Optical combined detection device and method

The optical detection device, which optimizes coaxial optical path and timing control, solves the problems of information mismatch and signal interference in the existing technology, realizes comprehensive detection of multiple parameters at the same location, and improves the accuracy and adaptability of detection.

CN122448827AActive Publication Date: 2026-07-24SUZHOU HUAXING YUANCHUANG TECH CO LTD
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Patent Information

Application Number
CN202610933333.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-26
Publication Date
2026-07-24
Estimated Expiration
2046-06-26

AI Technical Summary

Technical Problem

Existing optical-coupled detection technologies suffer from problems such as information mismatch due to time-division and location-division measurements, interference signals from plasma flashes, complex polarization management, and poor adaptability to smooth and rough surfaces, making it difficult to achieve comprehensive detection of multiple parameters at the same location.

Method used

By using coaxial optical paths, timing control, and polarization optimization, an optically coupled detection device is designed to combine a signal optical comb, an ultrasonic detection laser, and a pulsed laser onto the same test point. The timing is coordinated through a synchronization control module to avoid signal interference and achieve comprehensive detection of multiple parameters.

Benefits of technology

It enables comprehensive detection of composition, morphology, thickness and defects at the same location, improves the spatial coherence of detection and system integration, and enhances adaptability to smooth and rough surfaces.

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Abstract

The invention discloses an optical combined detection device and method. The optical combined detection device comprises a light source module comprising a continuous laser source and a pulse laser source; the light path coupling and regulating module is configured to combine the pulse laser, the signal light comb generated by the continuous laser and the ultrasonic detection laser and focus the combined laser on the same point position; the reflected light beam is separated into different light paths to be output to corresponding detection units; the detection module comprises a first detection unit for collecting reflection optical comb signals, a second detection unit for collecting ultrasonic signals and a third detection unit for collecting laser-induced breakdown spectrum signals; the signal processing module comprises a first signal processing system for receiving and processing an output signal of the first detection unit, a second signal processing system for receiving and processing an output signal of the second detection unit, and a third signal processing system for receiving and processing an output signal of the third detection unit; and the synchronous control module is used for controlling the emission time of the pulse laser and the continuous laser and the processing time sequence of each signal processing system.
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