Magnetron sputter coating apparatus and process

Abstract

The application relates to a magnetron sputtering coating equipment and a process thereof, and belongs to the field of magnetron sputtering coating. The equipment comprises a rack, a magnetron sputtering coating chamber, a feeding conveying belt, a discharging conveying belt and a switching mechanism. The magnetron sputtering coating chamber is arranged on the rack and is used for magnetron sputtering coating of a substrate. The feeding conveying belt is arranged on the rack and is used for conveying the substrate to the magnetron sputtering coating chamber. The discharging conveying belt is arranged on the rack and is opposite to the feeding conveying belt in conveying direction. The switching mechanism is arranged on the rack and is used for transferring the coated substrate on the feeding conveying belt to the discharging conveying belt. The application has the effects of eliminating the back-and-forth work of workers, improving the efficiency and safety of the magnetron sputtering coating process of the substrate.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering coating, and more particularly to a magnetron sputtering coating apparatus and process thereof. Background Technology

[0002] In the manufacturing process of various materials, coating is a key surface treatment technology. By depositing a thin layer of functional material on the surface of a substrate, its performance, reliability, and lifespan can be significantly improved. Magnetron sputtering coating is a commonly used coating method for substrates. By applying an electromagnetic field in a vacuum environment, argon ions bombard the surface of a solid target material, and the sputtered target atoms can be deposited onto the substrate to form a thin film.

[0003] Currently, due to the strict environmental requirements of magnetron sputtering coating, the magnetron sputtering coating of substrates is usually carried out in a separate isolated workshop. In order to ensure the continuity and efficiency of the processing, most existing substrate magnetron sputtering coating equipment uses conveyor belts for loading and unloading. The loading and unloading positions are distributed at both ends of the conveyor belt, requiring workers to work back and forth, resulting in low work efficiency. In addition, the frequent movement of workers in the isolated workshop poses safety hazards. Summary of the Invention

[0004] To improve the efficiency and safety of magnetron sputtering coating on substrates, this application provides a magnetron sputtering coating equipment and process.

[0005] The magnetron sputtering coating equipment provided in this application adopts the following technical solution: A magnetron sputtering coating apparatus includes a frame, a magnetron sputtering coating chamber, a feeding conveyor belt, a discharging conveyor belt, and a switching mechanism. The magnetron sputtering coating chamber is mounted on the frame and is used to magnetron sputter-coat a substrate. The feeding conveyor belt is mounted on the frame and is used to transport the substrate to the magnetron sputtering coating chamber. The discharging conveyor belt is mounted on the frame and its conveying direction is opposite to that of the feeding conveyor belt. The switching mechanism is mounted on the frame and is used to transfer the coated substrate from the feeding conveyor belt to the discharging conveyor belt.

[0006] By adopting the above technical solution, the staff places the substrate to be coated on the feeding conveyor belt, which transports the substrate to the magnetron sputtering coating chamber. After the magnetron sputtering coating chamber coats the substrate with magnetron sputtering, the feeding conveyor belt continues to transport the coated substrate to the changing mechanism. The changing mechanism transfers the coated substrate from the feeding conveyor belt to the unloading conveyor belt. The unloading conveyor belt, which is in the opposite direction to the feeding conveyor belt, can transport the coated substrate to the loading position. This eliminates the need for staff to travel back and forth, improving the efficiency and safety of the magnetron sputtering coating process.

[0007] Optionally, the feeding conveyor belt and the unloading conveyor belt are arranged in parallel, one above the other. The switching mechanism includes a lifting seat, a push-pull assembly, and a lifting component. The lifting seat is vertically slidably mounted on the frame at the same end of the feeding conveyor belt and the unloading conveyor belt. The push-pull assembly is mounted on the lifting seat and is used to drive the substrate to move. The lifting component is mounted on the frame and is used to drive the lifting seat to move up and down.

[0008] By adopting the above technical solution, the feeding conveyor belt transports the coated substrate to the side near the lifting seat. The lifting component drives the lifting seat to rise and fall to the height of the feeding conveyor belt. Then, the push-pull component drives the substrate on the feeding conveyor belt to move onto the lifting seat. The lifting component then drives the lifting seat to lift and fall the substrate to the height of the unloading conveyor belt. The push component pushes the substrate onto the unloading conveyor belt, thus conveniently completing the transfer of the substrate from the feeding conveyor belt to the unloading conveyor belt.

[0009] Optionally, the push-pull assembly includes a conveyor rod, a conveyor wheel, a conveyor belt, and a drive component. Multiple conveyor rods are rotatably arranged at intervals on the lifting seat. The conveyor wheels are coaxially arranged on the conveyor rods. The conveyor belt is sleeved on the multiple conveyor wheels. The drive component is arranged on the lifting seat and is used to drive the conveyor belt to rotate.

