Furnace tube replacement device and tubular chemical vapor deposition equipment

By designing a furnace pipe replacement device including a lifting platform, a mobile platform and a lifting drive assembly, the safety hazards and labor intensity problems caused by manual operation of the furnace pipe replacement in the prior art are solved, and the automation or semi-automation of furnace pipe replacement is realized, and the labor intensity is reduced.

CN222699926UActive Publication Date: 2025-04-01LONGI SOLAR TECH (XIAN) CO LTD
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Patent Information

Application Number
CN202420525032.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-18
Publication Date
2025-04-01
Estimated Expiration
2034-03-18

AI Technical Summary

Technical Problem

In the prior art, replacing the quartz furnace tube in the vacuum cavity during solar cell manufacturing requires manual operation, which poses safety hazards and high labor intensity.

Method used

A furnace tube replacement device is designed, including a lifting platform, a moving platform, a furnace tube positioning member, a horizontal drive member and a lifting drive assembly. The lifting drive assembly uses a chain mechanism, a screw mechanism and/or a telescopic cylinder mechanism, which can drive the platform and furnace tube to be replaced at a suitable height and position.

Benefits of technology

It realizes automation or semi-automation of furnace tube replacement, reduces labor intensity, improves operational safety, and can meet the needs of furnace tube replacement in lower and higher positions.

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Abstract

The present application discloses a furnace tube replacement device and a tubular chemical vapor deposition device. The furnace tube replacement device includes: a lifting platform and a mobile platform detachably connected to the lifting platform, and furnace tube positioning parts are arranged on the mobile platform and / or the lifting platform; a lifting drive assembly, and the lifting drive assembly can drive the lifting platform to lift and lower, and the lifting drive assembly includes a chain mechanism, a screw mechanism and / or a telescopic cylinder mechanism. In the furnace tube replacement device provided in the present application, the lifting drive assembly includes a chain mechanism, a screw mechanism and / or a telescopic cylinder mechanism. Compared with the scissor-type lifting structure used in the prior art, the lowest starting point is not restricted, and the replacement of furnace tubes at lower and higher positions can be satisfied. In addition, in the process of replacing furnace tubes using the furnace tube replacement device provided by the utility model, there is no need to manually lift the furnace tube, which reduces the labor intensity.
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