Method and system for detecting gas concentration in epitaxial growth reaction cavity, computer device and storage medium

Abstract

The application provides a method and system for detecting gas concentration in an epitaxial growth reaction cavity, a computer device and a storage medium. The application acquires a reflected light signal, a reference signal and a reaction cavity environment signal. The reflected light signal is wavelength calibrated and intensity baseline calibrated according to the reference signal, and an experimental absorption spectrum is generated according to the calibrated reflected light signal. The experimental absorption spectrum and a target absorption spectrum obtained by querying a preset database are fitted according to the reaction cavity environment signal, and the concentration information of the gas to be measured is obtained by inversion. The double calibration of the reference channel strictly aligns the experimental spectrum and the database target spectrum in the frequency scale and the amplitude scale, reduces the interference of line displacement and baseline fluctuation on fitting, improves the quantitative accuracy, introduces the environmental conditions as physical constraints, weakens the parameter coupling, improves the distinguishability and robustness of inversion, reduces the dependence on pure empirical correction, and improves the stability of the detection data.

Description

Technical Field

[0001] This application relates to the field of semiconductor detection technology, and in particular to a method, system, computer equipment, and storage medium for detecting the gas concentration in an epitaxial growth reaction chamber. Background Technology

[0002] MOCVD is a key process for fabricating compound semiconductor materials such as gallium nitride (GaN) and gallium arsenide (GaAs), and is widely used in the manufacture of core optoelectronic chips such as vertical-cavity surface-emitting lasers (VCSELs), laser diodes (LDs), and micro-LEDs. MOCVD processes are typically performed under high temperature, specific cavity pressure, and carrier gas ratios. Real-time monitoring and quantitative determination of the target gas concentration within the cavity are crucial for timely correction of the ratio, temperature, pressure, and gas intake / exhaust strategies, preventing cumulative deviations in film thickness, composition, and defect density caused by growth condition drift. For example, in a typical MOCVD process, material growth is usually carried out at high temperatures (e.g., 600-1200°C), specific cavity pressures (e.g., 10-1000 mbar), and precisely controlled carrier gas ratios. The stability of these process parameters directly determines the uniformity of epitaxial film thickness, compositional accuracy, and crystal defect density.

[0003] Traditional online monitoring of epitaxial growth processes relies primarily on the measurement of macroscopic physical quantities such as temperature, pressure, and flow rate, combined with indirect judgment using solid-state characterization methods such as reflective high-energy electron diffraction or laser reflectance spectroscopy. Therefore, it lacks the ability to directly and in real-time detect gas-phase reaction processes and target gas concentrations, particularly regarding the concentration changes of participating metal-organic sources (e.g., TMGa, TMAl) and hydrides (e.g., NH3, AsH3). Because the actual concentration distribution and variation patterns of reactants at high temperatures cannot be accurately determined, growth condition drift easily occurs during the process, leading to cumulative deviations in epitaxial film thickness, component ratios, and defect density, severely impacting device performance and product yield. To overcome these problems, attempts have been made to introduce in-situ spectroscopy methods such as narrowband laser absorption into process monitoring for quantitative analysis. However, laser wavelength drift, intensity fluctuations, and background gas interference result in low measurement accuracy. First, the complex high-temperature environment within the epitaxial growth reaction chamber easily leads to wavelength drift and intensity fluctuations in the laser, severely affecting the stability of the measurement signal. Second, the presence of various background gases (e.g., H2, N2) within the reaction chamber causes spectral interference that masks the characteristic absorption peaks of the target gas. Furthermore, issues such as particulate matter deposition and optical window contamination during the process can also alter optical path transmission characteristics, further reducing measurement accuracy. These factors collectively make it difficult for existing laser absorption spectroscopy methods to meet the accuracy and stability requirements of gas concentration measurement in semiconductor manufacturing processes. Summary of the Invention

[0004] The purpose of this application is to provide a method, system, computer equipment and storage medium for detecting the gas concentration in the epitaxial growth reaction chamber, so as to overcome the shortcomings of traditional online monitoring methods in terms of insufficient measurement capability and low measurement accuracy.

[0005] Firstly, this application proposes a method for detecting the gas concentration inside an epitaxial growth reaction chamber, comprising:

[0006] Acquire reflected light signal, reference signal, and reaction chamber environment signal; wherein the reflected light signal is measured when the laser signal passes through the reaction chamber, the reference signal is measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be measured;

[0007] The reflected light signal is calibrated for wavelength and intensity baseline based on the reference signal, and experimental absorption spectral lines are generated based on the calibrated reflected light signal.

[0008] Based on the environmental signal of the reaction chamber, the experimental absorption spectrum and the target absorption spectrum are fitted to obtain the concentration information of the gas to be tested; wherein, the target absorption spectrum is obtained by querying the gas to be tested from a preset database.

[0009] In one embodiment, the step of performing wavelength calibration and intensity baseline calibration on the reflected light signal based on the reference signal, and generating experimental absorption spectral lines based on the calibrated reflected light signal, includes:

[0010] Based on the absolute center wavelength of the absorption peak of the reference gas cell in the reference signal, a mapping relationship between the scanning time and wavelength of the laser signal is established, and based on the mapping relationship, a corresponding wavelength value is configured for each data point in the reflected light signal.

[0011] Within the pre-defined non-absorption regions on both sides of the target absorption peak, the intensity envelope of the reflected light signal is fitted to obtain the non-absorption intensity baseline.

[0012] Based on the baseline of no absorption intensity, the absorbance of each sampling point is calculated point by point according to the wavelength value, and the absorbance of each point constitutes the experimental absorption spectrum.

[0013] In one embodiment, the step of fitting the experimental absorption spectrum and the target absorption spectrum based on the reaction chamber environmental signal to obtain the concentration information of the gas to be measured includes:

[0014] The target absorption spectrum is corrected based on the reaction chamber environment signal;

[0015] The experimental absorption spectrum and the corrected target absorption spectrum are fitted using least squares, and the concentration information of the gas to be measured is obtained by minimizing the sum of squared residuals.

