An adaptive multi-precision wide-field imaging device, scanning system and method

Abstract

The application provides an adaptive multi-precision wide-field imaging device, a scanning system and a method, wherein the imaging device comprises a diamond containing NV color centers, an objective lens turntable, a plurality of objective lenses with different magnifications, an optical detection module and a microwave radiation device; the microwave radiation device comprises a plurality of microwave antennas and a rotating table, the plurality of microwave antennas are arranged at intervals on the rotating table, the radiation end of each microwave antenna extends out of the rotating table, the rotating table can switchably place the radiation end between the diamond and the objective lens in a working position, and the radiation end is provided with a through hole facing the diamond, the aperture decreases with the increase of the magnification of the objective lens, and the radiation performance of the microwave antenna increases with the decrease of the aperture. While the field of view requirement is considered, the radiation performance of the microwave antenna corresponding to the high-magnification objective lens is effectively improved. A suction tube for adsorbing or releasing the diamond is installed on the objective lens turntable, imaging and diamond suction and release operations are realized, and scanning imaging of a measured object is realized.

Description

Technical Field

[0001] This invention relates to the field of quantum sensing, and in particular to an adaptive multi-precision wide-field imaging device, scanning system, and method. Background Technology

[0002] Quantum wide-field imaging based on diamond NV centers utilizes excitation light to excite the NV centers from the ground state to the excited state, emitting fluorescence. This fluorescence is then manipulated via microwaves, where the microwave frequency is related to |0> When the transition frequency resonates, the fluorescence changes, and the Zeeman splitting effect caused by the magnetic field causes the resonant frequency to shift by a factor related to the magnitude of the magnetic field. By combining this with microscope elements such as objectives and cameras, wide-field imaging over a large range can be achieved.

[0003] Different magnification objectives are required for imaging with varying precision, and the required field of view changes accordingly. To achieve uniform microwave radiation, a microstrip antenna is typically used, with its radiating end positioned above the diamond. An aperture is created at the radiating end facing the diamond, allowing the objective lens to excite the diamond and collect fluorescence. The aperture size directly affects the usable field of view; typically, the largest diameter aperture is chosen to fit different magnification objectives. However, since the diamond is directly below the aperture, increasing the aperture diameter weakens the radiation intensity and its uniformity in the central region. For high-magnification objectives, this results in unnecessary loss of radiation performance when a large field of view is not required, hindering the achievement of superior imaging results. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide an adaptive multi-precision wide-field imaging device, scanning system and method to solve the problem that in the prior art, when implementing quantum wide-field imaging, the use of microstrip antennas with large apertures to adapt to the field of view required by different magnification objectives results in a weakening of the radiation intensity and uniformity at the center of the aperture due to the increased aperture size, which is not conducive to obtaining better imaging results with high magnification objectives.

[0005] To achieve the above and other related objectives, a first aspect of the present invention provides an adaptive multi-precision wide-field imaging device, comprising: a diamond containing NV color centers, an objective lens turret, multiple objectives with different magnifications, an optical detection module, and a microwave radiation device;

[0006] Multiple objectives with different magnifications are mounted on the objective lens turret, which allows you to switch the objective lens of the desired magnification to the working position;

[0007] The diamond is placed on the workpiece under test and positioned below the objective lens in the working position;

[0008] The microwave radiation device includes multiple microwave antennas and a rotating stage. The multiple microwave antennas are arranged at intervals on the rotating stage. Each microwave antenna has a radiating end that radiates microwaves to the diamond. The radiating end extends beyond the rotating stage. Rotating the rotating stage allows the radiating end to be switched between the diamond and the objective lens located in the working position. The radiating end has a through hole facing the diamond. The aperture of the through hole is matched one-to-one with the magnification of the multiple objective lenses. The aperture decreases as the magnification of the objective lens increases, and the radiation performance of the microwave antenna increases as the aperture decreases.

[0009] The optical detection module is used to irradiate the objective lens located in the working position with excitation light. The excitation light is transmitted through the objective lens and then irradiates the diamond located below it to excite fluorescence. It is also used to collect this fluorescence through the objective lens for imaging and output imaging data.

[0010] Furthermore, the microwave antenna is a microstrip antenna, with radiating patches on the bottom surface of the radiating end, distributed circumferentially along the through-hole.

[0011] Furthermore, the microwave radiating device also includes a switching switch that can be switched to multiple microwave antennas for transmitting received microwaves to the connected microwave antennas.

[0012] Furthermore, the feed end of the microwave antenna is located on the rotating platform. The microwave radiating device also includes a spring pin, a feed bracket, and an antenna adapter plate. The antenna adapter plate is mounted on the upper surface of the feed bracket. The first end of the feed bracket is located above the rotating platform, and the second end is fixedly mounted. The upper end of the spring pin is mounted on the first end of the feed bracket, and its top end is connected to the antenna adapter plate. Its bottom end is compressibly abutted against the feed connection point of the microwave antenna located below it. The antenna adapter plate is used to receive microwaves and transmit microwaves to the spring pin.

[0013] Furthermore, the mounting area on the rotating platform for mounting each microwave antenna has a sloping structure with inclined slopes on both sides. The highest side of the slope is adjacent to the mounting area and is flush with the plane where the feed connection point of the microwave antenna is located, while the lowest side is connected to the table surface of the rotating platform.

[0014] Furthermore, the mounting areas on the rotary table for mounting each microwave antenna are arranged at intervals along the circumference of the rotary table, such that the same type of feed connection points of the multiple microwave antennas are on the same circumference.

[0015] Furthermore, it also includes a bias magnetic field module for applying a bias magnetic field to the diamond.

