An inflatable spectroscopic cell system

Abstract

The application discloses an inflatable spectrometer chamber system, which is suitable for a 120 nm-200 nm deep ultraviolet spectrometer and belongs to the technical field of spectrometers. The system comprises a spectrometer chamber and a gas source. The gas source is communicated with the inside of the spectrometer chamber through a gas delivery control assembly. The gas source injects protective gas into the inside of the spectrometer chamber through the gas delivery control assembly. The gas pressure of the protective gas in the spectrometer chamber is greater than the atmospheric pressure. The gas source injects protective gas into the inside of the spectrometer chamber through the gas delivery control assembly, and the gas pressure of the protective gas in the spectrometer chamber is greater than the atmospheric pressure, so that the spectrometer chamber continuously maintains a positive pressure state, thereby avoiding oxygen and water vapor in the outside air from entering the inside of the spectrometer chamber, and enabling the spectrometer chamber to maintain a long-term oxygen-free, water-vapor-free and light-transmittance-stable state.

Description

Technical Field

[0001] This invention relates to an inflatable spectrophotometer system, suitable for 120 nm to 200 nm deep ultraviolet spectrophotometers, and belongs to the field of spectrometer technology. Background Technology

[0002] Deep ultraviolet light in the 120 nm to 200 nm range is strongly absorbed by oxygen and water molecules in the air. Therefore, vacuum pumps are often used to evacuate the spectrometer's chamber. For example, Chinese patent application CN201921425448.2 discloses a vacuum Rowland circular grating spectrometer; and Chinese patent application CN200720190241.2 discloses a novel vacuum spectrometer. Both methods employ vacuum pumps to evacuate the spectrometer to prevent the deep ultraviolet light from being absorbed by oxygen and water molecules within the chamber.

[0003] However, the use of vacuum pumps can cause problems such as oil contamination, vibration, noise, and gas backflow during shutdown in the spectrometer. Deep ultraviolet spectrometers are extremely sensitive to signal attenuation, making it difficult for the spectrometer to maintain stable light transmission over a long period of time, requiring frequent maintenance. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention provides an inflatable spectrophotometer system.

[0005] This invention is achieved through the following technical solution: An inflatable spectrophotometer system includes a spectrophotometer and a gas source. The gas source is connected to the interior of the spectrophotometer via a gas delivery control component. The gas source injects protective gas into the interior of the spectrophotometer via the gas delivery control component, and the pressure of the protective gas inside the spectrophotometer is greater than the external atmospheric pressure.

[0006] The gas delivery control assembly includes an inlet pipe and a pressure regulating valve. One end of the inlet pipe is connected to a gas source, and the other end is connected to the interior of the spectrophotometer. The pressure regulating valve is located on the inlet pipe.

[0007] The gas delivery control assembly also includes a differential pressure valve, which is located on the inlet pipe and between the pressure regulating valve and the spectrophotometer.

[0008] The beam splitting chamber includes a main body and a cover plate. The main body has an opening on one side. A sealing groove is provided circumferentially on the opening side of the main body, and a sealing ring is provided in the sealing groove. The cover plate is placed on the main body and seals the opening side of the main body. The side wall of the optical chamber body is provided with an optical chamber incident lens and a signal output sealed socket.

[0009] It also includes a protective gas chamber, with the spectrometer located inside the protective gas chamber. The gas source is connected to the interior of the spectrometer and the interior of the protective gas chamber through the gas delivery control component. The gas source injects protective gas into the interior of the spectrometer and the interior of the protective gas chamber through the gas delivery control component, and the gas pressure of the protective gas in the spectrometer and the protective gas chamber is greater than the external atmospheric pressure.

[0010] The protective air chamber includes an air chamber body and an air chamber cover plate. The air chamber body has an opening on one side, and an air chamber sealing groove is provided circumferentially on the opening side of the air chamber body. An air chamber sealing ring is provided in the air chamber sealing groove. The air chamber cover plate is provided on the air chamber body and seals the opening side of the air chamber body. The opening side of the air chamber body faces the same direction as the opening side of the light chamber body.

