Isopropyl alcohol water bath heating equipment

Abstract

The utility model relates to isopropanol water bath heating equipment which is composed of a water bath box and a quartz tank, the quartz tank is arranged in the water bath box, and the quartz tank is firmly fixed in the water bath box through a pressure seat, a circular sealing seat and a circular base. The isopropanol in the quartz tank is heated by hot water flowing in the water bath box to form mixed gas of isopropanol and nitrogen, so that the problem that the isopropanol is flammable and combustible can be avoided, and a safe heating mode is provided.

Description

Technical Field

[0001] The present application belongs to the technical field of wafer production equipment, and in particular, relates to an isopropyl alcohol water bath heating device. Background Art

[0002] During the wafer production process, the wafer needs to be cleaned and dried as many times as possible. In order to improve the drying effect, it is sometimes necessary to use the strong water absorption of isopropyl alcohol (IPA) for drying. The boiling point of isopropyl alcohol is 82.3°C, and it is flammable and explosive, which has certain dangers. When drying the wafer, the isopropyl alcohol needs to be heated and atomized (usually mixed with nitrogen). Due to the flammable and explosive nature of isopropyl alcohol, direct atomization is prone to danger, so an isopropyl alcohol heating device that can safely heat isopropyl alcohol is needed. Utility Model Content

[0003] The technical problem to be solved by the utility model is: to solve the deficiencies in the prior art, thereby providing an isopropyl alcohol water bath heating device which is safe for heating isopropyl alcohol.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] An isopropyl alcohol water bath heating device, comprising:

[0006] Frame;

[0007] A water bath is arranged in the outer frame, wherein a circular base is arranged on the inner bottom surface of the water bath, an opening is arranged on the top, a circular sealing seat is arranged at the opening, and a water inlet and a water outlet are respectively arranged on the side walls on both sides of the water bath;

[0008] A quartz tank, used for mixing isopropanol and nitrogen, is placed on a circular base, with a water bath extending from an opening. A sealing ring is provided between the circular sealing seat and the outer wall of the quartz tank. A pressure seat is provided on the top of the quartz tank, which is connected to the circular sealing seat by screws. The quartz tank is fixed by applying downward pressure through the screws.

[0009] Preferably, the isopropanol water bath heating device of the utility model, the quartz tank comprises:

[0010] The tank body is cylindrical, with an isopropyl alcohol inlet and a mixed gas outlet at the top, the length of the isopropyl alcohol inlet extending into the tank body is not shorter than the length of the gas outlet extending into the tank body, and the bottom of the tank body is also provided with a quartz tank lower opening;

[0011] The inner tank is cylindrical, located in the tank body, and communicated with the nitrogen inlet channel. The nitrogen inlet channel passes through the top of the tank body and is connected with the top of the inner tank.

[0012] Preferably, in the isopropanol water bath heating device of the utility model, the top of the quartz tank also has a quartz tank upper liquid level opening, the quartz tank upper liquid level opening and the quartz tank lower opening are connected to the quartz tank liquid level tube, and a plurality of quartz tank liquid level sensors are arranged on the quartz tank liquid level tube.

[0013] Preferably, in the isopropyl alcohol water bath heating device of the utility model, the quartz tank liquid level sensors are three arranged in the height direction.

[0014] Preferably, in the isopropyl alcohol water bath heating device of the utility model, a flexible sealing gasket with a hole in the middle is arranged in the circular base, and the lower opening of the quartz tank at the bottom of the quartz tank passes through the hole in the middle.

[0015] Preferably, in the isopropyl alcohol water bath heating device of the utility model, the side wall of the water bath is made of transparent glass.

[0016] Preferably, in the isopropyl alcohol water bath heating device of the utility model, a water bath liquid level tube is further provided on the side of the water bath, and a water bath liquid level sensor is provided on the water bath liquid level tube.

[0017] Preferably, in the isopropyl alcohol water bath heating device of the present invention, the water bath tank liquid level sensors are three arranged in height direction.

[0018] Preferably, the isopropyl alcohol water bath heating device of the utility model is further provided with a temperature sensor on the water bath box.

[0019] Preferably, in the isopropyl alcohol water bath heating device of the present invention, the number of the quartz tanks is three and they are arranged in parallel.

