Automatic jacking mechanism

Abstract

The utility model discloses an automatic jacking mechanism which comprises a vacuum adsorption carrying table, a jacking assembly and a lifting driving assembly. A jacking opening is formed in the vacuum adsorption carrying table; the jacking assembly comprises a jacking piece, and the jacking piece is arranged in the jacking opening and located at the driving end of the lifting driving assembly. In the feeding process, the lifting driving assembly can drive the jacking piece to ascend, the jacking piece is used for bearing the product so that the product can be conveniently fed, then the lifting driving assembly drives the jacking piece to descend, the product falls on the vacuum adsorption carrying table, and the product is sucked through the adsorption opening; and during discharging, the jacking piece can be driven by the lifting driving assembly to ascend, so that the product is in a suspended state, and discharging of the product is facilitated. Therefore, the automatic jacking mechanism is high in practicability, manual taking and placing of the products are facilitated, and automatic taking and placing of the products are also facilitated.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to an automatic lifting mechanism. Background Technology

[0002] Currently, in the semiconductor ingot processing, the ingot needs to be placed on a corresponding vacuum adsorption platform to support and fix it. However, when the ingot is placed on the vacuum adsorption platform, the surface of the platform adheres to the bottom of the ingot, and no gap can be formed between the platform and the ingot, making it inconvenient for manual or material handling equipment to handle the ingot. Utility Model Content

[0003] In view of the shortcomings of the prior art, this application provides an automatic lifting mechanism that can facilitate the loading and unloading of products.

[0004] The following technical solution is adopted in this embodiment:

[0005] An automatic lifting mechanism, comprising:

[0006] The vacuum adsorption stage is equipped with a lifting port;

[0007] A lifting assembly includes a lifting member movably disposed within the lifting opening; and

[0008] A lifting drive assembly, wherein the lifting member is disposed at the drive end of the lifting drive assembly, and the lifting drive assembly is used to drive the lifting member to extend / retract from the lifting port.

[0009] Furthermore, in the automatic lifting mechanism, the surface of the vacuum adsorption platform is formed with a first adsorption area, a lifting area, and a second adsorption area arranged in sequence. The interior of the vacuum adsorption platform is provided with a first vacuum adsorption chamber and a second vacuum adsorption chamber. The first adsorption area is provided with a plurality of first adsorption holes communicating with the first vacuum adsorption chamber, and the second adsorption area is provided with a plurality of second adsorption holes communicating with the second vacuum adsorption chamber. The lifting port is located in the lifting area.

[0010] Furthermore, in the automatic lifting mechanism, the vacuum adsorption platform includes a main body and a support part. The main body has an installation cavity, the lifting component is disposed in the installation cavity, the support part covers the installation cavity, the first adsorption area, the lifting area and the second adsorption area are formed on the surface of the support part, and the first vacuum adsorption cavity and the second vacuum adsorption cavity are formed inside the support part.

[0011] Furthermore, in the automatic lifting mechanism, the vacuum adsorption platform is a ceramic platform, the first adsorption area and the second adsorption area are made of porous ceramic, and the lifting area is made of dense ceramic.

[0012] Furthermore, in the automatic lifting mechanism, the vacuum adsorption platform includes a main body and a support part. The main body has an installation cavity, the lifting assembly is disposed in the installation cavity, and the support part covers the installation cavity.

[0013] Furthermore, in the automatic lifting mechanism, the lifting component includes a suction cup and a connecting column, the connecting column is disposed at the driving end of the lifting drive assembly, and the suction cup is disposed at the top of the connecting column.

[0014] Furthermore, in the automatic lifting mechanism, the lifting component also includes a mounting component, which is disposed on the drive end of the lifting drive component. There are multiple lifting components, all of which are disposed on the mounting component, and the number of lifting openings corresponds to the number of lifting components.

[0015] Furthermore, in the automatic lifting mechanism, the lifting component also includes a linear guide rail, which is disposed on the vacuum adsorption platform, and the mounting component is slidably disposed on the linear guide rail.

