A multi-blade multi-throw switch based on RF MEMS

Abstract

The application relates to the field of radio frequency microwave devices, in particular to a multi-pole multi-throw switch based on RF MEMS, in order to solve the problem that domestic institutions have less research on the multi-pole multi-throw switch, the multi-channel signal gating function cannot be realized, and the back of the existing multi-throw switch has poor heat dissipation effect, and overheat phenomenon is caused during long-time use, the multi-pole multi-throw switch comprises a base serving as overall support; a port assembly is installed on one side of the base; an electrode assembly is installed on the front of the base and located on the inner side of the corresponding ground wire; a shell is installed on the back of the base; and a cooling mechanism is installed in the shell and used for cooling the base in contact with the shell. The application designs the multi-pole multi-throw switch based on RF MEMS, has multiple input and output ports, realizes the multi-channel signal gating function through voltage control, and enables the multi-channel signal transmission to be switchable; and the shell and the cooling mechanism can realize the connection and cooling effect of the back of the base.

Description

Technical Field

[0001] This application relates to the field of radio frequency microwave devices, and in particular to a multi-pole multi-throw switch based on RF MEMS. Background Technology

[0002] Common types of RF switches include mechanical switches, solid-state RF switches based on PIN or CMOS processes, and RF switches based on MEMS (Micro-Electro-Mechanical Systems). Mechanical RF switches offer advantages such as high power, low loss, and high isolation, but also suffer from slow speed (milliseconds) and limited lifespan (millions of cycles). Solid-state RF switches offer advantages such as high speed (nanoseconds) and long lifespan, but also have disadvantages such as low power capacity and nonlinear distortion. MEMS RF switches can achieve the performance of mechanical switches while possessing the speed of solid-state RF switches, making them suitable for aerospace communications.

[0003] In the process of developing this application, the inventors discovered that the technology has at least the following problems: domestic institutions' research on RF MEMS technology mainly focuses on single-pole multi-throw (SPMT) switches, with very little research on multi-pole multi-throw (MPMT) switches. This makes it impossible to achieve multi-channel signal gating function. At the same time, existing MPMT switches have poor heat dissipation on the back when in use, which can easily lead to overheating during long-term use. Summary of the Invention

[0004] To address the issues of existing single-pole multi-throw switches being unable to perform multi-channel signal gating and the poor heat dissipation of multi-throw switches during use, this application provides a multi-pole multi-throw switch based on RF MEMS.

[0005] This application provides a multi-pole multi-throw switch based on RF MEMS, which employs the following technical solution: A multi-pole multi-throw switch based on RF MEMS, including The base serves as the overall support; Port components are mounted on one side of the base; Four ground wires are installed at the four corners of the front of the base. The electrode assembly is mounted on the front side of the substrate and located inside the corresponding ground wire; An anchor point is fixed on the front of the substrate and located inside the corresponding electrode. A cantilever beam is fixed on the front of the anchor point, and each cantilever beam has a contact point fixed at both ends near the anchor point. The housing is mounted on the back of the base; Fastening threaded posts are installed at the four end corners of the housing and are used to assemble the base and housing through threaded connection with the base. A braking mechanism, installed at the top and bottom of the housing, is used to limit the rotation of the fastening threaded post through a braking hole; The cooling mechanism, installed inside the housing, is used to cool the substrate in contact with the housing.

[0006] Optionally, the port component includes: Port 1 is fixed to the top of the front side of the base, Port 3 is fixed to the bottom of the front side of the base, Port 2 is fixed to one end of the front side of the base and located at the bottom of Port 1, and Port 4 is fixed to the end of the front side of the base away from Port 2 and located at the top of Port 3.

[0007] Optionally, the electrode assembly includes electrode one, and electrode one, electrode two, electrode three and electrode four are fixed sequentially on the front side of the substrate and around the center of the substrate in a clockwise direction.

[0008] Optionally, a rotary drive motor is fixed inside the housing at a position corresponding to the fastening threaded post. The output end of the rotary drive motor is connected to a synchronizing block. The outer side of the synchronizing block is slidably connected to the fastening threaded post. Braking holes are evenly distributed on the outer side of the fastening threaded post.

