Safety protection device for electrostatic oil removal system

Abstract

The utility model discloses a safety protection device for an electrostatic oil removal system. The electrostatic oil removal system comprises a high-voltage electrostatic field area, an air inlet valve and an air outlet valve, wherein the high-voltage electrostatic field area is provided with a high-voltage electrode, and the air inlet valve and the air outlet valve are arranged at the two ends of the high-voltage electrostatic field area; the safety protection device comprises a temperature controller, a first fire extinguishing spraying system and a second fire extinguishing spraying system; the temperature controller comprises a temperature detection probe arranged in the high-voltage electrostatic field area, and the temperature detection probe is used for detecting the temperature of the high-voltage electrostatic field area. A temperature controller and a two-section spraying fire extinguishing system are arranged, targeted fire extinguishing is conducted on a high-voltage electrostatic field area according to the actual detection temperature, when the ignition range is small and the temperature rising amplitude is small, only one fire extinguishing medium is adopted for spraying fire extinguishing, and when the ignition range is large and the temperature rising amplitude is large, the fire extinguishing medium is adopted for spraying fire extinguishing. And meanwhile, two fire extinguishing media are adopted for rapid spraying fire extinguishing, meanwhile, a high-voltage electrostatic field area is isolated from the external environment, and the production safety is effectively protected.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and specifically relates to a safety protection device for an electrostatic degreasing system. Background Technology

[0002] In a semiconductor heavily doped crystal growth system, an electrostatic degreasing system is required to treat the oil and gas mist discharged from the oil pump. The process is as follows: the oil and gas mist enters the electrostatic degreasing system through the inlet, first passing through a pretreatment zone to remove large oil particles or impurities. Then, it enters a high-voltage electrostatic field zone, where the high-voltage electric field charges the oil mist. Under the influence of the high-voltage electric field, the charged oil mist enters the dust collection area and is adsorbed onto the dust collector, thus achieving oil-air separation. The purified gas is discharged through the outlet, while the oil droplets are collected and periodically cleaned. The entire process is grounded to prevent the outer casing from becoming electrified.

[0003] However, during the above-mentioned work process, if the high-voltage electrostatic field area malfunctions, causing a high-voltage short circuit or breaking down the oil mist and causing high-voltage sparking, it is easy to ignite the oil and gas and oil mist in the system. Moreover, under the chimney effect, the fire will become larger and larger, and the resulting fire or high temperature will cause serious damage to the production system, resulting in incalculable losses. Utility Model Content

[0004] The purpose of this invention is to provide a safety protection device for an electrostatic oil removal system to address the shortcomings of existing technologies.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A safety protection device for an electrostatic oil removal system, the electrostatic oil removal system including a high-voltage electrostatic field area with high-voltage electrodes and an inlet valve and an outlet valve located at both ends of the high-voltage electrostatic field area; the safety protection device includes a temperature controller, a first fire extinguishing sprinkler system and a second fire extinguishing sprinkler system;

[0007] The first fire-extinguishing sprinkler system includes a first sprinkler pipe aligned with the high-voltage electrode and a first control valve for controlling the on / off state of the first sprinkler pipe;

[0008] The second fire-extinguishing sprinkler system includes a second sprinkler pipe aligned with the high-voltage electrode and a second control valve for controlling the on / off state of the second sprinkler pipe;

[0009] The temperature controller includes a temperature detection probe disposed within the high-voltage electrostatic field area, the temperature detection probe being used to detect the temperature of the high-voltage electrostatic field area; the temperature controller is also electrically connected to the first control valve, the second control valve, the inlet valve, and the outlet valve, and is used to send corresponding instructions to the first control valve, the second control valve, the inlet valve, and the outlet valve according to the temperature signal detected by the temperature detection probe.

[0010] Preferably, the first fire-extinguishing sprinkler system further includes a first fire-extinguishing medium storage device located outside the high-voltage electrostatic field area;

[0011] A first connecting pipe is provided between the first fire extinguishing medium storage device and the first sprinkler pipe, and the first control valve is located on the first connecting pipe portion outside the high-voltage electrostatic field area.

[0012] Preferably, the second fire-extinguishing sprinkler system further includes a second fire-extinguishing medium storage device located outside the high-voltage electrostatic field area;

[0013] A second connecting pipe is provided between the second extinguishing medium storage device and the second sprinkler pipe, and the second control valve is located on the second connecting pipe portion outside the high-voltage electrostatic field area.

[0014] Preferably, the temperature detection probe comprises multiple probes, distributed at different locations within the high-voltage electrostatic field.

[0015] Preferably, the temperature controller is located outside the high-voltage electrostatic field area.

[0016] Preferably, the extinguishing medium used in the first fire sprinkler system is a dry powder extinguishing agent.

