Piezoelectric robot and measuring and analyzing instrument

Abstract

The invention relates to the technical field of robots, and provides a piezoelectric robot and a measurement and analysis instrument. The piezoelectric robot comprises a robot main body; the piezoelectric stack driving unit is arranged on the robot main body; the spherical rotor is arranged below the piezoelectric stack driving unit; and the piezoelectric stack driving unit is used for driving the spherical rotor to rotate, so that the robot main body is driven to move through the spherical rotor. According to the piezoelectric robot provided by the invention, the piezoelectric stack driving unit drives the spherical rotor to rotate, so that the robot main body is driven to move, and the flexibility and the positioning precision of the piezoelectric robot are improved.

Description

Technical Field

[0001] The present application relates to the field of robotics technology, and in particular to a piezoelectric robot and a measuring and analyzing instrument. Background Art

[0002] Currently, precision robots are key components of ultra-precision measurement and analysis instruments such as scanning electron microscopes (SEMs). They significantly impact the microscope's imaging quality and measurement accuracy. Furthermore, with the advancement of cutting-edge technologies, the demand for precision performance and flexibility in precision robots is increasing. In recent years, piezoelectric precision robots, manufactured from piezoelectric ceramics, have demonstrated compact structure, nanometer-level resolution, and rapid response speeds. They are capable of performing ultra-precision nanometer-level measurements and operations while maintaining extremely high positioning accuracy and flexible operation.

[0003] In related technologies, piezoelectric precision robots have the problems of being bulky, fixed in position, and having low flexibility. Summary of the Invention

[0004] In order to solve the technical problem of low flexibility of the above-mentioned piezoelectric robot, the first aspect of the present application proposes a piezoelectric robot.

[0005] In a second aspect, the present application proposes a measurement and analysis instrument.

[0006] In view of this, according to an embodiment of the first aspect of the present application, the present application proposes a piezoelectric robot, comprising: a robot body; a piezoelectric stack drive unit, arranged on the robot body; a spherical mover, arranged below the piezoelectric stack drive unit; wherein the piezoelectric stack drive unit is used to drive the spherical mover to rotate, so as to drive the robot body to move through the spherical mover.

[0007] The piezoelectric robot provided in this application includes a robot body, a piezoelectric stack drive unit, and a spherical mover. This application uses the piezoelectric stack drive unit to drive the spherical mover to rotate, thereby driving the robot body to move, thereby overcoming the position and flexibility limitations of traditional piezoelectric robots. Because the piezoelectric stack drive unit has the advantage of fast response speed, it can enable the piezoelectric robot to quickly adjust its position and posture, thereby improving the piezoelectric robot's flexibility.

[0008] The piezoelectric stack drive unit is made of piezoelectric ceramic materials, making it structurally compact. Compared with traditional drive methods, piezoelectric drive does not require complex transmission mechanisms, thereby reducing the overall size and weight of the robot, facilitating the design of smaller and lighter robots.

[0009] Piezoelectric stack drive units are renowned for their high precision and nanometer-level resolution, enabling piezoelectric robots to achieve exceptionally high positioning accuracy during ultra-precision measurement and manipulation. This is crucial for ultra-precision measurement and analysis instruments such as scanning electron microscopes, which require high-precision control. Due to their enhanced flexibility and positioning accuracy, piezoelectric robots are better suited to a variety of complex environments and operational tasks. Whether performing precision measurement in research laboratories or delicate manipulation on industrial production lines, piezoelectric robots demonstrate their unique advantages.

[0010] The piezoelectric robot provided in the present application drives the spherical mover to rotate through a piezoelectric stack drive unit, thereby driving the robot body to move, thereby improving the flexibility and positioning accuracy of the piezoelectric robot.

[0011] In addition, the piezoelectric robot in the above embodiment provided by this application may also have the following additional technical features:

[0012] In some technical solutions, optionally, the piezoelectric stack driving unit includes: three piezoelectric tangential stacks, and the driving directions of the three piezoelectric tangential stacks are 120 degrees to each other.

[0013] In some technical solutions, optionally, the number of the piezoelectric stack drive units is at least two groups, and each group of the piezoelectric stack drive units is connected to at least one spherical mover.

[0014] In some technical solutions, optionally, the robot body includes: a shell, the shell includes a cavity; a mounting seat, the mounting seat is arranged above the shell, the piezoelectric stack drive unit is arranged on the mounting seat and is located in the cavity; and a base plate is arranged below the shell.