[0009] Optionally, each of the braking mechanisms includes: The limiting shells are fixed to the top and bottom ends inside the base, respectively; Brake pins are slidably connected to the interior of both ends of each limiting shell, and the brake pins are slidably connected to the brake holes; A sliding frame is slidably connected to both ends inside the limiting shell, and the sliding frame is fixed to the brake column. A second compression spring is fixed at the top between the two sliding frames. An adjusting plate is slidably connected to the top and bottom of the sliding frame. A first compression spring is fixed at the top of the adjusting plate. A guide slope is provided at one end of the adjusting plate.

[0010] Optionally, a release plate is fixed inside the limiting shell and outside the displacement rack.

[0011] Optionally, the braking mechanism further includes: A displacement drive motor is fixed inside the limiting shell. The output end of the displacement drive motor is connected to a displacement gear. Both sides of the displacement gear are meshed with displacement racks, and the displacement racks are slidably connected to the limiting shell. The pull plate is fixed to the end of the displacement rack away from the displacement gear and located inside the sliding frame.

[0012] Optional cooling mechanisms include: Cooling pipes are evenly distributed and fixed inside the shell; The connecting mechanisms are installed at the output and input ends of each cooling pipe.

[0013] Optionally, the connecting mechanism includes: A connecting sleeve is fixed to a cooling pipe, and assembly beads are evenly distributed and slidably connected to the inner side of the connecting sleeve. A sliding sleeve is slidably connected to the outside of the connecting sleeve, and a return spring is fixed at one end of the sliding sleeve; An extrusion plate is fixed inside the sliding sleeve and at a position corresponding to the assembly bead. An extrusion slope is provided at the bottom of the end of the extrusion plate away from the cooling pipe.

[0014] Optionally, a sliding cavity is provided inside the connecting sleeve at a position corresponding to the assembly bead, and a sliding groove is provided on the outside of the connecting sleeve at a position corresponding to the extrusion plate.

[0015] In summary, this application includes at least one of the following beneficial technical effects: 1. This invention presents a multi-pole multi-throw switch based on RF MEMS, featuring multiple input / output ports. It enables multi-channel signal selection via voltage control, allowing for switchable multi-channel signal transmission. It exhibits excellent insertion loss and VSWR, operating at frequencies up to 110GHz. Furthermore, the insertion loss of the transmitted signal channels is better than 1dB@DC-110GHz, and the VSWR is less than 1.5@DC-110GHz. The housing and cooling mechanism facilitate connection to and cooling of the substrate's back side. 2. The present invention uses a sliding frame to drive the movement of the brake pin inside the limiting shell. When the brake pin enters the brake hole of the corresponding fastening threaded pin, the rotation and movement of the fastening threaded pin inside the shell are restricted, thereby making the assembly between the base and the shell more stable. 3. The present invention allows an external pipe to enter the interior of the connecting sleeve through the cooperation of the connecting sleeve and the assembly beads on the cooling pipe, and the assembly is limited by the proximity of multiple assembly beads. At the same time, when the sliding sleeve slides on the outside of the connecting sleeve, it can squeeze and limit the position of the assembly beads. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of Embodiment 1 of the present invention.

[0017] Figure 2 This is a schematic diagram of the electrodes and ports of the present invention.

[0018] Figure 3 This is a schematic diagram of the cantilever beam structure of the present invention.

[0019] Figure 4 This is a schematic diagram of the insertion loss of the port 1 / port 3 to port 2 / port 4 channels of the present invention.

[0020] Figure 5 This is a schematic diagram of the standing wave ratio (SWR) of each port from port one to port four of the present invention.

[0021] Figure 6 This is a schematic diagram of the isolation between adjacent ports of the present invention.

[0022] Figure 7 This is a schematic diagram of the overall structure of Embodiment 2 of the present invention.

[0023] Figure 8 This is a schematic diagram of the separation structure in Embodiment 2 of the present invention.