[0010] By adopting the above technical solution, the feeding conveyor belt transports the substrate to the conveyor rods. The driving component drives the conveyor belt to rotate, and the conveyor belt drives the conveyor wheel to rotate away from the feeding conveyor belt. The conveyor rods can then rotate away from the feeding conveyor belt, causing the substrate to move onto multiple conveyor rods. The driving component drives the conveyor belt to rotate in the opposite direction, causing the conveyor wheel to drive the conveyor rods to rotate towards the unloading conveyor belt. The conveyor rods can then drive the substrate to move onto the unloading conveyor belt.

[0011] Optionally, the frame is provided with a cleaning mechanism for cleaning the substrate before coating. The cleaning mechanism includes an ultrasonic cleaner, a transfer component, and a drying component. The ultrasonic cleaner is mounted on the frame, the transfer component is mounted on the frame and is used to transfer the substrate on the feed conveyor belt to the ultrasonic cleaner, and the drying component is mounted on the frame and is used to dry the cleaned substrate.

[0012] By adopting the above technical solution, the feeding conveyor belt transports the substrate to be coated to the transfer component. The transfer component transfers the substrate on the feeding conveyor belt to the ultrasonic cleaning machine. After the ultrasonic cleaning machine cleans the substrate, the transfer component transfers the cleaned substrate back to the feeding conveyor belt. During the transfer process, the drying component dries the cleaned substrate, which can conveniently complete the cleaning of the substrate and improve the adhesion and stability of the subsequent coating.

[0013] Optionally, the transfer assembly includes a transfer seat, a turntable, a clamping assembly, a moving component, and a rotating component. The transfer seat is slidably mounted on the frame between the ultrasonic cleaner and the feeding conveyor belt. The turntable is rotatably mounted on the transfer seat. The clamping assembly is mounted on the turntable and is used to clamp the substrate. The moving component is mounted on the frame and is used to drive the transfer seat to slide. The rotating component is mounted on the transfer seat and is used to drive the turntable to rotate.

[0014] By adopting the above technical solution, the rotating component drives the turntable to rotate, and the turntable drives the clamping assembly to rotate toward the substrate on the feeding conveyor belt. Then, the moving component drives the transfer seat to move the clamping assembly to the substrate on the feeding conveyor belt. After the clamping assembly clamps the substrate, the rotating component drives the turntable to rotate toward the ultrasonic cleaner. Then, the moving component drives the transfer seat to move toward the ultrasonic cleaner, thus conveniently transferring the substrate from the feeding conveyor belt to the ultrasonic cleaner.

[0015] Optionally, the magnetron sputtering coating chamber includes a vacuum chamber, a vacuum pumping assembly, a support frame, and a magnetron target. The vacuum chamber is mounted on a frame and spans the feed conveyor belt. A sputtering coating area is provided inside the vacuum chamber. A door is provided at the bottom of the vacuum chamber. The vacuum pumping assembly is mounted on the vacuum chamber and is used to remove gas from the vacuum chamber. The support frame is located in the sputtering coating area and is used to transfer the substrate from the feed conveyor belt to the sputtering coating area. The magnetron target is located in the sputtering coating area and is used to sputter a predetermined film onto the substrate.

[0016] By adopting the above technical solution, the feeding conveyor belt transports the substrate to the bottom of the vacuum chamber. After the chamber door is opened, the carrier frame transfers the substrate from the feeding conveyor belt to the sputtering coating area. After the chamber door is closed, the vacuum pumping component evacuates the vacuum chamber, and then the magnetron sputtering target can sputter the predetermined film material onto the substrate, thus conveniently coating the substrate.

[0017] Optionally, the support frame includes a support base, a reversing seat, a pickup assembly, an extension, and a reversing component. The support base is slidably mounted on the vacuum chamber in the direction of the chamber door. The reversing seat is rotatably mounted on the support base. The pickup assembly is mounted on the reversing seat and is used to pick up the substrate on the feeding conveyor belt. The extension is mounted on the vacuum chamber and is used to drive the support base to move. The reversing component is mounted on the support base and is used to drive the reversing seat to rotate.

[0018] By adopting the above technical solution, the extension component drives the carrier seat to move the pickup component down to the substrate on the feeding conveyor belt. After the pickup component picks up the substrate, the extension component drives the carrier seat to move the substrate up to the sputtering coating area. During the coating process, the reversing component drives the reversing seat to rotate the substrate, so that the substrate can be coated circumferentially, thereby improving the coating effect on the substrate.

