Lidar and terminal device

Abstract

The present disclosure relates to a laser radar and a terminal device. The laser radar comprises a transmitter, a receiver, a first scanner, a second scanner and a window. The transmitter is configured to emit a probe beam. The receiver is configured to receive a return wave generated after the probe beam is reflected by an object. The first scanner is a fast scanner configured to change the direction of the probe beam in a first direction, and to deflect the probe beam to different angles in the first direction. The second scanner is a slow scanner configured to change the direction of the probe beam in a second direction, and to deflect the probe beam to different angles in the second direction. The probe beam is transmitted to a field of view of the laser radar via the window, and the return wave enters the interior of the laser radar via the window. The emission light path of the probe beam and the receiving light path of the return wave at least partially coincide.

Description

Technical Field

[0001] This disclosure relates to the field of photoelectric detection, and more specifically to a lidar and terminal device. Background Technology

[0002] Lidar (Light Detection and Ranging) is a radar system that uses emitted laser beams to detect the position, velocity, and other characteristics of objects. Due to its advantages such as high resolution, strong resistance to active interference, good detection performance, small size, and light weight, lidar is widely used in fields such as autonomous driving, transportation communication, drones, intelligent robots, and resource exploration.

[0003] As a crucial sensor for perceiving surrounding information, the field of view and scanning accuracy are important parameters for automotive LiDAR. Beyond this, the degree of integration between LiDAR and the vehicle structure is also a key performance indicator. With the gradual development of the LiDAR OEM market, how to better integrate LiDAR into the vehicle body (even inside the windshield) in mass-produced vehicles is becoming increasingly important. Especially in the vehicle's height direction, areas such as near the rearview mirror inside the windshield typically house devices like main cameras, which are usually around 20mm high. Integrating LiDAR into these areas (near the cameras) requires the LiDAR's height to be close to the size of existing devices. Summary of the Invention

[0004] This disclosure provides a lidar that can achieve a small size in the height direction.

[0005] According to a first aspect of this disclosure, a lidar is provided. The lidar includes: a transmitter configured to emit a probe beam; a receiver configured to receive an echo generated by reflection of the probe beam from an object; a first scanner, which is a fast scanner configured to change the direction of the probe beam in a first direction, deflecting the probe beam to different angles in the first direction; a second scanner, which is a slow scanner configured to change the direction of the probe beam in a second direction, deflecting the probe beam to different angles in the second direction; a window through which the probe beam is transmitted to the field of view of the lidar and the echo enters the interior of the lidar through the window; and the emission path of the probe beam and the reception path of the echo at least partially overlap.

[0006] Optionally, the first scanner is configured to rotate about a first rotation axis; the second scanner is configured to reciprocate about a second rotation axis; the first rotation axis and the second rotation axis have a preset angle.

[0007] Optionally, the first direction and the second direction are perpendicular to each other. The first direction is horizontal, and the second direction is vertical. Alternatively, the first direction is vertical, and the second direction is horizontal.

[0008] Optionally, the second scanner has a first position state and a second position state. When the second scanner is in the first position state, it deflects the detection beam to a first angle in the second direction. When the second scanner is in the second position state, it deflects the detection beam to a second angle in the second direction. The first angle is different from the second angle.

[0009] Optionally, when the first scanner rotates around the first rotation axis, the second scanner first changes from the first position state to the second position state and then changes from the second position state back to the first position state.

[0010] Optionally, the first scanner includes: a plurality of working reflective surfaces and at least one homing surface. When the plurality of working reflective surfaces are in the emission optical path, the second scanner changes from the first position state to the second position state. When the homing surface is in the emission optical path, the second scanner changes from the second position state to the first position state.

[0011] Optionally, when the homing surface is in the emission optical path, the lidar does not detect the object.

[0012] Optionally, the first scanner includes multiple working reflective surfaces. When the multiple working reflective surfaces deflect the detection beam, the second scanner changes from the first position state to the second position state, causing the lidar to scan along the first scanning direction in the second direction, and the second scanner changes from the second position state to the first position state, causing the lidar to scan along the second scanning direction in the second direction.

[0013] Optionally, the receiver includes a plurality of single-photon detectors arranged in a single-photon detector array, the single-photon detector array being configured to provide a plurality of photosensitive areas.

[0014] Optionally, the transmitter includes multiple lasers, and the echo generated by the detection beam emitted by one of the lasers after being reflected by the object illuminates one of the photosensitive areas.

[0015] Optionally, the transmitter includes a first row of lasers and a second row of lasers, wherein at least one laser in the first row of lasers is non-aligned with at least one laser in the second row of lasers along a third direction.

[0016] Optionally, at least one laser in the first row of lasers has an overlapping area with at least one laser in the second row of lasers in the third direction.

[0017] Optionally, the receiver includes a first row of photosensitive areas and a second row of photosensitive areas, wherein at least one photosensitive area in the first row of photosensitive areas and at least one photosensitive area in the second row of photosensitive areas are arranged non-parallel to each other along a fourth direction.

[0018] Optionally, at least one photosensitive area in the first row of photosensitive areas overlaps with at least one photosensitive area in the second row of photosensitive areas in the fourth direction.

[0019] Optionally, the field of view of the lidar includes a first region and a second region, wherein the resolution of the point cloud in the first region is different from the resolution of the point cloud in the second region.

[0020] Optionally, the plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area. The first photosensitive area is configured to receive echoes from the first area. The second photosensitive area is configured to receive echoes from the second area. The number of single-photon detectors activated in the first photosensitive area is different from the number of single-photon detectors activated in the second photosensitive area.

[0021] Optionally, the plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area. The first photosensitive area is configured to receive echoes from the first area. The second photosensitive area is configured to receive echoes from the second area. The lidar is configured to determine a point in the point cloud based on detection data from a plurality of single-photon detectors in the first photosensitive area.

[0022] Optionally, the first scanner has a first velocity when it deflects the probe beam to the first region. The first scanner has a second velocity when it deflects the probe beam to the second region. The first velocity is different from the second velocity.

[0023] Optionally, the second scanner has a third velocity when it deflects the probe beam to the first region. The second scanner has a fourth velocity when it deflects the probe beam to the second region. The third velocity is different from the fourth velocity.

[0024] Optionally, the plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area. The first photosensitive area is configured to receive echoes from the first area. The second photosensitive area is configured to receive echoes from the second area. The lidar is configured to generate a point cloud based on detection data from a portion of the single-photon detectors in the first photosensitive area.

[0025] Optionally, the transmitter is mounted on a transmitting circuit board, which is positioned perpendicular to the second direction.

[0026] Optionally, the receiver is mounted on a receiving circuit board, which is placed perpendicular to the second direction.

[0027] Optionally, the lidar includes: a housing having a surface perpendicular to the second direction, and the transmitter, the receiver, the first scanner, and the second scanner disposed on the surface.

[0028] According to a second aspect of this disclosure, a terminal device is provided, including the lidar described above.

[0029] Optionally, the terminal device includes a vehicle, and the lidar is disposed inside the windshield of the vehicle. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments will be introduced as examples below. The drawings described below are merely embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort. The drawings are used to provide a further understanding of this disclosure and constitute a part of the specification. They are used together with the embodiments of this disclosure to explain this disclosure and do not constitute a limitation of this disclosure. In the drawings:

[0031] Figure 1 A structural block diagram of an exemplary lidar consistent with some embodiments of this disclosure is shown.

[0032] Figure 2 A structural block diagram of an exemplary vehicle system consistent with some embodiments of this disclosure is shown.

[0033] Figure 3 A schematic block diagram of a lidar according to a first exemplary embodiment consistent with some embodiments of the present disclosure is shown.

[0034] Figure 4 A schematic block diagram of a lidar according to a second exemplary embodiment consistent with some embodiments of the present disclosure is shown.

[0035] Figure 5 A schematic diagram is shown illustrating how a scanner changes the direction of a probe beam, consistent with some embodiments of this disclosure.

[0036] Figure 6 A schematic block diagram of a lidar according to a third exemplary embodiment consistent with some embodiments of the present disclosure is shown.

[0037] Figures 7A-7C Schematic diagrams of transmitters consistent with some embodiments of this disclosure are shown.

[0038] Figures 8A-8B Schematic diagrams of receivers consistent with some embodiments of this disclosure are shown.

[0039] Figures 9A-9B Schematic diagrams of receivers consistent with other embodiments of this disclosure are shown.

[0040] Figure 10 A schematic diagram of the scanning field of view of a lidar with a longitudinal scanning mode consistent with some embodiments of this disclosure is shown.

[0041] Figure 11 A schematic diagram of the scanning field of view of a lidar with a lateral scanning mode consistent with some embodiments of this disclosure is shown.

[0042] Figure 12 A schematic diagram is shown illustrating one method of differentiating the resolution of point clouds in different regions, consistent with some embodiments of this disclosure.

[0043] Figure 13 A schematic diagram illustrates another method for differentiating the resolution of point clouds in different regions, consistent with some embodiments of this disclosure.

[0044] Figure 14 A schematic diagram is shown illustrating yet another method for differentiating the resolution of point clouds in different regions, consistent with some embodiments of this disclosure.

[0045] Figure 15 A schematic diagram showing the arrangement of transmitters consistent with some embodiments of this disclosure is provided.

[0046] Figure 16 A schematic diagram showing the arrangement of the transmitter relative to the beam splitter, consistent with some embodiments of this disclosure, is shown.

[0047] Figure 17 A schematic diagram of another arrangement of the transmitter relative to the beam splitter, consistent with some embodiments of this disclosure, is shown.

