A semiconductor temperature control device double-channel circulating pump and control method

Abstract

The application relates to the technical field of conveying pump structures, in particular to a semiconductor temperature control equipment double-channel circulating pump and a control method, which comprises a pump body, a channel arranged in the pump body and a pushing unit arranged in the channel and used for pushing fluid flow in the channel, the pushing unit is horizontally arranged in the channel; the pushing unit comprises a hollow shaft rotatably arranged on the inner wall of the channel; the direction of the fan blade can be adjusted by an adjusting unit, the fan blade can be tilted in different directions according to needs, so that the forward or reverse conveying of the fluid is realized, the design overcomes the limitation of the one-way conveying of the traditional circulating pump, and greatly expands the application scene and flexibility of the equipment; the hollow shaft drives the rotating table and the fan blade to synchronously rotate, and the flow direction of the fluid is accurately controlled through the adjusting unit, so that the efficiency of the fluid conveying is improved, and the adaptability of the system to different working conditions is enhanced, especially in the refrigeration or heating equipment which needs to frequently change the flow direction of the fluid.

Description

Technical Field

[0001] This invention relates to the technical field of delivery pump structures, and in particular to a dual-channel circulating pump for semiconductor temperature control equipment and its control method. Background Technology

[0002] Semiconductor temperature control equipment typically requires the use of circulating pumps to deliver both high-temperature and low-temperature media for temperature control. Because it simultaneously delivers two media with significant temperature differences, two independent circulating pumps are necessary to achieve synchronous delivery. However, semiconductor temperature control equipment is located in a cleanroom with limited floor space. Using two circulating pumps results in significant space consumption, high energy consumption, and high operating costs, leading to resource waste.

[0003] Meanwhile, typical circulating pumps use a motor to power an impeller, which in turn drives the medium through centrifugal motion, pressurizing and transporting the medium from the pump chamber inlet to the outlet to achieve fluid transport. In semiconductor temperature control equipment, this type of circulating pump is limited to unidirectional flow, making installation difficult. Furthermore, its functionality is also poor when transporting both high-temperature and low-temperature media that require rapid response and flow direction changes. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention provides a dual-channel circulating pump and control method for a semiconductor temperature control device, the specific technical solution of which is as follows:

[0005] A dual-channel circulating pump for semiconductor temperature control equipment includes a pump body, a channel formed in the pump body, and a driving unit disposed in the channel for driving fluid flow in the channel, wherein the driving unit is horizontally located in the channel;

[0006] The pushing unit includes a hollow shaft rotatably mounted on the inner wall of the channel. The axis of the hollow shaft is aligned with the direction of fluid flow in the channel. Multiple turntables are rotatably mounted on the outer wall of the hollow shaft. The multiple turntables are arranged around the circumference of the hollow shaft. Each turntable is equipped with a fan blade for providing propulsion to the fluid.

[0007] The hollow shaft contains an adjustment unit for adjusting the rotation of each turntable. When the fan blades are tilted toward one end of the hollow shaft, the rotating hollow shaft and fan blades provide a forward flow thrust to the fluid. When the fan blades are tilted toward the other end of the hollow shaft, the rotating hollow shaft and fan blades provide a reverse flow thrust to the fluid.

[0008] In an optimized version of the above implementation, a sealing platform is filled between two adjacent turntables. The sealing platform is fixed on the outer wall of the hollow shaft. Two planes are provided on the sealing platform. One plane is perpendicular to the axis of one of the two adjacent turntables, and the other plane is perpendicular to the axis of the other of the two adjacent turntables.

[0009] The end face of the fan blade facing the axis of the hollow shaft is set as a smooth surface, and the smooth surface slides in contact with the plane on the sealing platform. When the surface where the fan blade is located is perpendicular to the axis of the hollow shaft, multiple fan blades and multiple sealing platforms form a cover and block the channel.

[0010] In an improved version of the above implementation, both end faces of the sealing platform along the axial direction of the hollow shaft are designed as arc surfaces.

[0011] In the optimized implementation described above, both the number of channels and the number of driving units are set to two. Both channels are opened in the pump body, and the two channels are oriented in opposite directions. The fluid flows in opposite directions in the two channels, and the two driving units are respectively arranged in the two channels.

