Tensioning device and photovoltaic solar cell manufacturing equipment

By designing a tensioning device including elastic parts and limiting parts, automatic adjustment of the electric heating wire is achieved, and the problem of insufficient or excessive tension in the prior art is solved, ensuring that the hot wire is manufactured in photovoltaic solar cells Stable operation and even distribution in the equipment.

CN222339909UActive Publication Date: 2025-01-10LAPLACE (WUXI) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421091080.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-17
Publication Date
2025-01-10
Estimated Expiration
2034-05-17

AI Technical Summary

Technical Problem

The existing tensioning devices cannot freely adjust the electric heating wires of different temperatures, lengths, thicknesses, materials and other chemical properties or physical states, resulting in insufficient or excessive tension, which can easily cause the hot wire to relax or break. Meet the processing needs of photovoltaic solar cell manufacturing equipment.

Method used

A tensioning device including a first winding part, an adjustment mechanism and a second winding part is designed. Through the cooperation of the elastic member and the limiting member, automatic tensioning and tensioning force adjustment of the hot wire is realized to ensure heat. The wires are evenly distributed and work stably under high temperature environments.

Benefits of technology

By adjusting the tension force, the hot wire is avoided to relax and break, ensuring the stable operation of the hot wire in the photovoltaic solar cell manufacturing equipment, meeting the processing needs of different types of hot wires, and improving the reliability and efficiency of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a tensioning device and photovoltaic solar cell manufacturing equipment. The tensioning device comprises a first winding part, an adjusting mechanism and a second winding part. The first winding part is oppositely arranged on the side, in the first direction, of the adjusting mechanism. And the second winding part is movably connected with the adjusting mechanism. And a wire rod is connected between the first winding part and the second winding part. The adjusting mechanism comprises a connecting piece, a limiting piece and an elastic piece, the connecting piece is provided with a first part and a second part, the second part movably penetrates through the second winding part in the first direction and is fixedly connected with the outside, and the limiting piece is connected to the first part. The two ends of the elastic piece make contact with the limiting piece and the second winding part respectively. According to the tensioning device, the limiting piece moves relative to the first winding part and adjusts the elastic force of the elastic piece, so that the elastic piece pushes the second winding part to move relative to the first winding part, and the purpose of adjusting the tensioning force of the wire is achieved.
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Description

Technical Field

[0001] The present application relates to the field of photovoltaic equipment, and in particular to a tensioning device and photovoltaic solar cell manufacturing equipment. Background Art

[0002] This patent belongs to the field of photovoltaic solar cell manufacturing technology. When making the battery silicon wafer process, it is carried out in a vacuum and high-temperature cavity environment, and the required process gas is introduced into the cavity. The cavity needs to be heated at high temperature and the temperature must be able to be adjusted and controlled at any time. Because a high-temperature environment is required, the high temperature inside the vacuum cavity is generally provided in the form of an electric heating wire, which can provide any temperature required by the process in the vacuum cavity. In order to meet the needs of the battery silicon wafer manufacturing process, the electric heating wire is evenly distributed in the vacuum cavity, and a tensioning device is generally used to tension the spot heating wire.

[0003] Although the existing tensioning device can tension the electric heating wire, the existing tensioning device cannot freely adjust the tensioning force when tensioning the electric heating wires of different (temperature, length, thickness, material and other chemical properties or physical states). There is a problem that the tensioning force of the electric heating wire is insufficient and it is easy for it to relax, causing the two electric heating wires to contact each other and short-circuit, or the tensioning force of the electric heating wire is too large and it is easy to break, resulting in the heating wire being unable to meet the processing requirements of photovoltaic solar cell manufacturing equipment. Utility Model Content

[0004] In view of this, the present application provides a tensioning device to achieve free adjustment of the tensioning force, so as to solve the problem that the hot wire is easily loosened due to insufficient tensioning force, or easily broken due to excessive tensioning force.