[0016] To achieve the above and other related objectives, a second aspect of the present invention provides an adaptive multi-precision imaging scanning system, comprising: an adaptive multi-precision wide-field imaging device as described in any one of the first aspects, a displacement platform, wherein a pipette is further installed on the objective lens turret, the objective lens turret can switch the objective lens or the pipette to a working position, the pipette is used to introduce negative pressure, and when the pipette is switched to the working position, the lower end opening of the pipette faces the diamond, and the diamond can be adsorbed or released by controlling the negative pressure in the pipette; the upper surface of the displacement platform is used to place the test piece, and the position of the test piece can be adjusted.

[0017] To achieve the above and other related objectives, a third aspect of the present invention provides an imaging scanning method based on diamond NV color centers, implemented using an adaptive multi-precision imaging scanning system as described in the second aspect, the method comprising:

[0018] When it is necessary to change the detection area of ​​the test piece, perform the following steps: Stop the imaging detection operation; switch the pipette to the working position and move the radiating end of the adapted microwave antenna away from the diamond; adjust the height of the displacement platform so that the lower end of the pipette contacts the upper surface of the diamond, and manipulate the negative pressure in the pipette to attract and hold the diamond; after adjusting the displacement platform so that the test piece is at the new predetermined horizontal position, manipulate the negative pressure in the pipette to release the diamond to the upper surface of the test piece, adjust the height of the displacement platform so that the diamond is in the initial position, switch the required objective lens to the working position, move the radiating end of the adapted microwave antenna above the diamond, and start the imaging detection operation.

[0019] To achieve the above and other related objectives, a fourth aspect of the present invention provides a non-destructive testing method based on diamond NV color centers, comprising: performing a low-magnification objective lens imaging scan on the entire test piece using the imaging scanning method described in the third aspect; combining the magnetic field intensity distribution maps of all detection areas obtained by the scan into a single image; analyzing and determining whether the test piece has defects; if defects exist, taking the area where the defects are located as the target area for further detection; and then performing a high-magnification objective lens imaging scan on the target area using the imaging scanning method described in the third aspect to obtain the magnetic field intensity distribution of the target area, thereby obtaining the distribution information of the defects.

[0020] As described above, the adaptive multi-precision wide-field imaging device, scanning system, and method of the present invention have the following beneficial effects: The imaging device includes a microwave radiation device comprising multiple microwave antennas and a rotating stage. The multiple microwave antennas are spaced apart and mounted on the rotating stage. Rotating the rotating stage allows the antenna radiating ends to be switchably placed between the diamond and the objective lens in the working position. The radiating ends have through-holes facing the diamond, and the aperture of the through-holes is adapted to the magnification of each of the multiple objective lenses. The aperture decreases as the objective lens magnification increases. By rotating the rotating stage to replace the microwave antenna with the one adapted to the objective lens magnification, the radiation performance of the microwave antenna corresponding to the high-magnification objective lens is effectively improved while meeting the field-of-view requirements, thus improving the imaging signal-to-noise ratio. A suction tube for adsorbing or releasing diamond is installed on the objective lens turntable. By switching the objective lens or the suction tube to the working position, the dual functions of imaging and diamond adsorption / release are achieved, thereby realizing precise and efficient scanning imaging of the test piece. Attached Figure Description

[0021] Figure 1 The diagram shown is a first exemplary structural diagram of a wide-field imaging device;

[0022] Figure 2 The diagram shown is an exemplary structural diagram of the optical detection module;

[0023] Figure 3 The diagram shows a bottom view of a first exemplary structure for a microwave antenna.

[0024] Figure 4 The diagram shown is a top view of a first exemplary structure of a microwave antenna.

[0025] Figure 5 The diagram shown is a second exemplary structural diagram of a wide-field imaging device;

[0026] Figure 6 The diagram shows the structure of the spring-loaded pressure pin.

[0027] Figure 7 The diagram shows the positional relationship between the spring-loaded pin and the microwave antenna.

[0028] Figure 8 The diagram shows a bottom view of a second exemplary structure for a microwave antenna.

[0029] Figure 9 The diagram shown is a top view of the rotary table.

[0030] Figure 10 The diagram shown is an exemplary structural diagram of a scanning imaging system;

[0031] Figure 11 The diagram shows the structure of the objective lens turret.

[0032] Figure 12The image shows the radiation intensity distribution of the microwave antenna.

[0033] Component labeling: 1—Diamond; 2—Objective turret; 21—Rotating disk; 22—Fixed disk; 23—Interface; 3—Objective lens; 4—Optical inspection module; 41—Excitation source; 42—Condenser lens; 43—Dichroic filter; 44—Imaging module; 441—Filter; 442—Imaging lens; 443—Imaging camera; 5—Microwave radiating device; 51—Microwave antenna; 510—First metallized hole; 511—Through hole; 512—Radiating patch; 513—First microstrip line; 514—Grounding patch; 515—First metal patch; 5151—First feed connection point; 516—Second metal patch; 5161—Second feed connection point; 517—Third metal patch; 518—Fourth metal patch; 519—Second metallized hole; 52—Rotating stage; 521—Mounting area; 522 —Slope structure; 5221—Highest side of the slope; 5222—Lowest side of the slope; 53—Microwave branch; 531—Microwave amplifier; 532—Microwave circulator; 54—Switch; 55—Microwave source; 56—Spring pressure pin; 561—Spring pin; 562—Needle tube; 563—Feed connector; 57—Feed bracket; 58—Antenna adapter board; 581—Microwave connector; 582—Third feed connection point; 583—Fourth feed connection point; 584—Second microstrip line; 9—Mirror tube; 10—Test piece; 20—Magnet; 30—Displacement platform; 40—Sticker tube; 401—Hollow connector; 50—Threaded connector; 501—Fixing ring; 502—Fixing rod; 60—Negative pressure device; 601—Negative pressure source; 602—Negative pressure delivery pipe; 70—Control module; 80—Data processing module. Detailed Implementation

[0034] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, unless otherwise specified, the following embodiments and features described therein can be combined with each other.