[0016] In one embodiment, the reaction chamber environment signal includes a temperature signal and a pressure signal; the spectral parameters corresponding to the target absorption spectral line include line intensity, self-broadening factor and air broadening factor, the line intensity has a temperature dependence, the self-broadening factor has a first pressure dependence, and the air broadening factor should have a second pressure dependence.

[0017] The step of correcting the target absorption spectrum based on the reaction chamber environment signal includes:

[0018] The value of the line strength is corrected based on the temperature signal and the temperature dependence.

[0019] The self-widening coefficient is corrected based on the pressure signal and the first pressure dependence.

[0020] The air width expansion coefficient is corrected based on the pressure signal and the second pressure dependence.

[0021] Based on the corrected line intensity, the corrected self-broadening factor, and the corrected air broadening factor, the target absorption line shape under the current operating conditions is generated and matched with the sampling resolution of the laser signal and the instrument line shape to obtain the corrected target absorption spectrum.

[0022] In one embodiment, the preset database stores multiple pre-built sets of optimal spectral lines, and the method for constructing each set of optimal spectral lines includes:

[0023] Acquire input data; wherein, the input data includes target gas, background gas, process temperature range, and process pressure range;

[0024] Within a preset spectral window, within the process temperature range and the process pressure range, a candidate spectral line set is constructed based on an initial calculation model of the target gas and the background gas.

[0025] Calculate the evaluation index for each candidate absorption line in the candidate spectral line set; wherein the evaluation index includes effective line intensity and spectral isolation.

[0026] Under the constraints of preset rules, the candidate spectral lines are screened based on the evaluation indicators; wherein, the preset rules include: effective line intensity is not lower than a first threshold and spectral isolation is not lower than a second threshold;

[0027] The selected candidate absorption lines are sorted, and the top few candidate absorption lines ranked in the first preset position are selected as the optimal spectral set for each process stage.

[0028] In one embodiment, the target absorption spectrum is obtained by querying a preset database based on the gas to be tested, including:

[0029] If no absorption line is found, the characteristic decomposition product that has a mapping relationship with the gas to be tested is called, and the characteristic decomposition product is queried in the preset database. The absorption line obtained from the query is used as the target absorption line.

[0030] If multiple absorption lines are found, they are sorted according to a preset optimization rule, and the absorption line with the highest ranking is selected as the target absorption line.

[0031] In one embodiment, the method further includes:

[0032] The trend index of the concentration of the gas to be measured is calculated within a preset time window. If the trend index exceeds a preset threshold and the duration exceeds a preset duration, the abnormal state is fed back to the host and an alarm signal is generated.

[0033] Secondly, this application proposes a system for detecting the gas concentration in an epitaxial growth reaction chamber, the system comprising:

[0034] The acquisition module is used to acquire reflected light signals, reference signals, and reaction chamber environmental signals; wherein the reflected light signals are measured when the laser signal passes through the reaction chamber, the reference signals are measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be measured;

[0035] The first processing module is used to perform wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and to generate experimental absorption spectral lines based on the calibrated reflected light signal.

[0036] The second processing module is used to fit the experimental absorption spectrum and the target absorption spectrum based on the environmental signal of the reaction chamber, and invert the concentration information of the gas to be tested; wherein the target absorption spectrum is obtained by querying the gas to be tested from a preset database.

[0037] Thirdly, this application also provides a computer device. The computer device includes a memory and a processor, the memory storing a computer program, and the processor executing the computer program to implement the method steps in the first aspect.

[0038] Fourthly, this application also provides a computer-readable storage medium. The computer-readable storage medium stores a computer program thereon, which, when executed by a processor, implements the method steps of the first aspect.

[0039] The above-mentioned method, system, computer equipment, and storage medium for detecting the gas concentration in the epitaxial growth reaction chamber have at least the following advantages:

[0040] This application acquires reflected light signals, reference signals, and reaction chamber environmental signals; performs wavelength and intensity baseline calibration on the reflected light signals based on the reference signals, and generates experimental absorption spectra based on the calibrated reflected light signals; fits the experimental absorption spectra with the target absorption spectra obtained from a preset database based on the reaction chamber environmental signals, and inverts the concentration information of the gas to be measured. Using the above scheme, this application achieves strict alignment of the experimental spectra with the target spectrum in the database on both frequency and amplitude scales through dual calibration of wavelength and intensity in the reference channel, reducing interference from line shift and baseline fluctuations on the fitting, lowering the fitting residual, and improving quantitative accuracy. Simultaneously, by introducing environmental conditions as physical constraints into the line shape and parameter space, parameter coupling is weakened, improving the identifiability and robustness of the inversion, reducing reliance on purely empirical corrections, and enhancing the stability of the detection data. Attached Figure Description

[0041] Figure 1 This is an application environment diagram of a method for detecting gas concentration in an epitaxial growth reaction chamber in one embodiment;

[0042] Figure 2 This is a flowchart illustrating a method for detecting gas concentration in an epitaxial growth reaction chamber in one embodiment.

[0043] Figure 3 This is a flowchart illustrating the steps involved in generating experimental absorption lines in one embodiment.

[0044] Figure 4 This is a flowchart illustrating the steps for obtaining concentration information through inversion in one embodiment;

[0045] Figure 5 This is a flowchart illustrating the steps for constructing the optimal spectral line sets in one embodiment;

[0046] Figure 6 This is a structural block diagram of a gas concentration detection system in an epitaxial growth reaction chamber in one embodiment;

[0047] Figure 7 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0048] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, unless otherwise specified, the following embodiments and features in the embodiments can be combined with each other.

[0049] Some exemplary embodiments of this application have been described for illustrative purposes. It should be understood that this application may be implemented in other ways not specifically shown in the accompanying drawings.

