Thermal management system and method
CN122912754APending Publication Date: 2026-10-16ASM IP HLDG BV
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Patent Information
- Application Number
- CN202610418158.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2025-04-04
- Filing Date
- 2026-04-01
- Publication Date
- 2026-10-16
AI Technical Summary
Technical Problem
在这方面，使气体经受不需要这种处理的环境缓解过程会产生额外的时间和费用
✦ Generated by Eureka AI based on patent content.
Abstract
A system is provided, comprising: a main cabinet having a process chamber and a gas box disposed therein; a first scrubber disposed outside the main cabinet in fluid communication with the gas box; a conduit disposed in the main cabinet configured to place an interior of the main cabinet in fluid communication with a fan.
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