[0005] The present application provides a tensioning device, comprising: a first winding part, an adjustment mechanism and a second winding part. The adjustment mechanism and the first winding part are arranged relative to each other along a first direction. The second winding part is movably connected to the adjustment mechanism, and the second winding part is configured to move relative to the adjustment mechanism and the first winding part along the first direction. The hot wire is respectively connected to the first winding part and the second winding part along the first direction. The adjustment mechanism comprises a connecting member, a limiting member and an elastic member. The connecting member comprises a first part and a second part which are arranged relative to each other along the first direction, the first part is close to the first winding part relative to the second part, the second part movably passes through the second winding part along the first direction, and an end of the second part away from the first part is used for fixed connection with the outside world. The elastic member is located between the limiting member and the second winding part along the first direction, and the two ends of the elastic member are respectively in contact with the limiting member and the second winding part, and the elastic member is used to push the second winding part to move relative to the first winding part along the first direction. The limiter is connected to the first part, and is configured to apply a force to the elastic member and compress the elastic member. The limiter can rotate relative to the first winding part with a direction parallel to the first direction as an axis, so that the limiter moves in the first direction relative to the first winding part and changes the compression amount of the elastic member.

[0006] In the above embodiment, the elastic member acts elastically on the second winding part to achieve the second winding part moving relative to the first winding part, thereby achieving the purpose of automatically tensioning the hot wire. And the limiter moves relative to the first winding part and adjusts the elastic force of the elastic member, so that the elastic member pushes the second winding part to move relative to the first winding part, thereby achieving the purpose of adjusting the tension of the hot wire.

[0007] In some embodiments, the stopper is threadedly connected to the first portion, the stopper is configured to rotate relative to the first portion under external force, and the stopper moves in a first direction relative to the first portion.

[0008] In some embodiments, the limit member is fixedly connected to the first part, and the limit member is configured to be driven by an external force to rotate the connecting member along a first direction relative to the second winding part with an axis parallel to the first direction as an axis, and the limit member is also configured to be driven by an external force to move the connecting member in the first direction relative to the second winding part.

[0009] In some embodiments, the second winding portion includes a second body and a protrusion. The second body extends along the first direction, and the protrusion is located on the second body and protrudes toward the third direction. In the first direction, the elastic member is located between the protrusion and the limiter, and the two ends of the elastic member are in contact with the limiter and the protrusion respectively. The first direction is arranged to intersect with the third direction.

[0010] In some embodiments, the first winding portion includes a plurality of first winding members sequentially distributed along the second direction; each first winding member can be rotatably arranged relative to the first winding portion. The second winding portion includes a plurality of second winding members sequentially distributed along the second direction, each second winding member can be rotatably arranged relative to the second winding portion. The first winding member and the second winding member are respectively wheel-shaped components. The first winding member and the second winding member are respectively used for winding the heating wire. The second direction is staggered with the first direction.

[0011] In some embodiments, at least two adjacent first winding members form a first winding assembly, and a plurality of first winding assemblies are sequentially distributed along the second direction. At least two adjacent second winding members form a second winding assembly, and a plurality of second winding assemblies are sequentially distributed along the second direction. The hot wire alternately passes around the first winding assembly and the second winding assembly in sequence along the second direction.

[0012] In some embodiments, each first winding member is slidably connected to the first winding portion via a first slider, and the sliding direction of the first winding member is the second direction. Each second winding member is slidably connected to the second winding portion via a second slider, and the sliding direction of the second winding member is the second direction. The first direction, the second direction, and the third direction are perpendicular to each other.

[0013] In some embodiments, each first slider is provided with a first rotating shaft extending toward the third direction, the first rotating shaft at least partially passes through the first winding member, and is rotatably connected to the first winding member. Each second slider is provided with a second rotating shaft extending toward the third direction, the second rotating shaft at least partially passes through the second winding member, and is rotatably connected to the second winding member. The first direction, the second direction, and the third direction are perpendicular to each other.