[0019] Optionally, the pickup assembly includes a pickup seat, a steering seat, a clamp, an adjusting member, a steering member, and a carrier. The pickup seat is slidably mounted on the steering seat, the steering seat is rotatably mounted on the pickup seat, the clamp is mounted on the steering seat and is used to clamp the substrate, the adjusting member is mounted on the steering seat and is used to drive the pickup seat to slide, the steering member is mounted on the pickup seat and is used to drive the steering seat to rotate, and the carrier is mounted on the vacuum chamber and is used to support the substrate.

[0020] By adopting the above technical solution, after the fixture picks up the substrate, the carrier supports the substrate, and then the steering component drives the steering seat to rotate. The steering seat can drive the substrate to rotate to face the magnetron target, so as to better coat the substrate. When the reversing seat drives the substrate to rotate and change position, the adjusting component can drive the pickup seat to move the substrate, so that the substrate always maintains a good coating distance from the magnetron target.

[0021] Optionally, the carrier includes a sliding seat, an extension seat, a support platform, a first control component, and a second control component. The sliding seat is vertically slidably disposed on the vacuum chamber, the extension seat is slidably disposed on the sliding seat, the support platform is rotatably disposed on the extension seat, the first control component is disposed on the vacuum chamber and is used to drive the sliding seat to move, and the second control component is disposed on the sliding seat and is used to drive the extension seat to move.

[0022] By adopting the above technical solution, the second control component drives the extension seat to move, so that the support platform moves to the bottom of the substrate. Then, the first control component drives the sliding seat to move, so that the support platform abuts against the bottom of the substrate, supports the substrate, and improves the stability of the substrate.

[0023] The magnetron sputtering coating process provided in this application adopts the following technical solution: A magnetron sputtering coating process includes the following steps: S1: The substrate to be coated is loaded onto the feeding conveyor belt, which then transports the substrate. S2: The transfer component transfers the substrate on the feed conveyor belt to the ultrasonic cleaner for cleaning, then the drying component dries the substrate, and the transfer component then transfers the dried substrate back to the feed conveyor belt. S3: The carrier transfers the substrate from the feeding conveyor belt to the sputtering coating area, the chamber door is closed, the air extraction component removes the gas in the vacuum chamber, and the magnetron-controlled targeted substrate is sputtered with the predetermined film; then the chamber door is opened, and the carrier transfers the coated substrate to the feeding conveyor belt for continued transport. S4: The lifting seat is raised to the height of the feeding conveyor belt. The push-pull assembly drives the substrate on the feeding conveyor belt to move onto the lifting seat. Then the lifting seat is raised to the height of the unloading conveyor belt. The push-pull assembly pushes the substrate onto the unloading conveyor belt. The unloading conveyor belt outputs the coated substrate to the feeding position.

[0024] In summary, this application includes at least one of the following beneficial technical effects: The switching mechanism transfers the coated substrate from the feeding conveyor belt to the unloading conveyor belt. The unloading conveyor belt, which is in the opposite direction to the feeding conveyor belt, can transport the coated substrate to the loading position. This eliminates the need for workers to travel back and forth, improving the efficiency and safety of the magnetron sputtering coating process for the substrate. After the ultrasonic cleaning machine cleans the substrate, the transfer component transfers the cleaned substrate to the feeding conveyor belt. During the transfer process, the drying component dries the cleaned substrate, which can conveniently complete the cleaning of the substrate and improve the adhesion and stability of the subsequent coating. During the coating process, the commutator drives the commutator seat to rotate the substrate, which allows for circumferential coating of the substrate and improves the coating effect on the substrate. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a magnetron sputtering coating apparatus according to an embodiment of this application.

[0026] Figure 2 This is a structural schematic diagram from another perspective of an embodiment of this application.

[0027] Figure 3 This is a cross-sectional structural diagram of the magnetron sputtering coating chamber according to an embodiment of this application.

[0028] Figure 4 This is a schematic diagram of the support frame according to an embodiment of this application.

[0029] Reference numerals: 1. Frame; 2. Magnetron sputtering coating chamber; 21. Vacuum chamber; 22. Evacuation assembly; 23. Support frame; 231. Support base; 232. Reversing base; 233. Pick-up assembly; 2331. Pick-up base; 2332. Reversing base; 2333. Fixture; 2334. Adjusting component; 2335. Support component; 23351. Sliding base; 23352. Extension base; 23353. Support platform; 23354. First control component; 23355. Second control component; 234 1. Extension component; 24. Magnetically controlled target; 3. Feeding conveyor belt; 4. Discharging conveyor belt; 5. Changing mechanism; 51. Lifting seat; 52. Push-pull assembly; 521. Conveying rod; 522. Conveying wheel; 523. Conveying belt; 524. Drive component; 53. Lifting component; 6. Cleaning mechanism; 61. Ultrasonic cleaner; 62. Transfer assembly; 621. Transfer seat; 622. Turntable; 623. Clamping assembly; 624. Moving component; 63. Drying assembly; 7. Sputtering coating area; 8. Silo door. Detailed Implementation

[0030] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0031] This application discloses a magnetron sputtering coating equipment and process.