[0015] In some technical solutions, optionally, the robot body further includes: a fixing plate, arranged on the bottom plate, for fixing the piezoelectric stack drive unit on the robot body; and a connecting column, arranged between the piezoelectric stack drive unit and the fixing plate.

[0016] In some technical solutions, optionally, there are multiple connecting columns, and the multiple connecting columns enclose an accommodating space. The fixed plate includes an annular structure, and the spherical mover part is located in the accommodating space and the annular structure and protrudes from the bottom plate.

[0017] In some technical solutions, optionally, the piezoelectric robot also includes an operating platform, the robot body is arranged on the operating platform, and the operating platform includes: a base; a table top, which is detachably arranged above the base; a shell, which is arranged on the base and has an opening; and a cable interface, which is arranged on the peripheral side of the table top and passes through the opening.

[0018] In some technical solutions, optionally, the piezoelectric robot further includes: a cantilever, which is arranged on the side of the robot body, and the cantilever can rotate relative to the robot body, and the cantilever is used for cell manipulation and object handling.

[0019] In some technical solutions, optionally, the cantilever includes: a first fixing member, which is arranged on the robot body; a second fixing member, which is spaced apart from the first fixing member; a piezoelectric dual chip, which is arranged between the first fixing member and the second fixing member; and a flexible metal sheet, which is arranged between the first fixing member and the second fixing member.

[0020] In some technical solutions, optionally, the piezoelectric robot also includes: a multi-channel voltage amplifier, which is connected to the piezoelectric stack drive unit through a cable; a control unit, which is connected to the multi-channel voltage amplifier, and the control unit is used to send a control signal to the multi-channel voltage amplifier to control the movement of the spherical mover.

[0021] According to an embodiment of the second aspect of the present application, a measuring and analyzing instrument is also proposed, including the measuring and analyzing instrument described in any of the above technical solutions.

[0022] The measuring and analyzing instrument provided in the second aspect of the present application includes the piezoelectric robot in any of the above technical solutions and therefore has all the beneficial effects of the piezoelectric robot.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. The piezoelectric robot provided in this application is an omnidirectional mobile piezoelectric micro precision operating robot, which improves the flexibility of precision operating equipment while ensuring positioning accuracy. The number and operating positions of precision operating robots can be flexibly configured according to actual application scenarios.

[0025] 2. The present invention provides an omnidirectional piezoelectric stack drive unit, which realizes omnidirectional precision movement of a tungsten steel ball mover by using piezoelectric tangential stacks with driving directions 120 degrees to each other. Compared with existing multi-degree-of-freedom drive units, the present invention provides a more miniaturized omnidirectional drive structure.

[0026] 3. Based on this, the present invention can be used as an independent probe device to realize applications such as semiconductor detection and cell manipulation on a precision operating platform.

[0027] Additional aspects and advantages of the present application will become apparent in the following description or may be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0029] Figure 1 One of the structural schematic diagrams of a piezoelectric robot in one embodiment of the present application is shown;

[0030] Figure 2 The second structural diagram of the piezoelectric robot in one embodiment of the present application is shown;

[0031] Figure 3 A schematic structural diagram of a bottom plate in one embodiment of the present application is shown;

[0032] Figure 4 A schematic diagram of the structure of a cantilever in one embodiment of the present application is shown;

[0033] Figure 5 The third structural diagram of the piezoelectric robot in one embodiment of the present application is shown;

[0034] Figure 6 A fourth structural diagram of a piezoelectric robot in one embodiment of the present application is shown;

[0035] Figure 7 One of the structural diagrams of the operating platform in one embodiment of the present application is shown;

[0036] Figure 8 The second structural diagram of the operating platform in one embodiment of the present application is shown.

[0037] in, Figures 1 to 8 The corresponding relationship between the reference numerals and component names is as follows:

[0038] 100 piezoelectric robot, 110 robot body, 112 shell, 114 mounting seat, 115 base plate, 116 fixing plate, 117 tenon, 118 connecting column, 119 accommodating space, 120 piezoelectric stack drive unit, 122 piezoelectric tangential stack, 130 spherical mover, 140 operating platform, 142 base, 144 table, 146 shell, 147 opening, 148 cable interface, 150 cantilever, 152 first fixing member, 154 second fixing member, 156 piezoelectric dual chip, 158 flexible metal sheet. DETAILED DESCRIPTION

[0039] In order to more clearly understand the above-mentioned objects, features and advantages of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other in the absence of conflict.