[0014] In some embodiments, the first direction is parallel to the direction of gravity, the second winding portion is located below the first winding portion along the first direction, and the second winding portion can move relative to the first winding portion along the first direction under the action of gravity.

[0015] A photovoltaic solar cell manufacturing device comprises: a vacuum chamber, a hot wire, two terminals and the above-mentioned tensioning device. A first winding portion and an adjusting mechanism are respectively arranged in the vacuum chamber, and the hot wire is rotated around the first winding portion and the second winding portion in sequence along the second direction from one end of the vacuum chamber to the other end of the vacuum chamber. Each terminal is fixedly arranged relative to the first winding portion and fixedly arranged relative to the adjusting mechanism. One of the two terminals is connected to one end of the hot wire, and the other of the two terminals is connected to the other end of the hot wire. The first direction is perpendicular to the second direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the structure of a photovoltaic solar cell manufacturing device provided in one embodiment of the present application.

[0017] Figure 2 for Figure 1 Side view of a heating device.

[0018] Figure 3 for Figure 1 A partial enlarged view of point A.

[0019] Figure 4 for Figure 1 A partial enlarged view of point B in the middle.

[0020] Figure 5 for Figure 2 A partial enlarged view of point C in the middle.

[0021] Figure 6 for Figure 2 A partial enlarged view of point D in the middle.

[0022] Main component symbols

[0023] 101, vacuum chamber; 102, hot wire; 103, tensioning device; 11, first winding part; 110, first main body; 111, first winding assembly; 1111, first winding member; 112, first guide structure; 1121, first slider; 11211, first rotating shaft; 12, adjusting mechanism; 121, connecting member; 1211, first part; 1212, second part; 122, elastic member; 123, limiting member Positioning member; 13, second winding part; 130, second main body; 131, second winding assembly; 1311, second winding member; 132, second guide structure; 1321, second slider; 13211, second rotating shaft; 133, plate surface; 134, protrusion; 104, working area; 1041, first end; 1042, second end; 105, terminal; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0025] It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "located on" another component, it may be directly located on the other component or there may be a central component at the same time. The terms "top", "bottom", "upper", "lower", "left", "right", "front", "back", and similar expressions used herein are for illustrative purposes only.

[0026] The terms "first", "second", etc. are only used to distinguish different objects and shall not be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the indicated technical features.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0028] Some embodiments of the present application will be described below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0029] In the accompanying drawings, the first direction is the opposite direction of the gravity direction, the first direction is the vertical upward direction, the second direction is staggered with the first direction, and the second direction is the horizontal direction.

[0030] In some embodiments, see Figure 1 The present application discloses a photovoltaic solar cell manufacturing device 100, comprising a vacuum chamber 101, a hot wire 102 and a tensioning device 103 arranged in the vacuum chamber 101, wherein the vacuum chamber 101 is used to accommodate a cell silicon wafer. The tensioning device 103 is used to wind the hot wire 102 so that the hot wire 102 is tightened and evenly distributed. The photovoltaic solar cell manufacturing device 100 is used to heat the gas flowing through the vacuum chamber 101.

[0031] The hot wire 102 of the photovoltaic solar cell manufacturing equipment 100 is an electric heating wire. When the photovoltaic solar cell manufacturing equipment 100 is working, the gas flows through the vacuum chamber 101, and the hot wire 102 in the vacuum chamber 101 is contacted by the fluid, so that the hot wire 102 heats the fluid. Under high temperature conditions, the length of the hot wire 102 changes due to thermal expansion and contraction, and the tension of the hot wire 102 is reduced and becomes loose, causing two adjacent hot wires 102 to contact each other and short-circuit. Or when the hot wire 102 with different chemical properties or physical states such as temperature, length, thickness, material, etc. is replaced for work, when different hot wires 102 are tensioned by the same tensioning force, it is easy for the hot wire 102 to be too loose or too tight, causing the hot wire 102 to fail to work normally.