[0032] Reference Figure 1 The magnetron sputtering coating equipment includes a frame 1, a magnetron sputtering coating chamber 2, a feeding conveyor belt 3, a discharging conveyor belt 4, a changing mechanism 5, and a cleaning mechanism 6.

[0033] Reference Figure 1 , Figure 2A feeding conveyor belt 3 is installed on the frame 1. The feeding conveyor belt 3 is used to transport the substrate to the magnetron sputtering coating chamber 2. A cleaning mechanism 6 is installed on the frame 1. The cleaning mechanism 6 is used to clean the substrate before coating. The cleaning mechanism 6 includes an ultrasonic cleaner 61, a transfer assembly 62, and a drying assembly 63. The ultrasonic cleaner 61 is installed on the frame 1 on the side of the feeding conveyor belt 3. The transfer assembly 62 is installed on the frame 1. The transfer assembly 62 is used to transfer the substrate on the feeding conveyor belt 3 to the ultrasonic cleaner 61. The transfer assembly 62 includes a transfer seat 621, a turntable 622, a clamping assembly 623, a moving part 624, and a rotating part. The transfer seat 621 is along the feeding... The conveyor belt 3 is slidably mounted on the frame 1 in the direction of the ultrasonic cleaner 61. The turntable 622 is rotatably mounted on the transfer seat 621. The clamping assembly 623 is mounted on the turntable 622. The clamping assembly 623 is used to clamp the substrate. In this embodiment, the clamping assembly 623 includes a telescopic cylinder, a double-headed cylinder and two clamping plates. The telescopic cylinder is vertically mounted on the turntable 622. The double-headed cylinder is mounted on the piston rod of the telescopic cylinder. The two clamping plates are respectively mounted on the two piston rods of the double-headed cylinder. The piston rod of the telescopic cylinder extends and retracts, so that the two clamping plates are located on both sides of the substrate. Then the two piston rods of the double-headed cylinder retract, which drives the two clamping plates to clamp the substrate.

[0034] Reference Figure 2 The movable component 624 is mounted on the frame 1 and is used to drive the transfer seat 621 to slide. In this embodiment, the movable component 624 is a cylinder, which is mounted on the frame 1 along the sliding direction of the transfer seat 621, and the piston rod of the cylinder is connected to the transfer seat 621. The rotating component is mounted on the transfer seat 621 and is used to drive the turntable 622 to rotate. In this embodiment, the rotating component is a servo motor, which is mounted on the transfer seat 621, and the output shaft of the servo motor is coaxially connected to the turntable 622. The drying component 63 is mounted on the frame 1 and is used to dry the cleaned substrate. In this embodiment, the drying component 63 is a hot air blower, and the hot air blower frame 1 is located on the frame 1 between the ultrasonic cleaner 61 and the feeding conveyor belt 3.

[0035] The operator loads the substrate to be coated onto the feeding conveyor belt 3. The feeding conveyor belt 3 transports the substrate to the clamping assembly 623. The moving component 624 drives the transfer seat 621 to move closer to the feeding conveyor belt 3, and the rotating component drives the clamping assembly 623 to rotate above the substrate on the feeding conveyor belt 3. The clamping assembly 623 can then clamp the substrate on the feeding conveyor belt 3. Then, the moving component 624 drives the transfer seat to move closer to the ultrasonic cleaner 61, and the rotating component drives the turntable 622 to rotate the substrate closer to the ultrasonic cleaner 61, so that the clamping assembly 623 clamps the substrate into the ultrasonic cleaner 61. The substrate is then placed into the ultrasonic cleaner 61, and the ultrasonic cleaner 61 is started to clean the substrate. Then, driven by the moving component 624 and the rotating component, the cleaned substrate can be transferred back onto the feeding conveyor belt 3. During the transfer process, the drying assembly 63 dries the moisture on the substrate, thereby removing impurities and oil stains from the substrate and improving the adhesion and stability of the subsequent coating.