[0040] In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present application is not limited to the specific embodiments disclosed below.

[0041] Refer to the following Figures 1 to 8 The piezoelectric robot 100 and the measurement and analysis instrument according to some embodiments of the present application are described.

[0042] like Figure 1 、 Figure 2 、 Figure 5 and Figure 6 As shown, the present application proposes a piezoelectric robot 100, comprising: a robot body 110; a piezoelectric stack drive unit 120, arranged on the robot body 110; a spherical mover 130, arranged below the piezoelectric stack drive unit 120; wherein the piezoelectric stack drive unit 120 is used to drive the spherical mover 130 to rotate, so as to drive the robot body 110 to move through the spherical mover 130.

[0043] The piezoelectric robot 100 provided herein includes a robot body 110, a piezoelectric stack drive unit 120, and a spherical mover 130. Spherical mover 130 is located at the bottom of the robot body 110 and is a tungsten steel ball mover. The tungsten steel ball is mainly composed of refractory metal carbides such as tungsten carbide. The tungsten steel ball mover has excellent properties such as high hardness, wear resistance, corrosion resistance, bending resistance, high density, and high temperature resistance.

[0044] This application overcomes the position and flexibility limitations of conventional piezoelectric robots 100 by introducing a piezoelectric stack drive unit 120 to drive the rotation of the spherical mover 130, thereby driving the movement of the robot body 110. Due to the fast response speed of the piezoelectric stack drive unit 120, the piezoelectric robot 100 can quickly adjust its position and posture, thereby improving its flexibility.

[0045] The piezoelectric stack drive unit 120 is made of piezoelectric ceramic material, which enables the piezoelectric stack drive unit 120 to achieve structural compactness. Compared with traditional drive methods, piezoelectric drive does not require a complex transmission mechanism, thereby reducing the overall volume and weight of the robot, which is conducive to the realization of a smaller and lighter robot design. Among them, the piezoelectric stack drive unit 120 is made of shear piezoelectric ceramic sheets, which are piezoelectric ceramic elements that use the shear mode of piezoelectric materials to perform electromechanical energy conversion. Unlike the common longitudinal or transverse modes, the shear mode generates electric charge or responds to electric field through the tangential deformation of the ceramic, which is suitable for force / displacement sensing or driving in a specific direction.

[0046] The piezoelectric stack drive unit 120 is renowned for its high precision and nanometer-level resolution, enabling the piezoelectric robot 100 to achieve exceptionally high positioning accuracy during ultra-precision measurement and manipulation. This is crucial for ultra-precision measurement and analysis instruments such as scanning electron microscopes, which require high-precision control. The piezoelectric robot 100's enhanced flexibility and positioning accuracy allow it to better adapt to a variety of complex environments and operational tasks. Whether performing precision measurements in a research laboratory or delicate manipulation on an industrial production line, the piezoelectric robot 100 demonstrates its unique advantages.

[0047] The piezoelectric robot 100 provided in the present application improves the flexibility and positioning accuracy of the piezoelectric robot 100 by introducing a rotation mechanism of the piezoelectric stack drive unit 120 and the spherical mover 130 .

[0048] In some embodiments, optionally, as Figure 1 As shown, the piezoelectric stack driving unit 120 includes three piezoelectric tangential stacks 122 , and the driving directions of the three piezoelectric tangential stacks 122 are 120 degrees to each other.

[0049] In this embodiment, the piezoelectric tangential stack 122 is made of piezoelectric ceramic sheets. Three piezoelectric tangential stacks 122 are bonded together to form the piezoelectric stack drive unit 120. Tangential motion is achieved through the piezoelectric tangential stack 122, thereby driving the tungsten steel ball mover. When the piezoelectric ceramic sheet deforms tangentially, the tungsten steel ball mover rotates. Simultaneously, by superimposing three piezoelectric tangential stacks 122 with drive directions 120 degrees apart and inputting different control signals to the piezoelectric stacks, the tungsten steel ball mover is driven, and the rotation of the three tungsten steel ball movers is then used to control the motion of the robot body 110.