[0035] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0036] Example 1: As Figure 1As shown, this embodiment provides an adaptive multi-precision wide-field imaging device, including: a diamond 1 containing NV color centers, an objective lens turret 2, multiple objective lenses with different magnifications 3, an optical detection module 4, and a microwave radiation device 5.

[0037] Multiple objectives 3 with different magnifications are mounted on the objective lens turntable 2, which can switch the objective lens 3 with the required magnification to the working position;

[0038] Diamond 1 is placed on the test piece 10 and is positioned below the objective lens 3 in the working position;

[0039] The microwave radiation device 5 includes multiple microwave antennas 51 and a rotating stage 52. The multiple microwave antennas 51 are arranged at intervals on the rotating stage 52. Each microwave antenna 51 has a radiating end that radiates microwaves to the diamond 1. The radiating end extends beyond the rotating stage 52. Rotating the rotating stage 52 allows the radiating end to be switched between the diamond 1 and the objective lens 3 located in the working position. The radiating end has a through hole 511 facing the diamond 1. The aperture of the through hole 511 is adapted to the magnification of the multiple objective lenses one by one. The aperture decreases as the magnification of the objective lens increases, and the radiation performance of the microwave antenna increases as the aperture decreases.

[0040] The optical detection module 4 is used to irradiate the objective lens 3 located in the working position with excitation light. The excitation light is transmitted through the objective lens 3 and then irradiates the diamond 1 located below it to excite fluorescence. It is also used to collect this fluorescence through the objective lens 3 for imaging and output imaging data.

[0041] This embodiment includes a microwave radiation device comprising multiple microwave antennas and a rotating stage. The multiple microwave antennas are arranged at intervals on the rotating stage, and the aperture diameter of each antenna corresponds one-to-one with the objective lens magnification. The aperture diameter decreases as the objective lens magnification increases. By rotating the rotating stage, the microwave antenna adapted to the correct objective lens magnification can be replaced. This effectively improves the radiation performance of microwave antennas corresponding to high-magnification objectives while accommodating diverse field-of-view requirements, thereby enhancing the imaging signal-to-noise ratio. Furthermore, the adaptation process between the objective lens and the antenna can be automated, significantly improving work efficiency.

[0042] The microwave antenna used in this embodiment is a microstrip antenna, such as... Figure 1 , Figure 3 As shown, a radiation patch 512 is provided on the bottom surface of the radiating end, facing the diamond and distributed circumferentially along the through-hole, to provide relatively uniform microwave radiation to the diamond in the imaging direction, and the through-hole 511 at the radiating end also provides the imaging field of view. This embodiment exemplifies that the radiation patch 512 is an open ring structure located around the through-hole 511, suitable for wide-field imaging of the NV color center, and adopts a double-ring structure, that is, an inner ring extending outward from the opening to increase bandwidth. Figure 12As shown, the radiating patch 512 generates microwave radiation along the circumference of the through-hole 511. The diamond located below the through-hole 511 receives this radiation, and the radiation intensity gradually decreases from the edge of the hole to the center. Due to the use of near-field radiation, the feed power of the microwave antenna remains essentially constant. To ensure that all antenna through-holes face the diamond during rotation, the centers of the through-holes are located on the same circumference after installation. In this case, the radiation performance of the microwave antenna towards the diamond decreases as the aperture increases. Here, radiation performance includes radiation intensity and the uniformity of its distribution. For high-magnification objectives, a small field of view is required. By adapting a small-aperture antenna, the antenna's radiation performance can be improved, thereby increasing the imaging signal-to-noise ratio. The parameters of the radiating patch 512 are designed according to application requirements such as radiation bandwidth and radiation intensity.

[0043] The radiating patch 512 is connected to the feed end via a first microstrip line 513. The end of the first microstrip line 513 at the feed end is connected to a first metallized via 510 and then to the signal pin of the microwave connector located on the top surface of the feed end to achieve microwave signal transmission. A grounding patch can also be provided on the top surface of the feed end and connected to the grounding pin of the microwave connector. The microwave connector, for example, uses IPEX Generation 1, and can be configured as follows: Figure 4 As shown, two grounding patches 514 are disposed on the top surface of the feed end, which are respectively connected to the two grounding pins of the microwave connector. The center signal pin of the microwave connector is connected to the first microstrip line 513 through the central metallized hole 510. Both the patches and the microstrip line can be formed by copper pouring. The specific parameters of the antenna structure are designed according to the application requirements.

[0044] Multiple microwave antennas are installed at intervals along the circumference of the rotating platform, with a preset angle between the radiating ends. Preferably, the outer structure of all microwave antennas is kept the same to facilitate rotation and switching, and to ensure that the through-hole of the radiating end is accurately placed above the diamond.

[0045] The rotary table 52 can be a simple rotating device, or it can be a multi-dimensional precision adjustment device. In addition to angle adjustment, it also has three-dimensional coordinate displacement adjustment functions for adjusting the position of the antenna along its three axes. After switching the antenna, it can automatically lock the position for precise positioning. The adjustment precision can be selected as needed; the three-dimensional axial precision can be 10 micrometers, and the angle precision can be 0.01 degrees. Manual adjustment is possible, but in this embodiment, it is preferred to automatically control the angle of each rotation and / or the three-axis displacement adjustment through a program to improve work efficiency. The multi-dimensional precision adjustment device can be an integrated multi-dimensional adjustment table or a combination of multiple independent single-axis displacement tables.