[0036] Reference Figure 1 , Figure 3 A magnetron sputtering coating chamber 2 is mounted on the frame 1. The magnetron sputtering coating chamber 2 is used to magnetron sputter coat a substrate. The magnetron sputtering coating chamber 2 includes a vacuum chamber 21, a vacuum pump assembly 22, a support frame 23, and a magnetron target 24. The vacuum chamber 21 is mounted on the frame 1 and spans above the feed conveyor belt 3. A sputtering coating area 7 is provided inside the vacuum chamber 21. The bottom of the vacuum chamber 21 has an opening, and a door 8 is installed at the bottom of the vacuum chamber 21 to close the bottom opening. In this embodiment, the door 8 includes a door seat, a door body, and a sealing strip. The door seat is vertically slidably mounted on the vacuum chamber 21 and is driven by a cylinder. The door body is slidably mounted on the door seat along one side of the vacuum chamber 21 to the other side and is driven by a cylinder. The sealing strip is circumferentially mounted on the door body near the vacuum chamber 21. On one side, the cylinder drives the door seat to move the door body away from the vacuum chamber 21, and then drives the door body away from the bottom of the vacuum chamber 21, so that the bottom opening of the vacuum chamber 21 is opened. The cylinder drives the door body to move to the position of closing the bottom opening of the vacuum chamber 21, and then the cylinder drives the door seat to move the door body closer to the vacuum chamber 21, so that the door body can drive the sealing strip to press against the vacuum chamber 21 and close the bottom of the vacuum chamber 21. The air extraction assembly 22 is installed on the vacuum chamber 21. The air extraction assembly 22 is used to extract the gas in the vacuum chamber 21. In this embodiment, the air extraction assembly 22 includes an exhaust fan. The exhaust fan is installed on the vacuum chamber 21, and the air inlet of the exhaust fan is connected to the vacuum chamber 21 through a pipe. The magnetron sputtering target 24 is installed on the side wall of the sputtering coating area 7. The magnetron sputtering target 24 is used to sputter a predetermined film material onto the substrate.

[0037] Reference Figure 3 , Figure 4The carrier frame 23 is installed in the sputtering coating area 7. The carrier frame 23 is used to transfer the substrate from the feed conveyor belt 3 to the sputtering coating area 7. The carrier frame 23 includes a carrier seat 231, a reversing seat 232, a pickup assembly 233, an extension 234, and a reversing component. The carrier seat 231 is slidably installed on the top of the sputtering coating area 7 in the direction toward the chamber door 8. The extension 234 is installed on the vacuum chamber 21 and is used to drive the carrier seat 231 to move. In this embodiment, the extension 234 is a cylinder. The reversing seat 232 is rotatably installed on the end of the carrier seat 231 near the chamber door 8 in the horizontal direction. The reversing component is installed on the carrier seat 231 and is used to drive the reversing seat 232 to rotate. In this embodiment, the reversing component is a servo motor.

[0038] Reference Figure 3 , Figure 4 The pickup assembly 233 is mounted on the reversing seat 232. The pickup assembly 233 is used to pick up the substrate on the feed conveyor belt 3. The pickup assembly 233 includes a pickup seat 2331, a reversing seat 2332, a clamp 2333, an adjusting member 2334, a steering member, and a carrier member 2335. The pickup seat 2331 is slidably mounted on the reversing seat 232 in a direction perpendicular to the sliding direction of the carrier frame 23. The adjusting member 2334 is mounted on the reversing seat 232 and is used to drive the pickup seat 2331 to... In this embodiment, the adjusting component 2334 is a cylinder; the steering seat 2332 is vertically rotatably mounted on the pickup seat 2331, and the steering component is mounted on the pickup seat 2331. The steering component is used to drive the steering seat 2332 to rotate. In this embodiment, the steering component is a servo motor; the clamp 2333 is mounted on the steering seat 2332 and is used to clamp the substrate. In this embodiment, the clamp 2333 includes a double-headed cylinder and two clamping plates. The double-headed cylinder is mounted on the steering seat 2332. Two clamping plates are respectively installed on the piston rods on both sides of the double-headed cylinder; the support member 2335 is installed on the vacuum chamber 21. The support member 2335 is used to support the substrate entering the sputtering coating area 7. The support member 2335 includes a sliding seat 23351, an extension seat 23352, a support platform 23353, a first control member 23354, and a second control member 23355. The sliding seat 23351 is slidably installed vertically on the vacuum chamber 21, and the extension seat 23352 is slidably installed horizontally on the sliding seat 23351. On 3351, the support platform 23353 is rotatably mounted on the side of the extension seat 23352 near the top of the vacuum chamber 21. The first control element 23354 is mounted on the vacuum chamber 21 and is used to drive the sliding seat 23351 to move. The second control element 23355 is mounted on the sliding seat 23351 and is used to drive the extension seat 23352 to move. In this embodiment, both the first control element 23354 and the second control element 23355 are cylinders.