[0050] The method for detecting gas concentration in the epitaxial growth reaction chamber provided in this application embodiment can be applied to, for example... Figure 1 The application environment shown is as follows. The reaction chamber 1 contains a rotatable planetary disk, on which multiple rotatable satellite disks are mounted. Each satellite disk has multiple wafer carrier disks for placing wafers. The planetary disk rotates under motor control, and each satellite disk rotates due to airflow.

[0051] An in-situ measurement system 2 is installed above the reaction chamber 1. The in-situ measurement system 2 is fixedly installed on the top cover or side wall of the reaction chamber. Its measurement optical path is incident into the reaction chamber vertically or at a specific angle through an optical window.

[0052] The in-situ measurement system 2 includes an optical module and a reference gas chamber, and the optical module includes a laser and a detector.

[0053] The reference gas chamber is located inside the optical module or adjacent to the reaction chamber wall and parallel to the measurement optical path. It provides a known and stable reference signal for real-time calibration of the in-situ measurement system 2, eliminating common-mode noise. It should be understood that the reference gas chamber is sealed, and the gas concentration within it is a stable value that does not change with the external environment.

[0054] The laser and detector are integrated within the optical module. Exemplarily, the laser can be a distributed feedback (DFB) laser or a VCSEL laser array. When the reference gas chamber is located within the optical module, the probe beam emitted by the laser first passes through the reference gas chamber, then illuminates the surface of a rotating wafer or satellite disk within the reaction chamber through an optical window; the beam reflected back from the wafer or satellite disk surface passes through the optical window again, and is finally received by the detector and converted into an analog electrical signal proportional to the light intensity. Specifically, in this embodiment, this analog electrical signal is the reflected light signal and the reference signal. When the reference gas chamber is located adjacent to the reaction chamber wall, the reference gas chamber has its own laser and detector, and its optical path is very close to the main measurement path, exposed to the same environmental conditions. The types of gases to be measured in the reaction chamber and the reference gas chamber are the same.

[0055] The gas concentration detection system 3 in the epitaxial growth reaction chamber is connected to the in-situ measurement system 2. It is used to acquire the reflected light signal measured when the laser signal passes through the reaction chamber, the reference signal measured when the laser signal passes through the reference gas chamber, and the reaction chamber environmental signal. The reaction chamber environmental signal includes a temperature signal and a pressure signal; exemplarily, the temperature signal can be measured by a multi-wavelength pyrometer installed at the top of the reaction chamber, and the pressure signal can be measured by a capacitive thin-film gauge installed on the main exhaust pipe of the reaction chamber.

[0056] Furthermore, after acquiring the above signals, the gas concentration detection system 3 in the epitaxial growth reaction chamber performs wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and generates an experimental absorption spectrum based on the calibrated reflected light signal; based on the reaction chamber environment signal, it fits the experimental absorption spectrum and the target absorption spectrum to obtain the concentration information of the gas to be measured; wherein, the target absorption spectrum is obtained by querying the gas to be measured from a preset database.

[0057] The aforementioned method for detecting gas concentration within the epitaxial growth reaction chamber involves wavelength calibration and intensity baseline calibration of the reflected light signal based on a reference signal. Wavelength calibration utilizes the known absorption line positions in the reference gas cell to correct wavelength shifts caused by laser scanning nonlinearity and temperature drift, aligning the experimental spectral lines with the absolute frequency standard and ensuring comparable spectral positions. Intensity baseline calibration leverages the slow-varying transmission characteristics of the reference channel to remove slow intensity drift, inherent interference fringes, and low-frequency fluctuations, preserving net features related to gas absorption and improving the signal-to-noise ratio. Based on this, the calibrated reflected light signal is converted into experimental absorption spectra suitable for physical fitting, establishing a consistent dimension and scale for subsequent point-by-point matching with target absorption spectra in a pre-set database. Furthermore, the introduced environmental constraints prevent overfitting during the fitting process, and real-time updates of environmental quantities automatically compensate for changes in the optical path length and background absorption within the chamber, achieving time-varying consistency and traceability of the concentration inversion results. By adopting the above scheme, this application achieves strict alignment of the experimental spectral lines with the target spectrum in the database on both frequency and amplitude scales through dual calibration of wavelength and intensity in the reference channel. This reduces the interference of line displacement and baseline fluctuations on the fitting, lowers the fitting residual, and improves quantitative accuracy. At the same time, environmental conditions are introduced as physical constraints into the line shape and parameter space, which weakens parameter coupling, enhances the identifiability and robustness of the inversion, reduces the dependence on purely empirical correction, and improves the stability of the detection data.

[0058] Please see Figure 2 In one exemplary embodiment, this application provides a method for detecting the gas concentration in an epitaxial growth reaction chamber, specifically including the following steps:

[0059] Step 202: Acquire the reflected light signal, the reference signal, and the reaction chamber environment signal; wherein, the reflected light signal is measured when the laser signal passes through the reaction chamber, the reference signal is measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be tested.

[0060] Specifically, the same gas to be measured refers to the same chemical species and the same set of absorption transitions selected in both the reference chamber and the reaction chamber. Typically, the reference chamber has a known concentration and optical path length, while the concentration in the reaction chamber is unknown.

[0061] Step 204: Perform wavelength calibration and intensity baseline calibration on the reflected light signal based on the reference signal, and generate experimental absorption spectral lines based on the calibrated reflected light signal.

[0062] Specifically, wavelength calibration refers to mapping the signal acquisition steps to standard coordinates to compensate for spectral shifts caused by nonlinearity and temperature drift during laser scanning.

[0063] Intensity baseline calibration refers to removing slowly varying intensity fluctuations and background terms that are unrelated to gas absorption and normalizing the intensity so that the spectrum only reflects absorption information.

[0064] Absorption spectral lines refer to the concave linear features and sets of light selectively absorbed by molecules at specific transition sites on the spectrum. Converting the reflected light signal to the absorption domain can eliminate the intensity effects related to the device and linearize the concentration relationship, facilitating subsequent fitting operations.