[0048] Figure 18 A schematic diagram showing the arrangement of receivers consistent with some embodiments of this disclosure is provided.

[0049] Figure 19 A schematic diagram showing the arrangement of the receiver relative to the beam splitter, consistent with some embodiments of this disclosure, is shown.

[0050] Figure 20 A schematic block diagram of a lidar according to a fourth exemplary embodiment consistent with some embodiments of the present disclosure is shown.

[0051] Figure 21 A schematic diagram of a vehicle equipped with a lidar is shown, consistent with some embodiments of this disclosure. Detailed Implementation

[0052] The embodiments of this disclosure will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments. It should be understood that, in the actual implementation of any embodiment, changes may occur from one embodiment to another to achieve specific objectives. Furthermore, it is also understood that, although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content of this disclosure, some design, manufacturing, or production modifications based on the technical content disclosed in this disclosure are merely conventional technical means and should not be construed as insufficient content of this disclosure.

[0053] Unless otherwise defined, the technical or scientific terms used in the claims and description shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar words used in this patent application description and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms “an” or “a” and similar words do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “comprising” or “including” and similar words mean that the element or object preceding “comprising” or “including” encompasses the element or object listed following “comprising” or “including” and its equivalents, and do not exclude other elements or objects. The terms “connected,” “coupled,” or “linked” and similar words are not limited to physical or mechanical connections, nor are they limited to direct or indirect connections.

[0054] Unless otherwise specified, all embodiments mentioned herein can be combined to form new technical solutions. Furthermore, unless otherwise specified, all technical features and preferred features mentioned herein can be combined to form new technical solutions.

[0055] In this disclosure, the terms "or" and "and / or" describe the relationship between related objects and indicate a non-exclusive inclusion. For example, "A and / or B" and "A or B" can include: the presence of only "A", the presence of only "B", and the presence of both "A" and "B", where "A" and "B" can be singular or plural. As another example, "A, B, and / or C" and "A, B, or C" can include: the presence of only "A", the presence of only "B", the presence of only "C", the presence of both "A" and "B", the presence of both "A" and "C", the presence of both "B" and "C", and the presence of both "A", "B", and "C", where "A", "B", and "C" can be singular or plural. Furthermore, the symbol " / " in this disclosure indicates an "or" relationship between the related objects before and after the symbol. In this disclosure, the term "at least one A or B" has the same meaning as "A or B" described above. The term "at least one A, B or C" has the same meaning as "A, B or C" above.

[0056] LiDAR is a remote sensing technology that uses laser light to measure distances and create three-dimensional (3D) images of objects and landscapes. During object detection, the lidar emits a laser beam. The laser beam is reflected off the object's surface. The reflected light (also called the echo) is received by the lidar and converted into an electrical signal. The lidar processes the electrical signal to determine information about the object, such as its distance, position, or velocity. The lidar system 110 can also create a real-time 3D model of the environment. This model can be represented as a point cloud. A point cloud is a collection of 3D data points representing the surfaces of objects, structures, and the environment within a specific area. Each data point in the point cloud can be defined by its X, Y, and Z coordinates in space, which represent its position in 3D space. Using point clouds, vehicles can accurately identify the positions of objects on the road (such as cars, pedestrians, and / or cyclists).

[0057] In some embodiments, LiDAR can generate point clouds, which simplifies and simplifies the processing of driver assistance algorithms. LiDAR provides high-resolution 3D vision for vehicles, such as intelligent vehicles, working in conjunction with cameras and radar. It can enhance a vehicle's perception capabilities to handle more complex road conditions, such as dark environments or unknown objects on highways. LiDAR can further provide high-performance automotive-grade LiDAR solutions, ensuring safer and smarter driver assistance, such as L2+ driver assistance. Once configured, LiDAR can be widely used in passenger cars and commercial vehicles equipped with advanced driver assistance systems (ADAS) and / or autonomous driving (automated transportation). LiDAR can also be applied to any suitable end device, such as drones or robots. For example, LiDAR can support robotic applications such as delivery robots and logistics robots.

[0058] In some embodiments, the lidar can be configured as a long-range lidar sensor. Long-range lidar sensors can have a long detection range (e.g., from hundreds of meters to thousands of meters). Long-range lidar sensors can detect and classify objects over a large distance range. Long-range lidar sensors can be mounted on the roof (e.g., the front and / or rear roof) or in windows, headlights, bumpers, or other locations. LiDAR can provide an unobstructed view of the road ahead and / or behind and can detect objects at greater distances. This is very useful for highway driving and for early detection of distant objects.

[0059] In some embodiments, the lidar can be configured as a short-range lidar sensor. Short-range lidar sensors have a shorter detection range (e.g., within a few meters to tens of meters around the lidar) and a wider field of view (FOV) (e.g., from 60 degrees to 360 degrees horizontally). The wider FOV allows for the detection of nearby objects and provides a more comprehensive view of the surrounding environment / objects. Short-range lidar sensors can be mounted on the roof, near the headlights, or on the side panels of the vehicle. This can improve the vehicle's perception capabilities and assist in lane keeping and / or lane changing maneuvers.

[0060] In some embodiments, the lidar can be configured as a mid-range lidar sensor. Mid-range lidar sensors strike a balance between long-range and short-range lidar sensors in terms of detection range (e.g., from a few meters to several hundred meters) and field of view (e.g., from 30 degrees to 180 degrees horizontally). Mid-range lidar sensors can be mounted on the front bumper, side panels, or rear bumper to detect objects near the vehicle. Mid-range lidar sensors are suitable for parking and detecting nearby objects during urban driving.

[0061] In some embodiments, a lidar system with multiple lidar sensors can be deployed around the vehicle. The multiple lidar sensors can be configured to have different detection ranges and fields of view to cover the area around the vehicle. In some embodiments, the lidar system may include one or more short-range lidar sensors and one or more mid-range lidar sensors. The lidar system can combine lidar sensors located at different positions on the vehicle to provide a comprehensive view of the environment. Data from these lidar sensors can be fused with data from other sensors, such as cameras and / or millimeter-wave radar. This allows for real-time decisions to be made for safe and efficient autonomous driving. Lidar sensors with different detection ranges, fields of view, and locations can be combined. This achieves a balance between long-range visibility and short-range object detection, while considering aesthetics and cost.

[0062] In some embodiments, multiple lidar sensors are activated in the lidar system. In other embodiments, these multiple lidar sensors are activated or deactivated depending on the scenario or requirements. For example, when the vehicle is traveling at high speeds (e.g., above 40 mph), one or more short-range lidar sensors can be deactivated, while one or more long-range and mid-range lidar sensors can be activated. Conversely, when the vehicle is traveling at lower speeds (e.g., below 40 mph), one or more long-range lidar sensors can be deactivated, while one or more short-range and mid-range lidar sensors can be activated. This effectively saves energy and extends the lifespan of the lidar system.

[0063] Figure 1 An example structural block diagram of an exemplary lidar consistent with some embodiments of this disclosure is shown. (Refer to...) Figure 1 The lidar 100 includes a laser emitting system 110, a laser receiving system 120, and a control and processing system 130. Optionally, the lidar 100 also includes a scanning system 140. The scanning system 140 may include a rotating optical engine, a rotating reflector, a reciprocating oscillating mirror or galvanometer (e.g., a MEMS mirror, a Galvo mirror, etc.), and other components that can direct the laser beam to different locations in the environment.

[0064] In some embodiments, the laser emitting system 110 can be used to emit a laser. When the laser encounters an object 10, it is reflected by the surface of the object 10, forming an echo. The echo can return to the lidar 100. The laser receiving system 120 can receive the reflected echo and convert it into an electrical signal. This electrical signal, after preprocessing, determines the echo data (e.g., the echo reception time) and provides it to the control and processing system 130. The control and processing system 130 can process the echo data to determine information about the object 10, such as its distance, position, or velocity. Repeating this process multiple times can create an accurate, real-time 3D environment map, such as a point cloud. Computers in terminal devices such as vehicles can use the point cloud for safe navigation.

[0065] In some embodiments, the laser emitting system 110 may include a driving circuit, a laser, and an emitting optics. The laser emits laser light under the drive of the driving circuit, and the laser light exits through the emitting optics. The laser may include a semiconductor laser, such as a vertical-cavity surface-emitting laser (VCSEL), an edge-emitting laser (EEL), or other semiconductor lasers capable of generating laser light. In other embodiments, the laser may also include a fiber laser. The wavelength of the laser light emitted by the laser may be any one of 905 nm, 940 nm, or 1550 nm. The laser may also emit laser light of other wavelengths. The driving circuit may include a driver integrated circuit, such as an analog chip or a digital-analog hybrid chip.

[0066] In some embodiments, the laser receiving system 120 may include a receiving optics and a receiver. The receiving optics collects echoes reflected from an object. The receiving optics converges the echoes onto the receiver. The receiver converts the echoes into electrical signals using the photoelectric effect. The receiver may include a photodetector circuit, an avalanche photodiode (APD), a single-photon avalanche diode (SPAD), a silicon photomultiplier (SiPM), or a similar device. The lidar 100 may also include a preprocessing circuit. This preprocessing circuit may include digitization circuitry. For example, the preprocessing circuit may include an analog-to-digital converter (ADC) that converts analog signals into digital signals for supply to the control and processing system 130. Alternatively, the preprocessing circuit may include a time-to-digital converter (TDC). The echoes are detected and converted into electrical signals by the receiver. These electrical signals are provided to the TDC. Based on the received electrical signals, the TDC can determine the timing information (e.g., a timestamp) of the echoes. The TDC can convert time information into digital signals and provide them to the control and processing system 130. The preprocessing circuit may also include analog front-end circuitry for channel selection and analog signal amplification. In some embodiments, the preprocessing circuit may be implemented as a system-on-chip (SOC) or an application-specific integrated circuit (ASIC). The transmitting and receiving optics may include, for example, one or more optics such as lenses / lens groups, mirrors, filters, beam splitters, apertures, and homogenizers. The transmitting and receiving optics may be independently configured optics, or they may be fully or partially multiplexed.