[0039] The feeding conveyor belt 3 transports the cleaned substrate to the bottom of the vacuum chamber 21. The chamber door 8 opens, making the bottom of the vacuum chamber 21 open. Then, the extension 234 drives the carrier 231 to move the clamp 2333 down to the substrate position on the feeding conveyor belt 3. The adjusting component 2334 drives the pickup 2331 to move the clamp 2333 laterally, so that the clamp 2333 is aligned with the substrate. Then, the extension 234 again drives the carrier 231 to move the clamp 2333 down, so that the two sides of the clamp 2333 are aligned with the substrate. Each clamping plate moves to both sides of the substrate, and the clamp 2333 clamps the substrate. The extension 234 then drives the carrier 231 to move the clamp 2333 and the substrate from the bottom opening of the vacuum chamber 21 into the sputtering coating area 7. The chamber door 8 closes, and the steering component drives the steering seat 2332 to rotate vertically. The steering seat 2332 drives the clamp 2333 and the substrate from a horizontal state to a vertical state, so that the substrate can be directly facing the magnetron target 24 for better coating. The adjustment component 2334 then drives the carrier 231 to move the substrate from a horizontal state to a vertical state. The pickup seat 2331 moves the clamp 2333 and the substrate, adjusting the distance between the substrate and the magnetron target 24 to the set distance. The second control unit 23355 drives the extension seat 23352 to move horizontally so that the support platform 23353 is below the substrate. The first control unit 23354 drives the sliding seat 23351 to move the extension seat 23352 and the support platform 23353 upward, so that the support platform 23353 can abut against the bottom of the substrate to support the substrate. Then the vacuum assembly 22 empties the vacuum chamber. The gas in the sputtering coating area 7 is removed, making the sputtering coating area 7 hollow. Then, an electromagnetic field is applied, which causes the magnetron target 24 to sputter the predetermined film material onto the substrate. During the coating process, the commutator drives the commutator seat 232 to rotate. The commutator seat 232 drives the fixture 2333 and the substrate to rotate. With the help of the adjusting component 2334, the substrate is moved, so that the substrate always maintains a good coating distance from the magnetron target 24. This allows for stable circumferential coating of the substrate and effectively improves the coating effect on the substrate.

[0040] Reference Figure 1The unloading conveyor belt 4 is installed on the frame 1 below the feeding conveyor belt 3. The conveying direction of the unloading conveyor belt 4 is opposite to that of the feeding conveyor belt 3, and the unloading conveyor belt 4 is parallel to the feeding conveyor belt 3. The switching mechanism 5 is installed on the frame 1. The switching mechanism 5 is used to transfer the coated substrate on the feeding conveyor belt 3 to the unloading conveyor belt 4. The switching mechanism 5 includes a lifting seat 51, a push-pull assembly 52, and a lifting component 53. The lifting seat 51 is slidably installed vertically on the frame 1 on the unloading side of the feeding conveyor belt 3. The lifting component 53 is installed on the frame 1 and is used to drive the lifting seat 51 to move up and down. In this embodiment, the lifting component 53 is a cylinder. The push-pull assembly 52 is installed on the lifting seat 51. The push-pull assembly 52 is used to drive the substrate to move. The push-pull assembly 52 includes a conveyor rod 521, a conveyor wheel 522, a conveyor belt 523, and a drive component 524. Multiple conveyor rods 521 are rotatably mounted on the lifting seat 51 along the conveying direction of the substrate. One conveyor wheel 522 is coaxially mounted on the same side of each conveyor rod 521. The conveyor belt 523 is sleeved on multiple conveyor wheels 522. The drive component 524 is mounted on the lifting seat 51 and is used to drive the conveyor belt 523 to rotate. In this embodiment, the drive component 524 includes a servo motor and a drive wheel. The servo motor is mounted on the frame 1, and the drive wheel is coaxially mounted on the output shaft of the servo motor. The drive wheel is sleeved inside the conveyor belt 523.

[0041] After coating, the substrate is conveyed by the feeding conveyor belt 3 to a position close to the lifting seat 51. The lifting component 53 first causes the lifting seat 51 to rise to the height of the feeding conveyor belt 3, so that the substrate on the feeding conveyor belt 3 can be conveyed to the conveyor rod 521. The driving component 524 drives the conveyor belt 523 to rotate, and the conveyor belt 523 drives multiple conveyor wheels 522 to rotate away from the feeding conveyor belt 3. The multiple conveyor wheels 522 then drive multiple conveyor rods 521 to rotate away from the feeding conveyor belt 3. The multiple conveyor rods 521 can convey the substrate to the multiple conveyor rods 521 through friction and detach it from the feeding conveyor belt 3. Then, the lifting component 53 drives the lifting seat 51 to lift the substrate to the height of the unloading conveyor belt 4. The driving component 524 drives the conveyor belt 523 to rotate in the opposite direction. The conveyor belt 523 drives the conveyor rods 521 to rotate in the opposite direction through the conveyor wheels 522, so that the conveyor rods 521 can convey the substrate to the unloading conveyor belt 4. Then, the unloading conveyor belt 4 conveys the substrate to the substrate loading position.

