Air inlet pipeline device and semiconductor equipment
By installing insulating anti-arc-breaking components on the inner and outer pipe walls of the air intake pipe device, the problem of gas arcing in the plasma enhancement process is solved, achieving uniform gas distribution and preventing electric arcs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2025-03-31
- Publication Date
- 2026-05-01
AI Technical Summary
In plasma-enhanced atomic layer deposition or plasma-enhanced chemical vapor deposition processes, arcing can easily occur in the pipeline after the gas is excited into plasma.
Insulating anti-arc assemblies are installed on the inner and outer pipe walls of the intake pipe device, including inner and outer anti-arc assemblies. These components use high resistivity materials to block current flow, disperse the electric field, and prevent ionization and arcing.
It effectively prevents the ionization and arcing of gas in the pipeline, ensuring uniform gas distribution and avoiding the propagation and diffusion of electric arcs.
Smart Images
Figure CN224186260U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to an air intake pipeline device and a semiconductor device. Background Technology
[0002] In processes such as Plasma Enhanced Atomic Layer Deposition (PEALD) or Plasma Enhanced Chemical Vapor Deposition (PECVD), radio frequency power supplies and electrode components are typically used to excite the process gas to generate plasma for thin film deposition. However, the gas excited into plasma has high energy and reactivity, which can easily cause arcing when passing through the pipeline.
[0003] In view of this, it is necessary to propose an intake pipe device and a semiconductor device to solve the above problems. Utility Model Content
[0004] The purpose of this invention is to provide an air intake pipeline device and a semiconductor device to prevent arcing problems that easily occur when gas is excited into plasma during plasma processing and passes through the pipeline.
[0005] This utility model provides an intake pipe device, including:
[0006] Outer tube;
[0007] An outer anti-arc component is located on the inner wall of the outer tube and has insulating properties.
[0008] The beneficial effect of the air intake pipeline device provided by this utility model is that by providing an insulating outer anti-arc component on the inner wall of the outer tube, it can effectively prevent the gas from ionizing and arcing when passing through the outer tube.
[0009] In one possible embodiment, the intake manifold assembly further includes:
[0010] An inner tube is disposed inside the outer tube, and an outer space is formed between the outer tube and the inner tube. The outer anti-arc component is located within the outer space.
[0011] The inner anti-arc component is located inside the inner tube and has insulation properties.
[0012] Its beneficial effect is that by providing an insulating inner anti-arc component on the inner wall of the inner tube, it can effectively prevent the gas from ionizing and arcing when passing through the inner tube.
[0013] In one possible embodiment, the inner anti-arc component includes a plurality of first anti-arc elements disposed at intervals along the extension direction of the inner tube on the inner wall of the inner tube, the first anti-arc elements being insulating and having a through hole in the middle.
[0014] In one possible embodiment, the inner anti-arc component includes a plurality of second anti-arc elements disposed at intervals along the extension direction of the inner tube on the inner wall of the inner tube, the second anti-arc elements being insulating and having a plurality of perforations at intervals.
[0015] In one possible embodiment, the inner anti-arc component includes a plurality of first anti-arc elements and a plurality of second anti-arc elements disposed at intervals on the inner wall of the inner tube along the extension direction of the inner tube. The first anti-arc elements and the second anti-arc elements are alternately arranged and both have insulation properties. The first anti-arc elements have a through hole in the middle, and the second anti-arc elements have a plurality of perforations disposed at intervals.
[0016] Its beneficial effect is that the gas needs to flow through the through hole of the first anti-arc component and / or the perforation of the second anti-arc component. The first anti-arc component and the second anti-arc component can effectively prevent the current from passing through the gas, thereby avoiding ionization and arcing.
[0017] In one possible embodiment, the perforation is located near the edge of the second anti-arc component.
[0018] Its beneficial effect is that the perforation is set close to the edge of the second anti-arc component, which reduces the electric field intensity by optimizing the electric field distribution, thereby avoiding ionization and arcing.
