Built-in bias device and CVD device

By designing a built-in biasing device in the CVD diamond film production device, including an efficient cooling structure, a tight positioning structure and a convenient connection structure, the problems of poor cooling effect of existing devices and unsatisfactory sample growth environment are solved, and the growth quality and quality of diamond films are significantly improved.

CN222665994UActive Publication Date: 2025-03-25SHENZHEN KUBIC TECH CO LTD
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Patent Information

Application Number
CN202421465591.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-24
Publication Date
2025-03-25
Estimated Expiration
2034-06-24

AI Technical Summary

Technical Problem

The cooling effect of the existing CVD diamond film production equipment is poor, which affects the yield of diamonds. Neighboring samples are prone to forming crystal boundaries during growth, affecting the deposition quality.

Method used

A built-in biasing device and CVD device are designed, including a cooling structure, a positioning structure and a connecting structure. The cooling structure forms a closed-loop circulation system through the coordinated work of the centrifugal pump and the refrigeration plate to ensure the continuous flow of low-temperature coolant; the positioning structure enhances the sealing between the cover and the sample holder through the coordination of the positioning rod and the positioning hole; the connecting structure fixes the sample holder and facilitates operation through the design of the spring cavity and the slot.

Benefits of technology

The cooling effect and yield of diamond film are improved, the ideal environment for the sample during the growth process is ensured, and the growth quality and quality of diamond film are significantly improved.

✦ Generated by Eureka AI based on patent content.
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Abstract

The utility model discloses a built-in bias voltage device and a CVD device, the built-in bias voltage device comprises a CVD device body and a bias voltage device body, the CVD device body is connected with one electrode of a radio frequency power supply through a lead, the other electrode of the radio frequency power supply is connected to a sample support through a lead, a vacuum pump is connected with a groove through an exhaust pipe, and the vacuum pump is connected with the bias voltage device body. A CVD cavity is formed in the CVD device body, a bias device body is installed in the CVD cavity, a cavity door is hinged to the front end of the CVD device body, a containing groove is formed in the upper end of the bias device body, a sample support is installed in the containing groove, a plurality of grooves are formed in the top of the sample support, and a cover body is installed at the upper end of the sample support. Connecting structures are arranged on the two sides of the bias device body. A positioning structure is arranged at the joint of the sample support and the cover body; a cooling structure is arranged in the bias device body, so that continuous flowing of low-temperature cooling liquid is ensured, and the stable and efficient sample cooling effect is ensured.
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