[0067] In some embodiments, the control and processing system 130 may include an information processing circuit and a light source control circuit. The information processing circuit can be used to process electrical signals to determine information about an object. For example, the information processing circuit includes: an application-specific integrated circuit (ASIC), or a circuit implemented with a programmable logic device (PLD), such as a field-programmable gate array (FPGA), or a microcontroller unit (MCU), or a digital signal processor (DSP), etc. Another example is that the information processing circuit includes a central processing unit (CPU). The light source control circuit can be used to send control signals to the excitation source to control the excitation source to drive the laser to emit light, realizing pulsed laser emission. For example, the light source control circuit can send timing signals to control the laser emission timing. Furthermore, the light source control circuit can control one or more of the pulse interval, pulse intensity, and pulse width. Adding pulse coding functionality can enhance the anti-interference capability of the lidar. The light source control circuit and the information processing circuit can be integrated together. For example, the light source control circuit and the information processing circuit can be integrated into a main control chip, or they can each be independent or partially independent chips. When the lidar 100 includes a scanning system 140, the control and processing system 130 may also include a scanning control circuit for controlling the scanning system. The scanning control circuit can be integrated with one or all of the light source control circuit and the information processing circuit. For example, the scanning control circuit, the light source control circuit, and the information processing circuit can be integrated into a main control chip; or they can each be independent or partially independent chips. In some embodiments, the control and processing system 130 can be implemented in the form of a SOC or an ASIC.

[0068] In some embodiments, the lidar can be installed on a terminal device. The lidar can transmit the detected sensing data to the terminal device. The terminal device can use the sensing data to perform one or more functions such as analysis, decision-making, or control. Terminal devices include, for example, vehicles, ships, aircraft (e.g., flying vehicles, or drones), robots (e.g., industrial robots or home robots).

[0069] Figure 2 A structural block diagram of an exemplary vehicle system consistent with some embodiments of this disclosure is shown. In some embodiments, reference is made to... Figure 2The vehicle system 200 may include a sensor system 202, a perception system 204, a planning system 206, and a control system 208. The vehicle system 200 may have autonomous capabilities. For example, the vehicle system 200 may have at least one function, characteristic, device, and / or similar device that enables the vehicle to operate partially or fully without human intervention, including but not limited to fully autonomous vehicles (e.g., abandoning vehicles dependent on human intervention), highly autonomous vehicles (e.g., abandoning vehicles dependent on human intervention in certain situations), and / or similar devices. The sensor system 202 may include one or more devices, such as lidar 202a, radar 202b, camera 202c, sonar 202d, global positioning system (GPS) 202e, and inertial measurement unit (IMU) 202f. The lidar 202a may include a lidar sensor, such as a long-range lidar sensor, a mid-range lidar sensor, or a short-range lidar sensor. In some embodiments, the sensor system 202 may use one or more devices included in the sensor system 202 to generate environment-related data. The data generated by the sensor system 202 can be used by one or more systems to observe the environment in which the vehicle is located.

[0070] In some embodiments, the perception system 204 may receive data associated with at least one object in the environment and may classify at least one object. In some embodiments, the perception system 204 may receive image data (e.g., point clouds) associated with objects captured by at least one lidar sensor. In such an example, the perception system 204 may classify objects based on groupings of objects (e.g., bicycles, vehicles, traffic signs, pedestrians and / or the like). In some embodiments, the perception system 204 may transmit data related to object classification to the planning system 206.

[0071] In some embodiments, the planning system 206 may receive destination-related data and generate data related to at least one route or trajectory. A vehicle may travel along this route or trajectory towards its destination. In some embodiments, the planning system 206 may periodically or continuously receive data from the sensing system 204 and may update the route or trajectory based on the data generated by the sensing system 204.

[0072] In some embodiments, the control system 208 may receive data related to at least one trajectory from the planning system 206, and the control system 208 may control the operation of the vehicle. In some embodiments, the control system 208 may include a steering control system 208a and a powertrain control system 208b. The control system 208 may control the operation of the steering control system 208a and the powertrain control system 208b according to the received trajectory. In some embodiments, the powertrain control system 208b may receive control signals from the control system 208 to start, stop, accelerate, decelerate, turn left, turn right, or perform similar operations on the vehicle. The steering control system 208a may be configured to receive control signals from the control system 208 to turn one or more wheels of the vehicle. For example, when the trajectory includes a left turn, the control system 208 transmits control signals to cause the steering control system 208a to adjust the direction.

[0073] According to some embodiments of this disclosure, a lidar is provided. The lidar may include a transmitter, a receiver, a first scanner, a second scanner, and a viewing window. The transmitter emits a probe beam. The receiver receives the echo generated after the probe beam is reflected by an object. The first scanner may be a fast scanner, capable of changing the direction of the probe beam in a first direction, deflecting the probe beam to different angles in the first direction. The second scanner may be a slow scanner, capable of changing the direction of the probe beam in a second direction, deflecting the probe beam to different angles in the second direction. The probe beam can be transmitted to the lidar's field of view via the viewing window, and the echo enters the lidar's interior via the viewing window. The emission path of the probe beam and the reception path of the echo may at least partially overlap.

[0074] See Figure 3 A schematic block diagram of a lidar 300 consistent with some embodiments of the present disclosure is shown. In some embodiments, reference is made to... Figure 3 The lidar 300 may include a transmitter 310, a receiver 320, a scanner 330, and a window 340.

[0075] In some embodiments, the transmitter 310 may emit a probe beam. The transmitter 310 may include a laser or laser array for emitting the probe beam. In some embodiments, the transmitter 310 may employ a laser emitting circuit or various types of lasers, including but not limited to VCSELs, EELs, etc.

[0076] In some embodiments, receiver 320 may receive the echo generated after the probe beam is reflected by an object. Receiver 320 may include a detector or detector array for receiving the echo generated after the probe beam is reflected by an object. Receiver 320 may employ a photodetector circuit or various types of detectors, including but not limited to SPAD, APD, SiPM, etc.

[0077] In some embodiments, the scanner 330 can change the direction of the light beam in at least one direction, deflecting the beam to different angles in at least one direction. The scanner 330 can be arranged in the optical path between the transmitter 310 and the window 340, and between the receiver 320 and the window 340. The scanner 330 can change the transmission direction of the detection beam and the echo in at least one direction. The at least one direction can include either a horizontal direction or a vertical direction, or both. For example, the horizontal direction could be... Figure 3 The direction in the xz plane shown can be a vertical direction that is perpendicular to the xz plane.

[0078] In some embodiments, the scanner 330 can be a one-dimensional scanner or a two-dimensional scanner. A one-dimensional scanner may include one of the following: a multi-faceted rotating mirror that rotates in one direction, a reciprocating pendulum mirror, a galvanometer mirror, and a MEMS mirror. A two-dimensional scanner may be a MEMS mirror, a biaxial pendulum mirror, etc. The scanner 330 can be used to adjust the transmission direction of the probe beam and the echo within a preset angle range to define the scanning area. It should be noted that the movement of the scanner 330 can be continuous in time or it can be performed at certain time intervals.

[0079] In some embodiments, the scanning frequency of the scanner 330 in the first direction can be greater than the scanning frequency of the scanner 330 in the second direction. The scanning frequency of the scanner 330 in the first direction can represent the number of times the scanner scans the complete field of view in the first direction within one second. The scanning frequency of the scanner 330 in the second direction can represent the number of times the scanner scans the complete field of view in the second direction within one second. For example, the scanning frequency of the scanner 330 in the first direction can be twice or more than twice the scanning frequency of the scanner 330 in the second direction.

[0080] In some embodiments, the lidar may be provided with a window to protect internal components such as optics, transmitters, and receivers. In some embodiments, the window may also filter out interference from noisy light signals to ensure the lidar's detection performance. The detection beam can be transmitted to the lidar's field of view via the window 340, and the echo enters the lidar's interior via the window.

[0081] In some embodiments, the emission path of the probe beam and the receiving path of the echo can at least partially overlap. In some embodiments, the lidar 300 may further include a beam splitter 350. The beam splitter 350 can guide and separate the probe beam and the echo, for example, by changing the transmission direction of the probe beam or the echo. The beam splitter 350 can reflect the probe beam and transmit the echo (e.g., ... Figure 3(As shown), or it may transmit the probe beam and reflect the echo. For example, beam splitter 350 may include a polarizing beam splitter, a beam-splitting mirror, or a pinhole mirror. In some embodiments, beam splitter 350 may change the transmission direction of the probe beam or echo in a plane substantially perpendicular to the second direction (e.g., the xz plane). This allows the transmission path of the probe beam and the receiving path of the echo to lie in a plane substantially perpendicular to the second direction (e.g., the xz plane), which is beneficial for reducing the size of the lidar in the second direction.