[0012] In an optimized version of the above implementation, a cavity is provided inside the pump body, and the end face of the turntable facing the axis of the hollow shaft extends into the interior of the hollow shaft.

[0013] The adjustment unit includes a movable shaft inserted into a hollow shaft. One end of the movable shaft passes through a channel and extends into the cavity. The other end of the movable shaft is rotatably provided with multiple first connecting shafts. The multiple first connecting shafts are distributed around the circumference of the movable shaft. The rotation axis of the first connecting shaft is along the radial direction of the movable shaft. A connecting rod is fixed on the first connecting shaft. The connecting rod is connected to the turntable through a second connecting shaft. The second connecting shaft is eccentrically located on the turntable. When the movable shaft moves, the movable shaft pulls the turntable to rotate through the second connecting shaft.

[0014] The two moving shafts are docked inside the cavity.

[0015] In an optimized implementation, the axis of the turntable is offset from the axis of the first connecting shaft.

[0016] In an optimized version of the above implementation, the two movable shafts within the cavity are connected by a connecting disc. The radius of the connecting disc is smaller than the radius of the movable shafts, so the end faces of the two movable shafts and the connecting disc between them together form a circular groove.

[0017] A dial is provided inside the cavity. The dial is inserted into a circular groove. A polygonal shaft slides through the middle of the dial. Both ends of the polygonal shaft are rotatably mounted on the inner wall of the cavity. The dial and the polygonal shaft are connected by a spring.

[0018] The cavity is equipped with a toggle unit, which is used to drive the dial to move. The hollow shaft consists of a movable sleeve shaft in the middle and two rotating sleeve shafts at both ends of the movable sleeve shaft. The rotating sleeve shafts are slidably inserted into the movable sleeve shaft. The movable sleeve shaft and the rotating sleeve shaft are elastically connected by a leaf spring. The turntable and the sealing platform are both located on the movable sleeve shaft.

[0019] In an optimized version of the above implementation, the actuating unit includes a crossbar installed inside the motor, a sliding sleeve slidably mounted on the crossbar, and two pins for moving the dial are provided on the surface of the sliding sleeve facing the dial. The sliding sleeve is connected to the inner wall of the motor via a cylinder.

[0020] In an optimized version of the above implementation, a worm gear is provided on the outer wall of the moving shaft, a worm is rotatably provided inside the motor to mesh with the worm gear, and a motor for providing power to the worm is provided on the pump body.

[0021] A control method for a dual-channel circulating pump in a semiconductor temperature control device includes the following steps:

[0022] S1. Connect both ends of the channel on the circulating pump to the pipeline;

[0023] S2. The fluid in the pipeline flows naturally into the channel. Start the motor. The motor drives the moving shaft to rotate through the worm gear, so that the hollow shaft and fan blades are in a rotating state.

[0024] S3. The dial is moved by the actuating unit, and the dial will push the adjustment unit to move through the circular groove between the two moving shafts, thereby tilting the fan blades.

[0025] S4. The fan blades rotate and provide propulsion for the fluid;

[0026] S5. When it is necessary to adjust the fluid flow direction, the position of the dial can be adjusted by the toggle unit, so that the adjustment unit can adjust the tilt direction of the fan blades.

[0027] The advantages of this invention are:

[0028] By adjusting the direction of the fan blades through the adjustment unit, the fan blades can be tilted in different directions as needed, thereby realizing the forward or reverse delivery of fluid. This design overcomes the limitation of the traditional circulating pump's unidirectional delivery and greatly expands the application scenarios and flexibility of the equipment.

[0029] The hollow shaft drives the turntable and fan blades to rotate synchronously, and the flow direction of the fluid is precisely controlled by the adjustment unit. This not only improves the efficiency of fluid transportation, but also enhances the system's adaptability to different working conditions, especially in refrigeration and heating equipment that requires frequent changes in fluid flow direction.