[0042] The implementation principle of the magnetron sputtering coating equipment in this application embodiment is as follows: the operator loads the substrate to be coated onto the feeding conveyor belt 3, the feeding conveyor belt 3 transports the substrate to the cleaning mechanism, the cleaning mechanism cleans the substrate, and the feeding conveyor belt 3 then transports the substrate to the magnetron sputtering coating chamber 2. After the magnetron sputtering coating chamber 2 coats the substrate, the feeding conveyor belt 3 transports the substrate to the changing mechanism 5, the changing mechanism 5 transfers the coated substrate from the feeding conveyor belt 3 to the unloading conveyor belt 4, and the unloading conveyor belt 4 unloads the coated substrate back to the substrate loading position, so that the operator does not need to go back and forth, improving the efficiency and safety of the magnetron sputtering coating process of the substrate.

[0043] The magnetron sputtering coating process includes the following steps: S1: The substrate to be coated is fed onto the feeding conveyor belt 3, and the feeding conveyor belt 3 transports the substrate. S2: The transfer component 62 transfers the substrate on the feed conveyor belt 3 to the ultrasonic cleaner 61 for cleaning, then the drying component 63 dries the substrate, and the transfer component 62 then transfers the dried substrate to the feed conveyor belt 3. S3: The carrier 23 transfers the substrate from the feed conveyor belt 3 to the sputtering coating area 7, the chamber door 8 is closed, the air extraction component 22 removes the gas in the vacuum chamber 21, and the magnetron target 24 sputters the predetermined film onto the substrate; then the chamber door 8 is opened, the carrier 23 transfers the coated substrate to the feed conveyor belt 3 for continued conveying. S4: The lifting seat 51 is raised to the height of the feeding conveyor belt 3. The push-pull assembly 52 drives the substrate on the feeding conveyor belt 3 to move onto the lifting seat 51. Then the lifting seat 51 is raised to the height of the unloading conveyor belt 4. The push-pull assembly 52 pushes the substrate onto the unloading conveyor belt 4. The unloading conveyor belt 4 outputs the coated substrate to the feeding position.

[0044] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A magnetron sputtering coating apparatus, characterized in that: The system includes a frame (1), a magnetron sputtering coating chamber (2), a feeding conveyor belt (3), a discharging conveyor belt (4), and a switching mechanism (5). The magnetron sputtering coating chamber (2) is mounted on the frame (1) and is used to magnetron sputter coat the substrate. The feeding conveyor belt (3) is mounted on the frame (1) and is used to transport the substrate to the magnetron sputtering coating chamber (2). The discharging conveyor belt (4) is mounted on the frame (1) and is in the opposite direction to the feeding conveyor belt (3). The switching mechanism (5) is mounted on the frame (1) and is used to transfer the coated substrate on the feeding conveyor belt (3) to the discharging conveyor belt (4).

2. The magnetron sputtering coating equipment according to claim 1, characterized in that: The feeding conveyor belt (3) and the unloading conveyor belt (4) are arranged in parallel, one above the other. The switching mechanism (5) includes a lifting seat (51), a push-pull assembly (52), and a lifting component (53). The lifting seat (51) is vertically slidably arranged on the frame (1) at the same end of the feeding conveyor belt (3) and the unloading conveyor belt (4). The push-pull assembly (52) is arranged on the lifting seat (51) and is used to drive the substrate to move. The lifting component (53) is arranged on the frame (1) and is used to drive the lifting seat (51) to move up and down.

3. The magnetron sputtering coating equipment according to claim 2, characterized in that: The push-pull assembly (52) includes a conveyor rod (521), a conveyor wheel (522), a conveyor belt (523), and a drive component (524). The conveyor rod (521) is arranged in multiple rotatable positions on the lifting seat (51). The conveyor wheel (522) is coaxially arranged on the conveyor rod (521). The conveyor belt (523) is sleeved on the multiple conveyor wheels (522). The drive component (524) is arranged on the lifting seat (51) and is used to drive the conveyor belt (523) to rotate.

4. The magnetron sputtering coating equipment according to claim 1, characterized in that: The frame (1) is provided with a cleaning mechanism (6) for cleaning the substrate before coating. The cleaning mechanism (6) includes an ultrasonic cleaner (61), a transfer component (62) and a drying component (63). The ultrasonic cleaner (61) is provided on the frame (1). The transfer component (62) is provided on the frame (1) and is used to transfer the substrate on the feed conveyor belt (3) to the ultrasonic cleaner (61). The drying component (63) is provided on the frame (1) and is used to dry the cleaned substrate.

