A combined beam light source device for an optical-mechanical system

By employing a combination of multiple monochromatic light sources and collimating lens groups in the optomechanical system, the problem of balancing light collection and collimation in a single-lens solution is solved, achieving efficient broadband and highly uniform illumination. It also provides an effective method for optical path debugging and calibration, improving the device's ease of maintenance and anti-interference capabilities.

CN122632465APending Publication Date: 2026-08-25BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Patent Information

Application Number
CN202611058582.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-07-16
Publication Date
2026-08-25

AI Technical Summary

Technical Problem

In existing LED beam combining light source solutions, a single collimating lens cannot simultaneously achieve both large-angle light collection and high collimation, resulting in beam quality degradation or light loss, and there is a lack of effective methods for multi-path debugging and calibration.

Method used

It employs a combination of multiple monochromatic light sources and collimating lens groups, and achieves wide-angle light collection and high collimation output through the division of labor and cooperation between condensing lenses and collimating lenses. The optical path is adjusted and calibrated through a beam combining imaging module and a feedback control module.

Benefits of technology

It achieves wide-spectrum, highly uniform illumination output, improves optical power utilization and beam quality, simplifies maintenance, and enhances the device's anti-interference capability.

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Abstract

This application provides a beam combining light source device for an optomechanical system, comprising: an emission module including multiple monochromatic light sources, each with a different emission wavelength, and at least one of the monochromatic light sources being a large divergence angle light source; a collimation module including collimating lens groups corresponding one-to-one with each monochromatic light source, each collimating lens group including a condenser lens and a collimating lens arranged sequentially along the optical path; and a beam combining imaging module including at least two dichroic filters and a coupling lens, each dichroic filter being obliquely disposed at the intersection of the transmission optical paths of each parallel beam, used to combine parallel beams from different directions into a combined beam propagating along the same optical axis, and image it onto the receiving surface of the optomechanical system in a critical illumination manner. This application overcomes the physical performance bottleneck of the single-lens scheme, where light collection capability and collimation accuracy cannot be simultaneously achieved, realizing large-angle light collection and high collimation output under large divergence angle light source conditions.
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