[0082] In some embodiments, the probe beam emitted by the transmitter 310 is reflected by the beam splitter 350 to the scanner 330. The scanner 330 is described as having a reflective surface that alters the direction of the probe beam and the echo. The probe beam reflected by the reflective surface of the scanner 330 is transmitted to the object via the viewing window 340. Upon encountering the object, the probe beam is reflected to form an echo. The echo is transmitted through the viewing window 340 to the scanner 330. The echo reflected by the reflective surface of the scanner 330 is transmitted through the beam splitter 350 and detected by the receiver 320.

[0083] In some embodiments, the transmitting optical path of the probe beam and the receiving optical path of the echo can at least partially overlap. Compared to lidars where the transmitting and receiving optical paths do not overlap, lidar 300 can achieve a smaller size in the second direction (e.g., a direction perpendicular to the xz plane).

[0084] See Figure 4 The diagram illustrates a schematic block diagram of a lidar 400 according to a second exemplary embodiment consistent with some embodiments of the present disclosure. Several details of the second exemplary embodiment are similar to those of the first exemplary embodiment and will not be repeated here. The following primarily describes the special features of the second exemplary embodiment.

[0085] In some embodiments, the lidar 400 may include a transmitter 410, a receiver 420, a first scanner 431, a second scanner 432, and a viewing window 440. For example, the transmitter 410 may be... Figure 3 The transmitter 310 in the middle. For example, the receiver 420 can be... Figure 3 Receiver 320 in the middle. For example, window 440 could be... Figure 3 Window 340 in the middle. For example, beam splitter 450 can be... Figure 3 The beam splitter in the middle is 350.

[0086] In some embodiments, the first scanner 431 can change the direction of the detection beam in a first direction, deflecting the detection beam to different angles in the first direction. The first scanner 431 can be a one-dimensional scanner. A one-dimensional scanner can include one of the following: a multi-faceted rotating mirror that rotates in one direction, a reciprocating pendulum mirror, a galvanometer mirror, and a MEMS mirror.

[0087] In some embodiments, the second scanner 432 can change the direction of the detection beam in the second direction, deflecting the detection beam to different angles in the second direction. The second scanner 432 can be a one-dimensional scanner. A one-dimensional scanner can include one of the following: a multi-faceted rotating mirror that rotates in one direction, a reciprocating pendulum mirror, a galvanometer mirror, and a MEMS mirror.

[0088] Optionally, the first scanner 431 can be located downstream of the optical path of the second scanner 432, along the propagation direction of the probe beam. Alternatively, the second scanner 432 can be located downstream of the optical path of the first scanner 431, along the propagation direction of the probe beam.

[0089] In some embodiments, the first direction and the second direction may be perpendicular to each other. For example, the first direction may be horizontal and the second direction may be vertical. Alternatively, the first direction may be vertical and the second direction may be horizontal.

[0090] In some embodiments, the first scanner 431 can be a fast scanner, and the second scanner 432 can be a slow scanner. The scanning frequency of the first scanner 431 can be greater than the scanning frequency of the second scanner 432. The scanning frequency of the first scanner 431 can refer to the number of times the first scanner scans the complete first-direction field of view in one second. The scanning frequency of the second scanner 432 can refer to the number of times the second scanner scans the complete second-direction field of view in one second. For example, the scanning frequency of the first scanner 431 can be twice or more than twice the scanning frequency of the second scanner 432.

[0091] In some embodiments, the first scanner 431 can rotate about a first rotation axis. The second scanner 432 can reciprocate about a second rotation axis. The first and second rotation axes can have a preset angle. The preset angle can be between 75° and 105°.

[0092] In some embodiments, the incident angle of the probe beam on the first scanner 431 can be between 20° and 60°, for example, between 20° and 45° or between 30° and 60°.

[0093] In some embodiments, the incident angle of the probe beam on the second scanner 432 can be between 20° and 60°, for example, between 20° and 45° or between 30° and 60°.

[0094] See Figure 5This diagram illustrates a scanner changing the direction of a probe beam, consistent with some embodiments of this disclosure. In some embodiments, the second scanner may have a first position state (indicated by solid lines) and a second position state (indicated by dashed lines). When the second scanner 432 is in the first position state, the second scanner 432 can deflect the probe beam to a first angle in a second direction (e.g., the y-direction). Figure 5 (represented by A). When the second scanner 432 is in the second position state, the second scanner 432 can deflect the detection beam to a second angle in the second direction ( Figure 5 (The first angle is represented by B). The second angle is different from the third angle. In some embodiments, the first angle may be between -90° and 0°, for example, the first angle is -45°, -20°, -15°, etc. The second angle may be between 0° and 90°, for example, the second angle is 15°, 20°, 25°, etc. It can be understood that an angle of 0° in the second direction (e.g., the y-direction) can indicate that the probe beam is parallel to the reference surface (e.g., the xz plane perpendicular to the y-axis or other planes), a positive angle in the second direction (e.g., the y-direction) can indicate that the probe beam points above the reference surface (e.g., the xz plane perpendicular to the y-axis or other planes), and a negative angle in the second direction (e.g., the y-direction) can indicate that the probe beam points below the reference surface (e.g., the xz plane perpendicular to the y-axis or other planes).

[0095] In some embodiments, the second scanner may have a zero-position state. When the second scanner 432 is in the zero-position state, it deflects the probe beam to a 0° angle in a second direction (e.g., the y-direction) (e.g., the probe beam is parallel to the xz plane or other plane). When the second scanner 432 is configured to reciprocate, it may have a positive maximum position state and a negative maximum position state relative to the zero-position state. When the second scanner 432 is in the positive maximum position state, it can deflect the probe beam to a positive maximum swing angle (positive angle) in the second direction (e.g., the y-direction). When the second scanner 432 is in the negative maximum position state, it can deflect the probe beam to a negative maximum swing angle (negative angle) in the second direction. The positive maximum swing angle and the negative maximum swing angle define the field of view of the lidar 400 in the second direction. For example, when the second scanner 432 rotates around the second rotation axis from the forward maximum position state to the reverse maximum position state by a rotation angle α, the difference between the forward maximum swing angle and the reverse maximum swing angle can be 2α. The difference between the forward maximum swing angle and the reverse maximum swing angle can correspond to the field of view angle of the lidar 400 in the second direction.

[0096] In some embodiments, at least one of the forward maximum swing angle and the reverse maximum swing angle of the second scanner 432 can be adjusted (e.g., adjusted according to a control signal) to change the field of view of the lidar 400 in the second direction.

[0097] In some embodiments, during the rotation of the first scanner 431 around the first rotation axis, the second scanner 432 changes from a first position state to a second position state and then from the second position state to the first position state. It should be noted that the movement of the second scanner 432 can be continuous in time or can be performed at certain time intervals. For example, during the rotation of the first scanner 431 around the first rotation axis, the second scanner 432 can move continuously to change between the first position state and the second position state. Alternatively, during the rotation of the first scanner 431 around the first rotation axis, the second scanner 432 can move in steps to change between the first position state and the second position state. In some embodiments, the second scanner 432 can have one or more intermediate position states between the first position state and the second position state.

[0098] See Figure 6 The diagram illustrates a schematic block diagram of a lidar 600 according to a third exemplary embodiment consistent with some embodiments of the present disclosure. Several details of the third exemplary embodiment are similar to those of the first or second exemplary embodiments and will not be repeated here. The following primarily describes the special features of the third exemplary embodiment.

[0099] In some embodiments, the lidar 600 may include a transmitter 610, a receiver 620, a first scanner 631, a second scanner 632, and a viewing window 640. For example, the transmitter 610 may be... Figure 3 The transmitter 310 in the middle. For example, the receiver 620 can be... Figure 3 The receiver 320 in the middle. For example, the first scanner 631 can be Figure 4 The first scanner 431. For example, the second scanner 632 could be... Figure 4 The first scanner 432 in the middle. For example, window 440 can be Figure 3 Window 640 in the middle. For example, beam splitter 650 can be Figure 3 The beam splitter in the middle is 350.

[0100] In some embodiments, the first scanner 631 may rotate about a first rotation axis R1. The first scanner 631 may include a plurality of working reflective surfaces and at least one homing surface. As an example, Figure 6The first scanner 631 shown may have four working reflective surfaces M1-M4 and a return surface G1. In other embodiments, the number of working reflective surfaces of the first scanner 631 may be 3, 5, 6, 7, 8, 10, etc. The number of return surfaces of the first scanner 631 may be 2, 3, etc. The second scanner 632 may reciprocate around the second rotation axis R2, and as combined with... Figure 5 It has a first position state and a second position state as described.

[0101] In some embodiments, during the rotation of the first scanner 631 around the first rotation axis R1, when the plurality of working reflective surfaces M1-M4 are in the emission optical path, the second scanner 632 can change from a first position state to a second position state. When the homing surface G1 is in the emission optical path, the second scanner 632 can change from the second position state to the first position state. In some embodiments, when the homing surface G1 is in the emission optical path, the lidar may not detect objects. For example, during the rotation of the first scanner 631 around the first rotation axis R1, when the plurality of working reflective surfaces M1-M4 are in the emission optical path, the lidar detects objects. When the homing surface G1 is in the emission optical path, the transmitter 610 may not emit a detection beam, or the receiver 620 may not respond to the echo, or the information processing circuit may not process data, so that the lidar does not detect objects. This can save energy and reduce the amount of data processing.