[0030] The bidirectional fluid transport capability enables refrigeration and instant heating equipment to control temperature more efficiently and respond quickly to different refrigeration or heating needs. This is especially important for fields such as medical, food processing, and scientific research, and can significantly improve production efficiency and product quality.

[0031] In summary, this invention effectively solves the limitations of traditional circulating pump applications by providing a circulating pump with bidirectional fluid transport function, improves the overall performance and applicability of refrigeration and instant heating equipment, and has a simple structure, convenient operation, and strong functionality and applicability. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of the present invention;

[0034] Figure 2 yes Figure 1 A schematic diagram of the structure viewed from below;

[0035] Figure 3 yes Figure 1 A schematic diagram of the internal structure of the pump body;

[0036] Figure 4 yes Figure 3 Schematic diagram of the enlarged structure of the central driving unit;

[0037] Figure 5 yes Figure 4 Enlarged schematic diagram of the internal structure of the hollow mandrel;

[0038] Figure 6 yes Figure 3 Enlarged schematic diagram of the internal structure of the hollow cavity;

[0039] Marked in the attached diagram:

[0040] 1. Pump body; 2. Channel; 3. Drive unit; 4. Hollow shaft; 5. Turntable; 6. Fan blade; 7. Sealing platform; 8. Moving shaft; 9. First connecting shaft; 10. Connecting rod; 11. Second connecting shaft; 12. Connecting plate; 13. Dial plate; 14. Polygonal shaft; 15. Spring; 16. Crossbar; 17. Sliding sleeve; 18. Dial pin; 19. Cylinder; 20. Worm gear; 21. Motor; 22. Cavity; 23. Moving sleeve shaft; 24. Rotating sleeve shaft. Detailed Implementation

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0042] In the description of this invention, it should be noted that the orientations or positional relationships indicated by terms such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inner", and "outer" are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0043] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. This embodiment is written in a progressive manner.

[0044] like Figures 1 to 4 As shown, a dual-channel circulating pump for semiconductor temperature control equipment according to the present invention includes a pump body 1, a channel 2 opened in the pump body 1, and a driving unit 3 disposed in the channel 2 and used to drive the fluid flow in the channel 2. The driving unit 3 is horizontally located in the channel 2.

[0045] The pushing unit 3 includes a hollow shaft 4 rotatably mounted on the inner wall of the channel 2. The axial direction of the hollow shaft 4 is consistent with the fluid flow direction in the channel 2. Multiple turntables 5 are rotatably mounted on the outer wall of the hollow shaft 4. The multiple turntables 5 are arranged around the circumference of the hollow shaft 4. Each turntable 5 is equipped with a fan blade 6 for providing driving force to the fluid.

[0046] The hollow shaft 4 is equipped with an adjustment unit for adjusting the rotation of each turntable 5. When the fan blade 6 is tilted toward one end of the hollow shaft 4, the rotating hollow shaft 4 and the fan blade 6 provide a forward flow thrust to the fluid. When the fan blade 6 is tilted toward the other end of the hollow shaft 4, the rotating hollow shaft 4 and the fan blade 6 provide a reverse flow thrust to the fluid.

[0047] In detail, channel 2 is Z-shaped, with a horizontal middle section. Both ends of channel 2 extend to the upper and lower sides of pump body 1, respectively, and are connected to the piping of the refrigeration / heating equipment. The driving unit 3 is horizontally located within the middle horizontal area of ​​channel 2 and provides a driving force to the fluid within channel 2, causing the fluid to flow within the refrigeration unit. The hollow shaft 4 provides support for the turntable 5 and fan blades 6. When the hollow shaft 4 rotates, it drives the turntable 5 and fan blades 6 to rotate. The tilted fan blades 6 provide a driving force to the fluid within channel 2. When the fluid needs to flow forward in channel 2, the adjusting unit drives multiple turntables 5 to rotate synchronously in the forward direction. The turntables 5 drive the fan blades 6 to rotate, and the fan blades 6 are tilted towards one end of the hollow shaft 4. At this time, the hollow shaft 4 rotates, and the fan blades 6 provide the thrust for the fluid in channel 2 to flow forward. When the fluid needs to flow in the reverse direction, the adjusting unit drives multiple turntables 5 to rotate synchronously in the reverse direction. The turntables 5 drive the fan blades 6 to tilt towards the other end of the hollow shaft 4. At this time, the hollow shaft 4 rotates, and the fan blades 6 provide the thrust for the fluid in channel 2 to flow in the reverse direction, thereby realizing the bidirectional transport of the fluid.