[0016] Furthermore, in the automatic lifting mechanism, the lifting assembly also includes a linear bearing, which includes a guide shaft and a bearing sleeve fitted onto the guide shaft. The guide shaft is connected to the vacuum adsorption platform, and the bearing is connected to the mounting component.

[0017] Furthermore, in the automatic lifting mechanism, the lifting drive assembly includes a motor, a lead screw, and a nut. The lead screw is disposed at the drive end of the motor, the nut is sleeved on the lead screw, and the nut is connected to the mounting component.

[0018] Furthermore, in the automatic lifting mechanism, the lifting drive assembly includes a cylinder, and the piston rod of the cylinder is connected to the mounting component.

[0019] Compared to existing technologies, the automatic lifting mechanism provided in this application allows for several advantages. During loading, a lifting drive assembly raises the lifting component to support the product, facilitating loading. The lifting component then lowers, allowing the product to fall onto a vacuum adsorption platform and be held in place by the adsorption port. During unloading, the lifting drive assembly raises the lifting component, suspending the product for easy unloading. Therefore, this automatic lifting mechanism is highly practical, benefiting both manual and automated product handling. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the automatic lifting mechanism provided in this application.

[0021] Figure 2 for Figure 1 The diagram shows the structure of the automatic lifting mechanism for removing the supporting part.

[0022] Figure 3 for Figure 1 The top view of the automatic lifting mechanism shown.

[0023] Figure 4 for Figure 3 The diagram shows the structure of the automatic lifting mechanism for removing the porous ceramic layer.

[0024] Figure 5 for Figure 2 The top view of the automatic lifting mechanism shown.

[0025] Figure 6 for Figure 2 The diagram shows a cross-sectional view of the automatic lifting mechanism.

[0026] Among them, 10 is a vacuum adsorption platform; 11 is the main body; 111 is the mounting cavity; 12 is the bearing part; 121 is the first adsorption area; 122 is the lifting area; 123 is the second adsorption area; 124 is the first vacuum adsorption cavity; 125 is the second vacuum adsorption cavity; 20 is the lifting assembly; 21 is the lifting component; 22 is the mounting component; 23 is the linear bearing; 30 is the lifting drive assembly; 31 is the motor; 32 is the lead screw; 33 is the nut; 40 is the sensor; and 50 is the sensing plate. Detailed Implementation

[0027] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the following detailed description of this application is provided with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining this application and are not intended to limit this application. Unless further described, elements, structures, and features in one embodiment may be advantageously combined with other embodiments.

[0028] It should be noted that when a metastructure is referred to as "fixed to" or "set on" another metastructure, it can be directly on or indirectly on that other metastructure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0029] The terms “length”, “width”, “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation.

[0030] This application provides an automatic lifting mechanism that can be used to carry products to be processed, such as semiconductor ingots, and can facilitate the loading and unloading of products to help realize automated ingot handling.

[0031] Please see Figure 1 and Figure 2 The automatic lifting mechanism provided in this application includes a vacuum adsorption platform 10, a lifting assembly 20, and a lifting drive assembly 30. The vacuum adsorption platform 10 is provided with a lifting port; the lifting assembly 20 includes a lifting member 21, which is movably disposed within the lifting port and located at the drive end of the lifting drive assembly 30.

[0032] The vacuum adsorption stage 10 is used to place products and can be provided with adsorption ports on its surface to vacuum adsorb the products, thereby maintaining the position of the products and preventing them from shifting. The lifting drive assembly 30 can drive the lifting member 21 to move up and down, so that the lifting member 21 extends / retracts from the lifting port, thereby lifting or lowering the products to facilitate unloading or loading.

[0033] Taking crystal ingots as an example, during the feeding process, the lifting drive assembly 30 first drives the lifting component 21 to rise, the external feeding mechanism places the crystal ingot on the lifting component 21, and then the lifting drive assembly 30 drives the lifting component 21 to fall down, so that the product falls on the vacuum adsorption platform 10 and is held by the adsorption port.

[0034] During the unloading process, the adsorption port first disconnects the adsorption, and then the lifting drive component 30 drives the lifting component 21 to rise, so that the product is in a suspended state. Finally, the external unloading mechanism removes the crystal ingot.