[0102] In some embodiments, the first scanner 631 may include multiple working reflective surfaces, but not a homing surface. As an example, Figure 6 The first scanner 631 shown may have five working reflective surfaces M1-M5. When the multiple working reflective surfaces M1-M5 deflect the detection beam, the second scanner 632 can change from a first position state to a second position state, causing the lidar 600 to scan along the first scanning direction in a second direction (e.g., a direction perpendicular to the xz plane). The second scanner 632 can also change from a second position state to a first position state, causing the lidar 600 to scan along the second scanning direction in the second direction. For example, the first scanning direction may be opposite to the second scanning direction.

[0103] In some embodiments, the first scanner 631 may include a plurality of working reflective surfaces and a plurality of repositioning surfaces, and may have one or more working reflective surfaces between different repositioning surfaces. For example, the first scanner 631 may include six working reflective surfaces and two repositioning surfaces, which may be symmetrically arranged and spaced three working reflective surfaces apart from each other.

[0104] See Figures 7A-7C The diagrams shown are schematic representations of transmitters consistent with some embodiments of the present disclosure.

[0105] In some embodiments, the transmitter 710 may include a single laser 70, see [link to documentation]. Figure 7A The length and width of the single laser 70 can be set to have a predetermined aspect ratio. When the single laser 70 emits light, a detection spot with a predetermined aspect ratio can be achieved.

[0106] In some embodiments, the transmitter 710 may include a plurality of lasers 70, see [link to documentation]. Figure 7B Multiple lasers 70 can be arranged in a row. Multiple lasers 70 can be independently controlled to emit probe beams. Multiple lasers 70 can emit light simultaneously or in a time-division manner.

[0107] In some embodiments, the transmitter may include a first row of lasers and a second row of lasers. At least one laser in the first row may be non-aligned with at least one laser in the second row along a third direction. In this disclosure, the non-alignment of the first and second lasers along a third direction can be characterized by the projection of the center of the first laser and the center of the second laser in the third direction at different locations. For example, the projection areas of at least one laser in the first row in the third direction may be completely offset from the projection areas of at least one laser in the second row in the third direction. Alternatively, the projection areas of at least one laser in the first row in the third direction may overlap with the projection areas of at least one laser in the second row in the third direction. This is beneficial for reducing the distance between adjacent transmission channels and helps improve the resolution of the lidar.

[0108] See Figure 7C The emitter 710 may include a first row of lasers 71 and a second row of lasers 72. One laser 71 in the first row of lasers 71 is non-aligned with at least one laser 72 in the second row of lasers along a third direction (e.g., the p direction). Lasers 71 and 72 may have overlapping regions in the third direction (e.g., the p direction). Figure 7C (As shown in the gray area).

[0109] See Figures 8A-8B The diagrams shown are schematic representations of receivers consistent with some embodiments of this disclosure.

[0110] In some embodiments, the receiver 820 may include a plurality of silicon photomultiplier tubes 80, see [link to documentation]. Figure 8A Multiple silicon photomultiplier tubes 80 can be arranged in a row. The echo generated by the detection beam emitted by one of the lasers in the transmitter 810 after being reflected by an object can illuminate one or more silicon photomultiplier tubes 80.

[0111] In some embodiments, receiver 820 may include a first row of silicon photomultiplier tubes 81 and a second row of silicon photomultiplier tubes 82, see [link to documentation]. Figure 8B At least one silicon photomultiplier tube 81 in the first row of silicon photomultiplier tubes 81 may be non-aligned with at least one silicon photomultiplier tube 82 in the second row of silicon photomultiplier tubes 82 along a fourth direction (e.g., the q direction). In this disclosure, the non-alignment of the first silicon photomultiplier tube 81 and the second silicon photomultiplier tube 82 along the fourth direction can be characterized as the center of the first silicon photomultiplier tube 81 and the center of the second silicon photomultiplier tube 82 being located at different positions in the projection of the second silicon photomultiplier tube 82 along the fourth direction (e.g., the q direction). The echo generated by the reflection of a probe beam emitted by one laser in the emitter 810 after being reflected by an object can illuminate one or more silicon photomultiplier tubes 81. The echo generated by the reflection of a probe beam emitted by another laser in the emitter 810 after being reflected by an object can illuminate one or more silicon photomultiplier tubes 82.

[0112] In some embodiments, the receiver may include multiple single-photon detectors (SPADs). Each single-photon detector can be read out independently. The multiple single-photon detectors may be arranged as a single-photon detector array. The single-photon detector array may be configured to provide multiple photosensitive areas.

[0113] In some embodiments, the echo generated by the reflection of a probe beam emitted by one of the multiple lasers after being reflected by an object can illuminate one of the multiple photosensitive areas. In some embodiments, the multiple lasers may correspond to multiple photosensitive areas. For example, the echo generated by the reflection of a probe beam emitted by one laser after being reflected by an object illuminates the photosensitive area corresponding to that laser.

[0114] In some embodiments, the receiver may include a first row of photosensitive areas and a second row of photosensitive areas. At least one photosensitive area in the first row and at least one photosensitive area in the second row may be non-aligned along a fourth direction. In this disclosure, the non-alignment of the first and second photosensitive areas along the fourth direction can be characterized by the projections of the centers of the first and second photosensitive areas in the fourth direction being at different locations. For example, the projection areas of at least one photosensitive area in the first row and at least one photosensitive area in the second row in the fourth direction may be completely offset from each other. Alternatively, the projection areas of at least one photosensitive area in the first row and at least one photosensitive area in the second row in the fourth direction may overlap. This is beneficial for reducing the distance between adjacent receiving channels and helps improve the resolution of the lidar.

[0115] See Figures 9A-9BThe diagrams shown are schematic representations of receivers consistent with other embodiments of this disclosure.

[0116] In some embodiments, see Figure 9A The receiver 920 may include multiple photosensitive areas 90. Each photosensitive area 90 may include an M×N array of single-photon detectors, where M and N are integers greater than or equal to 1. The echo generated by the reflection of a detection beam emitted by a laser in the transmitter 310 after being reflected by an object can illuminate one or more photosensitive areas 90.

[0117] In some embodiments, see Figure 9B The receiver 920 may include a first row of photosensitive areas 91 and a second row of photosensitive areas 92. Photosensitive areas 91 may include an M×N array of single-photon detectors. Photosensitive areas 92 may also include an M×N array of single-photon detectors. Where M and N are integers greater than or equal to 1. At least one photosensitive area 91 in the first row and at least one photosensitive area 92 in the second row may be non-aligned along a fourth direction (e.g., the q direction). Optionally, at least one photosensitive area 91 may have overlapping areas with at least one photosensitive area 92 in the fourth direction (e.g., the q direction). Figure 9B (As shown in the gray area). The echo generated by the detection beam emitted by a laser in the transmitter 910 after being reflected by an object can illuminate a photosensitive area 91 or a photosensitive area 92.

[0118] In some embodiments, receiver 920 may include an ASIC chip arranged in a three-dimensional stack. A single-photon detector array may be formed on the ASIC chip. Multiple different regions of the single-photon detector array can provide multiple different photosensitive regions.

[0119] In some embodiments, sets of single-photon detectors in different photosensitive areas can be activated (e.g., by applying an appropriate bias voltage to enable the single-photon detectors to detect echoes) and readout independently. Figure 9A In the embodiment shown, a set of single-photon detectors in one photosensitive region 90 can be activated and read out independently of a set of single-photon detectors in another photosensitive region 90. Figure 9B In the illustrated embodiment, a set of single-photon detectors within one photosensitive region 91 can be activated and read out independently of a set of single-photon detectors within another photosensitive region 91. Similarly, a set of single-photon detectors within one photosensitive region 91 can be activated and read out independently of a set of single-photon detectors within any photosensitive region 92.

[0120] Optionally, multiple single-photon detectors within a single photosensitive area can be activated simultaneously. For example, M×N single-photon detectors in photosensitive areas 90 / 91 / 92 can be activated simultaneously to detect echoes. Optionally, multiple single-photon detectors within a single photosensitive area can be read out simultaneously. For example, the connections between the M×N single-photon detectors in photosensitive areas 90 / 91 / 92 and the readout circuit can be simultaneously activated.

[0121] Optionally, some of the single-photon detectors within a photosensitive area can be activated or read out together. Alternatively, some of the single-photon detectors within a photosensitive area can be activated or read out independently of other single-photon detectors. In some embodiments of this disclosure, the scanning mode of the lidar can include a horizontal scanning mode and a vertical scanning mode. In the horizontal scanning mode, the horizontal scanning speed of the lidar can be faster than the vertical scanning speed. A fast scanner can change the direction of the detection beam in the horizontal direction. A slow scanner can change the direction of the detection beam in the vertical direction. In the vertical scanning mode, the vertical scanning speed of the lidar can be faster than the horizontal scanning speed. A fast scanner can change the direction of the detection beam in the vertical direction. A slow scanner can change the direction of the detection beam in the horizontal direction.

[0122] refer to Figure 10 The diagram illustrates a scanning field of view of a lidar with a longitudinal scanning mode consistent with some embodiments of the present disclosure.

[0123] In some embodiments, refer to Figure 10 , Figure 10 In the diagram, An (n = 1, 2, 3, 4, 5…) represents the spot formed by the probe beam emitted by the first laser of the lidar in the scanning field of view, and Bn (n = 1, 2, 3, 4, 5…) represents the spot formed by the probe beam emitted by the second laser of the lidar in the scanning field of view. The first and second lasers can emit probe beams simultaneously, or they can emit probe beams in a time-division manner. The fast scanner can change the direction of the probe beam in the y-direction to achieve scanning of the probe beam in the y-direction. The fast scanner can reciprocate around its rotation axis. The slow scanner can change the direction of the probe beam in the x-direction to achieve scanning of the probe beam in the x-direction. The slow scanner can reciprocate around its rotation axis. Since the scanning speed of the lidar in the vertical direction can be faster than the scanning speed in the horizontal direction, a vertical scanning mode lidar scanning field of view is formed.

