Optical coupled detection device and method

The optical detection device, which optimizes coaxial optical path and timing control, solves the problems of information mismatch and signal interference in the existing technology, realizes comprehensive detection of multiple parameters at the same location, and improves the accuracy and adaptability of detection.

CN122448827APending Publication Date: 2026-07-24SUZHOU HUAXING YUANCHUANG TECH CO LTD
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Patent Information

Application Number
CN202610933333.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-26
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing optical-coupled detection technologies suffer from problems such as information mismatch due to time-division and location-division measurements, interference signals from plasma flashes, complex polarization management, and poor adaptability to smooth and rough surfaces, making it difficult to achieve comprehensive detection of multiple parameters at the same location.

Method used

By using coaxial optical paths, timing control, and polarization optimization, an optically coupled detection device is designed to combine a signal optical comb, an ultrasonic detection laser, and a pulsed laser onto the same test point. The timing is coordinated through a synchronization control module to avoid signal interference and achieve comprehensive detection of multiple parameters.

Benefits of technology

It enables comprehensive detection of composition, morphology, thickness and defects at the same location, improves the spatial coherence of detection and system integration, and enhances adaptability to smooth and rough surfaces.

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Abstract

The application discloses an optical combined detection device and method, which comprises the following modules: a light source module comprising a continuous laser source and a pulsed laser source; an optical path coupling and regulation module configured to combine and focus pulsed laser, signal light comb generated by the continuous laser and ultrasonic detection laser at the same point; and separate the reflected light beams into different optical paths to output to corresponding detection units; a detection module comprising a first detection unit for collecting reflected light comb signals, a second detection unit for collecting ultrasonic signals and a third detection unit for collecting laser-induced breakdown spectroscopy signals; a signal processing module comprising a first signal processing system for receiving and processing output signals of the first detection unit, a second signal processing system for receiving and processing output signals of the second detection unit and a third signal processing system for receiving and processing output signals of the third detection unit; and a synchronous control module for controlling the emission time of the pulsed laser and the continuous laser and the processing timing of each signal processing system.
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