[0035] It is evident that the automatic lifting mechanism is highly practical. By lifting the product, it not only facilitates manual handling but also helps to achieve automated product handling.

[0036] In some embodiments, the vacuum adsorption stage 10 includes a main body 11 and a support part 12. The main body 11 has an installation cavity 111, the lifting assembly 20 is disposed in the installation cavity 111, and the support part 12 covers the installation cavity 111.

[0037] The support portion 12 is used to support the crystal ingot and can be made of ceramic material. The main body portion 11 is used to install the support portion 12 and house the lifting assembly 20. The support portion 12 and the main body portion 11 are independent of each other and do not interfere with each other. The lifting assembly 20 is located in the mounting cavity 111 of the main body portion, which not only protects the lifting assembly 20, but also makes the overall structure of the vacuum adsorption stage 10 more compact.

[0038] The mounting cavity 111 is used to accommodate the lifting assembly 20. When the lifting member 21 is lowered, it is completely located within the mounting cavity 111. Several air pipe connectors can be provided on the main body 11, and air pipe connectors are also provided at the bottom of the lifting member 21. By providing connecting air passages, the corresponding air pipe connectors are connected to each other, and vacuum is conducted to the lifting member 21 to realize the adsorption function of the lifting member 21.

[0039] Please see Figure 3 and Figure 4 In some embodiments, the surface of the support portion 12 is formed with a first adsorption area 121, a lifting area 122 and a second adsorption area 123 arranged in sequence. The vacuum adsorption stage 10 is provided with a first vacuum adsorption cavity 124 and a second vacuum adsorption cavity 125 inside. The first adsorption area 121 is provided with a plurality of first adsorption holes communicating with the first vacuum adsorption cavity. The second adsorption area 123 is provided with a plurality of second adsorption holes communicating with the second vacuum adsorption cavity. The lifting port is located in the lifting area 122.

[0040] The adsorption of products in the first adsorption zone 121 and the second adsorption zone 123 is independent of each other. When a small product is placed on the support part 12, the product is located in the first adsorption zone 121 and the lifting zone 122. At this time, the first adsorption zone 121 works while the second adsorption zone 123 does not work, so as to ensure the adsorption effect of the first adsorption zone 121.

[0041] When a large product is placed on the support section 12, the product is located in the first adsorption area 121, the lifting area 122 and the second adsorption area 123. At this time, both the first adsorption area 121 and the second adsorption area 123 work together to adsorb the product and ensure the adsorption effect.

[0042] Furthermore, a third adsorption zone, a fourth adsorption zone, etc., can be provided outside the second adsorption zone 123, and one or more lifting zones 122 can be provided between each adsorption zone, so that the supporting part 12 can support products of more sizes.

[0043] In some embodiments, the support portion 12 includes a porous ceramic layer and a dense ceramic layer, the porous ceramic layer having a vacuum adsorption chamber inside, and the lifting port being opened on the dense ceramic layer.

[0044] The porous ceramic layer is characterized by its loose and porous structure. When multiple pores of the porous ceramic layer are connected to the vacuum adsorption chamber, multiple adsorption ports are formed, which can adsorb products. The dense ceramic layer does not form pores and has higher strength, which is used to better support products.

[0045] Please see Figure 4 The support part 12 can adopt an independent ring of porous ceramic layer in the first adsorption zone 121, and a first vacuum adsorption chamber 124 is provided below the porous ceramic layer. The first vacuum adsorption chamber 124 is connected to an external vacuum generating device through a gas pipe to realize the adsorption function of the first adsorption zone 121.

[0046] Meanwhile, the support unit 12 can also adopt an independent ring of porous ceramic layer in the second adsorption zone 123, and a second vacuum adsorption chamber 125 is set below the porous ceramic layer. The second vacuum adsorption chamber 125 is also connected to an external vacuum generating device through another air pipe to realize the adsorption function of the second adsorption zone 123.

[0047] In some embodiments, the lifting member 21 includes a suction cup and a connecting column, the connecting column being disposed at the driving end of the lifting drive assembly 30, and the suction cup being disposed at the top of the connecting column.

