A vacuum coating apparatus

Abstract

The present application relates to the field of vacuum coating equipment, and particularly relates to a vacuum coating equipment, which comprises a rotating shaft, a support fixedly installed at the lower end of the rotating shaft, and a plating pot fixedly installed at the lower end of the support, wherein the plating pot comprises a top plate, a plurality of side plates fixedly installed at the bottom of the top plate, the side plates are isosceles trapezoids with narrow top and wide bottom, and the plurality of side plates are distributed in a prism shape around the rotating shaft; a through groove is arranged on the side plate, a carrier plate is movably installed in the through groove, a plurality of mounting holes are uniformly distributed on the carrier plate, a substrate fixing assembly is arranged at the mounting hole; an upper shaft is fixedly installed at one end of the carrier plate, the upper shaft coincides with the symmetry axis of the corresponding side plate, the upper shaft is movably installed on the corresponding side plate, and a power device for driving the plurality of upper shafts to rotate is arranged on the support; the driving motor drives the driving bevel gear to rotate, the driving bevel gear drives the plurality of transmission shafts to synchronously rotate through the driven bevel gears, and the transmission shafts and the carrier plates are turned over, so that the substrate is turned over.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment, and more specifically to a vacuum coating device. Background Technology

[0002] Vacuum coating is a method of heating metal or non-metal materials under high vacuum conditions, causing them to evaporate and condense onto the surface of the workpiece (metal, semiconductor, or insulator) to form a thin film.

[0003] Existing vacuum coating equipment, such as the thermal resistance evaporation device and evaporation equipment disclosed in utility model patent application number CN202220062545.5, discloses that the coating pot is located above the nozzle assembly and can rotate around its own axis. The axis of the coating pot is perpendicular to the plane of the top wall of the support cavity, and the axis of the coating pot corresponds to the middle of the evaporation container. The inner wall of the coating pot is provided with multiple support positions for supporting the substrate.

[0004] However, existing vacuum coating equipment cannot quickly flip the substrate mounted on the coating pot. When it is necessary to coat both sides of the substrate, it is necessary to wait for the substrate to cool down before flipping it over and re-clamping it, which makes the coating process cumbersome and reduces processing efficiency. Summary of the Invention

[0005] The purpose of this invention is to provide a vacuum coating equipment that facilitates the flipping of substrates, thereby addressing the deficiencies mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A vacuum coating apparatus includes a rotating shaft, a bracket fixedly mounted at the lower end of the rotating shaft, a coating pot fixedly mounted at the lower end of the bracket, the coating pot including a top plate, and multiple side plates fixedly mounted at the bottom of the top plate. The side plates are isosceles trapezoids with a narrower top and a wider bottom, and the multiple side plates are distributed in a frustum shape around the rotating shaft. A through groove is provided on the side plate, and a substrate plate is movably mounted in the through groove. The substrate plate has a plurality of mounting holes evenly distributed, and a substrate fixing assembly is provided at the mounting holes. An upper shaft is fixedly mounted at one end of the substrate plate, the upper shaft coinciding with the axis of symmetry of the corresponding side plate, and the upper shaft is movably mounted on the corresponding side plate. The bracket is provided with a power device for driving the multiple upper shafts to rotate.

[0007] As a further improvement, the power unit is a drive motor mounted on the bracket. A driving bevel gear is fixedly mounted on the motor shaft of the drive motor. A transmission shaft corresponding to each of the upper shafts is rotatably mounted on the top plate. A driven bevel gear meshing with the driving bevel gear is fixedly mounted on one end of the transmission shaft, and the other end of the transmission shaft is connected to the corresponding upper shaft.

[0008] As a further improvement, the slide plate is an isosceles trapezoid with a narrower end near the rotation axis and a wider end away from the rotation axis, and the corresponding upper shaft coincides with the axis of symmetry of the slide plate; limiting plates are fixedly installed on the inner and outer sides of the side plate corresponding to the waist edge of the slide plate, and a slot is provided between the ends of the two limiting plates near the through groove for the waist edge of the slide plate to be inserted.