[0046] like Figure 1 As shown, the microwave radiating device 5 also includes multiple microwave branches 53, a switching switch 54, and a microwave source 55, each corresponding to a feed terminal of a plurality of microwave antennas. Figure 2 Each microwave branch 53 shown includes components such as a microwave amplifier 531 and a microwave circulator 532 for processing microwaves, and is connected to a microwave source 55 via a switch 54. The switch 54 can be a single-pole multi-throw coaxial switch or a multi-channel microstrip microwave switch, etc., and can be automated to improve operating efficiency. Therefore, after placing the required microwave antenna above the diamond, switching the microwave signal to that antenna via the switch will start its operation. The feed point can be located above or outside the rotary table 52, depending on design requirements. Alternatively, each microwave antenna can have its own independent microwave branch, microwave switch, and microwave source, and the corresponding microwave antenna can be started or stopped by controlling the microwave switch.

[0047] Objective turret 2 is a commonly used optical device in microscopic imaging, such as... Figure 11 As shown, it is equipped with a rotating disk 21 and a fixed disk 22, and the fixed disk 22 is equipped with mounting devices such as... Figure 1 The interface 23 of the lens barrel 9, after the objective lens 3 is rotated to the working position, aligns the optical axis of the objective lens 3 with the optical axis of the lens barrel 9, and the optical path in the lens barrel 9 is part of the imaging optical path. The objective lens turret 2 can be rotated manually or automatically, and the automation level of the objective lens assembly can be further improved when the automatic mode is selected. The working position referred to in this embodiment is the position when the objective lens is rotated to the point where its optical axis is aligned with the optical axis of the imaging optical path.

[0048] The objective lens magnification in this embodiment can be set according to requirements. For example, the objective lens magnification can be 5x-20x, corresponding to a decreasing field of view, and the required antenna aperture 511 can be decreasing in diameter from 2.5mm to 1mm. The distance between the objective lens and the diamond depends on the working distance of the objective lens, and the distance between the antenna and the diamond is determined experimentally, based on the optimal effect of the diamond receiving microwave radiation. Under near-field radiation conditions, it is generally within 1mm.

[0049] Optical detection module 4, such as Figure 2 As shown, the exemplary embodiment includes an excitation light source 41, a condenser lens 42, a dichroic filter 43, and an imaging module 44. The excitation light source 41 is used to generate excitation light, which is a laser. The laser light is focused by the condenser lens 42 and transmitted to the dichroic filter 43. After being reflected by the dichroic filter 43, it is transmitted through the objective lens 3 located in the working position and then illuminates the diamond 1. The fluorescence generated by the diamond 1 is transmitted through the objective lens 3 and the dichroic filter 43 in sequence and then enters the imaging module 44 to be collected and imaged. Figure 2Only one objective lens and one microwave antenna are shown as an example; the structure of the objective lens turntable and other microwave antennas are not fully shown. The condenser lens 42 shapes the light beam to obtain the beam size required by the subsequent objective lens and works with the objective lens to achieve wide-range imaging. The condenser lens 42 can be a biconvex lens. The imaging module 44 includes a filter 441, an imaging lens 442, and an imaging camera 443. The fluorescence transmitted through the dichroic filter 43 is filtered out by the filter 441, converged by the imaging lens 442, and finally collected and output by the imaging camera 443. The optical route from the objective lens 3 to the optical detection module 4 is as follows: Figure 1 The lens tube 9 in the middle transmits the image. In this embodiment, it can also be as follows: Figure 1 , Figure 2 As shown, the system includes a bias magnetic field module for applying a bias magnetic field to the diamond to adjust the resonance peak generated by the color center, or to ensure that the detection of weak magnetic fields by the color center operates in the linear region, or to adjust the detection frequency band to improve the sensitivity of weak magnetic field detection. The bias magnetic field module exemplarily includes a Helmholtz coil or, for example... Figure 1 , Figure 2 When using a Helmholtz coil, the objective lens turntable, diamond, and test piece are all placed within the coil frame of the magnet 20 shown, so that there is sufficient operating space between the diamond, the objective lens, and the test piece. When using a magnet, a permanent magnet or a passable electromagnet can be selected.

[0050] Wide-field imaging based on diamond NV centers can be used for precise measurement of physical quantities such as magnetic fields, temperature, and current. The operation of ODMR (optically probed magnetic resonance) measurement using the frequency sweep method is as follows: excitation light is irradiated onto the diamond, microwave frequencies are scanned, and the fluorescence generated by the diamond is collected and imaged; the ODMR spectrum at each pixel is plotted using the gray value at each pixel, and the magnetic field or temperature value at each pixel is calculated to form a magnetic field or temperature distribution map.

[0051] Of course, the fixed-frequency method can also be used to perform ODMR measurements. Based on the principle that changes in magnetic field strength cause shifts in ODMR spectral lines, a certain frequency point is selected. This fixed frequency point is preferably the point where the slope of the spectral line on one side of any resonance peak is the largest. Moreover, within the half-width range of the fixed frequency point, the spectral line is approximately linear, that is, the change in magnetic field and the change in fluorescence are linear. Therefore, different magnetic field strengths can correspond to different fluorescence intensities, which are reflected in the image as gray values. The distribution of gray values ​​at the fixed frequency point can be used to characterize the distribution of magnetic field strength.

[0052] Example 2: This example differs from Example 1 in that, as... Figure 5As shown, the feed end of the microwave antenna 51 is located on the rotating stage 52. The microwave radiating device also includes a spring pin 56, a feed bracket 57, and an antenna adapter plate 58. The antenna adapter plate 58 is mounted on the upper surface of the feed bracket 57. The first end of the feed bracket 57 is located above the rotating stage 52, and the second end is fixedly mounted. The upper end of the spring pin 56 is mounted on the first end of the feed bracket 57, and the top end is connected to the feed connection point of the antenna adapter plate 58. The bottom end is compressibly abutted against the feed connection point of the microwave antenna 51 mounted below it. The antenna adapter plate 58 is used to receive microwaves and transmit microwaves to the spring pin 56.

