Miniaturized high-precision double-sided polishing machine
CN122914031APending Publication Date: 2026-10-16JIANGXI ZUOHE SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information
- Application Number
- CN202611262293.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-08-19
- Publication Date
- 2026-10-16
AI Technical Summary
Technical Problem
同样越精密越薄带来了加工难度,厚度公差(TTV)全批次极难稳定,超薄硬脆件极易崩边、翘曲、隐性开裂,表面质量苛刻:划痕、麻点、波纹难以杜绝,亚表面损伤(SSD)管控难
Benefits of technology
[0011]与现有技术相比,本发明的有益效果是:(1)本发明通过设置滚珠丝杆升降机用于内外齿圈升降,滚珠丝杆升降机定位与重复定位精度极高,可做到微米级定位与重复定位,内外齿圈高度一致,保证工件平行度与厚度均匀,刚性强、形变小;内外齿圈升降同步性好,减少偏载与接触不均。相比链条/齿轮齿条,本发明传动链短、间隙少、同步误差小;内外齿圈高度一致性更好,无油液泄漏与压力波动,位置稳定、可控性强,适合精密压力控制;
✦ Generated by Eureka AI based on patent content.
Abstract
The application provides a small-sized high-precision double-sided polishing machine, which comprises an upper and lower outer tooth driving assembly for driving rotation of upper and lower disc main driving gears, an inner tooth driving assembly for driving rotation of an inner ring main driving gear, an inner and outer ring lifting assembly for driving upward and downward movement of the inner ring and the outer ring, a lower disc assembly comprising an auxiliary shaft, which is provided with an upper disc, a lower disc and an outer ring gear set for driving rotation of an upper disc shaft, a lower disc shaft and an outer ring seat respectively, and an upper disc assembly.The application synchronously drives the upper grinding disc, the lower grinding disc and the outer ring through the upper and lower outer tooth driving assembly, the speed ratio is fixed and unchanged, the revolution and rotation are uniform and stable, the grinding track is fully covered, there is no dead angle and repetition, the grinding is more uniform, the workpiece front and back surfaces are synchronously and equally ground, the thickness difference is extremely small, the batch precision is highly unified, one set of power simultaneously drives the upper grinding disc, the lower grinding disc and the outer ring, the synchronous response is fast, there is no multi-motor asynchronous error, and the control is simpler and more stable.
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