[0032] By arranging a tensioning device 103 in the vacuum chamber 101 to adjust the tensioning force of the hot wire 102, the hot wire 102 can be automatically tensioned and the tensioning force of different hot wires 102 can be adjusted at the same time, so that different hot wires 102 can heat the fluid stably and evenly respectively, thereby realizing the function of the photovoltaic solar cell manufacturing equipment 100 to perform thermal reaction processing on the object to be processed.

[0033] See also Figure 1 and Figure 2 In some embodiments, the tensioning device 103 includes: a first winding portion 11, an adjusting mechanism 12, and a second winding portion 13. The adjusting mechanism 12 and the first winding portion 11 are respectively arranged on the vacuum chamber 101, and are arranged relatively along the first direction X. The second winding portion 13 is movably connected to the adjusting mechanism 12. The hot wire 102 is respectively connected to the first winding portion 11 and the second winding portion 13 along the first direction X. The hot wire 102 is respectively connected to the first winding portion 11 and the second winding portion 13, and the relative position between the second winding portion 13 and the first winding portion 11 is adjusted by the adjusting mechanism 12, so as to achieve the purpose of tensioning the hot wire 102 between the first winding portion 11 and the second winding portion 13.

[0034] In some embodiments, see Figure 1 , Figure 2 , Figure 3 and Figure 5 The adjustment mechanism 12 includes a connecting member 121, a stopper 123 and an elastic member 122. The connecting member 121 has a first portion 1211 and a second portion 1212 arranged opposite to each other along the first direction X. The first portion 1211 is closer to the first winding portion 11 relative to the second portion 1212. The second portion 1212 moves through the second winding portion 13 along the first direction X and is fixedly connected to the vacuum chamber 101. The stopper 123 is connected to the first portion 1211. The elastic member 122 is located between the stopper 123 and the second winding portion 13 along the first direction X. Both ends of the elastic member 122 are in contact with the stopper 123 and the second winding portion 13 respectively. The elastic member 122 can generate a force on the second winding portion 13.

[0035] When the hot wire 102 with different chemical properties or physical states such as temperature, length, thickness, material, etc. is tensioned, the limiter 123 moves relative to the second winding portion 13 in the first direction X under the action of external force, and adjusts the compression amount of the elastic member 122 to adjust the magnitude of the force of the elastic member 122 on the second winding portion 13. The elastic member 122 is an elastic member such as a compression spring.

[0036] Specifically, before the shorter hot wire 102 bypasses the second winding portion 13, the position of the limit member 123 is adjusted to lengthen the elastic member 122 so as to reduce the force exerted by the elastic member 122 on the second winding portion 13, thereby facilitating the second winding portion 13 to move closer to the first winding portion 11 under the action of a smaller external force and compress the elastic member 122, so as to shorten the distance between the first winding portion 11 and the second winding portion 13, so as to facilitate the shorter hot wire 102 to bypass the second winding portion 13, thereby reducing the risk of the shorter hot wire 102 being broken due to excessive traction before being pulled around the second winding portion 13.

[0037] After the shorter hot wire 102 passes around the second winding portion 13, the position of the limit member 123 is adjusted to shorten the length of the elastic member 122, so that the force exerted by the elastic member 122 on the second winding portion 13 becomes larger, thereby causing the elastic member 122 to push the second winding portion 13 away from the first winding portion 11, thereby increasing the distance between the first winding portion 11 and the second winding portion 13, and straightening the hot wire 102 between the first winding portion 11 and the second winding portion 13, thereby achieving the purpose of tensioning the hot wire 102.

[0038] When the temperature of the hot wire 102 gradually increases, the length of the hot wire 102 gradually increases due to thermal expansion and contraction. During this process, the elastic member 122 pushes the second winding portion 13 away from the first winding portion 11 under the action of its own elasticity to increase the distance between the second winding portion 13 and the first winding portion 11, so that the lengthened hot wire 102 is always in a straight state. When the photovoltaic solar cell manufacturing equipment 100 is running, the distance between two adjacent hot wires 102 remains stable and does not cause contact short circuit, thereby ensuring the normal operation of the photovoltaic solar cell manufacturing equipment 100.