[0065] Step 206: Based on the environmental signal of the reaction chamber, fit the experimental absorption spectrum and the target absorption spectrum to obtain the concentration information of the gas to be tested; wherein, the target absorption spectrum is obtained by querying the gas to be tested from a preset database.

[0066] Specifically, fitting inversion refers to using a physical model that can generate the target absorption spectrum under given environmental constraints, treating the unknown concentration information as the variable to be estimated, and using an optimization algorithm to minimize the difference between the target absorption spectrum and the experimental absorption spectrum, ultimately outputting the concentration and its uncertainty.

[0067] The aforementioned method for detecting gas concentration within the epitaxial growth reaction chamber involves wavelength calibration and intensity baseline calibration of the reflected light signal based on a reference signal. Wavelength calibration utilizes the known absorption line positions in the reference gas cell to correct wavelength shifts caused by laser scanning nonlinearity and temperature drift, aligning the experimental spectral lines with the absolute frequency standard and ensuring comparable spectral positions. Intensity baseline calibration leverages the slow-varying transmission characteristics of the reference channel to remove slow intensity drift, inherent interference fringes, and low-frequency fluctuations, preserving net features related to gas absorption and improving the signal-to-noise ratio. Based on this, the calibrated reflected light signal is converted into experimental absorption spectra suitable for physical fitting, establishing a consistent dimension and scale for subsequent point-by-point matching with target absorption spectra in a pre-set database. Furthermore, the introduced environmental constraints prevent overfitting during the fitting process, and real-time updates of environmental quantities automatically compensate for changes in the optical path length and background absorption within the chamber, achieving time-varying consistency and traceability of the concentration inversion results. By adopting the above scheme, this application significantly suppresses systematic errors caused by light source and optical path drift and intracavity operating condition fluctuations through dual calibration of wavelength and intensity of the reference channel and physical fitting of environmental constraints, thereby achieving high-precision and long-term stable online detection of the concentration of the gas to be measured.

[0068] Please see Figure 3 Optionally, the reflected light signal is calibrated for wavelength and intensity baseline based on a reference signal, and experimental absorption spectra are generated based on the calibrated reflected light signal, including:

[0069] Step 302: Based on the absolute center wavelength of the absorption peak of the reference gas cell in the reference signal, establish the mapping relationship between the scanning time and wavelength of the laser signal, and configure the corresponding wavelength value for each data point in the reflected light signal according to the mapping relationship.

[0070] Step 304: Fit the intensity envelope of the reflected light signal within the preset non-absorption regions on both sides of the target absorption peak to obtain the non-absorption intensity baseline.

[0071] Step 306: Based on the baseline without absorption intensity, the absorbance of each sampling point is calculated point by point according to the wavelength value, and each absorbance constitutes the experimental absorption spectrum.

[0072] Specifically, a preset set of reference cell absorption peaks is automatically retrieved from the reference data. Through peak search and center positioning, the absolute center wavelengths of multiple peaks and their corresponding sampling timestamps are obtained. The preset set of reference cell absorption peaks is a list of centerline positions predetermined based on a standard line table and the instrument's scanning bandwidth. This list is used to quickly locate absorption peaks within the corresponding window in the real-time reference signal and serve as frequency standard anchor points. A piecewise fitting method is used to obtain a global mapping relationship between scanning time and wavelength. For each laser scan, this global mapping relationship is independently calculated, and the absolute center wavelength of the absorption peak is used as the anchor point to compensate for the temperature drift and scanning nonlinearity of the global mapping relationship on that day. This mapping relationship is then applied to the reflected light signal of the measurement channel, and the corresponding wavelength values ​​are written point-by-point according to the sampling time to obtain data pairs of reflection intensity and wavelength.

[0073] For the target absorption peak, non-absorption regions on both sides are selected symmetrically according to its center wavelength. The target absorption peak refers to multiple peaks or peak groups of a selected absorption line in the reflected light signal used to quantitatively determine the concentration of the analyte gas. Robust fitting of the reflection intensity within the non-absorption regions is performed to estimate the intensity envelope. The obtained envelope is then extrapolated and stitched together within a local window containing the target peak to form a non-absorption intensity baseline covering the entire bandwidth of the target peak.

[0074] Using the aforementioned baseline with no absorption intensity as a reference, the reflection intensity on the same wavelength grid is normalized, and the absorbance is calculated point by point to obtain the corresponding sequence of absorbance and wavelength.

[0075] By adopting the above scheme, a global mapping relationship between time and wavelength is established by using a reference signal as anchor. A baseline with no absorption intensity is fitted on both sides of the target absorption peak, and the reflection intensity is converted into absorbance. This makes the experimental spectrum comparable on the standard coordinates and amplitude scale, significantly suppressing the drift of the light source and the detector gain, as well as the baseline fluctuations caused by the stripes of the observation window of the reaction chamber. This improves the signal-to-noise ratio and parameter identifiability, thereby achieving high-precision, long-term stable and consistent detection effect of the concentration of the gas to be measured across batches.

[0076] Please see Figure 4Optionally, based on the environmental signal of the reaction chamber, the experimental absorption spectrum and the target absorption spectrum are fitted to obtain the concentration information of the gas to be measured, including:

[0077] Step 402: Correct the target absorption spectrum based on the reaction chamber environment signal.

[0078] Step 404: Perform least-squares fitting on the experimental absorption spectrum and the corrected target absorption spectrum, and obtain the concentration information of the gas to be measured by minimizing the sum of squared residuals.

[0079] Optionally, when the reaction chamber environmental signal includes temperature and pressure signals; and the spectral parameters corresponding to the target absorption line include line intensity, self-broadening coefficient, and air broadening coefficient, with the line intensity having a temperature dependence, the self-broadening coefficient having a first pressure dependence, and the air broadening coefficient having a second pressure dependence, the target absorption line is corrected based on the reaction chamber environmental signal, including:

[0080] Based on the temperature signal and temperature dependence, the line intensity is corrected; based on the pressure signal and first pressure dependence, the self-broadening factor is corrected; based on the pressure signal and second pressure dependence, the air broadening factor is corrected; based on the corrected line intensity, the corrected self-broadening factor, and the corrected air broadening factor, the target absorption line shape under the current operating conditions is generated, and matched with the sampling resolution of the laser signal and the instrument line shape to obtain the corrected target absorption spectrum.