[0009] As a further improvement, an upper bushing matching the upper shaft is fixedly installed on the carrier plate, and the upper shaft is movably sleeved in the upper bushing; the slot is an elongated strip extending parallel to the waist edge of the carrier plate. When the carrier plate is parallel to the corresponding side plate, the carrier plate is moved away from the rotation axis along the upper bushing, so that the waist edge of the carrier plate disengages from the corresponding slot, or the carrier plate is moved closer to the rotation axis along the upper bushing, so that the waist edge of the carrier plate is engaged in the corresponding slot.

[0010] As a further improvement, the upper shaft is coaxially arranged with the corresponding transmission shaft, and a sliding column is fixedly installed at the end of the upper shaft away from the carrier plate. The sliding column is a polygonal prism coaxially arranged with the upper shaft, and the transmission shaft is provided with a socket for the sliding column to be inserted.

[0011] As a further improvement, a lower shaft coaxially arranged with the upper shaft is fixedly installed on the carrier plate, and an electric push rod is fixedly installed on the side plate. The output end of the electric push rod extends out in a direction parallel to the lower shaft and is fixedly installed with a connecting plate. One end of the connecting plate is provided with a U-shaped groove for the lower shaft to be inserted into. Two retaining rings distributed along its axial direction are fixedly installed on the lower shaft, and one end of the connecting plate is located between the two retaining rings.

[0012] As a further improvement, the upper shaft and the lower shaft are located at opposite ends of the carrier plate, and a lower bushing that matches the lower shaft is also fixedly installed on the carrier plate.

[0013] As a further improvement, the substrate fixing assembly includes a plurality of support blocks that are circumferentially and evenly fixedly installed on the inner wall of the mounting hole, and the plurality of support blocks together support the substrate; a fixing ring is detachably installed on one side of the substrate plate by fixing screws, and a pressure foot for pressing the substrate is fixedly installed on the fixing ring.

[0014] Compared with the prior art, the beneficial effects of the present invention are: 1. This application uses a drive motor to drive the active bevel gear to rotate, and the active bevel gear drives multiple transmission shafts to rotate synchronously through the driven bevel gear. This causes the plates on each transmission shaft to flip, thereby achieving the flipping of the substrate. Double-sided coating of the substrate can be completed efficiently without disassembling the substrate. 2. After the substrate is flipped over, this application uses an electric push rod to drive the substrate to be inserted into the slot, thereby effectively suppressing the vibration and sway of the substrate when the plating pan rotates at high speed, and ensuring the coating quality. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of an embodiment of the present invention; Figure 2 yes Figure 1 A schematic diagram of a localized explosion; Figure 3 This is a schematic diagram of the side plate structure according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the substrate fixing assembly according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the fixing ring according to an embodiment of the present invention.

[0017] In the diagram: 1-Rotating shaft; 2-Bracket; 3-Glazing pot; 4-Top plate; 5-Side plate; 6-Fixing plate; 7-Through groove; 8-Carrier plate; 9-Mounting hole; 10-Upper shaft; 11-Drive motor; 12-Protective cover; 13-Driving bevel gear; 14-Bearing seat; 15-Transmission shaft; 16-Driven bevel gear; 17-Limiting plate; 18-Slot; 19-Upper bushing; 20-Sliding column; 21-Insertion hole; 22-Lower shaft; 23-Lower bushing; 24-Electric push rod; 25-Connecting plate; 26-U-shaped groove; 27-Retaining ring; 28-Support block; 29-Base plate; 30-Fixing screw; 31-Fixing ring; 32-Pressure foot; 33-Vertical part; 34-Horizontal part. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0019] like Figures 1 to 5 As shown, a vacuum coating equipment includes a rotating shaft 1, which is installed inside the vacuum coating machine and driven to rotate by a motor. A bracket 2 is fixedly installed at the lower end of the rotating shaft 1 by bolts, and a coating pot 3 is fixedly installed at the lower end of the bracket 2.