[0017] Preferably, the extinguishing medium used in the second fire sprinkler system is water.

[0018] Preferably, the safety protection device further includes an alarm electrically connected to the thermostat.

[0019] This application incorporates a temperature controller and a two-stage sprinkler fire suppression system. Based on the actual detected temperature, the system provides targeted fire suppression for the high-voltage electrostatic field. When the fire area is small and the temperature rise is minimal, only one extinguishing medium is used for sprinkler fire suppression. When the fire area is large and the temperature rise is significant, two extinguishing media are used simultaneously for rapid sprinkler fire suppression. This system also isolates the high-voltage electrostatic field from the external environment, effectively protecting production safety. Attached Figure Description

[0020] Figure 1 This is a structural schematic diagram of the safety protection device for an electrostatic oil removal system provided in this application;

[0021] Explanation of reference numerals in the attached figures:

[0022] 1-Air inlet; 2-Air inlet valve; 3-Filter; 4-Drain outlet; 5-High voltage electrode; 6-Grounding device; 7-High voltage generator; 8-Air outlet valve; 9-Air outlet; 10-Thermostat; 11-First extinguishing medium storage tank; 12-First control valve; 13-First sprinkler pipe; 14-Second control valve; 15-Second sprinkler pipe; 16-Temperature detection probe. Detailed Implementation

[0023] A typical electrostatic oil removal system structure is as follows: Figure 1 As shown, the system includes a high-voltage electrostatic field zone equipped with a high-voltage electrode 5, and an air inlet 1 and an air outlet 9 located at both ends of the high-voltage electrostatic field zone. An air inlet valve 2 is installed on the air inlet 1, and an air outlet valve 8 is installed on the air outlet 9. A filter 3 is also installed at the inlet end of the high-voltage electrostatic field zone. The high-voltage electrode 5 generates a high-voltage electric field through a high-voltage generator 7. Oil mist entering through the air inlet 1 is first pre-filtered by the filter 3, and then enters the high-voltage electrostatic field zone, where it becomes charged. The charged oil mist particles are then adsorbed by the dust collector and separated from the air. The separated air is discharged through the air outlet 9. The adsorbed oil mist particles are discharged from the drain outlet 4. The air inlet valve 2 and the air outlet valve 8 can control the air intake and exhaust respectively. In addition, the outer casing of the high-voltage electrostatic field zone is connected to a grounding device 6 to prevent the casing from becoming charged.

[0024] As mentioned earlier, if a fault occurs in the high-voltage electrostatic field, leading to a high-voltage short circuit or a breakdown of oil mist causing high-voltage sparking, it can easily ignite the oil and gas in the system, causing damage to the production system. Without safety protection devices, the fire will grow larger and larger through the chimney effect, further affecting production and causing incalculable losses.

[0025] To address the aforementioned problems, this application provides a safety protection device for electrostatic oil removal systems, such as... Figure 1 As shown, the safety protection device includes a thermostat 10, a first fire sprinkler system, and a second fire sprinkler system.

[0026] The first fire-extinguishing sprinkler system includes a first sprinkler pipe 13 aligned with the high-voltage electrode and a first control valve 12 for controlling the on / off state of the first sprinkler pipe.

[0027] The second fire sprinkler system includes a second sprinkler pipe 15 aligned with the high-voltage electrode and a second control valve 14 for controlling the on / off state of the second sprinkler pipe.

[0028] The temperature controller 10 includes a temperature detection probe 16 located in the high-voltage electrostatic field area. The temperature detection probe 16 is used to detect the temperature of the high-voltage electrostatic field area. The temperature controller 10 is also electrically connected to a first control valve, a second control valve, an inlet valve, and an outlet valve, and is used to send corresponding instructions to the first control valve, the second control valve, the inlet valve, and the outlet valve according to the temperature signal detected by the temperature detection probe.

[0029] Specifically: The temperature detection probe monitors the temperature of the high-voltage electrostatic field. When the electrostatic oil removal system is working normally, the temperature of the high-voltage electrostatic field is normal, generally not exceeding 30℃. However, when high-voltage electrode breakdown and short-circuit ignition of fuel gas or waste occur, the temperature of the high-voltage electrostatic field will rise. The temperature detection probe transmits the detected temperature signal to the temperature controller in real time. The temperature controller compares this temperature signal value with a preset temperature value. When the temperature exceeds the first preset temperature, such as exceeding 50℃, it will issue two commands: first, it sends a command to the first control valve to open the first spray pipe and use the first extinguishing medium to spray and extinguish the fire in the high-voltage electrostatic field; second, it sends a command to the inlet and outlet valves to close them, isolating the high-voltage electrostatic field from the outside environment to prevent the temperature and flame from affecting other systems. When the temperature exceeds the second preset temperature, such as exceeding 100℃, the temperature controller will issue a third command to the third control valve to open the second spray pipe and simultaneously use the second extinguishing medium to spray and extinguish the fire in the high-voltage electrostatic field. When the detected temperature is within the normal range, the first and second control valves are closed, and the inlet and outlet valves are reopened for normal production.