[0124] In some embodiments, the first laser can emit a probe beam to form a spot in the scanning field of view, such as A-1. The second laser can emit a probe beam to form a spot in the scanning field of view, such as B-1. Here, n=1 represents the spot formed by the probe beams emitted by the first and second lasers within a first time interval T1, n=2 represents the spot formed by the probe beams emitted by the first and second lasers within a second time interval T2, and so on. The first time interval T1 and the second time interval T2 can be the time corresponding to the reciprocating motion of the fast scanner. The reciprocating motion of the fast scanner and the rotation of the slow scanner can form a spot such as... Figure 10 Sawtooth scanning curve ( Figure 10 (As shown by the solid black line in the image). The time corresponding to the fast scanner's movement along the -y direction can be the first time interval T1. For example... Figure 10 As shown, the fast scanner and the slow scanner enable the probe beam to move along a first specific direction during the first time interval T1, forming a scanning curve Q1. Correspondingly, spots A-1 and B-1 can be formed sequentially along the scanning curve Q1 at different times during the first time interval T1. The time corresponding to the fast scanner's movement along the y-direction can be the second time interval T2. For example... Figure 10 As shown, the fast scanner and the slow scanner enable the probe beam to form a scanning curve Q2 along a second specific direction during the second time interval T2. Correspondingly, spots A-2 and B-2 can be formed sequentially along the scanning curve Q2 at different times during the second time interval T2, and so on, spots An and Bn (n = 3, 4, 5…) can be formed sequentially, constituting the scanning field of view of the lidar. The first specific direction and the second specific direction can be approximately opposite. For example, the first specific direction extends entirely towards the -y direction, and the second specific direction extends entirely towards the y direction. Spots A-1 and B-1 formed sequentially along the scanning curve Q1 at different times during the first time interval T1 and spots A-2 and B-2 formed sequentially along the scanning curve Q2 at different times during the second time interval T2 can be staggered (at least partially non-overlapping) in the scanning field of view. For example, spots A-1 and B-1 are formed sequentially along scanning curve Q1, and spots A-2 and B-2 are formed sequentially along scanning curve Q2, alternating with each other. Similarly, spots A-2 and B-2 are alternating with spots A-1 and B-1, and A-3 and B-3, respectively. That is, spots An and Bn within one time interval and spots A-(n+1) and B-(n+1) in the next time interval are alternating. This helps ensure the safety of the human eye.

[0125] refer to Figure 11 The diagram illustrates a scanning field of view of a lidar with a lateral scanning mode consistent with some embodiments of this disclosure. As an example, see... Figure 6 The described lidar 600 Figure 11 The scanned field of view is shown. Figure 11 The points shown can represent the detection points where the receiver of the lidar 600 receives echoes in the lidar's scanning field of view to generate a point cloud.

[0126] As described above, in some embodiments, the first scanner 631 can rotate around a first rotation axis R1 and change the direction of the detection beam in the x-direction. The first scanner 631 can be used to scan the detection beam in the x-direction. The first scanner 631 may have four working reflective surfaces M1-M4. The second scanner 632 can reciprocate around a second rotation axis R2 and change the direction of the detection beam in the y-direction. The second scanner 632 can be used to scan the detection beam in the y-direction. Since the scanning speed of the lidar in the x-direction can be faster than the scanning speed in the y-direction, a scanning field of view of the lidar in a lateral scanning mode is formed.

[0127] In some embodiments, during the process of the first scanner 631 rotating to scan the probe beam in the x-direction and the second scanner changing from a second position state to a first position state to scan the probe beam in the y-direction... Figure 11 The blue detection points in the image correspond to the detection points formed by the lidar when the first working reflective surface M1 of the first scanner 631 is in the emission optical path. Figure 11 The green detection point in the image corresponds to the detection point formed by the lidar when the second working reflective surface M2 of the first scanner 631 is in the emission optical path. Figure 11 The yellow detection point in the image corresponds to the detection point formed by the lidar when the third working reflective surface M3 of the first scanner 631 is in the emission optical path. Figure 11 The red detection point in the image corresponds to the detection point formed by the lidar when the fourth working reflective surface M4 of the first scanner 631 is in the emission optical path.

[0128] In some embodiments, in a lidar operating in lateral scanning mode, the reflective surface of the first scanner 631 can be configured to have a certain angle with a reference axis (e.g., the y-axis perpendicular to the xz plane). This allows the tilted point cloud in lateral scanning mode to be adjusted to be more horizontal, which helps improve the aesthetics of the point cloud.

[0129] In some embodiments, the field of view of the lidar may include a first region and a second region. The resolution of the point cloud in the first region may differ from the resolution of the point cloud in the second region. As an example, the first region may be the region of interest (ROI) of the lidar's field of view, and the second region may be the region of non-interest (ROI) of the lidar's field of view. The resolution of the point cloud in the ROI may be greater than the resolution of the point cloud in the ROI.

[0130] See Figure 11 In this example, the scanning field of view of the lidar can have a region of interest (ROI) and a non-ROI region. The ROI region can have more detection points than the non-ROI region, and the point cloud of the ROI region has a higher resolution than the point cloud of the non-ROI region.

[0131] The following describes several ways to achieve resolution differences in point clouds for different regions.

[0132] In some embodiments, the plurality of photosensitive regions may include a first photosensitive region and a second photosensitive region. The first photosensitive region may receive echoes from a first region. The second photosensitive region may receive echoes from a second region. The number of single-photon detectors activated in the first photosensitive region may differ from the number of single-photon detectors activated in the second photosensitive region.

[0133] See Figure 12 The illustration shows a schematic diagram of a method for differentiating the resolution of point clouds in different regions, consistent with some embodiments of the present disclosure.

[0134] In some embodiments, the receiver 1220 may include a first photosensitive area 121 and a second photosensitive area 122. The first photosensitive area 121 and the second photosensitive area 122 may each include an M-row, N-column detector array, where M and N are integers greater than 1. The following description assumes that the detectors include one or more SPADs. The first photosensitive area 121 can receive echoes from non-ROI areas. The second photosensitive area 122 can receive echoes from ROI areas. The number of SPADs activated in the first photosensitive area 121 may be less than the number of SPADs activated in the second photosensitive area 122. Figure 12 Medium gray SPADs indicate that the SPAD is active, while white SPADs indicate that the SPAD is inactive. A point in a point cloud can be generated from the probe data of a specific number of SPADs (e.g., 1, 2, 3, 4, or more). For example, when a point in a point cloud is generated from the probe data of 1 SPAD, Figure 12 The first photosensitive area 121 shown has 16 activated SPADs (gray SPADs), and the first photosensitive area 121 can provide 16 points in the point cloud. In contrast, Figure 12The second photosensitive area 122 shown contains 64 activated SPADs (gray SPADs), providing 64 points in the point cloud. Thus, the resolution of the point cloud generated from the readout data of the SPADs activated in the first photosensitive area 121 can be lower than the resolution of the point cloud generated from the readout data of the SPADs activated in the second photosensitive area 122, thereby allowing the resolution of the ROI region in the LiDAR's field of view to be greater than the resolution of the non-ROI region.

[0135] In some embodiments, the plurality of photosensitive areas may include a first photosensitive area and a second photosensitive area. The first photosensitive area can receive echoes from a first area. The second photosensitive area can receive echoes from a second area. The lidar can determine a point in the point cloud based on detection data from multiple single-photon detectors in the first photosensitive area.

[0136] See Figure 13 The illustration shows an alternative method for differentiating the resolution of point clouds in different regions, consistent with some embodiments of this disclosure.

[0137] In some embodiments, the receiver 1320 may include a first photosensitive area 131 and a second photosensitive area 132. The first photosensitive area 131 and the second photosensitive area 132 each comprise an M-row, N-column SPAD array, where M and N are integers greater than 1. The first photosensitive area 131 can receive echoes from non-ROI regions. The second photosensitive area 132 can receive echoes from ROI regions.

[0138] In some embodiments, in the second photosensitive area 132, for example, a SPAD can be used as a pixel, and the lidar can determine a point in the point cloud based on the detection data of a SPAD in the second photosensitive area 132.

[0139] In some embodiments, the first photosensitive area 131 may include a plurality of macropixels 31. Each macropixel 31 includes a plurality of SPADs. Detection data from the SPADs in the macropixel 31 can be merged to form the detection data for the macropixel 31. The lidar can determine a point in the point cloud based on the detection data from one macropixel 31 in the second photosensitive area 132.

[0140] In this way, the number of points in the point cloud determined by the LiDAR through the first photosensitive area 131 can be smaller, while the number of points in the point cloud determined through the second photosensitive area 132 can be larger. This allows the resolution of the ROI in the LiDAR's field of view to be greater than the resolution of the non-ROI.

[0141] In some embodiments, the multiple photosensitive areas may include a first photosensitive area and a second photosensitive area. The first photosensitive area can receive echoes from a first area. The second photosensitive area can receive echoes from a second area. The lidar can generate a point cloud based on detection data from a portion of the detectors in the first photosensitive area.

[0142] See Figure 14 The illustration shows another method for differentiating the resolution of point clouds in different regions, consistent with some embodiments of this disclosure.