[0011] The side wall of the air chamber body is provided with an exhaust pipe connector and an external incident lens. The exhaust pipe connector is connected to the interior of the air chamber body, and the external incident lens is arranged coaxially with the optical chamber incident lens on the optical chamber body. The optical chamber body is provided with an optical chamber inflation shut-off valve on its side wall, and the optical chamber inflation shut-off valve is connected to the interior of the optical chamber body; The protective gas in the protective chamber is discharged to the outside through the exhaust pipe joint, and the gas pressure of the protective gas in both the spectrometer and the protective chamber is greater than or equal to the outside atmospheric pressure.

[0012] The main body of the optical chamber is located on the bottom plate inside the main body of the gas chamber, and the beam splitting chamber has gaps between itself and the protective gas chamber in all directions except the bottom side. Alternatively, the main body of the optical chamber and the main body of the gas chamber are integrally manufactured, the main body of the optical chamber and the main body of the gas chamber share a base plate, and the top surface of the main body of the optical chamber is located below the top surface of the main body of the gas chamber. The main body of the gas chamber also has a groove for accommodating the optical chamber incident lens, the signal output sealing socket and the optical chamber inflation shut-off valve. Deoxidizers are placed inside the main body of the light chamber, the main body of the gas chamber, and the groove.

[0013] When the inflatable spectrophotometer system includes a protective gas chamber, the gas delivery control component includes a constant flow gas valve, a spectrophotometer gas valve, an inlet pipe, and a tee. The constant flow gas valve is located on the protective gas chamber and communicates with the interior of the protective gas chamber. The spectrophotometer gas valve is located on either the protective gas chamber or the spectrophotometer and communicates with the interior of the spectrophotometer. One end of the inlet pipe is connected to a gas source. The inlet of the tee is connected to the end of the inlet pipe furthest from the gas source. The two outlets of the tee are respectively connected to the constant flow gas valve and the spectrophotometer gas valve through branch pipes.

[0014] The gas source includes a gas storage tank and a protective gas stored in the gas storage tank; The protective gas is nitrogen, argon, or helium.

[0015] The beneficial effects of this invention are as follows: 1. This invention utilizes a gas source to inject protective gas into the interior of the spectrophotometer through a gas delivery control component, and makes the pressure of the protective gas inside the spectrophotometer greater than the external atmospheric pressure, thereby keeping the spectrophotometer in a positive pressure state to prevent oxygen, water vapor, etc. from the outside air from entering the interior of the spectrophotometer, so that the spectrophotometer can maintain a state of no oxygen, no water vapor, and stable light transmittance for a long time.

[0016] Compared with existing vacuum spectrometers, this invention avoids the drawbacks of using a vacuum pump, such as oil contamination, vibration, noise, and gas backflow during shutdown. Instead, it uses a gas source to inject protective gas into the spectrometer and maintains a positive pressure state relative to the outside environment for a long time. This ensures that the spectrometer remains oxygen-free and moisture-free, thereby maintaining a stable light transmittance over a long period. Ultimately, this results in a spectrometer with advantages such as high and stable light transmittance, low signal attenuation, ultra-long lifespan, and maintenance-free operation.

[0017] Existing technologies also employ continuous argon gas flow to protect the spectrometer. However, continuous argon flow consumes a large amount of argon gas, and more importantly, it can contaminate the spectrometer. In contrast, this invention uses a gas source to inject protective gas into the sealed spectrometer, maintaining a positive pressure relative to the outside environment for an extended period. The amount of protective gas used is simply the sum of the spectrometer volume and the amount of natural gas leakage, significantly reducing the amount of protective gas required. This method is suitable for continuously operating, long-term online deep ultraviolet spectrometers.

[0018] 2. Install an adaptive differential pressure valve on the air inlet pipe to maintain the air pressure inside the spectrometer chamber 1 kPa to 10 kPa higher than the outside atmospheric pressure, so as to give the spectrometer chamber a positive pressure, ensure that oxygen, water vapor and other substances in the outside air will not enter the spectrometer chamber, and enable the inflatable spectrometer chamber system to adapt to changes in altitude or atmospheric pressure.