[0020] The plating pot 3 includes a horizontally positioned top plate 4, which is bolted to the lower end of the support 2. Multiple side plates 5 are fixedly mounted on the bottom of the top plate 4. Each side plate 5 is an isosceles trapezoid, narrower at the top and wider at the bottom, and is arranged in a frustum shape around the rotation axis 1. The waist edges of adjacent side plates 5 are joined together and fixed by welding. A fixing plate 6 extending horizontally towards the rotation axis 1 is welded to the upper end of each side plate 5, and is bolted to the bottom of the top plate 4. The top plate 4 is a regular polygon matching the upper ends of the multiple side plates 5, closing the upper ends of the side plates 5 and thus forming a top-closed frustum-shaped cavity. This facilitates the accumulation of evaporated coating material at the bottom of the plating pot 3, reducing upward dispersion.

[0021] like Figure 3 As shown, a through groove 7 is provided on the side plate 5, and a carrier plate 8 is movably installed in the through groove 7. Several mounting holes 9 are evenly distributed on the carrier plate 8, and substrate fixing components are provided at the mounting holes 9. An upper shaft 10 is fixedly installed at one end of the carrier plate 8 by screws. The upper shaft 10 and the carrier plate 8 are located in the same plane, and the upper shaft 10 coincides with the axis of symmetry of the corresponding side plate 5. The upper shaft 10 is movably installed on the corresponding side plate 5, and a power device for driving the multiple upper shafts 10 to rotate is provided on the bracket 2.

[0022] like Figure 2As shown, the power unit includes a drive motor 11 mounted on a bracket 2. The bracket 2 is a cylindrical shape with an open bottom. The drive motor 11 is bolted to the inner side of the top wall of the bracket 2. A protective cover 12 covering the drive motor 11 is also installed on the bracket 2. The motor shaft of the drive motor 11 extends downward through the protective cover 12 and is fixedly mounted with a driving bevel gear 13. A transmission shaft 15 corresponding to the upper shaft 10 is rotatably mounted on the top plate 4 via a bearing seat 14. The peripheral wall of the bracket 2 has a through-hole for the transmission shaft 15 to pass through. One end of the transmission shaft 15 is fixedly mounted with a driven bevel gear 16 that meshes with the driving bevel gear 13, and the other end is connected to the corresponding upper shaft 10. During operation, the drive motor 11 drives the driving bevel gear 13 to rotate. The driving bevel gear 13 drives multiple transmission shafts 15 to rotate synchronously through the driven bevel gear 16, thereby causing the transmission shafts 15 to rotate and flip the various carrier plates 8.

[0023] like Figure 2 As shown, the slide plate 8 is an isosceles trapezoid with a narrower end near the rotation axis 1 and a wider end away from the rotation axis 1. The corresponding upper shaft 10 coincides with the axis of symmetry of the slide plate 8. The through groove 7 is an isosceles trapezoid that matches the slide plate 8. Its upper base is the same width as the upper base of the slide plate 8, and its lower base is wider than the lower base of the slide plate 8, providing space for the axial movement of the slide plate 8.

[0024] like Figure 3 As shown, the inner and outer sides of the side plate 5 corresponding to the waist of the substrate 8 are respectively fixed with screws to limit plates 17. A long strip-shaped slot 18 is provided between the two limit plates 17 near the end of the through groove 7, which is used for the waist of the substrate 8 to be inserted during the coating process.

[0025] An upper bushing 19, matching the upper shaft 10, is welded onto the carrier plate 8. The upper shaft 10 is movably fitted inside the upper bushing 19, allowing it to rotate within the upper bushing 19 and move axially along it. The limiting plate 17 is an elongated strip extending parallel to the waist edge of the carrier plate 8, and the slot 18 is also an elongated strip extending parallel to the waist edge of the carrier plate 8.