[0143] In some embodiments, the receiver 1420 may include a first photosensitive area 141 and a second photosensitive area 142. The first photosensitive area 141 and the second photosensitive area 142 each comprise an M-row, N-column SPAD array, where M and N are integers greater than 1. The first photosensitive area 141 can receive echoes from non-ROI regions. The second photosensitive area 142 can receive echoes from ROI regions.

[0144] In some embodiments, within the second photosensitive area 142, for example, a SPAD can be considered as a pixel, and the detection data of all SPADs can be read out. The lidar can determine a point in the point cloud based on the detection data of one SPAD in the second photosensitive area 132.

[0145] In some embodiments, a SPAD can serve as a pixel within the first photosensitive area 141. The lidar can generate a point cloud based on detection data from a portion of the SPADs. Figure 14 As shown, the detection data of SPAD in the m-th row and n-th column can be read, where m and n are odd numbers. Figure 14 White SPADs indicate that the data from that SPAD can be excluded from point cloud generation, while gray SPADs indicate that the data from that SPAD can be used to generate point clouds. The lidar can use the detection data from the gray SPADs in the first photosensitive area 141 to generate point clouds.

[0146] In this way, within the same field of view, the number of points in the point cloud determined by the lidar through the first photosensitive area 141 can be less, while the number of points in the point cloud determined through the second photosensitive area 142 can be more, which makes the resolution of the ROI of the lidar's field of view greater than the resolution of the non-ROI.

[0147] In some embodiments, the first scanner may have a first velocity when deflecting the probe beam to a first region, and a second velocity when deflecting the probe beam to a second region. The first velocity may be different from the second velocity.

[0148] Reference Figure 6 and Figure 11As described above, the first scanner 631 can change the direction of the probe beam in the x-direction to achieve scanning of the probe beam in the x-direction. In some embodiments, the first scanner 631 may have a first speed when deflecting the probe beam to the ROI region. The first scanner 631 may have a second speed when deflecting the probe beam to a non-ROI region. The first speed is less than the second speed. The scanning speed of the probe beam in the x-direction within the ROI region can be slower, resulting in more probe points in the x-direction. The scanning speed of the probe beam in the x-direction within the non-ROI region can be faster, resulting in fewer probe points in the x-direction. In this way, the point cloud generated based on probe points in the ROI region can have a higher x-direction resolution than the point cloud generated based on probe points in the non-ROI region.

[0149] In some embodiments, the second scanner may have a third velocity when it deflects the probe beam to the first region. The second scanner may have a fourth velocity when it deflects the probe beam to the second region. The third velocity is different from the fourth velocity.

[0150] Reference Figure 6 and Figure 11 As described above, the second scanner 632 can change the direction of the probe beam in the y-direction to achieve scanning of the probe beam in the y-direction. In some embodiments, the second scanner 632 may have a third speed when deflecting the probe beam to the ROI region. It may have a fourth speed when deflecting the probe beam to a non-ROI region. The third speed is less than the fourth speed. A slower scanning speed of the probe beam in the y-direction within the ROI region allows for the generation of more probe points in the y-direction. A faster scanning speed of the probe beam in the y-direction within the non-ROI region allows for the generation of fewer probe points in the y-direction. In this way, the point cloud generated based on probe points in the ROI region can have a higher y-direction resolution than the point cloud generated based on probe points in the non-ROI region.

[0151] In some embodiments, the transmitter may be mounted on a transmitting circuit board, and the transmitting circuit board may be positioned perpendicular to the second direction.

[0152] See Figure 15 The diagram illustrates a transmitter arrangement consistent with some embodiments of this disclosure. For example, transmitter 1510 may be... Figure 3 The transmitter 310 in the middle Figure 4 The transmitter 410 or Figure 6 The transmitter 610 is located in the LiDAR. The transmitter 1510 can be disposed on the transmitting circuit board 1511. The transmitting circuit board 1511 can be placed perpendicular to the second direction (e.g., the y-direction). In some embodiments, the y-direction can be either the first scanning direction or the second scanning direction of the LiDAR.

[0153] In some embodiments, the transmitter may include an EEL laser. The light output of the EEL laser may be emitted along the edge direction of the device, for example, substantially parallel to the surface of the transmitting circuit board. In this disclosure, the term "first element substantially parallel to second element" may mean that the angle between the first element and the second element is between -15° and 15°. In these embodiments, there may be no deflection optical path between the transmitter and the beam splitter.

[0154] See Figure 16 The diagram shows a schematic representation of the arrangement of the transmitter relative to the beam splitter, consistent with some embodiments of this disclosure.

[0155] In some embodiments, the transmitter 1610 may be disposed on the transmitting circuit board 1611 and include a laser 161. The laser 161 may include an EEL laser, and it may emit laser light at an angle (e.g., between 75° and 105°) to a direction perpendicular to the surface of the transmitting circuit board (e.g., the y-direction). For example, the beam splitter 1650 may be... Figure 3 The beam splitter 350 can transmit or reflect the probe beam. There may be no folding optics (e.g., mirrors) between the laser 161 and the beam splitter 1650.

[0156] In some embodiments, the transmitter may include a VCSEL laser. The laser output of the VCSEL laser may be emitted perpendicular to the device surface, for example, substantially perpendicular to the surface of the transmitting circuit board. In this disclosure, the term "first element substantially perpendicular to second element" may mean that the included angle between the first element and the second element is between 75° and 105°. In these embodiments, a deflection optical path may be present between the transmitter and the beam splitter.

[0157] See Figure 17 The diagram shows another arrangement of the transmitter relative to the beam splitter, consistent with some embodiments of this disclosure.

[0158] In some embodiments, the transmitter 1710 may be disposed on the transmitting circuit board 1711 and may include a laser 171. The laser 171 may include a VCSEL laser, and its light output direction may be substantially perpendicular to the surface of the transmitting circuit board, for example, emitted substantially parallel to the y-direction. For example, the beam splitter 1750 may be... Figure 3 The beam splitter 350 is located in the laser 171. A folding optics (e.g., a mirror) 1761 may be present between the laser 171 and the beam splitter 1750. The folding optics 1761 can change the direction of the beam emitted by the laser 171 so that the beam is emitted substantially perpendicular to the y-direction.

[0159] In some embodiments, the receiver is disposed on a receiving circuit board, and the receiving circuit board may be placed perpendicular to the second direction.

[0160] See Figure 18 The diagram illustrates an arrangement of receivers consistent with some embodiments of this disclosure. For example, receiver 1820 may be... Figure 3 Receiver 320 in Figure 4 Receiver 420 or Figure 6 The receiver 620 is located in the LiDAR. The receiver 1820 can be mounted on a receiving circuit board 1821. The receiving circuit board 1821 can be positioned perpendicular to a second direction (e.g., the y-direction). In some embodiments, the y-direction can be either the first scanning direction or the second scanning direction of the LiDAR.

[0161] See Figure 19 The diagram shows a schematic representation of the arrangement of the receiver relative to the beam splitter, consistent with some embodiments of this disclosure.

[0162] In some embodiments, receiver 1920 may be disposed on receiver circuit board 1921 and include detector 192. The photosensitive area of ​​detector 192 may be substantially parallel to the surface of receiver circuit board 1921, for example, substantially perpendicular to the y-direction. For example, beam splitter 1950 may be... Figure 3 The beam splitter 350 is located in the detector 192. A refracting optics (e.g., a mirror) 1961 may be present between the detector 192 and the beam splitter 1950. The refracting optics 1961 can change the direction of the echo from the beam splitter 1950 so that the echo is incident substantially perpendicularly to the photosensitive area of ​​the detector 192.

[0163] In some embodiments, both the transmitting circuit board and the receiving circuit board can be placed perpendicular to the second direction, which helps to reduce the size of the lidar in the second direction.

[0164] See Figure 20 The diagram illustrates a schematic block diagram of a lidar 2000 according to a fourth exemplary embodiment consistent with some embodiments of this disclosure. Several details of the fourth exemplary embodiment are similar to those of the first, second, or third exemplary embodiments, and will not be repeated here. The following primarily describes the special features of the fourth exemplary embodiment.

[0165] In some embodiments, the lidar 2000 may include a transmitter 2010, a receiver 2020, a first scanner 2031, a second scanner 2032, and a viewing window 2040. For example, the transmitter 2010 may be... Figure 3 The transmitter 310 in the middle. For example, the receiver 2020 can be... Figure 3The receiver 320 in the middle. For example, the first scanner 2031 can be Figure 4 The first scanner 431. For example, the second scanner 2032 could be... Figure 4 The first scanner 432 in the image. For example, window 2040 could be... Figure 3 Window 340 in the middle.

[0166] In some embodiments, the transmitter 2010 may include a linearly polarized laser, such as an EEL laser or a linearly polarized VCSEL laser, to emit linearly polarized light. The beam splitter 2050 may be a polarization beam splitter, for example, transmitting first linearly polarized light and reflecting second linearly polarized light, the first and second linearly polarized light being orthogonal to each other.

[0167] In some embodiments, the lidar 2000 may further include a phase modulator 2060. The phase modulator 2060 can convert first linearly polarized light into first circularly polarized light and convert second circularly polarized light into second linearly polarized light. The rotation direction of the first circularly polarized light may be opposite to the rotation direction of the second circularly polarized light. For example, the phase modulator 2060 may include a quarter-wave plate.

[0168] In some embodiments, the lidar 2000 may further include a transceiver lens 2070. The transceiver lens 2070 can collimate the detection beam emitted by the transmitter 2010 and transmit the echo to the receiver 2020. The transceiver lens 2070 may include one or more optical devices such as a lens / lens group, a mirror, a filter, a beam splitter, an aperture, and a homogenizer.