[0039] When the photovoltaic solar cell manufacturing equipment 100 stops working and the temperature of the hot wire 102 gradually decreases, the length of the hot wire 102 gradually shortens due to thermal expansion and contraction. During this process, the elastic member 122 pushes the second winding portion 13 to move closer to the first winding portion 11 under the action of its own elasticity, so as to reduce the distance between the second winding portion 13 and the first winding portion 11, so that the shortened hot wire 102 is always in a stretched state, avoiding the hot wire 102 from breaking, thereby achieving the purpose of automatically tensioning the hot wire 102.

[0040] Before the longer hot wire 102 passes around the second winding portion 13, the position of the limit member 123 is adjusted to shorten the length of the elastic member 122, so that the force exerted by the elastic member 122 on the second winding portion 13 becomes larger, thereby causing the elastic member 122 to push the second winding portion 13 further away from the first winding portion 11, so as to further increase the distance between the first winding portion 11 and the second winding portion 13, and straighten the hot wire 102 between the first winding portion 11 and the second winding portion 13, thereby achieving the purpose of tensioning different hot wires 102.

[0041] In some embodiments, the connecting member 121 is a screw, the first part 1211 is provided with a thread, and the limiting member 123 is a nut threadedly connected to the first part 1211. When the limiting member 123 is rotated relative to the first part 1211 by an external force, the limiting member 123 moves along the first direction X relative to the first part 1211 under the action of the thread, thereby realizing the movement of the limiting member 123 relative to the first winding part 11 to change the relative position between the limiting member 123 and the second winding part 13, so as to achieve the purpose of the limiting member 123 adjusting the compression amount of the elastic member 122.

[0042] In other embodiments, the limiting member 123 is fixedly connected to the connecting member 121, and the second part 1212 is threadedly connected to the vacuum chamber 101. Specifically, the limiting member 123 and the connecting member 121 are integrally arranged bolts. When the limiting member 123 is driven by an external force to rotate the connecting member 121 relative to the vacuum chamber 101, the second part 1212 moves along the first direction X relative to the vacuum chamber 101 under the action of the thread, and the connecting member 121 drives the limiting member 123 to move relative to the second winding portion 13 along the first direction X, so as to change the relative position between the limiting member 123 and the second winding portion 13, so as to achieve the purpose of the limiting member 123 adjusting the compression amount of the elastic member 122.

[0043] In some embodiments, when the first direction X is parallel to the direction of gravity, the second winding portion 13 is located below the first winding portion, and the second winding portion 13 is slidably arranged on the connecting member 121. After the hot wire 102 passes around the second winding portion 13, the second winding portion 13 slides away from the first winding portion 11 on the connecting member 121 under the action of gravity, so that the distance between the second winding portion 13 and the first winding portion 11 is automatically increased, so as to pre-tension the hot wire 102, thereby reducing the risk of the hot wire 102 falling off on the second winding portion 13 and the first winding portion 11. The relative position of the mobile limiter 123 is adjusted so that the limiter 123 adjusts the compression amount of the elastic member 122, so that the second winding portion 13 moves away from the first winding portion 11, so that the distance between the second winding portion 13 and the first winding portion 11 is automatically increased, thereby achieving the purpose of tensioning the hot wire 102. The second winding part 13 moves relative to the first winding part 11 under the action of its own weight, and the second winding part 13 moves relative to the first winding part 11 by combining the elastic force of the elastic part 122 and gravity, compared with the elastic member 122 acting on the second winding part 13 only, the elastic coefficient of the elastic member 122 can be reduced, that is, the ratio of the compression amount and the elastic force of the elastic member 122 is increased. This is conducive to improving the accuracy and sensitivity of adjusting the elastic force of the elastic member 122, and achieving the effect of accurately adjusting the tension of the hot wire 102.