[0081] Specifically, the temperature dependence refers to the relationship between the linear intensity of the absorption transition and the gas temperature. It is used to convert the linear intensity given at the standard temperature to the current temperature in the reaction chamber, thereby obtaining the target linear intensity under the current operating conditions.

[0082] The first pressure dependence refers to the law that the spectral broadening caused by collisions between gas molecules and their own molecules changes with the total pressure or the partial pressure of the constituent components. It is used to convert the self-broadening coefficient under standard pressure to the current pressure and component partial pressure to obtain the self-collision broadening amount for the current time.

[0083] The second pressure dependence refers to the broadening caused by the collision between the test gas and the background, and how it changes with the total pressure or the partial pressure and component ratio of the background gas. It is used to convert the air broadening coefficient under standard conditions to the current pressure and carrier gas ratio to obtain the broadening amount of the heterogeneous collision in the current case.

[0084] Based on the temperature signal, the line intensity of the transition is updated according to the temperature dependence relationship to obtain the target line intensity in the current temperature range; based on the pressure signal, the self-broadening coefficient is updated according to the first pressure dependence relationship to reflect the broadening changes caused by the collision of the gas under test itself; based on the pressure signal, the air broadening coefficient is updated according to the second pressure dependence relationship to reflect the broadening changes caused by the collision with the background gas.

[0085] Furthermore, based on the corrected line strength, the corrected self-broadening factor, and the corrected air broadening factor, the linear parameters of the target transition are determined according to the temperature and pressure conditions under the current operating conditions, thereby generating the target absorption line shape corresponding to the transition in standard coordinates. The corrected line strength is used to determine the peak depth or area of ​​the linear parameters, and the corrected broadening factor is used to determine the linewidth and line shape of the linear parameters. The broadening factor includes both the self-broadening factor and the air broadening factor.

[0086] The sampling resolution of a laser signal refers to the horizontal axis resolution, which is jointly determined by the scanning step size of the laser signal, the integration time of data acquisition, and the sampling interval. The instrument line shape is pre-calibrated based on a reference signal for the current instrument setup. The target absorption line shape is resampled to a wavelength sampling grid consistent with the sampling resolution of the laser signal. Then, based on the pre-calibrated instrument line shape of the current instrument setup, a response transformation is performed on the resampled target absorption line shape to obtain a corrected target absorption spectrum that is comparable to the measured spectrum in terms of line width and tail shape.

[0087] Furthermore, the gas concentration to be measured is set as the primary degree of freedom, and the line-center micro-shift and micro-baseline residual are set as narrow-range constraint variables. During fitting, the gas concentration to be measured is used as the primary degree of freedom for solving, and the line-center micro-shift and micro-baseline residual are only used for morphological correction within the limited range.

[0088] A joint window for the target absorption peaks is determined, and least-squares fitting is performed within this window. The concentration result is obtained by minimizing the sum of squared residuals. The process stops when the decrease in residuals falls below a threshold or the maximum number of iterations is reached. The joint window is the overall fitting region obtained by taking the union of the fitting segments corresponding to each target absorption peak on standard coordinates. The fitting segment corresponding to each target absorption peak is a continuous wavelength interval around the center position of that peak, determined by the current broadening and signal-to-noise ratio. Before fitting, initial weights are assigned to each sampling point within the fitting segment, with higher weights assigned to the peak center and lower weights assigned to the gentle slope areas on both sides. Sampling points marked as anomalous are masked. During fitting iterations, each round first calculates the residuals based on the current model output and experimental data, then adaptively adjusts the weights according to the magnitude of the residuals, and then uses the updated weights to enter the next round of solution until convergence.

[0089] By adopting the above scheme, before fitting, the line intensity and broadening parameters of the target absorption spectrum are corrected for operating conditions based on the temperature and pressure under the current operating conditions. This reduces the coupling between line intensity, line width and concentration, making concentration the main parameter to be estimated, and the subsequent fitting is more robust. By performing weighted least squares between the corrected target absorption spectrum and the experimental absorption spectrum and using the minimum of the sum of squared residuals as the criterion, high-precision and traceable concentration inversion can still be obtained even when window fringes, power drift and background fluctuations exist.

[0090] Please see Figure 5 Optionally, the preset database stores multiple pre-built sets of optimal spectral lines, and the methods for constructing each set of optimal spectral lines include:

[0091] Step 502: Obtain input data; wherein, the input data includes target gas, background gas, process temperature range, and process pressure range.

[0092] Step 504: Within a preset spectral window, and within the process temperature and pressure ranges, construct a candidate spectral line set based on the initial calculation model of the target gas and background gas.

[0093] Step 506: Calculate the evaluation index for each candidate absorption line in the candidate spectral line set; the evaluation index includes effective line intensity and spectral isolation.

[0094] Step 508: Under the constraints of preset rules, candidate spectral lines are screened based on various evaluation indicators; wherein the preset rules include: effective line intensity is not lower than the first threshold and spectral isolation is not lower than the second threshold.

[0095] Step 510: Sort the selected candidate absorption lines and select the top few candidate absorption lines in each process stage as the optimal set of spectral lines for that process stage.

[0096] Specifically, the spectral window refers to a preset continuous frequency band on the standard coordinate system, used to limit the search and fitting range of candidate absorption spectra. It can be determined based on the tunable range of the laser and the response bandwidth of the detector, and should avoid strong interference spectral regions.

[0097] The initial calculation model refers to the basic model of the theoretical absorption line shape of the target gas and background gas under given temperature, pressure and gas composition conditions. It is a parameterized description of the transition line position, line intensity, broadening, displacement coefficient and its temperature and pressure dependence.