[0169] In the fourth exemplary embodiment, the transmitter 2010 can emit first linearly polarized light as a probe beam. The first linearly polarized light can be split (transmissive or reflective) by a polarization beam splitter 2050. After passing through a phase modulator 2060, the first linearly polarized light can be converted into first circularly polarized light (left-handed or right-handed). The first circularly polarized light can be collimated into parallel light by a transceiver lens 2070, and then pass through a first scanner 2031 and a second scanner 2032 respectively to achieve a scanning field of view of a certain FOV. When the first circularly polarized light is reflected by an object, the rotation direction of the first circularly polarized light can be reversed, for example, from left-handed to right-handed or from right-handed to left-handed, so that the echo can include second circularly polarized light. The echo can return along the same path after passing through the aforementioned scanning system. After passing through the phase modulator 2060, the second circularly polarized light can be converted into second linearly polarized light. The polarization direction of the echo can be orthogonal to the polarization direction of the probe beam. When the second linearly polarized light passes through the polarization beam splitter 2050, it can be transmitted along a receiving optical path that is different from the transmitting optical path between the transmitter 2010 and the polarization beam splitter 2050, and is focused onto the receiver 2020 by the transceiver lens 2070.

[0170] In some embodiments, the lidar 2000 may further include a filter 2080. The filter 2080 can filter out unwanted light beams. For example, the filter 2080 can allow light with a wavelength range consistent with the probe beam to pass through, while filtering out all or part of light in other wavelength ranges. This can reduce interference from ambient light.

[0171] In some embodiments, the lidar 2000 may further include one or more emitting lenses for adjusting the emission focal length. For example, one or more emitting lenses may be disposed in the emission optical path between the transmitter 2010 and the polarization beam splitter 2050. The emitting lenses may have a positive focal length or a negative focal length.

[0172] In some embodiments, the lidar 2000 may further include one or more receiving lenses for adjusting the receiving focal length. For example, one or more receiving lenses may be disposed in the receiving optical path between the receiver 2020 and the polarizing beam splitter 2050. The receiving lens may have a positive focal length or a negative focal length.

[0173] In some embodiments, the lidar may further include a housing. The housing may have a surface perpendicular to the second direction (e.g., the y-direction) (e.g., a surface parallel to the xz-plane). A transmitter, a receiver, a first scanner, and a second scanner may be disposed on said surface.

[0174] According to another exemplary embodiment of this disclosure, a terminal device is also provided. The terminal device may include any of the lidar types described above.

[0175] In some embodiments, the terminal device includes a vehicle, and the lidar may be positioned inside the vehicle's windshield. See also Figure 21 The diagram illustrates a vehicle 2120 equipped with a lidar 2110, consistent with some embodiments of this disclosure. For example, the lidar 2110 may be... Figure 3 The lidar 300 in the middle, Figure 4 The lidar 400 in the middle, Figure 6 The lidar 600 or Figure 20 The lidar 2000 disclosed herein. The lidar 2110 may have a smaller size in a second direction (e.g., the vehicle height direction), and the lidar 2110 may be disposed on the inside of the windshield 2121 of the vehicle 2120.

[0176] It should be understood that the above description is illustrative and not restrictive. For example, the above embodiments (and / or aspects thereof) can be used in combination with each other. Furthermore, many modifications can be made to adapt particular situations or materials to the teachings of the various embodiments of this disclosure without departing from the scope of this disclosure. While the dimensions and types of materials described herein are used to define parameters of the various embodiments of this disclosure, the embodiments are not intended to be restrictive but are exemplary. Many other embodiments will become apparent to those skilled in the art upon reading the above description. Therefore, the scope of the various embodiments of this disclosure should be determined by reference to the appended claims and the full scope of their equivalents.

Claims

1. A lidar, comprising: A transmitter configured to emit a probe beam; A receiver configured to receive the echo generated after the probe beam is reflected by an object; A first scanner, which is a fast scanner, is configured to change the direction of the detection beam in a first direction, deflecting the detection beam to different angles in the first direction; A second scanner, which is a slow scanner, is configured to change the direction of the detection beam in a second direction, deflecting the detection beam to different angles in the second direction; A viewing window through which the detection beam is transmitted to the field of view of the lidar and through which the echo enters the interior of the lidar; and The emission path of the detection beam and the receiving path of the echo at least partially overlap.

2. The lidar as described in claim 1, characterized in that, The first scanner is configured to rotate about a first rotation axis; The second scanner is configured to reciprocate about a second rotation axis; The first rotating axis and the second rotating axis have a preset included angle.

3. The lidar as described in claim 1 or 2, characterized in that, The first direction and the second direction are perpendicular to each other, wherein, The first direction is horizontal, and the second direction is vertical, or The first direction is the vertical direction, and the second direction is the horizontal direction.

4. The lidar as described in claim 2, characterized in that, The second scanner has a first position state and a second position state; When the second scanner is in the first position state, the second scanner deflects the detection beam to a first angle in the second direction; When the second scanner is in the second position state, the second scanner deflects the detection beam to a second angle in the second direction; The first angle is different from the second angle.

5. The lidar as described in claim 4, characterized in that, When the first scanner rotates around the first rotation axis, the second scanner first changes from the first position state to the second position state and then from the second position state back to the first position state.

6. The lidar as described in claim 5, characterized in that, The first scanner includes: multiple working reflective surfaces and at least one homing surface; wherein, When the plurality of working reflective surfaces are in the emitting optical path, the second scanner changes from the first position state to the second position state; and When the homing surface is in the emission optical path, the second scanner changes from the second position state to the first position state.

7. The lidar as described in claim 6, characterized in that, When the homing surface is in the emission optical path, the lidar does not detect the object.

8. The lidar as described in claim 5, characterized in that, The first scanner includes multiple working reflective surfaces; When the plurality of working reflective surfaces deflect the detection beam, the second scanner changes from the first position state to the second position state, causing the lidar to scan along the first scanning direction in the second direction, and the second scanner changes from the second position state to the first position state, causing the lidar to scan along the second scanning direction in the second direction.

9. The lidar as described in claim 1, characterized in that, The receiver includes multiple single-photon detectors arranged in a single-photon detector array, which is configured to provide multiple photosensitive areas.

10. The lidar as described in claim 9, characterized in that, The transmitter includes multiple lasers, and the detection beam emitted by one of the lasers is reflected by the object, and the resulting echo illuminates one of the photosensitive areas.

11. The lidar as described in claim 10, characterized in that, The transmitter includes a first row of lasers and a second row of lasers, wherein at least one laser in the first row of lasers is non-aligned with at least one laser in the second row of lasers along a third direction.

12. The lidar as described in claim 11, characterized in that, At least one laser in the first row of lasers has an overlapping area with at least one laser in the second row of lasers in the third direction.

13. The lidar as described in claim 9, characterized in that, The receiver includes a first row of photosensitive areas and a second row of photosensitive areas, wherein at least one photosensitive area in the first row of photosensitive areas and at least one photosensitive area in the second row of photosensitive areas are arranged non-parallel to each other along a fourth direction.

14. The lidar as described in claim 13, characterized in that, At least one photosensitive area in the first row of photosensitive areas overlaps with at least one photosensitive area in the second row of photosensitive areas in the fourth direction.

15. The lidar as described in claim 1 or 9, characterized in that, The field of view of the lidar includes a first region and a second region, wherein the resolution of the point cloud in the first region is different from the resolution of the point cloud in the second region.

16. The lidar as described in claim 15, characterized in that, The plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area, wherein the first photosensitive area is configured to receive echoes from the first area, and the second photosensitive area is configured to receive echoes from the second area. The number of single-photon detectors activated in the first photosensitive region is different from the number of single-photon detectors activated in the second photosensitive region.

17. The lidar as described in claim 15, characterized in that, The plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area, wherein the first photosensitive area is configured to receive echoes from the first area, and the second photosensitive area is configured to receive echoes from the second area. The lidar is configured to determine a point in the point cloud based on detection data from multiple single-photon detectors in the first photosensitive area.

18. The lidar as described in claim 15, characterized in that, The first scanner has a first velocity when it deflects the detection beam to the first region. The first scanner has a second velocity when it deflects the probe beam to the second region. The first speed is different from the second speed.

19. The lidar as described in claim 15, characterized in that, The second scanner has a third velocity when it deflects the probe beam to the first region. The second scanner has a fourth velocity when it deflects the probe beam to the second region. The third speed is different from the fourth speed.

20. The lidar as described in claim 15, characterized in that, The plurality of photosensitive areas includes a first photosensitive area and a second photosensitive area, wherein the first photosensitive area is configured to receive echoes from the first area, and the second photosensitive area is configured to receive echoes from the second area. The lidar is configured to generate a point cloud based on detection data from a portion of the single-photon detectors in the first photosensitive area.

21. The lidar as described in claim 1, characterized in that, The transmitter is mounted on a transmitting circuit board, which is positioned perpendicular to the second direction; The receiver is mounted on a receiving circuit board, which is placed perpendicular to the second direction.

22. The lidar as described in claim 21, characterized in that, The lidar includes: a housing having a surface perpendicular to the second direction, and the transmitter, the receiver, the first scanner, and the second scanner disposed on the surface.

23. A terminal device, characterized in that, Including the lidar as described in any one of claims 1-22.

24. The terminal device as described in claim 23, characterized in that, The terminal device includes a vehicle, and the lidar is located inside the windshield of the vehicle.

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