[0048] By adjusting the direction of the fan blades 6 through the adjustment unit, the fan blades 6 can be tilted in different directions as needed, thereby realizing the forward or reverse delivery of fluid. This design overcomes the limitations of the unidirectional delivery of traditional circulating pumps, greatly expanding the application scenarios and flexibility of the equipment. The hollow shaft 4 drives the turntable 5 and the fan blades 6 to rotate synchronously, and the flow direction of the fluid is precisely controlled by the adjustment unit. This not only improves the efficiency of fluid delivery but also enhances the system's adaptability to different working conditions, especially in refrigeration and instant heating equipment that requires frequent changes in fluid flow direction. The bidirectional fluid delivery capability enables the refrigeration and instant heating equipment to control temperature more efficiently and respond quickly to different refrigeration or heating needs. This is particularly important for fields such as medical treatment, food processing, and scientific research, and can significantly improve production efficiency and product quality. In summary, this invention provides a circulating pump with bidirectional fluid delivery function, effectively solving the limitations of traditional circulating pump applications, improving the overall performance and applicability of refrigeration and instant heating equipment, while also being simple in structure, easy to operate, and highly functional and applicable.

[0049] like Figure 4 As shown, a sealing platform 7 is filled between two adjacent turntables 5. The sealing platform 7 is fixed on the outer wall of the hollow shaft 4. The sealing platform 7 is provided with two planes, one of which is perpendicular to the axis of one of the two adjacent turntables 5, and the other plane is perpendicular to the axis of the other of the two adjacent turntables 5.

[0050] The end face of the fan blade 6 facing the axis of the hollow shaft 4 is set as a smooth surface, and the smooth surface slides in contact with the plane on the sealing platform 7. When the surface where the fan blade 6 is located is perpendicular to the axis of the hollow shaft 4, multiple fan blades 6 and multiple sealing platforms 7 form a cover and block the channel 2.

[0051] In detail, since each fan blade 6 can only rotate on its corresponding turntable 5, and the hollow shaft 4 is cylindrical, there will be a gap between the fan blade 6 and the hollow shaft 4 in order for the fan blade 6 to rotate smoothly. The fan blade 6 cannot exert force on the fluid in the gap, which causes the fluid to flow through the gap to the left and right sides of the fan blade 6, affecting the force exerted by the fan blade 6 on the fluid. At this time, by setting the sealing platform 7, the gap can be sealed, so that the fan blade 6 can directly contact the fluid in the channel 2 and exert a direct force, thereby improving the force transmission effect between the fan blade 6 and the fluid.

[0052] The two planes on the sealing platform 7 are mainly for contacting the end faces of the two adjacent fan blades 6. This allows the gap between the two adjacent turntables 5 to be sealed while ensuring that the fan blades 6 can rotate normally.

[0053] When the plane of the fan blade 6 is perpendicular to the axis of the hollow shaft 4, multiple fan blades 6 and multiple sealing platforms 7 are coplanar. At this time, multiple fan blades 6 and multiple sealing platforms 7 form a cover and block the inside of the channel 2, thereby preventing fluid flow. This function can further improve the functionality of the circulating pump.

[0054] like Figure 4 As shown, both end faces of the sealing platform 7 along the axial direction of the hollow shaft 4 are designed as arc surfaces.

[0055] In detail, by setting both ends of the sealing platform 7 along the axial direction of the hollow shaft 4 as arc surfaces, the fluid can flow smoothly along the arc surface, reducing the resistance of the sealing platform 7 to the fluid and increasing the fluid flow rate.

[0056] like Figure 3 As shown, the number of channels 2 and the number of driving units 3 are both set to two. Both channels 2 are opened inside the pump body 1, and the directions of the two channels 2 are opposite. The flow directions of the fluid in the two channels 2 are opposite, and the two driving units 3 are respectively arranged in the two channels 2.

