Method and apparatus for measuring lateral spatial resolution of confocal raman microscopy

By using a single-layer graphene sample on a confocal Raman microscope, Raman spectral signals were acquired and characteristic distribution curves were fitted, solving the problem of low accuracy in lateral spatial resolution measurement in existing technologies and achieving higher precision resolution measurement.

CN121656223BActive Publication Date: 2026-06-26INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202511908978.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-12-17
Publication Date
2026-06-26
Estimated Expiration
2045-12-17

AI Technical Summary

Technical Problem

In the existing technology, the method for determining the lateral spatial resolution of confocal Raman microscopy is affected by the edge tilt angle and thickness of the metal or semiconductor blade, resulting in low measurement accuracy and serious problems of abnormal signal enhancement or distortion.

Method used

A single-layer graphene sample was prepared on a silicon oxide substrate. A confocal Raman microscope was used to scan the straight edge region and collect Raman spectral signals. The lateral spatial resolution was determined by fitting the characteristic distribution curves of the D mode and G mode, thus avoiding the electromagnetic field enhancement and scattered light interference effects at the edge.

Benefits of technology

It improves the accuracy of lateral spatial resolution measurement in confocal Raman microscopy, effectively avoids abnormal signal enhancement or distortion, and enhances the precision and reliability of measurement.

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Abstract

The application provides a method and device for measuring lateral spatial resolution of a confocal Raman microscope, and relates to the field of optical measurement and microscopic spectroscopy technology. The method comprises the following steps: positioning a region of a straight edge on a single-layer graphene sample by using a confocal Raman microscope, wherein the single-layer graphene sample is prepared on a silicon oxide substrate; determining a straight scanning path and a scanning step in a direction perpendicular to the straight edge from a bare region of the substrate to a sample region in the region of the straight edge which has been positioned by using the confocal Raman microscope; determining a plurality of scanning points on the straight scanning path based on the scanning step in the process of moving the single-layer graphene sample, and collecting Raman spectrum signals of the scanning points; and measuring the lateral spatial resolution of the confocal Raman microscope based on the Raman spectrum of each scanning point. By using the method provided in the application, the accuracy of the lateral spatial resolution of the confocal Raman microscope can be improved.
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