[0053] This embodiment utilizes the rotation of the turntable to simultaneously switch the microwave antenna and the power supply. Compared to Embodiment 1, it can reduce the time loss caused by the asynchronous switching of the antenna and the power supply, further improving efficiency.

[0054] The bottom end of the spring-loaded pin 56 is compressible, facilitating sliding on the rotary table 52 and adapting to uneven surfaces. The elastic pressure ensures reliable contact at the power supply connection point, preventing intermittent connections caused by sliding losses. Figure 6 As shown, the spring-loaded pin 56 includes a spring pin 561, a pin tube 562, and a feed connector 563. The lower end of the spring pin 561 is a needle-like structure, and the upper end is a spring, which is built into the pin tube 562. The top end of the spring pin 561 abuts against the bottom end face of the feed connector 563. The lower end of the feed connector 563 is installed inside the top tube of the pin tube 562, and the upper end extends out of the pin tube 562. The pin tube 562 is fixedly connected to the first end of the feed bracket 57. For example, the outer side of the pin tube 562 is provided with external threads. By providing an internal threaded hole in the feed bracket 57, the pin tube 562 can be fixed to the feed bracket 57 through the connection of the internal and external threads. The feed connector 563 is used to connect with the feed connection point on the antenna adapter board 58 to realize feeding. The lower end of the power supply connector 563 is installed inside the upper cavity of the needle tube 562 and fixed thereto. The installation method can be threaded connection, fastening insertion, etc., so that the spring tip of the spring needle 561 abuts against the bottom end face of the power supply connector 563. The end of the needle-like structure connected to the spring is located inside the needle tube 562, and its radial dimension is larger than the bottom opening of the needle tube 562, so that it stops inside the needle tube 562 when extended. The radial dimension of the free end of the needle-like structure is smaller than the bottom opening of the needle tube 562, and it can be designed as a tapered structure.

[0055] In Adoption Figure 6 The spring-loaded pins shown are configured in pairs, one for radiative feeding and the other for grounding. (Example:) Figure 7As shown, a first metal patch 515 and a second metal patch 516 are disposed on the top surface of the feed end of the microwave antenna 51. The positions where the two spring pins contact the two metal patches are the feed connection points. One feed connection point is used for microwave radiation feeding, and the other is used for grounding. Thus, feed connection points of the same type for multiple microwave antennas are located on the same circumference, and the bottom ends of the spring pins feeding to the same type of feed connection point are on the circumference formed by the same type of feed connection point. Figure 8 As shown, corresponding third metal patches 517 and fourth metal patches 518 are provided on the bottom surface of the feed end, and are connected to the first metal patch 515 and second metal patch 516 one-to-one by through-holes 519 formed by the second metallized holes. The third metal patch 517 is connected to the first microstrip line 513 to transmit microwave signals, and the fourth metal patch 518 serves as a grounding metal plate. The metal patches can be manufactured using a copper-plating process. Figure 7 As shown, each microwave antenna has two feed connection points ( Figure 7 The first feed connection point 5151 for receiving radiated signals and the second feed connection point 5161 for grounding are spaced apart. When multiple microwave antennas are mounted on the rotating platform, the feed connection points for radiated feeding are on the same circumference, while the feed connection points for grounding are on a different circumference. Correspondingly, two spring-loaded pins located above the antenna abut against the two circumferences respectively. Thus, when the rotating platform 52 is rotated, the feed connection point of the desired microwave antenna can be rotated to the bottom end of the spring-loaded pin 56 to achieve feeding. In this embodiment, the feed connection points, without specific distinction, include both signal feed points and grounding points.

[0056] For spring-loaded pins, only one can be used to simultaneously power both the signal and ground, and may include, for example: Figure 6 The spring needle, needle tube, and power supply connector shown are different from those shown. Figure 6 The spring pin and the needle tube, as well as the feed connector and the needle tube, are insulated from each other, for example, by filling with insulating material to form a coaxial structure. Therefore, during feed installation, the internal spring pin connects to the feed connection point for radiation on the adapter plate via the feed connector, the bottom end of the spring pin connects to the signal feed connection point on the antenna, and the external needle tube is pressed into the metallized mounting holes of the adapter plate and the antenna, grounding through the metallized mounting holes. The feed connection point structure for microwave antennas requires corresponding adjustments.

[0057] like Figure 9 As shown, the rotating stage 52 is provided with a mounting area 521 for mounting each microwave antenna, and a sloped structure 522 with inclined slopes on both sides of each mounting area 521. The highest edge 5221 of the slope is adjacent to the mounting area and connected to the feed connection point of the microwave antenna 51. Figure 7The first feed connection point 5151 and the second feed connection point 5161 are located on the same plane and are flush, with the lowest edge 5222 connected to the table surface of the rotating platform 52. This design allows the bottom end of the spring pin 56 to move smoothly between the planes containing the feed connection points of different microwave antennas and the table surface of the rotating platform when the rotating platform 52 is rotated. Since the bottom end of the spring pin 56 is a compressible structure, its degree of compression varies at different heights. After the microwave antenna is installed, the plane containing the feed connection point is higher than the table surface of the rotating platform, and the slope of the sloped structure 522 provides a transition between the two heights. On the one hand, the high degree of compression at the feed connection point ensures good contact between the bottom end of the spring pin 56 and the feed connection point, ensuring the feeding function. On the other hand, the low degree of compression on the table surface of the rotating platform 52 prevents the spring from always being in a high-compression state, thus improving the service life of the spring pin. Figure 9 The example only shows three microwave antenna installation areas, but of course, other numbers can be designed.