[0019] 3. The entire beam splitter is housed within a protective gas chamber. A gas source is used to inject protective gas into both the beam splitter and the protective gas chamber via a gas delivery control component. This ensures that the pressure of the protective gas in both chambers is greater than the external atmospheric pressure, preventing oxygen and water vapor from entering the protective gas chamber. Simultaneously, the protective gas within the protective gas chamber forms a protective sleeve, encasing the incident lens, signal output sealed socket, and weak points on the beam splitter, completely isolating it from the external environment. This prevents oxygen and water vapor from entering the beam splitter, further improving its transmittance stability and extending its service life.

[0020] 4. After the spectrometer is filled with protective gas once, it is sealed, and a deoxidizer is used to remove the trace amounts of oxygen in the spectrometer and protective gas chamber to maintain a stable oxygen-free environment inside the spectrometer. During the use of the deep ultraviolet spectrometer, the argon gas used for excitation of the deep ultraviolet spectrometer is introduced into the main body of the gas chamber in a pulsed or continuous flow manner through the gas delivery control component. This forms a protective gas sleeve in the protective gas chamber, enclosing the entrance lens of the optical chamber, the signal output sealed socket, the filling shut-off valve, and the weakest sealing parts on the spectrometer, and completely isolating the spectrometer from the external environment. This prevents oxygen, water vapor, etc. from the outside air from entering the spectrometer, which helps to further improve the transmittance stability of the spectrometer and extend its service life. Since the argon gas used by the deep ultraviolet spectrometer itself is introduced into the main body of the gas chamber to form a protective gas sleeve, there is no additional increase in argon gas consumption. Since the continuous flow of argon gas does not flow into the spectrometer, it will not contaminate the optical chamber. Attached Figure Description

[0021] Figure 1 This is an exploded view of Embodiment 1 of the present invention after the gas source has been removed; Figure 2 This is an exploded view of Embodiment 2 of the present invention after the gas source has been removed; Figure 3 This is an exploded view of Embodiment 3 of the present invention; Figure 4 for Figure 3 A structural diagram from another perspective; Figure 5 This is an exploded view of Embodiment 4 of the present invention; Figure 6 for Figure 5 A structural diagram from another perspective; Figure 7 This is an exploded view of Embodiment 5 of the present invention; Figure 8 for Figure 7 A structural diagram from another perspective; Figure 9 This is an exploded view of Embodiment Six of the present invention; Figure 10 for Figure 9 A structural diagram from another perspective.

[0022] In the diagram: 1-Spectrometer, 100-Spectrometer body, 101-Spectrometer cover, 102-Spectrometer sealing groove, 103-Spectrometer sealing ring, 2-Gas source, 3-Gas delivery control assembly, 30-Inlet pipe, 31-Pressure regulating valve, 32-Differential pressure valve, 33-Normal flow valve, 34-Spectrometer valve, 35-T-connector, 36-Branch pipe, 4-Spectrometer entrance lens, 5-Signal output sealing socket, 6-Protective gas chamber, 60-Gas chamber body, 600-Groove, 61-Gas chamber cover, 62-Gas chamber sealing groove, 63-Gas chamber sealing ring, 7-Exhaust pipe connector, 8-External entrance lens, 9-Spectrometer inflation shut-off valve. Detailed Implementation

[0023] The technical solution of the present invention is further described below, but the scope of protection is not limited to what is described.

[0024] Example 1: like Figure 1 As shown, the present invention provides an inflatable spectrophotometer system, comprising a spectrophotometer 1 and a gas source 2. The gas source 2 is connected to the interior of the spectrophotometer 1 through a gas delivery control component 3. The gas source 2 injects protective gas into the interior of the spectrophotometer 1 through the gas delivery control component 3, and the pressure of the protective gas inside the spectrophotometer 1 is greater than the external atmospheric pressure.