[0044] In some embodiments, see Figure 3 and Figure 5The second winding part 13 includes a second body 130 and a protrusion 134. The second body 130 is a plate-shaped member. The second body 130 has two plate surfaces 133 parallel to the first direction X. The protrusion 134 is located on one of the plate surfaces 133 and extends toward the third direction Z. The protrusion 134 is provided with a through hole (not shown) for the connection member 121 to pass through. The second part 1212 passes through the protrusion 134 and is connected to the vacuum chamber 101. The two ends of the elastic member 122 along the first direction X are in contact with the stopper 123 and the protrusion 134 respectively. The relative position of the stopper 123 is adjusted so that the stopper 123 adjusts the compression amount of the elastic member 122, so that the elastic member 122 acts on the protrusion 134, and the protrusion 134 drives the second winding part 13 to move relative to the connection member 121 under the action of the elastic member 122, thereby achieving the effect of the adjustment mechanism 12 adjusting the relative position of the second winding part 13 and the first winding part 11.

[0045] The first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0046] In some embodiments, see Figure 1 A working area 104 is provided in the vacuum chamber 101, and the first winding part 11 and the second winding part 13 are arranged on both sides of the working area 104 along the first direction X. The first winding part 11 includes a first body 110 and a plurality of first winding assemblies 111 arranged on the first body 110, the first body 110 is a plate-shaped member, and the plurality of first winding assemblies 111 are sequentially distributed along the second direction Y. The second winding part 13 also includes a plurality of second winding assemblies 131 arranged on the second body 130, and the plurality of second winding assemblies 131 are sequentially distributed along the second direction Y. Along the first direction X, the first winding assembly 111 and the second winding assembly 131 are staggered.

[0047] The working area 104 has a first end 1041 and a second end 1042 of the working area 104 that are opposite to each other along the second direction Y. When the hot wire 102 needs to be installed, the hot wire 102 is made to alternately bypass the first winding assembly 111 and the second winding assembly 131 from the first end 1041 of the working area 104 to the second end 1042 of the working area 104, or the hot wire 102 is made to alternately bypass the second winding assembly 131 and the first winding assembly 111 from the second end 1042 of the working area 104 to the first end 1041 of the working area 104. In this way, the hot wire 102 is reversed multiple times in the working area 104, so that the area of ​​the hot wire 102 distributed in the working area 104 is increased.

[0048] See also Figure 4 and Figure 6Each first winding assembly 111 includes at least two first winding members 1111 . A first guide structure 112 is provided on the first body 110 along the second direction Y. The two first winding members 1111 are slidably arranged on the first body 110 through the first guide structure 112 .

[0049] See also Figure 3 and Figure 5 Each second winding assembly 131 includes two second winding members 1311 . A second guide structure 132 is provided on the second body 130 along the second direction Y. The two second winding members 1311 are slidably disposed on the second body 130 through the second guide structure 132 .

[0050] When the distance between two adjacent hot wires 102 in the working area 104 needs to be adjusted, the first winding member 1111 and the second winding member 1311 are moved to adjust the relative position of the first winding member 1111 on the first body 110 and the relative position of the second winding member 1311 on the second body 130, so that the distance between the two first winding members 1111 is equal to the distance between the two second winding members 1311, thereby achieving the purpose of adjusting the distance between the adjacent hot wires 102 in the working area 104. In addition, by moving the first winding member 1111 and the second winding member 1311, the purpose of adjusting the parallelism between the adjacent hot wires 102 in the working area 104 is achieved, so that the hot wires 102 after each reversal are parallel to each other, so as to ensure that the density between the hot wires 102 in the working area 104 remains consistent.

[0051] In some embodiments, see Figure 5 and Figure 6 The first guide structure 112 is a guide groove or guide rail provided on the first body 110. The guide groove or guide rail on the first body 110 is slidably connected with a plurality of first sliders 1121. A first slider 1121 is connected to a first winding member 1111, thereby achieving the purpose of sliding the first winding member 1111 on the first body 110 through the first slider 1121. The second guide structure 132 is a guide groove or guide rail provided on the first body 110. The guide groove or guide rail on the second body 130 is slidably connected with a plurality of second sliders 1321. A second slider 1321 is connected to a second winding member 1311. The second body 130 thus achieves the purpose of sliding the second winding member 1311 on the first body 110 through the second slider 1321.