[0026] When it is necessary to flip the substrate 29, the carrier plate 8 can be pulled outward along the axial direction of the upper bushing 19, so that its waist edge disengages from the slot 18. Then, the carrier plate 8 is rotated 180 degrees by the drive motor 11 to flip the substrate 29 on the carrier plate 8. After the flipping is completed, the carrier plate 8 is pushed back, so that its waist edge re-engages into the slot 18 for locking. The slot 18 structure effectively enhances the stability of the carrier plate 8 during high-speed rotation coating and reduces vibration.

[0027] like Figure 2As shown, the upper shaft 10 is coaxially arranged with the corresponding transmission shaft 15. A sliding column 20 is welded or integrally formed at the end of the upper shaft 10 away from the carrier plate 8. The sliding column 20 is a polygonal prism shape coaxially arranged with the upper shaft 10. The end of the transmission shaft 15 away from the driven bevel gear 16 is provided with an insertion hole 21 for the sliding column 20 to be inserted. The cross-sectional shape of the insertion hole 21 matches the cross-sectional shape of the sliding column 20, allowing axial movement of the upper shaft 10 and the carrier plate 8 while transmitting torque.

[0028] A lower shaft 22, coaxially arranged with the upper shaft 10, is also fixedly installed on the plate 8 by screws. The upper shaft 10 and the lower shaft 22 are respectively installed on the upper bottom edge and the lower bottom edge of the plate 8. A lower bushing 23 that matches the lower shaft 22 is also welded on the plate 8. Through the cooperation between the upper shaft 10 and the upper bushing 19 and the lower shaft 22 and the lower bushing 23, the supporting rigidity of the plate 8 is improved.

[0029] like Figure 3 As shown, an electric push rod 24 is fixedly mounted on the side plate 5 with screws. The output end of the electric push rod 24 extends in a direction parallel to the lower shaft 22 and is fixedly mounted on a connecting plate 25 with screws. The end of the connecting plate 25 away from the electric push rod 24 is provided with a U-shaped groove 26 for the lower shaft 22 to be engaged. Two retaining rings 27 are welded or integrally formed on the lower shaft 22 and distributed along its axial direction. The end of the connecting plate 25 away from the electric push rod 24 is located between the two retaining rings 27. The extension and retraction of the electric push rod 24 can drive the carrier plate 8 to move axially along the upper shaft 10 and the lower shaft 22, so that the waist edge of the carrier plate 8 is engaged or disengaged from the slot 18.

[0030] like Figure 4 and Figure 5 As shown, the substrate fixing assembly includes multiple support blocks 28 that are circumferentially and evenly spaced and fixedly installed on the inner wall of the mounting hole 9, which together support the substrate 29. A fixing ring 31 is detachably installed on one side of the substrate plate 8 by fixing screws 30, and the fixing ring 31 is coaxially arranged with the mounting hole 9. A pressure foot 32 for pressing the substrate 29 is fixedly installed on the fixing ring 31. The pressure foot 32 has a vertical part 33 extending axially parallel to the mounting hole 9, which is in close contact with the inner wall of the mounting hole 9. The end of the vertical part 33 away from the fixing ring 31 has a horizontal part 34 extending radially along the mounting hole 9.

[0031] When installing the substrate 29, place it in the mounting hole 9 and support it with the bracket 28. Then install the fixing ring 31 with the fixing screw 30. The fixing ring 31 can press the substrate 29 towards the side close to the bracket 28 by the pressure foot 32.

