Method and system for detecting gas concentration in epitaxial growth reaction cavity, computer device and storage medium

By calibrating the wavelength and intensity of the reflected light signal and fitting it with the environmental signal, the problem of inaccurate gas concentration detection in traditional detection methods is solved, and high-precision and stable detection of gas concentration in the epitaxial growth reaction chamber is achieved.

CN121049206BActive Publication Date: 2026-01-27SHANGHAI CHEYITIAN TECH CO LTD
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Patent Information

Application Number
CN202511596156.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-11-04
Publication Date
2026-01-27
Estimated Expiration
2045-11-04

AI Technical Summary

Technical Problem

In traditional online monitoring epitaxial growth processes, it is impossible to detect the gas concentration in the reaction chamber in real time and accurately, which leads to drift in growth conditions, affecting the epitaxial film thickness, component ratio and defect density, and seriously affecting device performance and product yield.

Method used

By acquiring reflected light signals, reference signals, and reaction chamber environment signals, wavelength calibration and intensity baseline calibration are performed to generate experimental absorption spectra. These spectra are then fitted with target absorption spectra from a pre-set database to retrieve the concentration information of the gas to be measured.

Benefits of technology

It improves the quantitative accuracy and stability of gas concentration detection, reduces systematic errors, and achieves high-precision, long-term stable online detection.

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Abstract

The application provides a method and system for detecting gas concentration in an epitaxial growth reaction cavity, a computer device and a storage medium. The application acquires a reflected light signal, a reference signal and a reaction cavity environment signal. The reflected light signal is wavelength calibrated and intensity baseline calibrated according to the reference signal, and an experimental absorption spectrum is generated according to the calibrated reflected light signal. The experimental absorption spectrum and a target absorption spectrum obtained by querying a preset database are fitted according to the reaction cavity environment signal, and the concentration information of the gas to be measured is obtained by inversion. The double calibration of the reference channel strictly aligns the experimental spectrum and the database target spectrum in the frequency scale and the amplitude scale, reduces the interference of line displacement and baseline fluctuation on fitting, improves the quantitative accuracy, introduces the environmental conditions as physical constraints, weakens the parameter coupling, improves the distinguishability and robustness of inversion, reduces the dependence on pure empirical correction, and improves the stability of the detection data.
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