[0048] The suction cup is connected to an external vacuum device. When the lifting component 21 lifts the product, the suction cup can adhere to the product, preventing product displacement or detachment during the lifting process. The connecting column increases the height of the suction cup; the height to which the suction cup lifts the product is determined by the height of the connecting column. Multiple lifting components 21 can be used, arranged in a suitable manner, with multiple lifting openings provided at corresponding positions on the vacuum adsorption platform 10. This allows for simultaneous lifting of the product from multiple directions, improving stability during lifting.

[0049] Please see Figure 2 and Figure 5 The lifting assembly 20 may also include a mounting component 22, on which multiple lifting components 21 are mounted together. The mounting component 22 is then mounted on the drive end of the lifting drive assembly 30, so that the lifting drive assembly 30 drives the multiple lifting components 21 to lift together through the mounting component 22, thereby improving the driving efficiency.

[0050] In some embodiments, the lifting assembly 20 further includes a linear guide rail, which is disposed on the vacuum adsorption stage 10, and the mounting member 22 is slidably disposed on the linear guide rail.

[0051] The linear guide rail can limit and guide the sliding of the mounting component 22, improve the stability of the mounting component 22 when it is raised and lowered, prevent the mounting component 22 and the lifting component 21 on the mounting component 22 from shaking, and thus prevent the product from shaking.

[0052] Specifically, the number of linear guide rails can be set to two, and they are symmetrically installed on the side wall of the mounting cavity 111. The corresponding guide rail sliders are then fixed on the mounting component 22 to slide and limit both sides of the mounting component 22 together, ensuring the smooth and reliable lifting action.

[0053] Alternatively, the linear guide rail can be replaced with a linear bearing 23, which includes a guide shaft and a bearing sleeve fitted onto the guide shaft. The guide shaft is connected to the vacuum adsorption stage 10, and the bearing sleeve is mounted on the mounting component 22.

[0054] Specifically, the number of linear bearings 23 can be set to 4. The guide shafts of the 4 linear bearings 23 are arranged in a rectangular manner in the mounting cavity 111 to slide and limit the four corners of the mounting component 22 together, so as to ensure the smooth and reliable lifting action.

[0055] Please see Figure 2 and Figure 6 In some embodiments, the lifting drive assembly 30 may include a motor 31, a lead screw 32 and a nut 33. The lead screw 32 is disposed on the drive end of the motor 31, the nut 33 is sleeved on the lead screw 32, and the nut 33 is connected to the mounting member 22.

[0056] The motor 31 can be a stepper motor. By rotating the motor 31 forward and backward, and through the cooperation of the lead screw 32 and the nut 33, the nut 33 drives the mounting part 22 to rise and fall, thereby realizing the lifting and lowering of the lifting part 21.

[0057] Furthermore, a sensor 40 can be provided on the side of the mounting component 22, and a sensing plate 50 can be provided on the mounting component. The movement position of the mounting component 22 can be determined by the cooperation of the sensor 40 and the sensing plate 50.

[0058] Specifically, upper limit sensors and lower limit sensors can be respectively installed on both sides of the mounting component 22, and corresponding upper limit sensing plates and lower limit sensing plates can be installed on both sides of the mounting component 22. Through the cooperation of the sensors 40 and the sensing plates 50, the movement limit of the mounting component 22 can be ensured to not exceed the set position.

[0059] When the crystal ingot needs to be fed, the stepper motor 31 drives the lifting assembly 20 to rise through the lead screw 32, so that the upper limit sensor 50 reaches the sensing position of the upper limit sensor. The suction cup at the end of the lifting assembly 21 exceeds the table surface of the vacuum adsorption platform 10. After the crystal ingot is placed on the suction cup at the end of the lifting assembly 21, the vacuum of the suction cup is turned on to adsorb the crystal ingot onto the suction cup. Then, the stepper motor 31 drives the lifting assembly 20 to fall through the lead screw 32, so that the lower limit sensor reaches the sensing position of the lower limit sensor. At this time, the crystal ingot falls onto the table surface of the vacuum adsorption platform 10, and the vacuum adsorption platform 10 turns on the vacuum and adsorbs the crystal ingot.

