A multi-degree-of-freedom template plate device with a flexible joint and a stamping device

Abstract

The application belongs to the technical field of nano-imprinting, and discloses a multi-degree-of-freedom template upper plate device with a flexible joint and an imprinting device, which comprises a base, a rotary driving mechanism, a linear driving mechanism, a flexible gasket and a template tray; one side of the flexible gasket is fixedly connected with the template tray, and the other side is fixedly connected with the linear driving mechanism; the flexible gasket is made of an elastic material; the template tray is used for placing a template; the flexible gasket is used for ensuring that the template is attached to an imprinting head when the template tray is placed; one side of the rotary driving mechanism is in transmission connection with the linear driving mechanism, and the other side is mounted on the base; the linear driving mechanism is used for controlling the template tray to move linearly along the Z axis; and the rotary driving mechanism is used for controlling the linear driving mechanism to rotate around the Z axis. In this way, the device can be used for conveying and mounting the template when the template is replaced on the imprinting head, and the accurate control of the template upper plate is realized through the multi-degree-of-freedom driving mechanism.