[0024] Figure 9 This is the present invention. Figure 8 Side view.

[0025] Figure 10 This is a schematic diagram of the internal structure of the housing of the present invention.

[0026] Figure 11 This is a schematic diagram of the cooling pipe structure of the present invention.

[0027] Figure 12 This is a schematic diagram of the internal structure of the fastening threaded column of the present invention.

[0028] Figure 13 This is a schematic diagram of the internal structure of the limiting shell of the present invention.

[0029] Figure 14 This is a schematic diagram of the structure of the pull plate of the present invention.

[0030] Figure 15 This is a schematic diagram of the internal structure of the sliding frame of the present invention.

[0031] Figure 16 This is a schematic diagram of the connection mechanism of the present invention.

[0032] Figure 17 This is a schematic diagram of the structure of the sliding sleeve of the present invention.

[0033] Figure 18 This is a schematic diagram of the internal structure of the connecting sleeve of the present invention.

[0034] Figure 19 This is a schematic diagram of the sliding groove of the present invention.

[0035] Figure 20 This is a schematic diagram of the extrusion plate of the present invention. Detailed Implementation

[0036] The following is in conjunction with the appendix Figures 1-20 This application will be described in further detail.

[0037] Example 1 refer to Figures 1-6 This application discloses a multi-pole multi-throw switch based on RF MEMS.

[0038] Reference Figure 1 , Figure 2 and Figure 3 A multi-pole multi-throw switch based on RF MEMS, comprising: Base 1 serves as the overall support; Preferably, the material of the substrate 1 is silicon, ceramic or glass, etc.

[0039] A port assembly is installed on one side of the base 1 and connects through different ports inside the port to realize multiple channels. The port assembly includes port 1 7, port 1 7 is fixed to the top of the front of the base 1, port 3 9 is fixed to the bottom of the front of the base 1, port 2 8 is fixed to one end of the front of the base 1 and located at the bottom of port 1 7, and port 4 10 is fixed to the end of the front of the base 1 away from port 2 8 and located at the top of port 3 9. Thus, the port assembly is formed by the array of port 1 7, port 2 8, port 3 9 and port 4 10 around the center. Ground wire 2, there are four ground wires, which are installed at the four corners of the front of the base 1 to achieve grounding; Preferably, a transmission signal line is installed between two adjacent ground wires 2, and the position where the transmission signal line contacts the MEMS cantilever beam is matched with gradient impedance, so that good grounding is achieved through silicon vias on both sides of the signal line, thereby improving isolation.

[0040] The electrode assembly is installed on the front of the substrate 1 and located inside the corresponding ground wire 2. Through the cooperation of the four electrodes in the electrode assembly with the port assembly, a multi-channel selection function is realized. The electrode assembly includes electrode 1 3. Electrode 1 3, electrode 2 4, electrode 3 5 and electrode 4 6 are fixed in sequence clockwise around the center of the substrate 1 on the front of the substrate 1. Electrode 1 3, electrode 2 4, electrode 3 5 and electrode 4 6 are located inside the corresponding ground wire 2. The warping of the corresponding cantilever beam 12 can be controlled by energizing electrode 1 3, electrode 2 4, electrode 3 5 and electrode 4 6.

[0041] Anchor points 11 are fixed to the front of the base 1 and located inside the corresponding electrodes, resulting in four anchor points 11 located inside electrodes 3, 4, 5, and 6 respectively. Cantilever beams 12 are fixed to the front of each anchor point 11, resulting in four cantilever beams 12. Contact points 13 are fixed to both ends of each cantilever beam 12 near the anchor point 11. Channel selection is achieved through contact between the contacts 13 on adjacent cantilever beams 12 and the same port, and through energization. When the electrodes are energized, the signal path is connected through contact 13 with the transmission line. When electrodes 3 and 5 are energized simultaneously, ports 7 and 8 are connected, and ports 9 and 10 are connected. When electrodes 4 and 6 are energized simultaneously, ports 8 and 9 are connected, and ports 7 and 10 are connected, thus achieving multi-channel selection.