[0019] In one possible embodiment, the perforation and the through hole are staggered in the vertical direction.
[0020] Its beneficial effect is that the vertically staggered arrangement of the perforations and through holes helps to disperse the electric field and reduce its concentration in a specific area. This dispersion effect can reduce the risk of ionization, since ionization usually occurs in areas with high electric field strength.
[0021] In one possible embodiment, the first anti-arc component includes a first plate portion arranged horizontally and a first tube portion fixedly connected to the first plate portion along the edge of the first plate portion. The first plate portion and the first tube portion are insulating. The first tube portion is tubular and adapted to the inner tube. The first tube portion is disposed on the inner wall of the inner tube. The through hole is disposed on the first plate portion.
[0022] Its beneficial effect is that the first tube section on the inner wall of the inner tube is insulating, preventing the gas from ionizing and arcing on the inner wall of the inner tube.
[0023] In one possible embodiment, the second anti-arc component includes a horizontally arranged second plate portion and a second tube portion fixedly connected to the second plate portion along the edge of the second plate portion. The second plate portion and the second tube portion are insulating. The second tube portion is tubular and adapted to the inner tube. The second tube portion is disposed on the inner wall of the inner tube. The perforation is disposed on the second plate portion.
[0024] Its beneficial effect is that the second tube section located on the inner wall of the inner tube is insulating, preventing the gas from ionizing and arcing on the inner wall of the inner tube.
[0025] In one possible embodiment, the outer anti-arc component includes a plurality of third anti-arc elements disposed at intervals on the inner wall of the outer tube along the extension direction of the outer tube. The third anti-arc elements are sleeved on the outer tube and have insulation properties. The third anti-arc elements are provided with a plurality of flow holes at intervals, and the flow holes are located on the side of the third anti-arc elements closer to the outer tube.
[0026] In one possible embodiment, the outer anti-arc component includes a plurality of fourth anti-arc elements disposed at intervals on the inner wall of the outer tube along the extension direction of the outer tube. The fourth anti-arc elements are sleeved on the outer tube and have insulation properties. The fourth anti-arc elements are provided with a plurality of flow guiding holes at intervals, and the flow guiding holes are located on the side of the fourth anti-arc elements closer to the inner tube.
[0027] In one possible embodiment, the outer anti-arc component includes a plurality of third anti-arc elements and a plurality of fourth anti-arc elements disposed at intervals along the extension direction of the outer tube on the inner wall of the outer tube. The third and fourth anti-arc elements are alternately arranged and all have insulation properties. The third and fourth anti-arc elements are sleeved on the outer tube. The third anti-arc elements are provided with a plurality of flow holes at intervals, and the flow holes are located on the side of the third anti-arc element closer to the outer tube. The fourth anti-arc elements are provided with a plurality of guide holes at intervals, and the guide holes are located on the side of the fourth anti-arc element closer to the inner tube.
[0028] Its beneficial effect is that the gas needs to flow through the flow hole of the third anti-arc component and / or the guide hole of the fourth anti-arc component. The third anti-arc component and the fourth anti-arc component can effectively prevent current from passing through the gas, thereby avoiding ionization and arcing.
[0029] In one possible embodiment, the third anti-arc component includes a horizontally arranged third plate and a third tube fixedly connected to the third plate along its edge. The third plate and the third tube are insulated. The third tube is tubular and adapted to the outer tube. The third tube is located on the inner wall of the outer tube. The flow hole is located on the third plate and on the side of the third plate closer to the outer tube. The third plate has a first sleeve hole adapted to the inner tube. The third plate is fitted over the inner tube through the first sleeve hole.
[0030] Its beneficial effect is that the third tube section located on the inner wall of the outer tube is insulating, preventing the gas from ionizing and arcing on the inner wall of the inner tube.