[0057] In detail, the two driving units 3 rotate synchronously in the same direction. When one driving unit 3 transports the fluid in the corresponding channel 2 from top to bottom, the other driving unit 3 transports the fluid in the corresponding channel 2 from bottom to top, thereby improving the fluid transport efficiency in the refrigeration and heating equipment and enhancing the effect of the circulating pump on the fluid.

[0058] In practical use, the two channels 2 and the two push units 3 can simultaneously provide force to two locations in the pipeline of the refrigeration and heating equipment. Compared with the traditional method of providing a single force to the pipeline, the structure of this case can greatly increase the flow rate of the fluid in the pipeline, avoid the problem of high pressure required for fluid flow due to long-distance pipeline transportation, and facilitate the smooth and rapid flow of fluid in the pipeline.

[0059] like Figure 5 As shown, a cavity 22 is provided inside the pump body 1, and the end face of the turntable 5 facing the axis of the hollow shaft 4 extends into the interior of the hollow shaft 4.

[0060] The adjustment unit includes a movable shaft 8 inserted in a hollow shaft 4. One end of the movable shaft 8 passes through the channel 2 and extends into the cavity 22. The other end of the movable shaft 8 is rotatably provided with a plurality of first connecting shafts 9. The plurality of first connecting shafts 9 are distributed around the circumference of the movable shaft 8. The rotation axis of the first connecting shaft 9 is along the radial direction of the movable shaft 8. A connecting rod 10 is fixed on the first connecting shaft 9. The connecting rod 10 is connected to the turntable 5 through a second connecting shaft 11. The second connecting shaft 11 is eccentrically located on the turntable 5. When the movable shaft 8 moves, the movable shaft 8 pulls the turntable 5 to rotate through the second connecting shaft 11.

[0061] The two moving shafts 8 are docked inside the cavity 22.

[0062] In detail, since the two moving shafts 8 are connected in the cavity 22, the two moving shafts 8 can rotate synchronously in the same direction, thus providing adjustment force for the multiple fan blades 6 on the two hollow shafts 4 at the same time. When the two moving shafts 8 move laterally, the moving shafts 8 will drive the turntable 5 to rotate through the first connecting shaft 9, the connecting rod 10 and the second connecting shaft 11 eccentrically installed on the end face of the turntable 5, thereby facilitating the adjustment of the angle of the turntable 5 and the fan blades 6, and the multiple fan blades 6 can achieve synchronous adjustment function.

[0063] When the two movable shafts 8 rotate around their axes, the movable shafts 8 can pull the turntable 5 to perform circular motion through the first connecting shaft 9, the connecting rod 10 and the second connecting shaft 11. The turntable 5 drives the hollow shaft 4 to perform circular motion, thereby causing the multiple fan blades 6 to generate thrust on the fluid.

[0064] like Figure 5 As shown, the axis of the turntable 5 is offset from the axis of the first connecting shaft 9.

[0065] In detail, when the axis of the turntable 5 coincides with the axis of the first connecting shaft 9, the fan blade 6 and the turntable 5 can rotate freely on the hollow shaft 4. At this time, the plane where the fan blade 6 is located is perpendicular to the axis of the hollow shaft 4. The fan blade 6 cannot block the channel 2, and the adjustment unit cannot effectively restrict the fan blade 6. Therefore, it is necessary to make the axis of the turntable 5 deviate from the axis of the first connecting shaft 9. This facilitates the real-time restriction of the rotation angle of the turntable 5 through the first connecting shaft 9. The rotation of the turntable 5 can only be adjusted by the moving shaft 8.

[0066] By offsetting the axis of turntable 5 from the axis of the first connecting shaft 9, the position of turntable 5 can be locked by utilizing the non-collinearity and non-parallelism between the two axes. That is, when the moving shaft 8 is stationary, turntable 5 cannot move. Its structure is simple and its functionality is strong.

[0067] like Figure 6 As shown, the two movable shafts 8 inside the cavity 22 are connected by a connecting plate 12. The radius of the connecting plate 12 is smaller than the radius of the movable shaft 8. Therefore, the end faces of the two movable shafts 8 and the connecting plate 12 between them together form a circular groove.

