A composite function accelerometer
By employing inertial sliding to detect capacitance changes in the accelerometer and combining it with a micro-energy emission unit to trigger a security mechanism, the integration and miniaturization problems of accelerometers and security devices in existing technologies have been solved. This has resulted in a highly integrated and miniaturized accelerometer with a planar structure and accurate overload detection capabilities.
CN120870607BActive Publication Date: 2026-07-24EAST CHINA INST OF OPTOELECTRONICS INTEGRATEDDEVICE
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Patent Information
- Application Number
- CN202511070576.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-31
- Publication Date
- 2026-07-24
- Estimated Expiration
- 2045-07-31
AI Technical Summary
Technical Problem
Existing accelerometers and security devices suffer from poor integration and miniaturization, making it difficult to meet the application requirements of micro-sized intelligent devices.
Method used
An accelerometer with multiple functions is used to determine acceleration by utilizing the inertial sliding of the first substrate and the change in capacitance of the plate-shaped inspection mass detection. The security mechanism is triggered by the micro-energy emission unit, reducing the volume occupied by the security device.
Benefits of technology
It achieves miniaturization, lightweighting, and high integration of the accelerometer, features a planar structure, can accurately detect acceleration and trigger safety measures when needed, and reduces errors.
✦ Generated by Eureka AI based on patent content.
Abstract
The application discloses a composite function accelerometer in the field of micro-electro-mechanical system technology, and aims to solve the problem of poor integration and miniaturization in the prior art. The accelerometer comprises: when a MEMS generates acceleration, relative sliding occurs between a first substrate and a plate-shaped proof mass; the relative sliding between the first substrate and the plate-shaped proof mass will reduce the effective area between a first electrode plate and a proof electrode plate, and then the detection capacitor releases the electric charge; an overload detector detects the current, and then judges the acceleration of the MEMS according to the size of the current; when the acceleration reaches a degree at which security measures need to be executed, the sliding distance between the first substrate and the plate-shaped proof mass reaches a degree at which a first substrate round hole and a proof mass hole are overlapped; at this time, micro energy emitted by a micro energy emission unit can pass through the first substrate round hole and the proof mass hole; and a security mechanism triggering unit executes security disconnect measures after receiving the micro energy. The composite function accelerometer is not only small in size, but also has the security judgment function.
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