[0031] In one possible embodiment, the fourth anti-arc component includes a horizontally arranged fourth plate and a fourth tube fixedly connected to the fourth plate along its edge. The fourth plate and the fourth tube are insulated. The fourth tube is tubular and adapted to the outer tube. The fourth tube is disposed on the inner wall of the outer tube. The fourth plate has a second sleeve hole adapted to the inner tube. The fourth plate is sleeved over the inner tube through the second sleeve hole. A flow guide hole is disposed on the fourth plate and located on the side of the fourth plate closer to the inner tube. The flow guide hole communicates with the second sleeve hole.
[0032] Its beneficial effect is that the fourth tube section located on the inner wall of the outer tube is insulating, preventing the gas from ionizing and arcing on the inner wall of the inner tube.
[0033] This invention also provides a semiconductor device, including: an air intake pipe device as described in any of the above embodiments. Attached Figure Description
[0034] Figure 1 This is a cross-sectional schematic diagram of the air intake pipeline device of this utility model.
[0035] Figure 2 This is a perspective cross-sectional view of the air intake pipeline device of this utility model in one embodiment.
[0036] Figure 3 This is a schematic diagram of the first anti-arc component in the air intake pipeline device of this utility model.
[0037] Figure 4 This is a schematic diagram of the second anti-arc component in the air intake pipe device of this utility model.
[0038] Figure 5 This is a three-dimensional cross-sectional view of the outer tube of the air intake pipe device of this utility model in one embodiment.
[0039] Figure 6 This is a schematic diagram of the third anti-arc component in the air intake pipeline device of this utility model.
[0040] Figure 7 This is a schematic diagram of the fourth anti-arc component in the air intake pipeline device of this utility model.
[0041] Explanation of reference numerals in the attached drawings: 100, outer tube; 110, outer space; 200, inner anti-arc component; 210, first anti-arc component; 211, first plate; 2111, through hole; 212, first tube; 220, second anti-arc component; 221, second plate; 2211, perforation; 222, second tube; 300, inner tube; 400, outer anti-arc component; 410, third anti-arc component; 411, third plate; 4111, flow hole; 4112, flow port; 4113, first sleeve hole; 412, third tube; 420, fourth anti-arc component; 421, fourth plate; 4211, guide hole; 4212, guide port; 4213, second sleeve hole; 422, fourth tube. Detailed Implementation
[0042] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0043] To address the problems existing in the prior art, embodiments of this utility model provide an intake pipe device. Figure 1 This is a cross-sectional schematic diagram of the intake pipe device of this utility model. See also Figure 1 The air intake piping device includes an outer tube 100 and an outer anti-arc component 400. The outer tube 100, for example in a deposition apparatus, is used to connect to a spray plate. The outer anti-arc component 400 is disposed on the inner wall of the outer tube 100 and has insulating properties. In this embodiment, by providing the outer anti-arc component 400 on the inner wall of the outer tube 100, and by ensuring its insulating properties, the adhesion and diffusion of electric arcs can be significantly reduced. When an electric arc attempts to propagate on the surface of the outer anti-arc component 400, its energy rapidly attenuates due to the high resistance of the component, preventing sustained propagation and thus preventing ionization and arcing of the gas within the outer tube 100.
[0044] In one embodiment, see Figure 1The intake piping device further includes an inner tube 300 and an inner anti-arc component 200. The inner tube 300 is disposed within the outer tube 100. For example, in a deposition apparatus, the inner tube 300 is used to connect to a spray plate. An outer space 110 is formed between the outer tube 100 and the inner tube 300. The outer anti-arc component 400 is located within the outer space 110. The inner anti-arc component 200 is disposed within the inner tube 300 and has insulating properties. In this embodiment, by providing the inner anti-arc component 200 on the inner wall of the inner tube 300, the inner anti-arc component 200 has insulating properties, which can significantly reduce the adhesion and diffusion capabilities of electric arcs. When an electric arc attempts to propagate on the surface of the inner anti-arc component 200, due to the high resistance characteristics of the inner anti-arc component 200, the energy of the arc will rapidly decay, thus preventing continuous propagation and preventing ionization and arcing of the gas within the inner tube 300.