[0058] like Figure 7 As shown, one end of the antenna adapter board 58 is provided with a third feed connection point 582 and a fourth feed connection point 583, which are respectively connected to the top ends of the two spring-loaded pins 56. The other end is provided with a microwave connector 581 for receiving microwave signals. The microwave connector 581 is connected to the third feed connection point 582 and the fourth feed connection point 583 via microstrip lines. Figure 7 The third feed connection point 582 and the fourth feed connection point 583 are shown only for one microstrip line (the second microstrip line 584), while the other is located inside the board. In this embodiment, the microwave connector 581 is an SMA connector, and the third feed connection point 582 and the fourth feed connection point 583 are metallized holes. The feed connector 563 of the spring-loaded pin 56 is inserted into these metal holes for connection.

[0059] The second end of the power supply bracket 57 can be as follows Figure 5 The bending extension shown extends to the mounting platform. The structural shape of the second end can be designed according to the position of the mounting platform, as long as it can be kept relatively fixed with the mounting structure of the rotary table 52.

[0060] The mounting area 521 on the rotating platform 52 for mounting each microwave antenna can be determined according to the shape of the antenna's mounting structure. Mounting holes can be provided on the portion of the microwave antenna 51 located on the rotating platform 52 and in the mounting area of ​​the rotating platform 52, and then fixed with screws. Alternatively, a mounting block with a receiving slot can be provided, which is fixedly connected to the rotating platform through mounting holes, and the microwave antenna passes through the receiving slot and is fixed in place. All of the above mounting methods must take into account their impact on the antenna's radiation performance during antenna design to create an antenna that meets the requirements.

[0061] Example 3: This example provides an adaptive multi-precision imaging scanning system, such as... Figure 10 As shown, it includes: the adaptive multi-precision wide-field imaging device in Embodiment 1 or Embodiment 2, the displacement platform 30, and a pipette 40 installed on the objective lens turret. The objective lens turret can switch the objective lens 3 or the pipette 40 to the working position. The pipette 40 is used to introduce negative pressure. When the pipette 40 is switched to the working position, the lower opening of the pipette 40 faces the diamond 1, and the diamond 1 can be adsorbed or released by controlling the negative pressure in the pipette. The upper surface of the displacement platform 30 is used to place the test piece 10, and the position of the test piece 10 can be adjusted.

[0062] This embodiment uses a pipette installed on the objective lens turret to adsorb or release diamond. The objective lens or pipette can be switched to the working position by rotating the objective lens turret. Since the working position of the objective lens turret and the diamond are relatively fixed, the lower end of the pipette can be aligned with the diamond on the test piece. By controlling the pipette with negative pressure, the adsorption and release of the diamond located below it can be achieved. Therefore, when scanning and imaging a large test piece, it is convenient to change the test area facing the diamond by adjusting the horizontal position of the test piece.

[0063] like Figure 10 , Figure 11 As shown, the upper ends of the objective lens 3 and the pipette 40 are fixedly mounted on the rotating disk 21. They can be fixed using the existing mounting holes on the rotating disk. These mounting holes are symmetrically distributed around the rotation axis of the rotating disk. By rotating around the axis, any mounting hole can be sequentially switched to the same working position. The objective lens 3 and the pipette 40 are installed in multiple mounting holes in a one-to-one correspondence. The optical axis of the objective lens and the central axis of the pipette are coaxial with the central axis of the mounting hole. Therefore, when the objective lens is in the working position, the diamond is located below the objective lens. When the pipette is switched to the working position, the diamond is located below the pipette, so that the lower end of the pipette faces the diamond.

[0064] The mounting hole is generally threaded, and the upper end of the objective lens 3 is installed in the mounting hole via an external thread. The upper end of the suction tube 40 can be exemplarily shown as... Figure 11 The device is connected to the mounting hole via a threaded connector 50. The threaded connector 50 includes a retaining ring 501 with threads on both its inner and outer surfaces, and a retaining rod 502 with threads on both its upper and lower outer surfaces. The threads on the outer surface of the retaining ring 501 connect to the internal threads of the mounting hole in the rotating disk 21, and the threads on its inner surface connect to the external threads at the upper end of the retaining rod 502. The upper end of the straw 40 is open, and the inner surface of the opening is threaded to connect to the external threads at the lower end of the retaining rod 502. The upper opening of the straw 40 is not connected to the straw cavity and is only used for installation. Other installation structures can also be used.

[0065] like Figure 11As shown, it also includes a negative pressure device 60 for providing negative pressure into the straw 40. The negative pressure device 60 includes a negative pressure source 601 and a negative pressure delivery pipe 602. One end of the negative pressure delivery pipe 602 is connected to the side wall of the straw 40, and the other end is connected to the negative pressure source 601. The side wall of the straw 40 is provided with a hollow connector 401 that communicates with the cavity of the straw 40 for connecting to the negative pressure device 60 and receiving negative pressure from the negative pressure device 60. The negative pressure source 601 can be a suction device, such as a vacuum pump, to generate negative pressure. The negative pressure delivery pipe 602 is made of a soft material, such as rubber, to facilitate the arrangement of the pipeline.

[0066] To ensure precise adsorption of diamond 1 via negative pressure, the lower end of the suction tube 40 is made of a flexible material, such as rubber or flexible plastic. This buffers the adsorption force applied to the diamond during negative pressure adsorption, preventing the diamond from shifting or failing to adsorb due to rigid adsorption force when the bottom of the suction tube contacts the diamond. The diameter of the lower end of the suction tube is 1mm-2mm to accommodate wide-field imaging based on diamond NV color centers. The size of the diamond used for wide-field imaging is several millimeters, for example, 2mm-5mm. Figure 1 The straw 40 in the example is tapered at the bottom, but it can also be a straight straw or other types of straw.

[0067] The displacement platform 30 also uses a multi-dimensional precision adjustment device, including angle and three-dimensional axial adjustment.