[0020] The beneficial effects of the utility model are:

[0021] The isopropyl alcohol water bath heating device of the present application places a quartz jar in a water bath, and firmly fixes the quartz jar in the water bath through a pressure seat, a circular sealing seat and a circular base. The isopropyl alcohol in the quartz jar is heated by hot water flowing in the water bath to form a mixed gas of isopropyl alcohol and nitrogen, which can avoid the problem of isopropyl alcohol being flammable and explosive, and provides a safe heating method. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The technical solution of the present application is further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 It is a schematic diagram of the structure of the isopropyl alcohol water bath heating device of an embodiment of the present application;

[0024] Figure 2 It is a schematic diagram of the structure within the outer frame of an embodiment of the present application;

[0025] Figure 3 It is a schematic diagram of the structure of a water bath and a quartz tank in an embodiment of the present application;

[0026] Figure 4 is a cross-sectional view of a water bath and a quartz tank according to an embodiment of the present application;

[0027] The reference numerals in the figure are:

[0028] 1. Frame;

[0029] 2 Water bath;

[0030] 3 quartz jars;

[0031] 11 Quartz tank liquid level sensor;

[0032] 12 Water bath liquid level sensor;

[0033] 21 Transparent glass;

[0034] 22 water inlet;

[0035] 23 Temperature sensor;

[0036] 24 water outlet;

[0037] 25 Water bath level tube;

[0038] 30 tanks;

[0039] 31 isopropanol inlet;

[0040] 32 nitrogen inlet channel;

[0041] 33 gas outflow port;

[0042] 34 The lower opening of the quartz jar;

[0043] 35 inner tank;

[0044] 36 upper liquid level opening;

[0045] 37 quartz tank level tube;

[0046] 41 Round Base

[0047] 42 Round seal seat

[0048] 43 pressure seat;

[0049] 44 screws. DETAILED DESCRIPTION

[0050] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0051] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention of the present utility model, unless otherwise specified, "multiple" means two or more.

[0052] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0053] The technical solution of the present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0054] Example

[0055] This embodiment provides an isopropyl alcohol water bath heating device, such as Figure 1-4 As shown, including:

[0056] Outer frame 1;

[0057] The water bath 2 is arranged in the outer frame 1, and a circular base 41 is arranged on the inner bottom surface of the water bath 2, and an opening is provided on the top, and a circular sealing seat 42 is arranged at the opening. A water inlet 22 and a water outlet 24 are respectively provided on the side walls on both sides of the water bath 2, and hot water can be injected into the water bath 2 through the water inlet 22, and the quartz tank 3 is heated by the hot water;

[0058] The quartz tank 3 is used to mix isopropanol and nitrogen, and is placed on a circular base 41. The water bath 2 extends from the opening. A sealing ring is provided between the circular sealing seat 42 and the outer wall of the quartz tank 3. A pressure seat 43 is provided on the top of the quartz tank 3. The pressure seat 43 is connected to the circular sealing seat 42 by screws 44. The quartz tank 3 is fixed by applying downward pressure by screws 44.

[0059] The isopropyl alcohol water bath heating device of this embodiment places the quartz tank 3 in the water bath box 2, and firmly fixes the quartz tank 3 in the water bath box 2 through the pressure seat 43, the circular sealing seat 42 and the circular base 41. The isopropyl alcohol in the quartz tank 3 is heated by the hot water flowing in the water bath box 2 to form a mixed gas of isopropyl alcohol and nitrogen, which can avoid the problem of isopropyl alcohol being flammable and explosive, and provide a safe heating method.

[0060] The heat in the hot water enters the quartz tank 3 through the wall of the quartz tank 3 by heat conduction, and heats the isopropyl alcohol in the quartz tank 3 .

[0061] Furthermore, the quartz tank 3 comprises:

[0062] The tank body 30 is cylindrical, and has an isopropyl alcohol inlet 31, a mixed gas outlet 33 and a quartz tank upper liquid level opening 36 on the top. The length of the isopropyl alcohol inlet 31 extending into the tank body 30 is not shorter than the length of the gas outlet 33 extending into the tank body 30. The bottom of the tank body 30 is also provided with a quartz tank lower opening 34.

[0063] The inner tank 35 is cylindrical and is located inside the tank body 30 and is connected to the nitrogen inlet passage 32. The nitrogen inlet passage 32 passes through the top of the tank body 30 and is connected to the top of the inner tank 35.

[0064] The upper liquid level opening 36 and the lower opening 34 of the quartz tank are connected to a quartz tank liquid level tube 37 , and a plurality of quartz tank liquid level sensors 11 are arranged on the quartz tank liquid level tube 37 .

[0065] The lower opening 34 of the quartz tank also has the function of discharging excess liquid in the quartz tank.