[0098] Within the spectral window, based on the initial calculation models of the target gas and background gas, and combined with the process temperature and pressure ranges for each process stage, a list of candidate absorption lines is generated. The spectral information for each candidate absorption line is recorded, including at least one of the following: center position, relative line intensity, broadening sensitivity, and distribution information of neighboring interference lines.

[0099] Within the temperature and pressure range of the corresponding process stage, a statistically representative value of the line intensity is taken, usually the minimum or quantile value within the stage, to obtain the effective line intensity. Centered on the candidate line and within a set bandwidth, the minimum interval and peak overlap with adjacent absorption lines are statistically analyzed to give a monotonically increasing isolation score, thus obtaining the spectral isolation.

[0100] Candidate spectral lines that meet the preset rules are selected and sorted according to multiple indicators. For example, the effective line intensity is assigned a weight of 0.6 and the spectral isolation is assigned a weight of 0.4. In the first process stage, the top 6 candidate spectral lines are selected to form the first optimal spectral line set; in the second process stage, the top 5 candidate spectral lines are selected to form the second optimal spectral line set, resulting in multiple optimal spectral line sets.

[0101] Using the above approach, the optimal spectral line set is pre-built offline and stored in the database. During runtime, absorption spectral lines with high intensity and good isolation can be directly called for multi-line joint fitting according to the process stage, reducing systematic errors caused by adjacent peak overlap and background interference from the source. At the same time, it avoids online full-spectrum blind search and complex screening, significantly improving real-time performance and stability.

[0102] Optionally, the target absorption spectrum is obtained from a preset database based on the gas to be measured, including:

[0103] If no absorption line is found, the characteristic decomposition products that have a mapping relationship with the gas to be measured are called, and the absorption line obtained from the query is used as the target absorption line.

[0104] When multiple absorption lines are found, they are sorted according to preset optimization rules, and the absorption line ranked first is selected as the target absorption line.

[0105] Specifically, within the set spectral window, the corresponding absorption line is first searched in the preset database according to the gas to be measured. If the match is unique, the absorption line is taken as the target absorption line.

[0106] If multiple absorption lines are matched, the evaluation index for each matched absorption line is calculated, and the lines are sorted according to the optimization rules. The absorption line ranked first is selected as the target absorption line. The optimization rules can be the same as or different from the preset rules mentioned above.

[0107] If no match is found, the characteristic decomposition product corresponding to the analyte gas is used. This characteristic decomposition product refers to a stable gaseous component generated from the analyte gas under the current process temperature and pressure conditions, possessing a measurable absorption line within the spectral window, and whose concentration satisfies a monotonic mapping relationship with the analyte gas concentration within a preset applicable range. The analyte gas and characteristic decomposition product are screened and stored in the database according to independent evaluation rules, and can exist independently in the database. Thus, under the current window and operating conditions, if a usable line for the analyte gas is screened out due to its weakness, but its decomposition product exhibits a stronger performance within the same window, it can still be found in the database and used for indirect quantification.

[0108] By adopting the above scheme, when there are no usable absorption lines for the gas to be tested, the detection is ensured to continue uninterrupted by backtracking through its corresponding characteristic decomposition products; by sorting and selecting the best of multiple candidate lines, the errors caused by adjacent peak overlap and background interference are significantly reduced, thereby improving the robustness and real-time performance of the fitting.

[0109] Optionally, the above-mentioned method for detecting the gas concentration in the epitaxial growth reaction chamber further includes:

[0110] The system calculates the trend of the gas concentration within a preset time window. If the trend exceeds a preset threshold and the duration exceeds a preset duration, the system will report the abnormal status to the host and generate an alarm signal.

[0111] Specifically, this application also provides users with trend indicators through a human-machine interface, which makes it easier for users to discover and quickly identify anomalies in real time, trigger correction or interlocking in advance, intervene before the film quality is damaged, and improve yield.

[0112] The aforementioned method for detecting gas concentration within the epitaxial growth reaction chamber involves wavelength calibration and intensity baseline calibration of the reflected light signal based on a reference signal. Wavelength calibration utilizes the known absorption line positions in the reference gas cell to correct wavelength shifts caused by laser scanning nonlinearity and temperature drift, aligning the experimental spectral lines with the absolute frequency standard and ensuring comparable spectral positions. Intensity baseline calibration leverages the slow-varying transmission characteristics of the reference channel to remove slow intensity drift, inherent interference fringes, and low-frequency fluctuations, preserving net features related to gas absorption and improving the signal-to-noise ratio. Based on this, the calibrated reflected light signal is converted into experimental absorption spectra suitable for physical fitting, establishing a consistent dimension and scale for subsequent point-by-point matching with target absorption spectra in a pre-set database. Furthermore, the introduced environmental constraints prevent overfitting during the fitting process, and real-time updates of environmental quantities automatically compensate for changes in the optical path length and background absorption within the chamber, achieving time-varying consistency and traceability of the concentration inversion results. By adopting the above scheme, this application achieves strict alignment of the experimental spectral lines with the target spectrum in the database on both frequency and amplitude scales through dual calibration of wavelength and intensity in the reference channel. This reduces the interference of line displacement and baseline fluctuations on the fitting, lowers the fitting residual, and improves quantitative accuracy. At the same time, environmental conditions are introduced as physical constraints into the line shape and parameter space, which weakens parameter coupling, enhances the identifiability and robustness of the inversion, reduces the dependence on purely empirical correction, and improves the stability of the detection data.

[0113] It should be understood that although the steps in the flowcharts of the embodiments described above are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the embodiments described above may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.

[0114] Based on the same inventive concept, this application also provides a gas concentration detection system in an epitaxial growth reaction chamber. This system is applicable to the above-described method for detecting gas concentration in an epitaxial growth reaction chamber. The solution provided by this system is similar to the solution described in the above-described method. Therefore, the specific limitations in one or more device embodiments provided below can be found in the limitations of the method described above, and will not be repeated here.

[0115] Please see Figure 6 In one embodiment, the satellite disk rotation speed detection system includes: an acquisition module, a first processing module, and a second processing module.