[0068] When the suction tube 40 is in the working position, the distance between the bottom end of the suction tube 40 and the upper surface of the diamond is 1mm-2mm, leaving sufficient space for switching suction tubes. When adsorbing the diamond, the height of the displacement platform 30 needs to be adjusted to bring the upper surface of the diamond 1 into contact with the lower end of the suction tube 40, ensuring a seamless fit to guarantee adsorption force and prevent movement of the diamond 1 during adsorption. After adsorption, keeping the diamond 1 stationary, the height of the displacement platform 30 can be readjusted to separate the test piece 10 from the diamond 1, facilitating the adjustment of the horizontal position of the test piece 10. After the horizontal position of the test piece 10 is adjusted, the displacement platform 30 is adjusted again until the test piece 10 and the diamond 1 are in contact again, and the diamond 1 is released by manipulating the suction tube 40. Finally, the displacement platform 30 is adjusted back to its original height, completing one image position adjustment of the test piece 10.

[0069] For larger diamonds (1), releasing the negative pressure within the suction tube 40 allows them to quickly fall onto the surface of the test piece under gravity. However, for lighter diamonds (1), after releasing the negative pressure, electrostatic and van der Waals forces exist between the lower end of the suction tube 40 and the surface of the diamond (1), preventing release due to gravity. In such cases, a suitable amount of positive pressure can be introduced into the suction tube 40 by manipulating the negative pressure source 601 to assist in the release of the diamond. The negative and positive pressure values ​​used are determined experimentally to ensure rapid and reliable adsorption and release when the lower end of the suction tube is in contact with the diamond surface. Alternatively, the bottom of the suction tube 40 can be designed to eliminate static electricity, such as using an anti-static material.

[0070] This embodiment also includes a control module 70 and a data processing module 80. The control module 70 controls the rotation of the objective lens turret 2 to switch between the objective lens 3 and the pipette 40, and controls the angle or displacement adjustment of the displacement platform 30 and the rotary stage 52. The data processing module 80 receives the imaging data output by the optical detection module 4 and processes and analyzes the imaging data, such as calculating the magnetic field strength and forming a magnetic field strength distribution map. The imaging data includes at least the grayscale value at each pixel.

[0071] Example 4: This example provides an imaging scanning method based on diamond NV color centers, implemented using the adaptive multi-precision imaging scanning system from Example 3. The method includes:

[0072] When it is necessary to change the detection area of ​​the test piece, perform the following steps: Stop the imaging detection operation; switch the pipette 40 to the working position, and move the radiating end of the adapted microwave antenna 51 away from the diamond 1; adjust the height of the displacement platform 30 so that the lower end of the pipette 40 contacts the upper surface of the diamond 1, and manipulate the negative pressure in the pipette 40 to attract and hold the diamond 1; adjust the displacement platform 30 so that the test piece 10 is at a new predetermined horizontal position, and then manipulate the negative pressure in the pipette 40 to release the diamond 1 to the upper surface of the test piece 10; adjust the height of the displacement platform 30 so that the diamond is in the initial position; switch the required objective lens 3 to the working position, move the radiating end of the adapted microwave antenna 51 above the diamond 1, and start the imaging detection operation.

[0073] This embodiment employs the imaging scanning system from Embodiment 3. On one hand, it utilizes the precise and fixed positional relationship between the working position of the objective lens turret and the diamond, and through switching, achieves the dual functions of diamond pickup and loading operations and objective lens imaging. Ultimately, it enables multiple scanning imaging of test objects larger than the diamond's imaging field of view. The entire operation is automated, greatly improving work efficiency. On the other hand, multiple microwave antennas with matching through-holes corresponding to the objective lens are set up and matched through adaptive switching. This improves the imaging quality of the high-magnification objective lens while meeting the field-of-view requirements.

[0074] The process of adjusting the displacement platform 30 to bring the test piece 10 to a new predetermined horizontal position includes the following steps: lowering the height of the displacement platform 30 to separate the test piece 10 from the diamond 1; adjusting the horizontal position of the displacement platform 30 so that the new test area on the test piece 10 corresponds longitudinally to the diamond 1; and raising the height of the displacement platform 30 until the diamond 1 is in contact with the upper surface of the test piece 10.

[0075] The imaging detection operation includes activating the adapted microwave antenna 51 to radiate microwaves to the diamond, and activating the optical detection module 4 to perform imaging detection.

[0076] Before starting the imaging test for the first time, preparations need to be made, including configuring the following positional relationships: the objective lens 3 with the required magnification is in the working position; the test piece 10 is placed on the displacement platform 30, the diamond 1 is placed on the test area on the upper surface of the test piece 1 and faces the objective lens 3 in the working position, the radiating end of the microwave antenna 51 adapted to the objective lens is located above the diamond 1, and the through hole 511 of the radiating end faces the objective lens 3 in the working position.

[0077] Since the working position of the objective lens turret is fixed after installation, the precise positions of the objective lens, microwave antenna, and diamond can be determined. During preparation, the order in which the objective lens, microwave antenna, and diamond are placed is not important; they can be placed according to the precisely calculated positions.

[0078] For scanning the detection area of ​​the test piece, the coordinate method can be used to record and move the detection area for each scan, or the scanning step method can be used to represent the detection area after each move by the step of movement.

[0079] The scanning method of this embodiment can be used in non-destructive testing to detect defects, such as those on the surface of a chip. The specific method is as follows: First, the entire device under test is scanned under a low-magnification objective lens using the aforementioned imaging scanning method. The magnetic field intensity distribution maps of all the detection areas obtained by the scan are collected into one image. The analysis is used to determine whether there are defects in the device under test. If there are defects, the area where the defects are located is taken as the target area for further detection. Then, a high-magnification objective lens imaging scan is performed on the target area using the aforementioned imaging scanning method to obtain the magnetic field intensity distribution of the target area, thereby obtaining the distribution of defects.