[0068] A dial 13 is provided inside the cavity 22. The dial 13 is inserted into a circular groove. A polygonal shaft 14 is slidably inserted through the middle of the dial 13. Both ends of the polygonal shaft 14 are rotatably mounted on the inner wall of the cavity 22. The dial 13 and the polygonal shaft 14 are connected by a spring 15.

[0069] The cavity 22 is equipped with a toggle unit, which is used to push the dial 13 to move. The hollow shaft 4 consists of a movable sleeve shaft 23 located in the middle and two rotating sleeve shafts 24 located at both ends of the movable sleeve shaft 23. The rotating sleeve shafts 24 are slidably inserted into the movable sleeve shaft 23. The movable sleeve shaft 23 and the rotating sleeve shafts 24 are elastically connected by a leaf spring. The turntable 5 and the sealing platform 7 are both located on the movable sleeve shaft 23.

[0070] In detail, in its natural state, the spring 15 pushes the dial 13 to the middle position of the polygonal shaft 14. At this time, the plane where the fan blade 6 is located is perpendicular to the axis of the hollow shaft 4, that is, the fan blade 6 blocks the channel 2. When it is necessary to provide power to the fluid, the actuating unit pushes the dial 13 to move. The dial 13 will push the two moving shafts 8 to move through the circular groove. The moving shafts 8 drive the fan blade 6 to tilt. At this time, rotating the moving shafts 8 can achieve the pushing effect on the fluid.

[0071] When the movable shaft 8 and the hollow shaft 4 rotate, the actuating unit separates from the dial 13. Since the fan blade 6 exerts a thrust on the fluid, the fluid generates a reaction force on the fan blade 6. When the fluid passes through the fan blade 6 and its velocity difference is large, the reaction force on the fan blade 6 is large. Because the hollow shaft 4 is composed of a movable sleeve shaft 23 and two rotating sleeve shafts 24, and the movable sleeve shaft 23 and rotating sleeve shafts 24 are connected by leaf springs, the movable sleeve shaft 23 and rotating sleeve shafts 24 rotate synchronously. The movable sleeve shaft 23 can slide on the rotating sleeve shaft 24. The leaf springs are hidden between the movable sleeve shaft 23 and the rotating sleeve shafts 24. Inside shaft 24, when the reaction force on fan blade 6 is large, the movable sleeve shaft 23 slides on the rotating sleeve shaft 24, that is, the turntable 5 moves relative to the movable shaft 8. At this time, the rotation angle of the turntable 5 increases, the tilt angle of fan blade 6 increases, that is, the effect of fan blade 6 on the fluid is enhanced, thereby increasing the driving force of fan blade 6 on the fluid and accelerating the fluid flow rate. When the reaction force on fan blade 6 is small, the movable sleeve shaft 23 moves towards its initial position. At this time, the tilt angle of fan blade 6 decreases. Thus, the automatic adjustment of the tilt angle of fan blade 6 is achieved by the difference in fluid flow rate through fan blade 6.

[0072] Since the position of the movable sleeve shaft 23 is affected by the fluid flow rate and the spring 15 simultaneously, when the fluid flow rate is stable, the position of the movable sleeve shaft 23 is controlled by the elastic force of the spring 15 and the fluid flow rate at the same time. The leaf springs on the movable sleeve shaft 23 and the rotating sleeve shaft 24 provide the reset elastic force for the movable sleeve shaft 23.

[0073] like Figure 6 As shown, the actuation unit includes a crossbar 16 installed inside the motor 21. A sliding sleeve 17 is slidably disposed on the crossbar 16. Two pins 18 for moving the dial 13 are disposed on the surface of the sliding sleeve 17 facing the dial 13. The sliding sleeve 17 is connected to the inner wall of the motor 21 by a cylinder 19.

[0074] In detail, when the cylinder 19 extends or retracts, the cylinder 19 can drive the sliding sleeve 17 to slide on the crossbar 16, thereby driving the two shift pins 18 to move. When it is necessary to push the moving shaft 8 to the left, the right shift pin 18 contacts the dial 13. When it is necessary to push the moving shaft 8 to the right, the left shift pin 18 contacts the dial 13.