[0060] Alternatively, the lifting drive assembly 30 may include a cylinder, with the piston rod of the cylinder connected to the mounting member 22. When the piston rod of the cylinder extends, it can push the lifting assembly 20 to the upper limit position, so that the suction cup at the end of the lifting member 21 exceeds the platform of the vacuum adsorption stage 10. After the crystal ingot is placed on the suction cup at the end of the lifting member 21, the vacuum of the suction cup is turned on to adsorb the crystal ingot onto the suction cup. Then, when the piston rod of the cylinder retracts, it can drive the lifting assembly 20 to descend to the lower limit position. At this time, the crystal ingot falls onto the platform of the vacuum adsorption stage 10, and the vacuum adsorption stage 10 turns on the vacuum and adsorbs the crystal ingot.

[0061] Of course, in other embodiments, other common linear drive structures can also be used to realize the lifting drive function of the lifting drive component 30 to the lifting component 20.

[0062] It is understood that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of this application, and all such substitutions or changes should fall within the protection scope of the appended claims.

Claims

1. An automatic jacking mechanism, characterized by, The vacuum adsorption platform comprises: a vacuum adsorption platform provided with a jacking opening; a jacking assembly comprising a jacking piece movably arranged in the jacking opening; and a lifting driving assembly, wherein the jacking piece is arranged at the driving end of the lifting driving assembly, and the lifting driving assembly is used to drive the jacking piece to extend out of / retract into the jacking opening. The surface of the vacuum adsorption platform is sequentially provided with a first adsorption area, a jacking area and a second adsorption area, the inside of the vacuum adsorption platform is provided with a first vacuum adsorption cavity and a second vacuum adsorption cavity, the first adsorption area is provided with a plurality of first adsorption holes communicating with the first vacuum adsorption cavity, the second adsorption area is provided with a plurality of second adsorption holes communicating with the second vacuum adsorption cavity, and the jacking opening is arranged in the jacking area.

2. The automatic jacking mechanism of claim 1, wherein, The vacuum adsorption platform comprises a main body and a bearing part, the main body is provided with a mounting cavity, the jacking assembly is arranged in the mounting cavity, the bearing part is arranged on the mounting cavity, the first adsorption area, the jacking area and the second adsorption area are arranged on the surface of the bearing part, and the first vacuum adsorption cavity and the second vacuum adsorption cavity are arranged in the inside of the bearing part.

3. The automatic jacking mechanism of claim 2, wherein, The vacuum adsorption platform is a ceramic platform, the first adsorption area and the second adsorption area are made of porous ceramic, and the jacking area is made of dense ceramic.

4. The automatic jacking mechanism of claim 2, wherein, The jacking piece comprises a suction disc and a connecting column, the connecting column is arranged at the driving end of the lifting driving assembly, and the suction disc is arranged at the top end of the connecting column.

5. The automatic jacking mechanism of claim 1, wherein, The jacking assembly further comprises a mounting piece, the mounting piece is arranged at the driving end of the lifting driving assembly, the number of jacking pieces is plural, the plural jacking pieces are arranged on the mounting piece, and the number of jacking openings corresponds to the number of jacking pieces.

6. The automatic jacking mechanism of claim 1, wherein, The jacking assembly further comprises a linear guide rail, the linear guide rail is arranged on the vacuum adsorption platform, and the mounting piece is slidingly arranged on the linear guide rail.

7. The automatic jacking mechanism of claim 6, wherein, The jacking assembly further comprises a linear bearing, the linear bearing comprises a guide shaft and a bearing sleeve sleeved on the guide shaft, the guide shaft is connected to the vacuum adsorption platform, and the bearing is connected to the mounting piece.

8. The automatic jacking mechanism of claim 6, wherein, The lifting driving assembly comprises a motor, a lead screw and a nut, the lead screw is arranged at the driving end of the motor, the nut is sleeved on the lead screw, and the nut is connected to the mounting piece.

9. The automatic jacking mechanism of claim 6, wherein, The lifting driving assembly comprises a gas cylinder, and the piston rod of the gas cylinder is connected to the mounting piece.

10. The automatic jacking mechanism of claim 6, wherein, ​

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