[0025] The gas delivery control component 3 includes an air inlet pipe 30 and a pressure regulating valve 31. One end of the air inlet pipe 30 is connected to the gas source 2, and the other end is connected to the interior of the spectrophotometer 1. The pressure regulating valve 31 is located on the air inlet pipe 30.

[0026] The beam splitter 1 includes a beam chamber body 100 and a beam chamber cover plate 101. The beam chamber body 100 has an opening on one side. A beam chamber sealing groove 102 is provided circumferentially on the opening side of the beam chamber body 100, and a beam chamber sealing ring 103 is provided in the beam chamber sealing groove 102. The beam chamber cover plate 101 is provided on the beam chamber body 100 and seals the opening side of the beam chamber body 100.

[0027] The optical chamber body 100 is provided with an optical chamber incident lens 4 and a signal output sealed socket 5 on its side wall.

[0028] The gas source 2 includes a gas storage tank and a protective gas stored in the gas storage tank; The protective gas is nitrogen, argon, or helium.

[0029] An oxygen absorber is placed inside the main body 100 of the light chamber.

[0030] Specifically, the beam splitter 1 is equipped with optical components such as a grating, an entrance slit, an exit slit, and a signal receiver. In this embodiment, the gas source 2 injects protective gas into the beam splitter 1 through the gas delivery control component 3, and makes the pressure of the protective gas inside the beam splitter 1 greater than the external atmospheric pressure, thereby keeping the beam splitter 1 in a positive pressure state to prevent oxygen, water vapor, etc. from the outside air from entering the beam splitter 1, so that the beam splitter 1 remains in an oxygen-free, water-free, and stable light transmittance state for a long time.

[0031] Compared with existing vacuum spectrometers, this invention avoids the drawbacks of using a vacuum pump, such as oil contamination, vibration, noise, and backflow of gas during shutdown, which can cause problems in the spectrometer 1. Instead, it uses a gas source 2 to inject protective gas into the spectrometer 1 and maintains a positive pressure state relative to the outside environment for a long time. This achieves the goal of keeping the spectrometer 1 in an oxygen-free and water-vapor-free state for a long time, thereby ensuring that the transmittance of the spectrometer 1 remains stable over a long period of time. Ultimately, this gives the spectrometer 1 advantages such as high and stable transmittance, low signal attenuation, ultra-long lifespan, and maintenance-free operation.

[0032] Existing technologies also employ a continuous argon gas flow to protect the spectrometer 1. However, this continuous argon flow consumes a large amount of argon gas, and more importantly, it also contaminates the spectrometer 1. In contrast, this invention uses a gas source 2 to inject protective gas into the sealed spectrometer 1, maintaining a positive pressure relative to the outside environment for an extended period. The amount of protective gas used is simply the sum of the volume of the spectrometer 1 and the amount of natural gas leakage from the spectrometer 1, significantly reducing the amount of protective gas required. This method is suitable for continuously operating, long-term online deep ultraviolet spectrometers.

[0033] Example 2: like Figure 2 As shown, the gas-filled spectrophotometer system provided in Embodiment 2 differs from Embodiment 1 in that the gas delivery control component 3 in Embodiment 2 further includes a differential pressure valve 32, which is located on the air inlet pipe 30 and between the pressure regulating valve 31 and the spectrophotometer 1.

[0034] Specifically, an adaptive differential pressure valve 32 is installed on the air intake pipe 30 to maintain the internal air pressure of the spectrophotometer 1 at 1 kPa to 10 kPa higher than the external atmospheric pressure, so as to give the spectrophotometer 1 a positive pressure, ensure that oxygen, water vapor and other substances in the outside air do not enter the interior of the spectrophotometer 1, and enable the inflatable spectrophotometer system to adapt to changes in altitude or atmospheric pressure.