[0075] Since the fan blade 6 does not need to provide force to the dial 13 when it propels the fluid, there needs to be enough space between the two dial posts 18.

[0076] like Figure 1 and Figure 6 As shown, the outer wall of the moving shaft 8 is provided with worm gears, the motor 21 is rotatably provided with a worm 20 that meshes with the worm gears, and the pump body 1 is provided with a motor 21 for providing power to the worm 20.

[0077] In detail, the motor 21 can drive the moving shaft 8 to rotate through the worm gear 20, thereby providing power for the rotation of the moving shaft 8 and the fan blade 6. When one moving shaft 8 is separated from the worm gear 20, the worm gear on the other moving shaft 8 meshes with the worm gear 20, thereby ensuring the continuity of transmission.

[0078] A control method for a dual-channel circulating pump in a semiconductor temperature control device includes the following steps:

[0079] S1. Connect both ends of channel 2 on the circulating pump to the pipeline;

[0080] S2. The fluid in the pipeline flows naturally into the channel 2. Start the motor 21. The motor 21 drives the moving shaft 8 to rotate through the worm gear 20, so that the hollow shaft 4 and the fan blade 6 are in a rotating state.

[0081] S3. The dial 13 is moved by the toggle unit, and the dial 13 will push the adjustment unit to move through the circular groove between the two moving shafts 8, thereby tilting the fan blade 6.

[0082] S4, fan blade 6 rotates and provides propulsion to the fluid;

[0083] S5. When it is necessary to adjust the fluid flow direction, the position of the dial 13 can be adjusted by the toggle unit, so that the adjustment unit can adjust the tilt direction of the fan blade 6.

[0084] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A dual-channel circulating pump for a semiconductor temperature control device, characterized in that, It includes a pump body (1), a channel (2) opened in the pump body (1), and a driving unit (3) disposed in the channel (2) for driving the fluid flow in the channel (2), wherein the driving unit (3) is horizontally located in the channel (2); The pushing unit (3) includes a hollow shaft (4) rotatably mounted on the inner wall of the channel (2). The axial direction of the hollow shaft (4) is consistent with the fluid flow direction in the channel (2). Multiple turntables (5) are rotatably mounted on the outer wall of the hollow shaft (4). The multiple turntables (5) are arranged around the circumference of the hollow shaft (4). Each turntable (5) is provided with a fan blade (6) for providing driving force to the fluid. The hollow shaft (4) is provided with an adjustment unit for adjusting the rotation of each turntable (5). When the fan blade (6) is tilted toward one end of the hollow shaft (4), the rotating hollow shaft (4) and the fan blade (6) provide a forward flow thrust to the fluid. When the fan blade (6) is tilted toward the other end of the hollow shaft (4), the rotating hollow shaft (4) and the fan blade (6) provide a reverse flow thrust to the fluid. A sealing platform (7) is filled between two adjacent turntables (5); The pump body (1) has a cavity (22) inside, and the turntable (5) extends from the end face of the turntable (5) toward the axis of the hollow shaft (4) into the interior of the hollow shaft (4). The adjustment unit includes a movable shaft (8) inserted in a hollow shaft (4). One end of the movable shaft (8) passes through the channel (2) and extends into the cavity (22). The other end of the movable shaft (8) is rotatably provided with a plurality of first connecting shafts (9). The plurality of first connecting shafts (9) are distributed around the circumference of the movable shaft (8). The rotation axis of the first connecting shaft (9) is along the radial direction of the movable shaft (8). A connecting rod (10) is fixed on the first connecting shaft (9). The connecting rod (10) is connected to the turntable (5) through a second connecting shaft (11). The second connecting shaft (11) is eccentrically located on the turntable (5). The two movable shafts (8) inside the cavity (22) are connected by a connecting plate (12). The radius of the connecting plate (12) is smaller than the radius of the movable shaft (8). Therefore, the end faces of the two movable shafts (8) and the connecting plate (12) between them together form a circular groove. A dial (13) is provided inside the cavity (22). The dial (13) is inserted into the circular groove. A polygonal shaft (14) is slidably inserted in the middle of the dial (13). Both ends of the polygonal shaft (14) are rotatably mounted on the inner wall of the cavity (22). The dial (13) and the polygonal shaft (14) are connected by a spring (15). The cavity (22) is equipped with a toggle unit, which is used to push the dial (13) to move. The hollow shaft (4) consists of a movable sleeve shaft (23) located in the middle and two rotating sleeve shafts (24) located at both ends of the movable sleeve shaft (23). The rotating sleeve shafts (24) are slidably inserted into the movable sleeve shaft (23). The movable sleeve shaft (23) and the rotating sleeve shaft (24) are elastically connected by a leaf spring. The turntable (5) and the sealing platform (7) are both located on the movable sleeve shaft (23).

