Dynamic focal plane position compensation method and system

By generating a compensation array using a distance sensor and converting the encoder trigger pulses, combined with a programmable logic controller and a servo driver, the problems of installation offset and signal instability in dynamic focal plane compensation are solved, achieving high-efficiency exposure quality and stability.

CN122449864AActive Publication Date: 2026-07-24SUZHOU LING AUTOMATION EQUIP
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Patent Information

Application Number
CN202610912401.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-24
Publication Date
2026-07-24
Estimated Expiration
2046-06-24

AI Technical Summary

Technical Problem

In existing dynamic focal plane compensation methods, the installation offset between the displacement sensor and the exposure lens leads to reduced scanning efficiency, the signal spacing is affected by fluctuations in motion speed, and there is a lack of a reliable focusing trigger mechanism, which affects system stability and exposure quality.

Method used

A distance sensor scans the substrate surface to generate a compensation array. An encoder detects the displacement of the exposure platform and converts it into trigger pulses with fixed spatial intervals. A programmable logic controller determines the compensation start position and a servo driver drives the focusing optical component for dynamic compensation. Trigger pulse interrupt response is shielded to avoid false triggering.

Benefits of technology

It simplifies the system architecture while responding to mounting offsets in real time and improving exposure linewidth uniformity and product yield, making it suitable for high-speed scanning exposure production lines with substrates of different specifications.

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Abstract

The invention discloses a dynamic focal plane position compensation method and system. The surface of the substrate is pre-scanned through the distance sensor, and the upper computer generates a corresponding compensation array and issues the compensation array to the PLC; and the high-frequency pulse output by the encoder is subjected to frequency reduction processing by the synchronous plate and is converted into a trigger pulse which has a fixed space interval and is adaptive to high-speed counting of the PLC. And the PLC calculates the installation offset of the sensor and the focusing assembly to determine a compensation initial position, accumulates the number of pulses, sequentially reads focal plane target values of a compensation array in hardware interruption when the number of pulses corresponding to a fixed interval is reached, and drives the linear servo module rotor to axially move along the linear servo module, so as to complete the compensation of the linear servo module. The thickness of the optical system is adjusted by moving the lower optical component to change focal length to realize dynamic compensation; and shielding interruption and resetting counting when the platform returns. According to the scheme, deterministic real-time focusing is achieved, installation offset is automatically compensated, the structure is simple, response is fast, and the line width uniformity and the product yield of long-stroke scanning exposure are remarkably improved.
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