[0035] Example 3: like Figure 3 and Figure 4As shown, the gas-filled spectrometer system provided in Embodiment 3 differs from Embodiment 1 in that: the gas-filled spectrometer system in Embodiment 3 further includes a protective gas chamber 6, the spectrometer 1 is located inside the protective gas chamber 6, the gas source 2 is connected to the inside of the spectrometer 1 and the inside of the protective gas chamber 6 through the gas delivery control component 3, the gas source 2 injects protective gas into the inside of the spectrometer 1 and the protective gas chamber 6 through the gas delivery control component 3, and the gas pressure of the protective gas in the spectrometer 1 and the protective gas chamber 6 is greater than the external atmospheric pressure.

[0036] The protective air chamber 6 includes an air chamber body 60 and an air chamber cover plate 61. The air chamber body 60 has an opening on one side. An air chamber sealing groove 62 is provided circumferentially on the opening side of the air chamber body 60, and an air chamber sealing ring 63 is provided in the air chamber sealing groove 62. The air chamber cover plate 61 is provided on the air chamber body 60 and seals the opening side of the air chamber body 60. The opening side of the air chamber body 60 faces the same direction as the opening side of the light chamber body 100.

[0037] The main body of the optical chamber 100 is located on the bottom plate inside the main body of the gas chamber 60, and the beam splitting chamber 1 has gaps between itself and the protective gas chamber 6 in all directions except the bottom side.

[0038] An external incident lens 8 is provided on the side wall of the air chamber body 60, and the external incident lens 8 is coaxially arranged with the optical chamber incident lens 4 on the optical chamber body 100.

[0039] When the inflatable spectrometer system includes a protective gas chamber 6, the gas delivery control component 3 includes a constant flow gas valve 33, a spectrometer gas valve 34, an inlet pipe 30, and a tee 35. The constant flow gas valve 33 is located on the protective gas chamber 6 and communicates with the interior of the protective gas chamber 6. The spectrometer gas valve 34 is located on the spectrometer 1 and communicates with the interior of the spectrometer 1. One end of the inlet pipe 30 is connected to the gas source 2. The inlet of the tee 35 is connected to the end of the inlet pipe 30 away from the gas source 2. The two outlets of the tee 35 are respectively connected to the constant flow gas valve 33 and the spectrometer gas valve 34 one-to-one through the branch pipes 36.

[0040] An oxygen absorber is placed inside the main body 60 of the gas chamber.

[0041] Specifically, in this embodiment, the beam splitter 1 is entirely housed within the protective gas chamber 6. A gas source 2 injects protective gas into both the beam splitter 1 and the protective gas chamber 6 via a gas delivery control component 3, ensuring that the gas pressure in both chambers is greater than the external atmospheric pressure. This prevents oxygen and water vapor from entering the protective gas chamber 6. Simultaneously, the protective gas within the protective gas chamber 6 forms a protective gas sleeve, enclosing the incident lens 4, signal output sealing socket 5, and any weak points on the beam splitter 1. This completely isolates the beam splitter 1 from the external environment, preventing oxygen and water vapor from entering and further improving the transmittance stability and extending the lifespan of the beam splitter 1.

[0042] Example 4: like Figure 5 and Figure 6 As shown, the inflatable beam splitter system provided in Embodiment 4 differs from Embodiment 3 in that: the main body 100 of the optical chamber and the main body 60 of the gas chamber are integrally manufactured, the main body 100 of the optical chamber and the main body 60 of the gas chamber share a common base plate, and the top surface of the main body 100 of the optical chamber is located below the top surface of the main body 60 of the gas chamber. The main body 60 of the gas chamber is also provided with a groove 600 for accommodating the optical chamber incident lens 4 and the signal output sealing socket 5.

[0043] The light chamber air valve 34 is located on the air chamber body 60.

[0044] The groove 600 contains a deoxidizer.