[0052] In some embodiments, the first winding member 1111 and the second winding member 1311 are both rotatable guide wheels (not marked), and the hot wire 102 is passed around the guide wheels to meet the reversing requirements of the hot wire 102. The rotating guide wheels can reduce the friction between the guide wheels and the hot wire 102, thereby avoiding the risk of reducing the tension of the hot wire 102 due to the friction offsetting the tension applied by the second winding member 1311 to the hot wire 102.

[0053] In some embodiments, each first slider 1121 is provided with a first rotating shaft 11211 extending toward the third direction Z, the first rotating shaft 11211 at least partially passes through the first winding member 1111, and is rotatably connected to the first winding member 1111, so that the first winding member 1111 is relative to each other. Each second slider 1321 is provided with a second rotating shaft 13211 extending toward the third direction Z, the second rotating shaft 13211 at least partially passes through the second winding member 1311, and is rotatably connected to the second winding member 1311.

[0054] In some embodiments, see Figure 5 , the second winding assembly 131 is located between the protrusion 134 and the first body 110 along the first direction X. When the relative position of the stopper 123 is adjusted, it is beneficial for the second winding assembly 131 to be away from the connecting member 121 and the stopper 123, and the second winding assembly 131 to avoid the space near the stopper 123, so that when an external force acts on the stopper 123 and the relative position of the stopper 123 is changed, the risk of the hot wire 102 bypassing the second winding assembly 131 being dropped, damaged or even broken due to external interference (such as scratching, bumping, etc.) can be reduced.

[0055] In other embodiments, the second winding assembly 131 and the adjusting mechanism 12 are respectively located on two opposite plate surfaces 133 of the second main body 130, so that the adjusting mechanism 12 and the second winding assembly 131 are respectively located on two different planes to reduce the possibility of interference between the adjusting mechanism 12 and the second winding assembly 131, so that when an external force acts on the limit member 123 and changes the relative position of the limit member 123, the risk of the hot wire 102 bypassing the second winding assembly 131 being affected by external interference (such as scratches, bumps, etc.) and causing it to fall off, be damaged or even break.

[0056] In some embodiments, see Figure 1The photovoltaic solar cell manufacturing equipment 100 also includes two terminals 105, which are respectively arranged on the vacuum chamber 101. When installing the hot wire 102, one end of the hot wire 102 is connected to one terminal 105, and the other end of the hot wire 102 is connected to the other terminal 105, so as to achieve the purpose of fixing the hot wire 102 after multiple reversals. When it is necessary to supply power to the hot wire 102, one terminal 105 is connected to the positive pole of the external power supply, and the other terminal 105 is connected to the negative pole of the external power supply, so that the external power supply applies voltage to both ends of the hot wire 102, so as to achieve the purpose of supplying power to the hot wire 102.

[0057] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application, and are not intended to limit the present application. As long as they are within the essential scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.

Claims

1. A tensioning device for tensioning a hot wire, characterized in that: include: a first winding portion; an adjusting mechanism, wherein the adjusting mechanism and the first winding portion are arranged opposite to each other along a first direction; a second winding portion, the second winding portion being movably connected to the adjustment mechanism, and the second winding portion being configured to move along the first direction relative to the adjustment mechanism and the first winding portion; The hot wire is respectively connected to the first winding portion and the second winding portion along the first direction; The adjustment mechanism includes a connecting member, a limiting member and an elastic member; The connecting member comprises a first part and a second part which are arranged opposite to each other along the first direction, wherein the first part is closer to the first winding part relative to the second part, the second part moves through the second winding part along the first direction, and an end of the second part away from the first part is used for fixed connection with the outside; The elastic member is located between the limiting member and the second winding portion along the first direction, and two ends of the elastic member are in contact with the limiting member and the second winding portion respectively, and the elastic member is used to push the second winding portion to move relative to the first winding portion along the first direction; The limit member is connected to the first part, and the limit member is configured to apply a force to the elastic member and compress the elastic member. The limit member can rotate relative to the first winding part with a direction parallel to the first direction as an axis, so that the limit member moves in the first direction relative to the first winding part and changes the compression amount of the elastic member.