[0050] Three piezoelectric tangential stacks 122, each driven at 120 degrees to each other, work together to precisely control the robot body 110 in the stack's tangential direction. Each stack is responsible for a specific driving direction. By precisely adjusting the output of each stack, the position and posture of the robot body 110 can be finely controlled, further improving positioning accuracy and operational stability.

[0051] In actual applications, the piezoelectric tangential stack 122 has a size of 6×6 mm and a thickness of 2.9 mm.

[0052] In some embodiments, optionally, the number of the piezoelectric stack driving units 120 is at least two groups, and each group of the piezoelectric stack driving units 120 is connected to at least one spherical mover 130 .

[0053] In this embodiment, increasing the number of piezoelectric stack drive units 120 significantly increases the robot's overall driving force and load capacity. Each set of piezoelectric stack drive units 120 independently provides driving force, and multiple units working together can generate a greater combined force, enabling the robot to handle heavier loads or more complex operational tasks.

[0054] Each group of piezoelectric stack drive units 120 is connected to at least one spherical mover 130, so that the piezoelectric robot 100 can achieve multi-dimensional movement through multiple independent drive paths, thereby increasing the freedom of movement of the piezoelectric robot 100, enabling it to operate and move flexibly in a more complex space.

[0055] The combination of multiple piezoelectric stack drive units 120 and spherical movers 130 provides more control variables for the piezoelectric robot 100. By precisely adjusting the output of each piezoelectric stack drive unit 120, more refined control can be achieved, further improving the positioning accuracy and motion stability of the piezoelectric robot 100.

[0056] In practical applications, such as Figure 1 As shown, there are three groups of piezoelectric stack drive units 120 and three tungsten steel ball movers, and the three groups of piezoelectric stack drive units 120 are distributed in a herringbone shape.

[0057] In some embodiments, optionally, as shown in FIG. 4 , Figure 5 and Figure 6 As shown, the robot body 110 includes: a shell 112, the shell 112 includes a cavity; a mounting seat 114, the mounting seat 114 is arranged above the shell 112, the piezoelectric stack drive unit 120 is arranged on the mounting seat 114 and is located in the cavity; and a base plate 115, which is arranged below the shell 112.

[0058] In this embodiment, the robot body 110 includes a housing 112, a mounting base 114, and a base plate 115. By placing the piezoelectric stack drive unit 120 within the housing, secured from above by the mounting base 114 and supported from below by the base plate 115, the entire robot body 110 presents a highly integrated structure. This not only reduces the robot's size but also improves its overall stability and robustness.

[0059] The design of the housing 112 and the cavity provides a closed and protected environment for the piezoelectric stack driver unit 120, helping to prevent external dust, moisture, and other contaminants from entering the piezoelectric stack driver unit 120, thereby extending its service life and improving its reliability.

[0060] In actual application, the three piezoelectric stack driver units 120 are fixed to the mounting base 114 using epoxy resin. Three 1mm high mounting pegs are positioned below the mounting base 114, arranged at a 60-degree angle to ensure consistent assembly of the piezoelectric stack driver units 120.

[0061] In some embodiments, optionally, as Figure 1 、 Figure 3 and Figure 6 As shown, the robot body 110 also includes: a fixing plate 116, which is arranged on the base plate 115, and the fixing plate 116 is used to fix the piezoelectric stack drive unit 120 on the robot body 110; and a connecting column 118, which is arranged between the piezoelectric stack drive unit 120 and the fixing plate 116.

[0062] In this embodiment, the robot body 110 further includes a fixing plate 116 and a connecting post 118. The fixing plate 116 and the connecting post 118 provide a stable support structure for the piezoelectric stack drive unit 120, thereby enhancing the overall stability of the robot body 110 and ensuring the precise positioning and stable operation of the piezoelectric stack drive unit 120 during operation.

[0063] The fixing plate 116 and connecting posts 118 allow precise adjustment of the position and angle of the piezoelectric stack drive unit 120 to meet specific operational requirements. Furthermore, the fixing plate 116 provides a reliable anchor point, ensuring that the drive unit does not loosen or shift during extended operation. This enhances the structural rigidity and stability of the robot body 110, helping to reduce vibration and deviation, and improving operational precision.

[0064] In some embodiments, optionally, as Figure 1 and Figure 6 As shown, there are multiple connecting columns 118 , which enclose an accommodating space 119 . The fixing plate 116 includes an annular structure. The spherical mover 130 is partially located in the accommodating space 119 and the annular structure, and protrudes from the bottom plate 115 .