[0030] The first and second preset temperatures can be adjusted according to actual conditions.

[0031] Therefore, this application sets up a temperature controller and a two-stage sprinkler fire extinguishing system to target the high-voltage electrostatic field area for targeted fire extinguishing based on the actual detected temperature. When the fire area is small and the temperature rise is small, only one extinguishing medium is used for sprinkler fire extinguishing. When the fire area is large and the temperature rise is large, two extinguishing media are used simultaneously for rapid sprinkler fire extinguishing. At the same time, the high-voltage electrostatic field area is isolated from the external environment, effectively protecting production safety.

[0032] The thermostat can use conventional technology and only needs to have simple logic judgment functions.

[0033] The first and second extinguishing agents are selected based on the actual situation. Preferably, the first fire sprinkler system uses dry powder extinguishing agent as the extinguishing agent. The second fire sprinkler system uses water as the extinguishing agent.

[0034] Preferably, the first fire extinguishing sprinkler system further includes a first fire extinguishing medium storage tank 11 located outside the high-voltage electrostatic field area; a first connecting pipe is provided between the first fire extinguishing medium storage tank and the first sprinkler pipe, and a first control valve is located on the first connecting pipe portion outside the high-voltage electrostatic field area.

[0035] Preferably, the second fire extinguishing sprinkler system further includes a second fire extinguishing medium storage device located outside the high-voltage electrostatic field area; a second connecting pipe is provided between the second fire extinguishing medium storage device and the second sprinkler pipe 15, and a second control valve is located on the second connecting pipe portion outside the high-voltage electrostatic field area.

[0036] Preferably, the temperature controller 10 is located outside the high-voltage electrostatic field area.

[0037] The first and second extinguishing medium storage tanks can provide the first and second extinguishing media, respectively. The first and second control valves are located outside the high-voltage electrostatic field area to prevent them from being damaged by the high temperature within the field.

[0038] The temperature detection probes preferably include multiple probes, which are distributed at different locations within the high-voltage electrostatic field.

[0039] Preferably, the safety protection device also includes an alarm electrically connected to the temperature controller, which will sound an alarm when the detected temperature exceeds the normal range to remind the operator to pay attention.

[0040] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.

Claims

1. A safety protection device for electrostatic oil removal system, the electrostatic oil removal system comprising a high-voltage electrostatic field area provided with a high-voltage electrode, and an air inlet valve and an air outlet valve arranged at both ends of the high-voltage electrostatic field area; characterized in that, The safety protection device comprises a temperature controller, a first fire extinguishing spray system and a second fire extinguishing spray system. The first fire extinguishing spray system comprises a first spray pipe arranged in alignment with the high-voltage electrode and a first control valve for controlling the on-off of the first spray pipe. The second fire extinguishing spray system comprises a second spray pipe arranged in alignment with the high-voltage electrode and a second control valve for controlling the on-off of the second spray pipe. The temperature controller comprises a temperature detection probe arranged in the high-voltage electrostatic field area, which is used for detecting the temperature of the high-voltage electrostatic field area; the temperature controller is also electrically connected with the first control valve, the second control valve, the air inlet valve and the air outlet valve, and is used for sending corresponding instructions to the first control valve, the second control valve, the air inlet valve and the air outlet valve according to the temperature signal detected by the temperature detection probe.

2. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The first fire extinguishing spray system further comprises a first fire extinguishing medium storage device located outside the high-voltage electrostatic field area. A first connecting pipe is arranged between the first fire extinguishing medium storage device and the first spray pipe, and the first control valve is located on the part of the first connecting pipe outside the high-voltage electrostatic field area.

3. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The second fire extinguishing spray system further comprises a second fire extinguishing medium storage device located outside the high-voltage electrostatic field area. A second connecting pipe is arranged between the second fire extinguishing medium storage device and the second spray pipe, and the second control valve is located on the part of the second connecting pipe outside the high-voltage electrostatic field area.

4. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The temperature detection probe comprises a plurality of temperature detection probes distributed at different positions in the high-voltage electrostatic field area.

5. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The temperature controller is located outside the high-voltage electrostatic field area.

6. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The fire extinguishing medium used by the first fire extinguishing spray system is a dry powder fire extinguishing agent.

7. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The fire extinguishing medium used by the second fire extinguishing spray system is water.

8. The safety protection device for the electrostatic oil removal system according to claim 1, wherein The safety protection device further comprises an alarm electrically connected with the temperature controller.

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