System and method for analyzing impurities in high-purity disilane

By employing a five-valve, five-column, dual-detector configuration, the problems of long detection time and difficult separation of impurities in high-purity silane gas are solved, achieving efficient and accurate impurity analysis, avoiding interference from the main component, and improving analysis efficiency.

CN121499702APending Publication Date: 2026-02-10SUZHOU JINHONG GAS CO LTD
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Patent Information

Application Number
CN202512056189.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-31
Publication Date
2026-02-10

AI Technical Summary

Technical Problem

Existing technologies for detecting impurities in high-purity silane gas suffer from problems such as long detection times, complex types of impurities that are difficult to separate, and, in particular, peaks of the main component that emerge affect the separation effect, resulting in low analytical efficiency.

Method used

The system employs a five-valve, five-column, dual-detector configuration. By controlling the working state and switching time of the multi-port valve, the sample gas can be separated and distributed in different chromatographic columns. Different detectors are used for impurity analysis to avoid interference from the main component.

Benefits of technology

Simultaneous analysis of impurities in high-purity silane is achieved, improving analytical efficiency and accuracy, reducing interference from the main component on the analytical results, and enabling the results of all impurity components to be obtained in a single analysis.

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Abstract

The invention discloses an analysis system and an analysis method for impurities in high-purity disilane. The analysis system comprises a first ten-way valve, a first quantitative tube, a first chromatographic column, a first six-way valve, a second quantitative tube, a second chromatographic column, a second six-way valve, a first PDD detector, a third chromatographic column, a second twenty-way valve, a third quantitative tube, a fourth chromatographic column, a third six-way valve, a fifth chromatographic column and a second PDD detector. According to the analysis system and the analysis method for the impurities in the high-purity disilane, a five-valve five-column double-detector configuration mode is adopted, different impurities are distributed on different detectors, the working state of a multi-way valve is controlled, and the valve switching time is regulated and controlled, so that sample introduction of the same gas path and separation and analysis of multiple gas paths are realized, and the detection accuracy is improved. Therefore, analysis results of all impurities in the sample gas can be obtained in one analysis process, main components or silane impurities can be reversely blown out, interference of a main peak background is removed, and the efficiency and accuracy of the analysis process are improved.
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