Infrared cob collimating light source structure for integrated circuit manufacturing

Abstract

The application discloses an infrared COB collimating light source structure for integrated circuit manufacturing, and relates to the technical field of light sources.The infrared COB collimating light source structure comprises a shell, an infrared COB chip array arranged in a recess in the shell, and a light source adjusting mechanism coaxially arranged on the top of the infrared COB chip array.The infrared COB chip array can be independently powered to adjust light, and is used for outputting a controllable infrared light beam.Through the independently controllable infrared COB chip array, the controllable infrared light beam with a specific spatial distribution and power mode can be output according to requirements, so that the flexible lighting requirements under complex working conditions are met.The lens can preliminarily converge, collimate or filter the infrared light, and the light beam quality is improved.In the light source adjusting mechanism, the adjusting assembly utilizes the differential volume deformation of the GST phase change part under controlled heating to drive the micro reflector to independently tilt or bend, so that the reflection angle is accurately adjusted, the problems of edge light escaping and insufficient contrast of the central light spot are effectively solved, and the light at specific angles can be supplemented.