[0116] The acquisition module is used to acquire reflected light signals, reference signals, and reaction chamber environmental signals; wherein the reflected light signals are measured when the laser signal passes through the reaction chamber, the reference signals are measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be measured.

[0117] The first processing module is used to perform wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and to generate experimental absorption spectral lines based on the calibrated reflected light signal.

[0118] The second processing module is used to fit the experimental absorption spectrum and the target absorption spectrum based on the environmental signal of the reaction chamber, and invert the concentration information of the gas to be tested; wherein, the target absorption spectrum is obtained by querying a preset database based on the gas to be tested. Obtaining the target absorption spectrum based on the gas to be tested from the preset database includes: if no absorption spectrum is found, calling up characteristic decomposition products that have a mapping relationship with the gas to be tested, and querying the preset database based on the characteristic decomposition products, and using the obtained absorption spectrum as the target absorption spectrum; if multiple absorption spectra are found, sorting the absorption spectra according to preset optimization rules, and selecting the absorption spectrum with the highest ranking as the target absorption spectrum.

[0119] Optionally, the first processing module performs wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and generates experimental absorption spectra based on the calibrated reflected light signal. This includes: establishing a mapping relationship between the scanning time and wavelength of the laser signal based on the absolute center wavelength of the absorption peak of the reference gas cell in the reference signal, and configuring corresponding wavelength values ​​for each data point in the reflected light signal according to the mapping relationship; fitting the intensity envelope of the reflected light signal within a preset non-absorption region on both sides of the target absorption peak to obtain a non-absorption intensity baseline; and calculating the absorbance of each sampling point point by point according to the wavelength value based on the non-absorption intensity baseline, with each absorbance constituting an experimental absorption spectrum.

[0120] Optionally, the second processing module fits the experimental absorption spectrum and the target absorption spectrum based on the reaction chamber environmental signal to obtain the concentration information of the gas to be measured, including: correcting the target absorption spectrum based on the reaction chamber environmental signal; performing least squares fitting on the experimental absorption spectrum and the corrected target absorption spectrum, and obtaining the concentration information of the gas to be measured based on the minimum sum of squared residuals.

[0121] Optionally, the satellite disk rotation speed detection system described above also includes a database construction module.

[0122] The database construction module is used to pre-build and store multiple optimal spectral line sets. The construction of each optimal spectral line set includes: acquiring input data, which includes target gas, background gas, process temperature range, and process pressure range; constructing candidate spectral line sets based on initial calculation models of target gas and background gas within a preset spectral window and within the process temperature and pressure ranges; calculating evaluation indicators for each candidate absorption line in the candidate spectral line set, which includes effective line intensity and spectral isolation; filtering candidate spectral lines based on each evaluation indicator under preset rules, which include: effective line intensity not lower than a first threshold and spectral isolation not lower than a second threshold; sorting the filtered candidate absorption lines, and selecting multiple candidate absorption lines ranked in the top preset positions according to the process stage as the optimal spectral line set for that process stage.

[0123] Optionally, the satellite disk rotation speed detection system described above also includes a display module.

[0124] The display module is used to calculate the trend index of the concentration information of the gas to be measured within a preset time window. If the trend index exceeds the preset threshold and the duration exceeds the preset duration, the abnormal status will be fed back to the host and an alarm signal will be generated.

[0125] The aforementioned satellite disk rotation speed detection system performs wavelength calibration and intensity baseline calibration on the reflected light signal based on a reference signal. The wavelength calibration utilizes the known absorption line positions in the reference gas cell to correct wavelength shifts caused by laser scanning nonlinearity and temperature drift, aligning the experimental spectral lines with the absolute frequency standard and ensuring comparable spectral positions. The intensity baseline calibration leverages the slow-varying transmission characteristics of the reference channel to remove slow intensity drift, inherent interference fringes, and low-frequency fluctuations, retaining net features related to gas absorption and improving the signal-to-noise ratio. Based on this, the calibrated reflected light signal is converted into experimental absorption spectra suitable for physical fitting, establishing a consistent dimension and scale for subsequent point-by-point matching with target absorption spectra in a pre-set database. Furthermore, the introduced environmental constraints prevent overfitting during the fitting process, and real-time updates of environmental quantities automatically compensate for changes in intracavity optical path and background absorption, achieving time-varying consistency and traceability of the concentration inversion results. By adopting the above scheme, this application achieves strict alignment of the experimental spectral lines with the target spectrum in the database on both frequency and amplitude scales through dual calibration of wavelength and intensity in the reference channel. This reduces the interference of line displacement and baseline fluctuations on the fitting, lowers the fitting residual, and improves quantitative accuracy. At the same time, environmental conditions are introduced as physical constraints into the line shape and parameter space, which weakens parameter coupling, enhances the identifiability and robustness of the inversion, reduces the dependence on purely empirical correction, and improves the stability of the detection data.

[0126] Each module in the aforementioned satellite disk rotation speed detection system can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of a computer device in hardware form or independent of it, or stored in the memory of a computer device in software form, so that the processor can call and execute the corresponding operations of each module.

[0127] In one feasible embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as follows: Figure 7 As shown, the computer device includes a processor, memory, input / output interface, communication interface, display unit, and input device. The processor, memory, and input / output interface are connected via a system bus, and the communication interface, display unit, and input device are also connected to the system bus via the input / output interface. The processor provides computational and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The input / output interface is used for exchanging information between the processor and external devices. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, mobile cellular networks, NFC (Near Field Communication), or other technologies. When the computer program is executed by the processor, it implements the aforementioned method for detecting the gas concentration within the epitaxial growth reaction chamber. The display unit is used to form a visually visible image and can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be an LCD screen or an e-ink screen. The input device of the computer device can be a touch layer covering the display screen, or buttons, trackballs, or touchpads set on the casing of the computer device, or external keyboards, touchpads, or mice, etc.

[0128] Those skilled in the art will understand that Figure 7 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0129] In one feasible embodiment, a computer device is provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the method steps in the above-described method for detecting the gas concentration in the epitaxial growth reaction chamber.