[0066] Furthermore, a flexible sealing gasket with a hole in the middle is arranged in the circular base 41, and the quartz tank lower opening 34 at the bottom of the quartz tank 3 passes through the hole in the middle.

[0067] Furthermore, the side wall of the water bath 2 is made of transparent glass 21 to facilitate observation of the interior of the water bath 2 .

[0068] Furthermore, a water bath liquid level tube 25 is provided on the side of the water bath 2 , and a water bath liquid level sensor 12 is provided on the water bath liquid level tube 25 .

[0069] Furthermore, a temperature sensor 23 is provided on the water bath 2 for monitoring the temperature in the water bath 2 .

[0070] The water bath tank liquid level sensor 12 and / or the quartz tank liquid level sensor 11 are arranged in three height directions, and the highest and lowest first liquid level sensor and the third liquid level sensor are used to monitor the upper limit and the lower limit of the liquid level respectively. When the liquid level triggers the middle second liquid level sensor, liquid is added to the water bath tank 2 or the quartz tank 3.

[0071] like Figure 3 and 4 As shown, there are three quartz tanks 3 arranged in parallel. The three quartz tanks 3 can be used at the same time, or any one or any two of them can be used.

[0072] The second liquid level sensor of the water bath is set at a height greater than the second liquid level sensor of the quartz tank, so that the water level is higher than the IPA level.

[0073] Based on the above ideal embodiments of this application, the relevant staff can make various changes and modifications without departing from the technical concept of this application through the above description. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An isopropyl alcohol water bath heating device, characterized in that: include: Frame (1); A water bath box (2) is arranged in the outer frame (1), a circular base (41) is arranged on the inner bottom surface of the water bath box (2), an opening is provided on the top, a circular sealing seat (42) is arranged at the opening, and a water inlet (22) and a water outlet (24) are respectively provided on the side walls on both sides of the water bath box (2); A quartz tank (3) is used for mixing isopropanol and nitrogen, and is placed on a circular base (41). A water bath (2) extends out from an opening. A sealing ring is provided between a circular sealing seat (42) and an outer wall of the quartz tank (3). A pressure seat (43) is provided on the top of the quartz tank (3). The pressure seat (43) is connected to the circular sealing seat (42) by a screw (44). The quartz tank (3) is fixed by applying downward pressure by the screw (44).

2. The isopropyl alcohol water bath heating device according to claim 1, characterized in that: The quartz tank (3) comprises: The tank body (30) is cylindrical and has an isopropyl alcohol inlet (31) and a mixed gas outlet (33) at the top. The length of the isopropyl alcohol inlet (31) extending into the tank body (30) is not shorter than the length of the gas outlet (33) extending into the tank body (30). The bottom of the tank body (30) is also provided with a quartz tank lower opening (34); The inner tank (35) is cylindrical and is located inside the tank body (30) and is connected to the nitrogen inlet channel (32). The nitrogen inlet channel (32) passes through the top of the tank body (30) and is connected to the top of the inner tank (35).

3. The isopropyl alcohol water bath heating device according to claim 2, characterized in that: The top of the quartz tank also has a quartz tank upper liquid level opening (36), which is connected to the quartz tank lower opening (34) and a quartz tank liquid level tube (37), and a plurality of quartz tank liquid level sensors (11) are arranged on the quartz tank liquid level tube (37).

4. The isopropyl alcohol water bath heating device according to claim 3, characterized in that: The quartz tank liquid level sensors (11) are three arranged in a height direction.

5. The isopropyl alcohol water bath heating device according to claim 2, characterized in that: A flexible sealing gasket with a hole in the middle is arranged in the circular base (41), and a quartz tank lower opening (34) at the bottom of the quartz tank (3) passes through the hole in the middle.

6. The isopropyl alcohol water bath heating device according to claim 1, characterized in that: The side wall of the water bath (2) is made of transparent glass (21).

7. The isopropyl alcohol water bath heating device according to claim 1, characterized in that: A water bath liquid level pipe (25) is also provided on the side of the water bath (2), and a water bath liquid level sensor (12) is provided on the water bath liquid level pipe (25).

8. The isopropyl alcohol water bath heating device according to claim 7, characterized in that: The water bath tank liquid level sensors (12) are three arranged in a height direction.

9. The isopropyl alcohol water bath heating device according to claim 1, characterized in that: The water bath (2) is also provided with a temperature sensor (23).

10. The isopropyl alcohol water bath heating device according to claim 1, characterized in that: The quartz tanks (3) are three arranged in parallel.

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