[0042] The implementation principle of a multi-pole multi-throw switch based on RF MEMS in this application embodiment is as follows: good grounding is achieved through silicon vias on both sides of the signal line to improve isolation. When multi-channel selection is performed, the electrodes are energized and contact the transmission line through contact 13, thus opening the signal path. When electrodes 1 (3) and 3 (5) are energized simultaneously, ports 1 (7) and 2 (8) are connected, and ports 3 (9) and 4 (10) are connected. When electrodes 2 (4) and 4 (6) are energized simultaneously, ports 2 (8) and 3 (9) are connected, and ports 1 (7) and 4 (10) are connected, thus realizing the multi-channel selection function.

[0043] Example 2 refer to Figures 7-20 Based on the above embodiment one, the following differences are made: The housing 14 is mounted on the back of the base 1 for connection with the base 1 and for providing heat dissipation to the back of the base 1; Fastening threaded posts 15 are installed at the four end corners of the housing 14 and are used to assemble the base 1 and the housing 14 through threaded connection with the base 1; A rotary drive motor 18 is fixed inside the housing 14 at a position corresponding to the fastening threaded post 15. The output end of the rotary drive motor 18 is connected to a synchronizing block 20. The outer side of the synchronizing block 20 is slidably connected to the fastening threaded post 15. The shape of the synchronizing block 20 can be triangular, rectangular, pentagonal, hexagonal, irregular, etc. It is used to allow the rotary drive motor 18 to drive the fastening threaded post 15 to rotate through the synchronizing block 20. The rotation of the fastening threaded post 15 enters the interior of the threaded base 1, realizing the assembly between the housing 14 and the base 1. Braking holes 19 are evenly distributed on the outer side of the fastening threaded post 15, so that the brake pin 23 can enter the interior of the brake hole 19 to restrict the rotation of the brake hole 19, thereby making the assembly between the base 1 and the housing 14 inseparable.

[0044] In other embodiments, a spring can be fixed inside the fastening threaded post 15 on the side of the synchronizing block 20 away from the rotary drive motor 18, for adjusting the position of the fastening threaded post 15 inside the housing 14, so that when the base 1 contacts the housing 14, the fastening threaded post 15 contacts the corresponding threaded hole position on the base 1.

[0045] In this embodiment, the fastening threaded post 15 cannot slide out of the housing 14. A fixing disc to prevent detachment can be added to the end of the fastening threaded post 15 as needed.

[0046] refer to Figures 12-15 A braking mechanism, installed at the top and bottom of the housing 14, is used to limit the rotation of the fastening threaded post 15 through the brake hole 19. Each braking mechanism includes a limiting shell 21. The limiting shell 21 is fixed at both the top and bottom of the base 1. Brake pins 23 are slidably connected to the interior of both ends of the limiting shell 21, and the brake pins 23 are slidably connected to the brake holes 19. This allows the brake pins 23 to slide into or out of the brake holes 19 within the limiting shell 21. When the brake pins 23 are inside the brake holes 19, the fastening threaded pins 15 cannot rotate. When the brake pins 23 disengage from the sliding brake holes 19, the fastening threaded pins 15 can be rotated by the operation of the rotation drive motor 18. Sliding brackets 22 are slidably connected to both ends of the limiting shell 21, and the sliding brackets 22 are fixed to the brake pins 23. This allows the sliding of the sliding brackets 22 to synchronously slide the brake pins 23. A second compression spring 40 is fixed at the top between the moving frames 22. When the two sliding frames 22 are close together, the second compression spring 40 is compressed. After the external force is removed, the sliding frame 22 is reset by the rebound of the second compression spring 40. The top and bottom of the sliding frame 22 are slidably connected to the adjusting plate 28. The top of the adjusting plate 28 is fixed with a first compression spring 30. When the adjusting plate 28 is squeezed, the first compression spring 30 is compressed. At this time, the two adjusting plates 28 do not contact each other. One end of the adjusting plate 28 is provided with a guide slope 29. The bottom of the top adjusting plate 28 near the displacement drive motor 24 and the top of the bottom adjusting plate 28 near the displacement drive motor 24 are both provided with guide slopes 29. The adjusting plate 28 can be squeezed through the guide slopes 29.

