spray of silica-encapsulated paraffin phase change microcapsules and liquid inert gas. The spray is sprayed onto the surface of the graphite part (30) to achieve zero water intervention cooling; the test is completed.

10. The method of claim 9, wherein, Before cooling, the starting and ending temperatures of the silica-encapsulated paraffin phase change microcapsules are set. During cooling, the temperature of the graphite component is measured. If the measured temperature is greater than the set starting temperature, the silica-encapsulated paraffin phase change microcapsules are triggered to melt and absorb heat. If the measured temperature is less than the set ending temperature, the silica-encapsulated paraffin phase change microcapsules are solidified and purged with argon gas for recovery.

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