[0130] In one feasible embodiment, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, implements the method steps in the method for detecting the gas concentration in the epitaxial growth reaction chamber described above.

[0131] In one feasible embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the method steps in the method for detecting the gas concentration in the epitaxial growth reaction chamber described above.

[0132] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments described above. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.

[0133] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0134] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A method for detecting the gas concentration in an epitaxial growth reaction chamber, characterized in that, The method includes: Acquire reflected light signal, reference signal, and reaction chamber environment signal; wherein the reflected light signal is measured when the laser signal passes through the reaction chamber, the reference signal is measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be measured; The reflected light signal is calibrated for wavelength and intensity baseline based on the reference signal, and experimental absorption spectra are generated based on the calibrated reflected light signal, including: Based on the absolute center wavelength of the absorption peak of the reference gas cell in the reference signal, a mapping relationship between the scanning time and wavelength of the laser signal is established, and based on the mapping relationship, a corresponding wavelength value is configured for each data point in the reflected light signal. Within the pre-defined non-absorption regions on both sides of the target absorption peak, the intensity envelope of the reflected light signal is fitted to obtain the non-absorption intensity baseline. Based on the baseline of no absorption intensity, the absorbance of each sampling point is calculated point by point according to the wavelength value, and the absorbance of each absorbance constitutes the experimental absorption spectrum. Based on the environmental signal of the reaction chamber, the experimental absorption spectrum and the target absorption spectrum are fitted to obtain the concentration information of the gas to be tested; wherein, the target absorption spectrum is obtained by querying the gas to be tested from a preset database.

2. The method according to claim 1, characterized in that, The step of fitting the experimental absorption spectrum and the target absorption spectrum based on the environmental signal of the reaction chamber to obtain the concentration information of the gas to be measured includes: The target absorption spectrum is corrected based on the reaction chamber environment signal; The experimental absorption spectrum and the corrected target absorption spectrum are fitted using least squares, and the concentration information of the gas to be measured is obtained by minimizing the sum of squared residuals.

3. The method according to claim 2, characterized in that, The reaction chamber environment signal includes temperature signal and pressure signal; the spectral parameters corresponding to the target absorption spectral line include line intensity, self-broadening coefficient and air broadening coefficient. The line intensity has a temperature dependence, the self-broadening coefficient has a first pressure dependence, and the air broadening coefficient should have a second pressure dependence. The step of correcting the target absorption spectrum based on the reaction chamber environment signal includes: The value of the line strength is corrected based on the temperature signal and the temperature dependence. The self-widening coefficient is corrected based on the pressure signal and the first pressure dependence. The air width expansion coefficient is corrected based on the pressure signal and the second pressure dependence. Based on the corrected line intensity, the corrected self-broadening factor, and the corrected air broadening factor, the target absorption line shape under the current operating conditions is generated and matched with the sampling resolution of the laser signal and the instrument line shape to obtain the corrected target absorption spectrum.

4. The method according to claim 1, characterized in that, The preset database stores multiple pre-constructed sets of optimal spectral lines, and the methods for constructing each set of optimal spectral lines include: Acquire input data; wherein, the input data includes target gas, background gas, process temperature range, and process pressure range; Within a preset spectral window, within the process temperature range and the process pressure range, a candidate spectral line set is constructed based on an initial calculation model of the target gas and the background gas. Calculate the evaluation index for each candidate absorption line in the candidate spectral line set; wherein the evaluation index includes effective line intensity and spectral isolation. Under the constraints of preset rules, the candidate spectral lines are screened based on the evaluation indicators; wherein, the preset rules include: effective line intensity is not lower than a first threshold and spectral isolation is not lower than a second threshold; The selected candidate absorption lines are sorted, and the top few candidate absorption lines ranked in the first preset position are selected as the optimal spectral set for each process stage.

5. The method according to claim 4, characterized in that, The target absorption spectrum is obtained from a preset database based on the gas to be tested, including: If no absorption line is found, the characteristic decomposition product that has a mapping relationship with the gas to be tested is called, and the characteristic decomposition product is queried in the preset database. The absorption line obtained from the query is used as the target absorption line. If multiple absorption lines are found, they are sorted according to a preset optimization rule, and the absorption line with the highest ranking is selected as the target absorption line.

6. The method according to claim 1, characterized in that, The method further includes: The trend index of the concentration of the gas to be measured is calculated within a preset time window. If the trend index exceeds a preset threshold and the duration exceeds a preset duration, the abnormal state is fed back to the host and an alarm signal is generated.

7. A system for detecting gas concentration in an epitaxial growth reaction chamber, characterized in that, The system includes: The acquisition module is used to acquire reflected light signals, reference signals, and reaction chamber environmental signals; wherein the reflected light signals are measured when the laser signal passes through the reaction chamber, the reference signals are measured when the laser signal passes through the reference gas chamber, and the reaction chamber and the reference gas chamber contain the same type of gas to be measured; The first processing module is used to perform wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and to generate experimental absorption spectral lines based on the calibrated reflected light signal, including: Based on the absolute center wavelength of the absorption peak of the reference gas cell in the reference signal, a mapping relationship between the scanning time and wavelength of the laser signal is established, and based on the mapping relationship, a corresponding wavelength value is configured for each data point in the reflected light signal. Within the pre-defined non-absorption regions on both sides of the target absorption peak, the intensity envelope of the reflected light signal is fitted to obtain the non-absorption intensity baseline. Based on the baseline of no absorption intensity, the absorbance of each sampling point is calculated point by point according to the wavelength value, and the absorbance of each absorbance constitutes the experimental absorption spectrum. The second processing module is used to fit the experimental absorption spectrum and the target absorption spectrum based on the environmental signal of the reaction chamber, and invert the concentration information of the gas to be tested; wherein the target absorption spectrum is obtained by querying the gas to be tested from a preset database.

8. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method according to any one of claims 1-6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 1-6.

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