5. The magnetron sputtering coating equipment according to claim 4, characterized in that: The transfer assembly (62) includes a transfer seat (621), a turntable (622), a clamping assembly (623), a moving part (624), and a rotating part. The transfer seat (621) is slidably mounted on the frame (1) between the ultrasonic cleaner (61) and the feed conveyor belt (3). The turntable (622) is rotatably mounted on the transfer seat (621). The clamping assembly (623) is mounted on the turntable (622) and is used to clamp the substrate. The moving part (624) is mounted on the frame (1) and is used to drive the transfer seat (621) to slide. The rotating part is mounted on the transfer seat (621) and is used to drive the turntable (622) to rotate.

6. The magnetron sputtering coating equipment according to claim 1, characterized in that: The magnetron sputtering coating chamber (2) includes a vacuum chamber (21), an air extraction component (22), a support frame (23), and a magnetron target (24). The vacuum chamber (21) is mounted on the frame (1) and spans the feed conveyor belt (3). A sputtering coating area (7) is provided inside the vacuum chamber (21). A chamber door (8) is provided at the bottom of the vacuum chamber (21). The air extraction component (22) is mounted on the vacuum chamber (21) and is used to extract the gas inside the vacuum chamber (21). The support frame (23) is mounted inside the sputtering coating area (7) and is used to transfer the substrate from the feed conveyor belt (3) to the sputtering coating area (7). The magnetron target (24) is mounted inside the sputtering coating area (7) and is used to sputter a predetermined film onto the substrate.

7. The magnetron sputtering coating equipment according to claim 6, characterized in that: The support frame (23) includes a support base (231), a reversing seat (232), a pickup assembly (233), an extension (234), and a reversing component. The support base (231) is slidably disposed on the vacuum chamber (21) in the direction of the chamber door (8). The reversing seat (232) is rotatably disposed on the support base (231). The pickup assembly (233) is disposed on the reversing seat (232) and is used to pick up the substrate on the feeding conveyor belt (3). The extension (234) is disposed on the vacuum chamber (21) and is used to drive the support base (231) to move. The reversing component is disposed on the support base (231) and is used to drive the reversing seat (232) to rotate.

8. The magnetron sputtering coating equipment according to claim 7, characterized in that: The pickup assembly (233) includes a pickup seat (2331), a steering seat (2332), a clamp (2333), an adjusting member (2334), a steering member, and a carrier member (2335). The pickup seat (2331) is slidably mounted on the reversing seat (232), and the steering seat (2332) is rotatably mounted on the pickup seat (2331). The clamp (2333) is mounted on the steering seat (2332) and is used to clamp the substrate. The adjusting member (2334) is mounted on the reversing seat (232) and is used to drive the pickup seat (2331) to slide. The steering member is mounted on the pickup seat (2331) and is used to drive the steering seat (2332) to rotate. The carrier member (2335) is mounted on the vacuum chamber (21) and is used to support the substrate.

9. The magnetron sputtering coating equipment according to claim 8, characterized in that: The carrier (2335) includes a sliding seat (23351), an extension seat (23352), a support platform (23353), a first control member (23354), and a second control member (23355). The sliding seat (23351) is vertically slidably disposed on the vacuum chamber (21). The extension seat (23352) is slidably disposed on the sliding seat (23351). The support platform (23353) is rotatably disposed on the extension seat (23352). The first control member (23354) is disposed on the vacuum chamber (21) and is used to drive the sliding seat (23351) to move. The second control member (23355) is disposed on the sliding seat (23351) and is used to drive the extension seat (23352) to move.

10. A coating process applied to the magnetron sputtering coating equipment according to any one of claims 1-9, characterized in that: Includes the following steps: S1: The substrate to be coated is loaded onto the feeding conveyor belt (3), and the feeding conveyor belt (3) transports the substrate. S2: The transfer component (62) transfers the substrate on the feed conveyor belt (3) to the ultrasonic cleaner (61) for cleaning, and then the drying component (63) dries the substrate, and the transfer component (62) transfers the dried substrate to the feed conveyor belt (3). S3: The carrier (23) transfers the substrate from the feeding conveyor belt (3) to the sputtering coating area (7), the chamber door (8) is closed, the air extraction assembly (22) removes the gas in the vacuum chamber (21), and the magnetron target (24) sputters the predetermined film onto the substrate; then the chamber door (8) is opened, and the carrier (23) transfers the coated substrate to the feeding conveyor belt (3) for continued conveying; S4: The lifting seat (51) is raised to the height of the feeding conveyor belt (3), and the push-pull assembly (52) drives the substrate on the feeding conveyor belt (3) to move to the lifting seat (51). Then the lifting seat (51) is raised to the height of the unloading conveyor belt (4), and the push-pull assembly (52) pushes the substrate to the unloading conveyor belt (4). The unloading conveyor belt (4) outputs the coated substrate to the feeding position.

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