[0080] Low-magnification objectives typically use 5x, 10x, or other magnifications, while high-magnification objectives include 20x, etc. The terms "high" and "low" refer to the comparison between the magnifications used in the two scans. Low-magnification imaging is performed first because it provides a larger field of view, reducing the number of scans and improving efficiency. This allows for faster imaging and assessment of the entire area under test. If defects are found, a high-magnification scan is then performed on the defect area. This provides a higher signal-to-noise ratio, resulting in more detailed defect distribution information, and because the defect area is smaller, it further improves scanning efficiency.

[0081] Defects are identified based on the distribution of magnetic field strength. For example, if the magnetic field strength in a certain area is abnormal, exceeding or falling below the normal value, it indicates the presence of a defect. This part, involving ODMR spectral plotting, magnetic field calculation, formation of magnetic field strength distribution maps, and defect identification, is all implemented by the data processing module 80.

[0082] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. An adaptive multi-precision wide-field imaging device, characterized in that, The wide-field imaging device includes: a diamond containing NV color centers, an objective lens turret, multiple objectives with different magnifications, an optical detection module, and a microwave radiation device. Multiple objectives with different magnifications are mounted on the objective lens turret, which allows you to switch the objective lens of the desired magnification to the working position; The diamond is placed on the workpiece under test and positioned below the objective lens in the working position; The microwave radiation device includes multiple microwave antennas and a rotating stage. The multiple microwave antennas are arranged at intervals on the rotating stage. Each microwave antenna has a radiating end that radiates microwaves to the diamond. The radiating end extends beyond the rotating stage. Rotating the rotating stage allows the radiating end to be switched between the diamond and the objective lens located in the working position. The radiating end has a through hole facing the diamond. The aperture of the through hole is matched one-to-one with the magnification of the multiple objective lenses. The aperture decreases as the magnification of the objective lens increases, and the radiation performance of the microwave antenna increases as the aperture decreases. The optical detection module is used to irradiate the objective lens located in the working position with excitation light. The excitation light is transmitted through the objective lens and then irradiates the diamond located below it to excite fluorescence. It is also used to collect this fluorescence through the objective lens for imaging and output imaging data.

2. The adaptive multi-precision wide-field imaging device according to claim 1, characterized in that: The microwave antenna is a microstrip antenna, with radiating patches on the bottom surface of the radiating end, distributed circumferentially along the through-hole.

3. The adaptive multi-precision wide-field imaging device according to claim 1 or 2, characterized in that: The microwave radiating device also includes a switching switch that can be switched to multiple microwave antennas for transmitting received microwaves to the connected microwave antennas.

4. The adaptive multi-precision wide-field imaging device according to claim 1 or 2, characterized in that: The feed end of the microwave antenna is located on the rotating platform. The microwave radiating device also includes a spring pin, a feed bracket, and an antenna adapter plate. The antenna adapter plate is installed on the upper surface of the feed bracket. The first end of the feed bracket is located above the rotating platform, and the second end is fixedly installed. The upper end of the spring pin is installed on the first end of the feed bracket, and the top end is connected to the antenna adapter plate. The bottom end is compressibly abutted against the feed connection point of the microwave antenna located below it. The antenna adapter plate is used to receive microwaves and transmit microwaves to the spring pin.

5. The adaptive multi-precision wide-field imaging device according to claim 4, characterized in that: The mounting area on the rotating platform for mounting each microwave antenna has a sloping structure on both sides. The highest side of the slope is close to the mounting area and is flush with the plane where the feed connection point of the microwave antenna is located, while the lowest side is connected to the table surface of the rotating platform.

6. The adaptive multi-precision wide-field imaging device according to claim 1, characterized in that: The mounting areas for each microwave antenna on the rotating platform are arranged at intervals along the circumference of the rotating platform, such that the same type of feed connection points of the multiple microwave antennas are on the same circumference.

7. The adaptive multi-precision wide-field imaging device according to claim 1, characterized in that: It also includes a bias magnetic field module for applying a bias magnetic field to the diamond.

8. An adaptive multi-precision imaging scanning system, characterized in that, The imaging scanning system includes: an adaptive multi-precision wide-field imaging device as described in any one of claims 1-7, and a displacement platform. The objective lens turret is further equipped with a pipette, which can switch the objective lens or the pipette to a working position. The pipette is used to introduce negative pressure. When the pipette is switched to the working position, the lower end of the pipette faces the diamond, and the diamond can be adsorbed or released by controlling the negative pressure inside the pipette. The upper surface of the displacement platform is used to place the test piece, and the position of the test piece can be adjusted.

9. An imaging scanning method based on diamond NV color centers, characterized in that, The method is implemented using the adaptive multi-precision imaging scanning system as described in claim 8, and includes: When it is necessary to change the detection area of ​​the test piece, perform the following steps: Stop the imaging detection operation; switch the pipette to the working position and move the radiating end of the adapted microwave antenna away from the diamond; adjust the height of the displacement platform so that the lower end of the pipette contacts the upper surface of the diamond, and manipulate the negative pressure in the pipette to attract and hold the diamond; after adjusting the displacement platform so that the test piece is at the new predetermined horizontal position, manipulate the negative pressure in the pipette to release the diamond to the upper surface of the test piece, adjust the height of the displacement platform so that the diamond is in the initial position, switch the required objective lens to the working position, move the radiating end of the adapted microwave antenna above the diamond, and start the imaging detection operation.

10. A non-destructive testing method based on diamond NV color centers, characterized in that, The method includes: performing a low-magnification objective lens imaging scan on the entire test piece using the imaging scanning method as described in claim 9; combining the magnetic field intensity distribution maps of all detected areas obtained from the scan into a single image; analyzing and determining whether the test piece has defects; if defects exist, taking the area where the defects are located as the target area for further detection; and then performing a high-magnification objective lens imaging scan on the target area using the imaging scanning method as described in claim 9 to obtain the magnetic field intensity distribution of the target area, thereby obtaining the distribution information of the defects.

Images