[0032] In practical use, the substrate 29 to be coated is installed in each mounting hole 9 of the carrier plate 8. First, the carrier plate 8 is rotated by the drive motor 11 until it is parallel to the corresponding side plate 5, so that the coating material gathered at the bottom of the coating pot 3 can evenly contact the substrate on the carrier plate 8. Then, the vacuum coating machine is started to coat the side of the substrate located at the bottom. After coating one side of the substrate is completed, there is no need to disassemble the substrate. The drive motor 11 directly drives multiple carrier plates 8 to rotate synchronously by 180 degrees, and the carrier plates 8 cause the substrates on them to flip over, thereby efficiently completing the double-sided coating of the substrate.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating equipment, characterized in that: The device includes a rotating shaft, a bracket fixedly mounted at the lower end of the rotating shaft, a plating pot fixedly mounted at the lower end of the bracket, a top plate, and multiple side plates fixedly mounted at the bottom of the top plate. Each side plate is an isosceles trapezoid with a narrower top and a wider bottom, and the multiple side plates are distributed in a frustum shape around the rotating shaft. A through groove is provided on each side plate, and a carrier plate is movably mounted within the through groove. Several mounting holes are evenly distributed on the carrier plate, and substrate fixing components are provided at the mounting holes. An upper shaft is fixedly mounted at one end of each carrier plate, and the upper shaft coincides with the axis of symmetry of the corresponding side plate. The upper shaft is movably mounted on the corresponding side plate. A power device is provided on the bracket to drive the multiple upper shafts to rotate.

2. The vacuum coating equipment as described in claim 1, characterized in that: The power unit is a drive motor mounted on the bracket. A driving bevel gear is fixedly mounted on the motor shaft of the drive motor. A transmission shaft corresponding to each upper shaft is rotatably mounted on the top plate. A driven bevel gear meshing with the driving bevel gear is fixedly mounted on one end of the transmission shaft, and the other end of the transmission shaft is connected to the corresponding upper shaft.

3. The vacuum coating equipment as described in claim 2, characterized in that: The slide plate is an isosceles trapezoid with a narrower end near the rotation axis and a wider end away from the rotation axis. The corresponding upper shaft coincides with the axis of symmetry of the slide plate. Limiting plates are fixedly installed on the inner and outer sides of the side plate corresponding to the waist of the slide plate. A slot is provided between the ends of the two limiting plates near the through groove for the waist of the slide plate to be inserted.

4. The vacuum coating equipment as described in claim 3, characterized in that: An upper bushing matching the upper shaft is fixedly installed on the slide plate, and the upper shaft is movably sleeved in the upper bushing. The slot is an elongated strip extending parallel to the waist of the slide plate. When the slide plate is parallel to the corresponding side plate, the slide plate is moved away from the rotation axis along the upper bushing, so that the waist of the slide plate disengages from the corresponding slot, or the slide plate is moved closer to the rotation axis along the upper bushing, so that the waist of the slide plate is engaged in the corresponding slot.

5. The vacuum coating equipment as described in claim 4, characterized in that: The upper shaft is coaxially arranged with the corresponding transmission shaft. A sliding column is fixedly installed at the end of the upper shaft away from the carrier plate. The sliding column is a polygonal prism coaxially arranged with the upper shaft. The transmission shaft is provided with a socket for the sliding column to be inserted.

6. The vacuum coating equipment as described in claim 4, characterized in that: A lower shaft coaxially arranged with the upper shaft is also fixedly installed on the carrier plate. An electric push rod is fixedly installed on the side plate. The output end of the electric push rod extends out in a direction parallel to the lower shaft and is fixedly installed with a connecting plate. One end of the connecting plate is provided with a U-shaped groove for the lower shaft to be inserted. Two retaining rings distributed along its axial direction are fixedly installed on the lower shaft. One end of the connecting plate is located between the two retaining rings.

7. The vacuum coating equipment as described in claim 6, characterized in that: The upper shaft and the lower shaft are located at opposite ends of the carrier plate, and a lower bushing that matches the lower shaft is also fixedly installed on the carrier plate.

8. The vacuum coating equipment as described in claim 1, characterized in that: The substrate fixing assembly includes multiple support blocks that are circumferentially and evenly spaced and fixedly installed on the inner wall of the mounting hole, and the multiple support blocks together support the substrate; a fixing ring is detachably installed on one side of the substrate plate by fixing screws, and a pressure foot for pressing the substrate is fixedly installed on the fixing ring.

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