2. The dual-channel circulating pump for a semiconductor temperature control device according to claim 1, characterized in that, The sealing platform (7) is fixed on the outer wall of the hollow shaft (4). The sealing platform (7) has two planes, one of which is perpendicular to the axis of one of the two adjacent turntables (5), and the other plane is perpendicular to the axis of the other turntable (5). The end face of the fan blade (6) facing the axis of the hollow shaft (4) is set as a smooth surface, and the smooth surface slides in contact with the plane on the sealing platform (7). When the surface where the fan blade (6) is located is perpendicular to the axis of the hollow shaft (4), multiple fan blades (6) and multiple sealing platforms (7) form a cover and block the channel (2).

3. The dual-channel circulating pump for a semiconductor temperature control device according to claim 2, characterized in that, The sealing platform (7) has two curved surfaces on both ends along the axis of the hollow shaft (4).

4. The dual-channel circulating pump for a semiconductor temperature control device according to claim 3, characterized in that, The number of channels (2) and the number of push units (3) are both set to two. Both channels (2) are opened in the pump body (1), and the directions of the two channels (2) are opposite. The flow direction of the fluid in the two channels (2) is opposite. The two push units (3) are respectively arranged in the two channels (2).

5. A dual-channel circulating pump for a semiconductor temperature control device according to claim 4, characterized in that, When the moving shaft (8) moves, the moving shaft (8) pulls the turntable (5) to rotate through the second connecting shaft (11); The two moving shafts (8) are docked inside the cavity (22).

6. A dual-channel circulating pump for a semiconductor temperature control device according to claim 5, characterized in that, The axis of the turntable (5) is offset from the axis of the first connecting shaft (9).

7. A dual-channel circulating pump for a semiconductor temperature control device according to claim 6, characterized in that, The actuation unit includes a crossbar (16) installed inside the motor (21), a sliding sleeve (17) is slidably arranged on the crossbar (16), and two pins (18) for moving the dial (13) are arranged on the surface of the sliding sleeve (17) facing the dial (13). The sliding sleeve (17) is connected to the inner wall of the motor (21) by a cylinder (19).

8. A dual-channel circulating pump for a semiconductor temperature control device according to claim 7, characterized in that, The outer wall of the moving shaft (8) is provided with worm gears, and the motor (21) is provided with a worm (20) that meshes with the worm gears. The pump body (1) is provided with a motor (21) for providing power to the worm (20).

9. The control method for a dual-channel circulating pump in a semiconductor temperature control device according to claim 8, characterized in that, Includes the following steps: S1. Connect both ends of the channel (2) on the circulating pump to the pipeline; S2. The fluid in the pipeline flows naturally into the channel (2). Start the motor (21). The motor (21) drives the moving shaft (8) to rotate through the worm (20), so that the hollow shaft (4) and the fan blade (6) are in a rotating state. S3. By pushing the dial (13) to move through the toggle unit, the dial (13) will push the adjustment unit to move through the circular groove between the two moving shafts (8), thereby tilting the fan blade (6); S4, the fan blades (6) rotate and provide propulsion for the fluid; S5. When it is necessary to adjust the fluid flow direction, adjust the position of the dial (13) by using the toggle unit, so that the adjustment unit can adjust the tilt direction of the fan blade (6).

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