[0065] In this embodiment, a plurality of connecting columns 118 enclose a housing space 119 that provides a stable support frame for the tungsten steel ball mover and the piezoelectric stack drive unit 120. The connecting columns 118 can replace surface contact with point contact, reducing friction on the tungsten steel ball mover. The design of the annular fixing plate 116 allows the tungsten steel ball mover to perform precise circular or radial motion within the housing space 119. This enables the robot body 110 to achieve more complex motion trajectories and more precise positioning control, meeting the needs of diverse application scenarios.

[0066] In practical applications, such as Figure 3 and Figure 6As shown, the fixing plate 116 is fixed in the groove on the bottom side of the bottom plate 115 and fixed with epoxy resin. Then the three connecting columns 118 are respectively inserted into the tenons 117 of the bottom plate 115, and the tungsten steel ball mover is placed in the accommodation space 119 and the annular structure.

[0067] In some embodiments, optionally, as Figure 7 and Figure 8 As shown, the piezoelectric robot 100 also includes an operating platform 140, and the robot body 110 is arranged on the operating platform 140. The operating platform 140 includes: a base 142; a table 144, which is detachably arranged above the base 142; a shell 146, which is arranged on the base 142, and an opening 147 is provided on the shell 146; and a cable interface 148, which is arranged on the peripheral side of the table 144 and passes through the opening 147.

[0068] In this embodiment, the piezoelectric robot 100 also includes an operating platform 140, which can improve operating accuracy. The operating platform 140 includes a base 142, a table 144, a shell 146 and a cable interface 148. The table 144 is detachably arranged above the base 142. Since the table 144 is in direct contact with the tungsten steel ball mover, it is prone to wear. The detachable arrangement makes it more convenient to maintain, upgrade or replace the table 144. The cable interface 148 is arranged on the peripheral side of the table 144 and passes through the opening 147 of the shell 146, which realizes the effective management of cables, facilitates the connection and disconnection of cables, and facilitates the rapid deployment and movement of the robot.

[0069] The housing 146 provides a protected environment for the internal components of the operating platform 140. It prevents external dust, moisture, and other contaminants from entering the operating platform 140, thereby extending the service life and improving the reliability of the robot body 110. Furthermore, the housing 146 provides a certain level of safety protection, reducing potential risks during operation.

[0070] In some embodiments, optionally, as Figure 2 、 Figure 4 、 Figure 5 and Figure 6 As shown, the piezoelectric robot 100 further includes a cantilever 150 disposed on a side of the robot body 110 . The cantilever 150 can rotate relative to the robot body 110 . The cantilever 150 is used for cell manipulation and object transport.

[0071] In this embodiment, the piezoelectric robot 100 further includes a cantilever 150. The cantilever 150 is a bimorph piezoelectric cantilever. The cantilever 150 can rotate relative to the robot body 110, enabling access to a wider range of operating areas. Depending on the application scenario, the cantilever 150 can be replaced with an end effector, such as a probe or precision gripper, for cell manipulation and object handling, thereby enhancing the flexibility and scalability of the piezoelectric robot 100 in these areas.

[0072] By providing a bimorph piezoelectric cantilever and cooperating with the piezoelectric stack drive unit 120 to drive the spherical mover 130 to rotate, the piezoelectric robot 100 can achieve omnidirectional motion. The piezoelectric stack drive unit 120 drives the spherical mover 130 to rotate, allowing the robot body to move along its contact surface, while the bimorph piezoelectric cantilever can move perpendicular to the contact surface, thereby achieving omnidirectional motion.

[0073] The cantilever 150's rotational capabilities allow the robot to operate at various angles and positions, adapting to more complex tasks. The cantilever 150's configuration takes into account the need for precise control and positioning, thus maintaining high accuracy when manipulating cells or handling tiny objects.

[0074] By precisely controlling the rotation angle and speed of the cantilever 150 , the piezoelectric robot 100 can accurately grasp, place, or manipulate a target object.

[0075] In some embodiments, optionally, as Figure 4 and Figure 6 As shown, the cantilever 150 includes: a first fixing member 152, which is arranged on the robot body 110; a second fixing member 154, which is spaced apart from the first fixing member 152; a piezoelectric dual chip 156, which is arranged between the first fixing member 152 and the second fixing member 154; and a flexible metal sheet 158, which is arranged between the first fixing member 152 and the second fixing member 154.