[0047] refer to Figure 13 Inside the limiting shell 21 and outside the displacement rack 26, there is a release plate 39. When the two sliding frames 22 move close together, the release plate 39 presses the guide slope 29 on the adjusting plate 28, causing the adjusting plate 28 to disengage from the pull plate 27. At this time, the sliding frame 22 is reset by the second compression spring 40, and the brake pin 23 extends out of the limiting shell 21 and enters the corresponding brake hole 19.

[0048] refer to Figure 13 and Figure 14A displacement drive motor 24 is fixed inside the limiting shell 21. The output end of the displacement drive motor 24 is connected to a displacement gear 25, so that the operation of the displacement drive motor 24 drives the keyed displacement gear 25 to rotate. Displacement racks 26 are meshed on both sides of the displacement gear 25, and the displacement racks 26 are slidably connected to the limiting shell 21, so that the rotation of the displacement gear 25 drives the two displacement racks 26 to slide in opposite directions. The end of the displacement rack 26 away from the displacement gear 25 is fixed inside the sliding frame 22. The pull plate 27 causes the sliding rack 26 to slide, which in turn moves the sliding frame 22. This causes the sliding frame 22 to retract the brake pin 23 back into the limiting shell 21. When the displacement rack 26 moves the pull plate 27 back into the sliding frame 22, the pull plate 27 presses the guide slopes 29 on the two adjusting plates 28, causing the adjusting plates 28 to move inside the sliding frame 22 and compress the corresponding first compression spring 30. This allows the pull plate 27 to return to the end of the sliding frame 22 that is away from the displacement drive motor 24.

[0049] refer to Figure 10 and Figure 16 A cooling mechanism is installed inside the housing 14 to cool the substrate 1 that is in contact with the housing 14. The cooling mechanism includes cooling pipes 16 and connecting mechanisms 17. Cooling pipes 16 are evenly distributed and fixed inside the housing 14, so that heat can be exchanged through the coolant flowing inside the cooling pipes 16 to dissipate heat to the base 1 in contact with the housing 14, and to dissipate heat to the motor and port installed on the base 1 when they are working. The output end and the input end of the cooling pipes 16 are both equipped with connecting mechanisms 17, so that the external coolant structure can flow to the coolant inside the cooling pipes 16 through the two connecting mechanisms 17.

[0050] refer to Figures 17-20 The connecting mechanism 17 includes a connecting sleeve 31, which is fixed to the cooling pipe 16, allowing coolant or other fluids to flow into the cooling pipe 16 through the connecting sleeve 31. (See reference...) Figure 17 The connecting structure shape in the middle, the inner side of the connecting sleeve 31 is evenly distributed with the slidable assembly beads 34, so that the external structure can be installed inside the connecting sleeve 31 by sliding the assembly beads 34 inside the connecting sleeve 31, or the multiple assembly beads 34 can move away from each other to realize the external structure is detached from the connecting sleeve 31. A sliding sleeve 32 is slidably connected to the outer side of the connecting sleeve 31. Pulling grooves are evenly distributed on the outer side of the sliding sleeve 32 to drive the sliding sleeve 32 to move. A return spring 33 is fixed to one end of the sliding sleeve 32, so that the sliding sleeve 32 moves away from the top position of the assembly bead 34 on the outer side of the connecting sleeve 31, allowing the sliding sleeve 32 to drive the return spring 33 to compress. A pressing plate 37 is fixed on the inner side of the sliding sleeve 32 at the position corresponding to the assembly bead 34, so that the movement of the sliding sleeve 32 drives the pressing plate 37 to move synchronously. A pressing slope 38 is opened at the bottom of the end of the pressing plate 37 away from the cooling pipe 16. When the sliding sleeve 32 presses the assembly bead 34, the pressing slope 38 on the pressing plate 37 contacts the assembly bead 34, so that multiple assembly beads 34 are located in a position close to each other. At this time, the assembly beads 34 can restrict the position of the external structure entering the interior of the connecting sleeve 31. As needed, a sealing ring can be added at the position where the external structure enters the interior of the connecting sleeve 31 to prevent liquid leakage.

