AOD and galvanometer composite beam scanning device capable of realizing dynamic rotation matching of coordinate system and control method

Abstract

The application provides an AOD and galvanometer composite light beam scanning device and a control method capable of realizing dynamic rotation matching of a coordinate system, belongs to the technical field of laser processing, and sequentially comprises a pulsed laser, an orthogonal AOD deflection system, a 4F system, an optical coordinate system rotation system and a galvanometer deflection unit along an optical path; the optical coordinate system rotation system can rotate around a main optical axis to realize pure optical rotation transformation of an AOD output coordinate system, and the galvanometer deflection unit can rotate as a whole around the optical axis to adjust the orientation of a processing coordinate system. The application can not only statically calibrate the assembly coordinate system deviation of the AOD and the galvanometer to improve the cross-device reuse rate of processing data, but also dynamically adjust the orientation of the processing coordinate system in processing to simplify the processing coordinate generation process of a complex curved surface, has the advantages of simple structure, high scanning precision and strong processing flexibility, and is suitable for three-dimensional curved surface high-precision laser processing scenes.