[0076] In this embodiment, cantilever 150 includes a first fixing member 152, a second fixing member 154, a piezoelectric bimorph 156, and a flexible metal sheet 158. As a driving element, piezoelectric bimorph 156 features fast response and high control precision. It deforms under the influence of an electric field, thereby driving cantilever 150 to rotate relative to robot body 110.

[0077] By precisely controlling the voltage and frequency applied to the piezoelectric bimorph 156, precise angle control and speed adjustment of the cantilever 150 can be achieved, meeting the requirements of high precision and high flexibility in cell manipulation and object handling.

[0078] The first fixing member 152 and the second fixing member 154 serve as a supporting structure of the cantilever 150 . Their spacing and fixing method ensure the stability and rigidity of the cantilever 150 during operation.

[0079] Two flexible metal sheets 158 are positioned on either side of the piezoelectric bimorph 156. The presence of these flexible metal sheets 158 further enhances the structural strength of the cantilever 150 while maintaining the necessary flexibility to accommodate the stress changes generated by the deformation of the piezoelectric bimorph 156. These flexible metal sheets 158 not only enhance structural strength but also optimize the dynamic performance of the cantilever 150 through their flexibility. Driven by the piezoelectric bimorph 156, the flexible metal sheets 158 smoothly transmit deformation energy, reducing vibration and noise, and improving the smoothness and accuracy of the cantilever 150's motion.

[0080] In actual application, the first fixing member 152 and the second fixing member 154 are provided with card slots, and the piezoelectric dual chip 156 and the flexible metal sheet 158 ​​are placed in the corresponding card slots, fixed by epoxy resin, and fixed to the mounting seat 114 of the robot body 110 by screws.

[0081] In some embodiments, optionally, the piezoelectric robot 100 also includes: a multi-channel voltage amplifier, which is connected to the piezoelectric stack drive unit 120 via a cable; a control unit, which is connected to the multi-channel voltage amplifier, and the control unit is used to send a control signal to the multi-channel voltage amplifier to control the movement of the spherical mover 130.

[0082] In this embodiment, the piezoelectric robot 100 also includes a multi-channel voltage amplifier and a control unit. The multi-channel voltage amplifier receives control signals from the control unit, amplifies them, and transmits them to the piezoelectric stack drive unit 120. This precise voltage control enables the spherical mover 130 to move with extremely high precision, meeting the requirements of high-precision applications such as cell manipulation and micro-nano manufacturing.

[0083] The control unit can quickly adjust the voltage applied to the piezoelectric stack drive unit 120 through a multi-channel voltage amplifier, thereby achieving a rapid response to the movement of the spherical mover 130. This helps to improve the working efficiency and operating speed of the entire piezoelectric robot 100.

[0084] The multi-channel voltage amplifier offers stable amplification performance and anti-interference capabilities, ensuring that control signals are not interfered with or distorted during transmission. This helps maintain stable motion of the piezoelectric stack driver unit 120 and spherical mover 130, improving overall system stability. The multi-channel voltage amplifier design allows for simultaneous control of multiple piezoelectric stack driver units 120, enabling multi-channel parallel operation.

[0085] In actual applications, the robot body 110 and the operating platform 140 are connected by flexible cables to reduce the impact of cable force on the robot body 110. The entire system is connected to a multi-channel voltage amplifier through an external cable. The control unit is a computer, and the motion control of the entire system is achieved through the computer.

[0086] The second embodiment of the present application further proposes a measuring and analyzing instrument, including the measuring and analyzing instrument described in any of the above embodiments.

[0087] The measuring and analyzing instrument provided in the second aspect of the present application includes the piezoelectric robot 100 in any of the above embodiments, and therefore has all the beneficial effects of the piezoelectric robot 100, which will not be described in detail here.

[0088] Optionally, the measuring and analyzing instrument may be an ultra-precision measuring and analyzing instrument such as a scanning electron microscope.

[0089] In a specific embodiment, the piezoelectric robot 100 provided by the present invention is an omnidirectional mobile piezoelectric micro precision operating robot, including an omnidirectional piezoelectric stack drive unit (piezoelectric stack drive unit 120), an omnidirectional mobile piezoelectric micro robot body (robot body 110), a dual-chip piezoelectric cantilever (cantilever 150) and a precision operating base (operating platform 140).