[0051] refer to Figure 19 A sliding cavity 35 is provided inside the connecting sleeve 31 at a position corresponding to the assembly bead 34, allowing the assembly bead 34 to slide up and down inside the sliding cavity 35. However, the assembly bead 34 cannot detach from the sliding cavity 35. A sliding groove 36 is provided on the outside of the connecting sleeve 31 at a position corresponding to the extrusion plate 37, allowing the sliding sleeve 32 on the outside of the connecting sleeve 31 to allow the extrusion plate 37 to slide into the sliding cavity 35 through the sliding groove 36, thus extruding the assembly bead 34 inside the sliding cavity 35.

[0052] In this implementation, the materials of the housing 14 and the fastening threaded post 15 can be changed to insulating materials as needed.

[0053] The implementation principle of a multi-pole multi-throw switch based on RF MEMS in this application embodiment is as follows: During assembly, the housing 14 is brought close to the back of the base 1, and the fastening threaded post 15 is aligned with the threaded hole on the base 1. The operation of the displacement drive motor 24 drives the displacement gear 25 to rotate, which in turn drives the two displacement racks 26 to move in opposite directions. The movement of the displacement racks 26 drives the adjusting plate 28 via the pull plate 27, which in turn drives the sliding frame 22 to move. The sliding frame 22 drives the brake post 23 to move, causing the brake post 23 to disengage from the brake hole 19 corresponding to the fastening threaded post 15. The operation of the displacement drive motor 24 is stopped. Then, the operation of the rotation drive motor 18 drives the synchronizing block 20 to rotate, causing the synchronizing block to move. The rotation of 20 drives the fastening threaded post 15 to rotate, allowing the rotation of the fastening threaded post 15 to enter the interior of the threaded connection base 1, realizing the assembly of the base 1 and the housing 14. Then, while the base 1 and the housing 14 are close together, the displacement drive motor 24 continues to work, allowing the movement of the displacement rack 26 to drive the sliding frame 22 to enter the outside of the release plate 39. At this time, the release plate 39 squeezes the guide slope 29, causing the adjusting plate 28 to rise and drive the first compression spring 30 to compress. At this time, the adjusting plate 28 is separated from the contact with the pull plate 27, and the sliding frame 22 is driven by the rebound of the second compression spring 40 to drive the brake post 23 to enter the brake hole 19 on the corresponding fastening threaded post 15, restricting the rotation of the fastening threaded post 15. After the housing 14 and the base 1 are assembled, the external pipe is connected to the cooling pipe 16 inside the connecting sleeve 31, so that the cooling liquid inside the cooling pipe 16 can flow and cool the back of the base 1. When the external structure needs to be detached, the sliding sleeve 32 can be pulled to compress the return spring 33 and release the pressure on the assembly beads 34. When the external pipe is pulled out, it causes the multiple assembly beads 34 to move away from each other, thus achieving separation.

[0054] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A multi-pole multi-throw switch based on RF MEMS, characterized in that: include The base (1) serves as the overall support; Port components are mounted on one side of the base (1); Ground wire (2), there are four ground wires (2), which are respectively installed at the four corners of the front of the base (1); The electrode assembly is mounted on the front of the substrate (1) and located inside the corresponding ground wire (2); Anchor point (11) is fixed on the front of the base (1) and located inside the corresponding electrode. A cantilever beam (12) is fixed on the front of the anchor point (11). Each cantilever beam (12) has a contact point (13) fixed at both ends on the side near the anchor point (11). The housing (14) is mounted on the back of the base (1); Fastening threaded posts (15) are installed at the four end corners of the housing (14) and are connected to the base (1) by threads to assemble the base (1) and the housing (14). Braking mechanism, installed at the top and bottom of the housing (14), is used to restrict the rotation of the fastening threaded post (15) through the brake hole (19); A cooling mechanism is installed inside the housing (14) to cool the substrate (1) in contact with the housing (14).