[0045] Example 5: like Figure 7 and Figure 8 As shown, the gas-filled spectrometer system provided in Embodiment 5 differs from that in Embodiment 3 in that: The side wall of the air chamber body 60 is provided with an exhaust pipe connector 7, which is connected to the interior of the air chamber body 60. The optical chamber body 100 is provided with an optical chamber inflation shut-off valve 9 on its side wall, and the optical chamber inflation shut-off valve 9 is connected to the interior of the optical chamber body 100. The protective gas in the protective gas chamber 6 is discharged to the outside through the exhaust pipe joint 7, and the gas pressure of the protective gas in both the spectrophotometer 1 and the protective gas chamber 6 is greater than or equal to the external atmospheric pressure.

[0046] The protective gas is argon.

[0047] Specifically, in this embodiment, after the spectrometer 1 is filled with protective gas once, it is sealed, and a deoxidizer is used to remove the trace amounts of oxygen in the spectrometer 1 and the protective gas chamber 6, so as to maintain a stable oxygen-free environment inside the spectrometer 1. During the use of the deep ultraviolet spectrometer, the argon gas used for excitation of the deep ultraviolet spectrometer is introduced into the gas chamber body 60 in a pulsed or continuous flow manner through the gas delivery control component 3, so as to form a protective gas sleeve in the protective gas chamber 6. This sleeve covers the optical chamber entrance lens 4, signal output sealing socket 5, gas filling shut-off valve 9 and the weak sealing parts on the spectrometer 1, and completely isolates the spectrometer 1 from the external environment, thereby preventing oxygen, water vapor and other substances in the outside air from entering the spectrometer 1. This is beneficial to further improve the transmittance stability of the spectrometer 1 and extend its service life. Since the argon gas used by the deep ultraviolet spectrometer itself is introduced into the gas chamber body 60 to form a protective gas sleeve, there is no additional increase in argon gas consumption. Since the continuous flow of argon gas does not flow into the spectrometer 1, it will not contaminate the optical chamber.

[0048] In addition, the argon gas can be preheated before entering the main body 60 of the gas chamber to ensure that the argon gas flowing into the main body 60 of the gas chamber does not affect the constant temperature of the optical chamber.

[0049] Example 6: like Figure 9 and Figure 10 As shown, the inflatable beam splitter system provided in Embodiment Six differs from Embodiment Five in that: the main body 100 of the optical chamber and the main body 60 of the gas chamber are integrally manufactured, the main body 100 of the optical chamber and the main body 60 of the gas chamber share a common base plate, and the top surface of the main body 100 of the optical chamber is located below the top surface of the main body 60 of the gas chamber. The main body 60 of the gas chamber also has a groove 600 for accommodating the optical chamber incident lens 4, the signal output sealing socket 5 and the optical chamber inflation shut-off valve 9.

[0050] The light chamber air valve 34 is located on the air chamber body 60.

Claims

1. An inflatable spectrophotometer system, characterized in that: It includes a spectrophotometer (1) and a gas source (2). The gas source (2) is connected to the interior of the spectrophotometer (1) through a gas delivery control component (3). The gas source (2) injects protective gas into the interior of the spectrophotometer (1) through the gas delivery control component (3), and the pressure of the protective gas in the spectrophotometer (1) is greater than the external atmospheric pressure.

2. The inflatable spectrophotometer system as described in claim 1, characterized in that: The gas delivery control component (3) includes an air inlet pipe (30) and a pressure regulating valve (31). One end of the air inlet pipe (30) is connected to the gas source (2), and the other end is connected to the interior of the spectrometer (1). The pressure regulating valve (31) is located on the air inlet pipe (30).

3. The inflatable spectrophotometer system as described in claim 2, characterized in that: The gas delivery control assembly (3) also includes a differential pressure valve (32), which is located on the inlet pipe (30) and between the pressure regulating valve (31) and the spectrophotometer (1).

4. The inflatable spectrophotometer system as described in claim 1, characterized in that: The beam splitter (1) includes a beam chamber body (100) and a beam chamber cover plate (101). The beam chamber body (100) has an opening on one side. A beam chamber sealing groove (102) is provided circumferentially on the opening side of the beam chamber body (100), and a beam chamber sealing ring (103) is provided in the beam chamber sealing groove (102). The beam chamber cover plate (101) is provided on the beam chamber body (100) and seals the opening side of the beam chamber body (100). The optical chamber body (100) is provided with an optical chamber incident lens (4) and a signal output sealed socket (5) on its side wall.