[0090] The omnidirectional mobile piezoelectric microrobot body 110 includes a drive unit base (mounting seat 114), a fixing plate 116, contact points (connecting posts 118), and a base plate 115. The omnidirectional piezoelectric stack drive unit 120 includes three piezoelectric tangential stacks 122, each measuring 6×6 mm and 2.9 mm thick. The three piezoelectric tangential stacks 122 are oriented 120 degrees relative to each other and are bonded together to form the omnidirectional piezoelectric stack drive unit 120. The omnidirectional piezoelectric stack drive unit 120 is fixed to the drive unit base with epoxy resin. Three 1mm-high mounting posts are designed below the drive unit base in a triangle pattern, with a 60-degree angle between them to ensure consistent assembly of the omnidirectional piezoelectric stack drive unit 120. At the same time, there are three cylindrical grooves at the corresponding positions of the base plate 115 for placing tungsten steel ball movers. In order to reduce the friction between the tungsten steel ball mover and the processing wall, three cylindrical contact points are added on the circumference of each cylindrical groove. The cylindrical contact points protrude from the inner surface of the cylindrical groove. The surface of the tungsten steel ball mover is tangent to the cylindrical contact points, ensuring that the tungsten steel ball mover is in point contact with the side wall. To limit the tungsten steel ball mover, the fixing plate 116 is fixed with epoxy resin and embedded in the base plate 115. The fixing plate 116 is fixed by connecting the holes inside the robot shell, and the base plate 115 is fixed by the fixing holes on the lower side of the robot shell, and the omnidirectional piezoelectric stack drive unit 120 is tangent to the tungsten steel ball.

[0091] The bimorph piezoelectric cantilever includes a piezoelectric bimorph 156, a flexible metal sheet 158, and fixings (a first fixing member 152 and a second fixing member 154). The piezoelectric bimorph 156 has a size of 20×4mm and a thickness of 0.8mm, and has positive and negative electrode wires welded on both sides. By connecting two flexible metal sheets 158 in parallel on both sides of the bimorph, the piezoelectric bimorph 156 is prevented from rotating sideways during use. It is fixed on both sides by the first fixing member 152 and the second fixing member 154, and is connected to the fixing slot on the fixing plate 116 of the omnidirectional mobile piezoelectric microrobot body 110 by screws.

[0092] In order to ensure the movement accuracy of the omnidirectional mobile piezoelectric micro-robot, the present invention designs a matching precision operating base, including a replaceable base plate (table 144), an expandable flexible cable interface 148, a fixed shell, and a fixed base. The replaceable base plate is an oxidized aluminum plate and has a replaceable function to ensure replacement for different uses. The expandable flexible cable connector consists of a flexible cable and multiple interfaces, and is inserted vertically to reduce the impact of cable force on the omnidirectional mobile piezoelectric micro-robot; the fixed shell fixes the replaceable base plate to the base 142 through screws at the four corners.

[0093] The present invention also provides an assembly method for an omnidirectional mobile piezoelectric micro precision operating robot, the specific steps of which are as follows:

[0094] 1. First, place a piezoelectric tangential stack 122 on the 3D printed assembly table. Then, place a piezoelectric tangential stack 122 rotated 120 degrees on the first piezoelectric tangential stack 122 and bond them with epoxy resin. Finally, rotate the third piezoelectric tangential stack 122 120 degrees on the first piezoelectric tangential stack 122 and bond them with epoxy resin. Finally, place them in an oven for drying.

[0095] 2. Place the three omnidirectional piezoelectric stack drive units 120 on the assembly piles below the drive unit base, and apply epoxy resin to fix them.

[0096] 3. Embed 9 cylinders in the circular holes of the bottom plate 115 and fix them with glue. Then place three sets of fixing plates 116 under the bottom plate 115 and fix them with glue. Finally, put in the tungsten steel ball mover.

[0097] 4. First, place the assembled omnidirectional piezoelectric stack drive unit 120 and base 142 in the robot housing and fix them with screws. Finally, fix the fixed robot housing to the bottom plate 115 and fix them on the side with screws.

[0098] 5. Embed the flexible metal sheet 158 ​​and the dual crystal into the two connectors and fix them with glue. Then embed them into the fixing groove of the drive unit base and fix them with screws.