2. A multi-pole multi-throw switch based on RF MEMS according to claim 1, characterized in that: The port component includes: Port 1 (7), Port 1 (7) is fixed at the top of the front side of the base (1), Port 3 (9) is fixed at the bottom of the front side of the base (1), Port 2 (8) is fixed at one end of the front side of the base (1) and at the bottom of Port 1 (7), and Port 4 (10) is fixed at one end of the front side of the base (1) away from Port 2 (8) and at the top of Port 3 (9).

3. A multi-pole multi-throw switch based on RF MEMS according to claim 1, characterized in that: The electrode assembly includes electrode one (3), and electrode one (3), electrode two (4), electrode three (5) and electrode four (6) are fixed in sequence clockwise around the center of the substrate (1) on the front side of the substrate (1).

4. A multi-pole multi-throw switch based on RF MEMS according to claim 1, characterized in that: A rotary drive motor (18) is fixed inside the housing (14) at a position corresponding to the fastening threaded post (15). The output end of the rotary drive motor (18) is connected to a synchronizing block (20). The outer side of the synchronizing block (20) is slidably connected to the fastening threaded post (15). Braking holes (19) are evenly distributed on the outer side of the fastening threaded post (15).

5. A multi-pole multi-throw switch based on RF MEMS according to claim 1, characterized in that: Each of the aforementioned braking mechanisms includes: The limiting shell (21) is fixed to the top and bottom of the base (1) respectively; Brake pins (23) are slidably connected to the interior of each end of a limiting shell (21), and the brake pins (23) are slidably connected to the brake holes (19); The sliding frame (22) is slidably connected to both ends inside the limiting shell (21), and the sliding frame (22) is fixed to the brake column (23). A second compression spring (40) is fixed at the top between the two sliding frames (22). An adjusting plate (28) is slidably connected to the top and bottom of the sliding frame (22). A first compression spring (30) is fixed at the top of the adjusting plate (28). A guide slope (29) is opened at one end of the adjusting plate (28).

6. A multi-pole multi-throw switch based on RF MEMS according to claim 5, characterized in that: A release plate (39) is fixed inside the limiting shell (21) and outside the displacement rack (26).

7. A multi-pole multi-throw switch based on RF MEMS according to claim 5, characterized in that: The braking mechanism further includes: The displacement drive motor (24) is fixed inside the limiting shell (21). The output end of the displacement drive motor (24) is connected to the displacement gear (25). Both sides of the displacement gear (25) are meshed with displacement racks (26), and the displacement racks (26) are slidably connected to the limiting shell (21). The pull plate (27) is fixed to the end of the displacement rack (26) away from the displacement gear (25) and located inside the sliding frame (22).

8. A multi-pole multi-throw switch based on RF MEMS according to claim 1, characterized in that: Cooling mechanisms include: Cooling pipes (16) are evenly distributed and fixed inside the shell (14); The connecting mechanism (17) is installed at the output and input ends of each cooling pipe (16).

9. A multi-pole multi-throw switch based on RF MEMS according to claim 8, characterized in that: The connecting mechanism (17) includes: Connecting sleeve (31), the connecting sleeve (31) is fixed to the cooling pipe (16), and the inner side of the connecting sleeve (31) is evenly connected with assembly beads (34). The sliding sleeve (32) is slidably connected to the outside of the connecting sleeve (31), and a return spring (33) is fixed at one end of the sliding sleeve (32). The extrusion plate (37) is fixed inside the sliding sleeve (32) and at a position corresponding to the assembly bead (34). The bottom of the extrusion plate (37) away from the cooling pipe (16) has an extrusion slope (38).

10. A multi-pole multi-throw switch based on RF MEMS according to claim 9, characterized in that: A sliding cavity (35) is provided inside the connecting sleeve (31) at a position corresponding to the assembly bead (34), and a sliding groove (36) is provided on the outside of the connecting sleeve (31) at a position corresponding to the extrusion plate (37).

Images