5. The inflatable spectrophotometer system as described in claim 4, characterized in that: It also includes a protective gas chamber (6), the spectrometer (1) is located inside the protective gas chamber (6), the gas source (2) is connected to the inside of the spectrometer (1) and the inside of the protective gas chamber (6) through the gas delivery control component (3), the gas source (2) injects protective gas into the inside of the spectrometer (1) and the inside of the protective gas chamber (6) through the gas delivery control component (3), and the gas pressure of the protective gas in the spectrometer (1) and the protective gas chamber (6) is greater than the external atmospheric pressure.

6. The inflatable spectrophotometer system as described in claim 5, characterized in that: The protective air chamber (6) includes an air chamber body (60) and an air chamber cover plate (61). The air chamber body (60) has an opening on one side. An air chamber sealing groove (62) is provided circumferentially on the opening side of the air chamber body (60), and an air chamber sealing ring (63) is provided in the air chamber sealing groove (62). The air chamber cover plate (61) is provided on the air chamber body (60) and seals the opening side of the air chamber body (60). The opening side of the air chamber body (60) faces the same direction as the opening side of the light chamber body (100).

7. The inflatable spectrophotometer system as described in claim 6, characterized in that: The side wall of the air chamber body (60) is provided with an exhaust pipe connector (7) and an external incident lens (8). The exhaust pipe connector (7) is connected to the interior of the air chamber body (60), and the external incident lens (8) is coaxially arranged with the optical chamber incident lens (4) on the optical chamber body (100). The optical chamber body (100) is provided with an optical chamber inflation shut-off valve (9) on its side wall, and the optical chamber inflation shut-off valve (9) is connected to the interior of the optical chamber body (100); The protective gas in the protective gas chamber (6) is discharged through the exhaust pipe joint (7), and the gas pressure of the protective gas in both the spectrophotometer (1) and the protective gas chamber (6) is greater than or equal to the external atmospheric pressure.

8. The inflatable spectrophotometer system as described in claim 7, characterized in that: The main body of the optical chamber (100) is located on the bottom plate inside the main body of the gas chamber (60), and the beam splitting chamber (1) has gaps between itself and the protective gas chamber (6) in all directions except the bottom side. Alternatively, the optical chamber body (100) and the gas chamber body (60) are integrally manufactured, the optical chamber body (100) and the gas chamber body (60) share a base plate, and the top surface of the optical chamber body (100) is located below the top surface of the gas chamber body (60). The gas chamber body (60) is also provided with a groove (600) for accommodating the optical chamber incident lens (4), the signal output sealing socket (5) and the optical chamber inflation shut-off valve (9). Deoxidizers are provided in the main body of the light chamber (100), the main body of the gas chamber (60), and the groove (600).

9. The inflatable spectrophotometer system as described in claim 5, characterized in that: When the gas-filled spectrometer system includes a protective gas chamber (6), the gas delivery control component (3) includes a constant flow gas valve (33), a spectrometer gas valve (34), an inlet pipe (30), and a tee (35). The constant flow gas valve (33) is located on the protective gas chamber (6) and communicates with the inside of the protective gas chamber (6). The spectrometer gas valve (34) is located on the protective gas chamber (6) or the spectrometer (1) and communicates with the inside of the spectrometer (1). One end of the inlet pipe (30) is connected to the gas source (2). The inlet of the tee (35) is connected to the end of the inlet pipe (30) away from the gas source (2). The two outlets of the tee (35) are respectively connected to the constant flow gas valve (33) and the spectrometer gas valve (34) through branch pipes (36).

10. The inflatable spectrophotometer system as described in claim 1, 2, 5, 7 or 9, characterized in that: The gas source (2) includes a gas storage tank and a protective gas stored in the gas storage tank; The protective gas is nitrogen, argon, or helium.

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