[0099] To ensure the precision of the omnidirectionally mobile piezoelectric microrobot's motion, the present invention incorporates a precision operating base, comprising a replaceable baseplate, an expandable flexible cable interface 148, a fixed housing, and a fixed base. The replaceable baseplate is an oxidized aluminum plate and is interchangeable for different applications. The expandable flexible cable connector, consisting of a flexible cable and multiple interfaces, is inserted vertically to minimize the effects of cable forces on the omnidirectionally mobile piezoelectric microrobot. The fixed housing secures the replaceable baseplate to the base 142 via screws at the four corners.

[0100] Compared with the prior art, the present invention has the following beneficial effects:

[0101] 1. The present invention designs an omnidirectional mobile piezoelectric micro precision operating robot, which improves the flexibility of precision operating equipment while ensuring positioning accuracy. The number and operating positions of precision operating robots can be flexibly configured according to actual application scenarios.

[0102] 2. The present invention provides an omnidirectional piezoelectric stack drive unit 120, which realizes omnidirectional precision movement of a tungsten steel ball mover by using piezoelectric stacks with driving directions 120 degrees apart. Compared with existing multi-degree-of-freedom drive units, the present invention provides a more miniaturized omnidirectional drive structure.

[0103] 3. Based on this, the present invention can be used as an independent probe device to realize applications such as semiconductor detection and cell manipulation on a precision operating platform.

[0104] Based on the above, the present invention can be applied to the semiconductor field and widely promoted.

[0105] In this application, the term "plurality" refers to two or more, unless otherwise specified. Terms such as "installed," "connected," "connected," and "fixed" should be interpreted broadly. For example, "connected" can mean fixed, removable, or integrally connected; and "connected" can mean directly or indirectly through an intermediary. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0106] Throughout this specification, terms such as "one embodiment," "some embodiments," and "specific embodiments" mean that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0107] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A piezoelectric robot, characterized in that: include: Robot body; A piezoelectric stack drive unit is provided on the robot body; a spherical mover, disposed below the piezoelectric stack drive unit; The piezoelectric stack driving unit is used to drive the spherical mover to rotate, so as to drive the robot body to move through the spherical mover.

2. The piezoelectric robot according to claim 1, characterized in that: The piezoelectric stack drive unit comprises: There are three piezoelectric tangential stacks, and the driving directions of the three piezoelectric tangential stacks are 120 degrees to each other.

3. The piezoelectric robot according to claim 2, characterized in that: There are at least two groups of the piezoelectric stack drive units, and each group of the piezoelectric stack drive units is connected to at least one of the spherical movers.

4. The piezoelectric robot according to claim 1, characterized in that: The robot body also includes: a housing, the housing comprising a cavity; A mounting seat, the mounting seat being arranged above the housing, the piezoelectric stack driving unit being arranged on the mounting seat and located in the cavity; The bottom plate is arranged below the shell.

5. The piezoelectric robot according to claim 4, characterized in that: The robot body also includes: a fixing plate, disposed on the bottom plate, and used to fix the piezoelectric stack drive unit on the robot body; A connecting column is provided between the piezoelectric stack driving unit and the fixing plate.

6. The piezoelectric robot according to claim 5, characterized in that: There are multiple connecting columns, which enclose a receiving space. The fixing plate includes an annular structure. The spherical mover portion is located in the receiving space and the annular structure and protrudes from the bottom plate.

7. The piezoelectric robot according to any one of claims 1 to 6, characterized in that: The piezoelectric robot further includes an operating platform, on which the robot body is disposed, and the operating platform includes: base; a tabletop, detachably disposed above the base; a shell, disposed on the base, and having an opening; The cable interface is arranged on the peripheral side of the table and passes through the opening.

8. The piezoelectric robot according to any one of claims 1 to 6, characterized in that: The piezoelectric robot further comprises: A cantilever is provided on a side of the robot body. The cantilever can rotate relative to the robot body and is used for cell manipulation and object transport.

9. The piezoelectric robot according to claim 8, characterized in that: The cantilever comprises: A first fixing member is provided on the robot body; a second fixing member, spaced apart from the first fixing member; a piezoelectric bimorph disposed between the first fixing member and the second fixing member; The flexible metal sheet is arranged between the first fixing member and the second fixing member.

10. A measuring and analyzing instrument, characterized in that: include: The piezoelectric robot according to any one of claims 1 to 9.

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