2. The tensioning device according to claim 1, characterized in that: The limiting member is threadedly connected to the first portion, the limiting member is configured to rotate relative to the first portion under external force, and the limiting member moves relative to the first portion in the first direction.

3. The tensioning device according to claim 1, characterized in that: The limit member is fixedly connected to the first part, and the limit member is configured to be driven by an external force to rotate the connecting member relative to the second winding part with an axis parallel to the first direction, and the limit member is also configured to be driven by an external force to move the connecting member in the first direction relative to the second winding part.

4. The tensioning device according to claim 1, characterized in that: The second winding portion includes a second body and a protrusion, the second body extends along the first direction, and the protrusion is located on the second body and protrudes toward the third direction; In the first direction, the elastic member is located between the protruding portion and the limiting member, and two ends of the elastic member are in contact with the limiting member and the protruding portion respectively; The first direction and the third direction are arranged to intersect each other.

5. The tensioning device according to claim 1, characterized in that: The first winding portion includes a plurality of first winding members sequentially distributed along the second direction; each of the first winding members can be rotatably arranged relative to the first winding portion; The second winding portion includes a plurality of second winding members sequentially distributed along the second direction, and each of the second winding members can be rotatably arranged relative to the second winding portion; The first winding member and the second winding member are respectively wheel-shaped components; The first winding member and the second winding member are respectively used for winding the hot wire; The second direction is arranged alternately with the first direction.

6. The tensioning device according to claim 5, characterized in that: At least two adjacent first winding members form a first winding assembly, and a plurality of first winding assemblies are sequentially distributed along the second direction; At least two adjacent second winding members form a second winding assembly, and a plurality of the second winding assemblies are distributed in sequence along the second direction; The hot wire alternately passes around the first winding assembly and the second winding assembly in sequence along the second direction.

7. The tensioning device according to claim 5, characterized in that: Each of the first winding members is slidably disposed relative to the second winding portion via a first slider, and the sliding direction of the first winding member is the second direction; Each of the second winding members is slidably disposed with the first winding portion via a second sliding block, and the sliding direction of the second winding member is the second direction.

8. The tensioning device according to claim 7, characterized in that: Each of the first sliding blocks is provided with a first rotating shaft extending toward the third direction, and the first rotating shaft at least partially passes through the first winding member and is rotatably connected to the first winding member; Each of the second sliding blocks is provided with a second rotating shaft extending toward the third direction, and the second rotating shaft at least partially passes through the second winding member and is rotatably connected to the second winding member; The first direction, the second direction and the third direction are perpendicular to each other.

9. The tensioning device according to claim 1, characterized in that: The first direction is parallel to the direction of gravity, the second winding portion is located below the first winding portion along the first direction, and the second winding portion can move relative to the first winding portion along the first direction under the action of gravity.

10. A photovoltaic solar cell manufacturing device, characterized in that: include: Vacuum chamber; Hot wire; Two binding posts; And the tensioning device according to any one of claims 1 to 9, wherein the first winding portion and the adjusting mechanism are respectively arranged in the vacuum chamber, and the hot wire is rotated around the first winding portion and the second winding portion in sequence along the second direction from one end of the vacuum chamber to the other end of the vacuum chamber; Each of the binding posts is fixedly disposed relative to the first winding portion and is fixedly disposed relative to the adjustment mechanism; One of the two binding posts is connected to one end of the hot wire, and the other of the two binding posts is connected to the other end of the hot wire; The first direction and the second direction are perpendicular.