[0045] In one embodiment, Figure 2 This is a perspective cross-sectional view of the air intake pipe device of this utility model in one embodiment. Figure 3 This is a schematic diagram of the first anti-arc component in the intake pipe device of this utility model. (See attached diagram) Figure 2 and Figure 3 The inner anti-arc component 200 includes a plurality of first anti-arc elements 210 spaced apart on the inner wall of the inner tube 300 along the extending direction of the inner tube 300. The first anti-arc elements 210 are adapted to the inner tube 300, and are insulating with a through hole 2111 in the center. In this embodiment, the first anti-arc elements 210 are insulating, that is, they have a high resistivity. The high resistivity can prevent current flow, effectively prevent the propagation of the arc in the inner tube 300, reduce the adhesion and diffusion of the arc in the inner tube 300, and prevent gas ionization and arcing in the inner tube 300.
[0046] In one embodiment, Figure 4 This is a schematic diagram of the second anti-arc component in the intake pipe device of this utility model. (See attached diagram) Figure 2 and Figure 4 The inner anti-arc component 200 includes a plurality of second anti-arc elements 220 spaced apart on the inner wall of the inner tube 300 along the extending direction of the inner tube 300. The second anti-arc elements 220 are adapted to the inner tube 300, and are insulating with a plurality of perforations 2211 spaced apart. In this embodiment, the second anti-arc elements 220 are insulating, meaning they have a high resistivity. This high resistivity prevents current flow, effectively preventing the propagation of an electric arc within the inner tube 300, greatly reducing the adhesion and diffusion of the electric arc within the inner tube 300, and preventing gas ionization and arcing within the inner tube 300.
[0047] In one embodiment, see Figure 2 , Figure 3 as well as Figure 4 The inner anti-arc component 200 includes a plurality of first anti-arc components 210 and a plurality of second anti-arc components 220 disposed at intervals along the extension direction of the inner tube 300 on the inner wall of the inner tube 300. The first anti-arc components 210 and the second anti-arc components 220 are alternately disposed and both have insulation. The first anti-arc component 210 is provided with a through hole 2111 in the middle, and the second anti-arc component 220 is provided with a plurality of through holes 2211 at intervals. In this embodiment, the first anti-arc component 210 and the second anti-arc component 220 are insulating, meaning they have high resistivity. High resistivity prevents current flow, effectively inhibiting the propagation of the electric arc within the inner tube 300 and reducing arc adhesion and diffusion within the inner tube 300. Furthermore, the alternating arrangement of the first and second anti-arc components 210 and 220 provides stronger insulation, preventing gas ionization and arcing within the inner tube 300. The combination of the through-hole 2111 and the perforation 2211 optimizes the gas flow path, contributing to the uniform distribution of plasma.
[0048] In one embodiment, see Figure 2 and Figure 4 The perforation 2211 is located near the edge of the second anti-arc component 220. Several perforations 2211 are spaced apart along the circumferential direction of the inner tube 300.
[0049] Since plasma is charged, when gas excited into plasma is introduced into the inner tube 300 and outer tube 100 of the intake pipe device, an electric field is generated within these tubes. Electric field concentration is the phenomenon where the intensity of the electric field significantly increases in a localized area; this enhancement can lead to ionization and arcing. Ionization refers to the process by which gas molecules or atoms lose electrons under the influence of an electric field, becoming positively charged ions and negatively charged electrons. Arcing, on the other hand, refers to the discharge phenomenon caused by the formation of current channels by charged particles generated by ionization under the influence of an electric field.
[0050] The perforation 2211 is positioned near the edge of the second anti-arc component 220. Electric field lines can pass through the perforation 2211, dispersing the electric field over a larger area and preventing concentration on the surface of the second anti-arc component 220. This results in a more uniform distribution of the electric field throughout the inner tube 300, preventing excessively high local electric field strength and avoiding ionization and arcing. The through-hole 2111 is located in the middle of the first anti-arc component 210, i.e., in the middle of the inner tube 300; the perforation 2211 is positioned near the edge of the second anti-arc component 220, i.e., in the edge of the inner tube 300. The combination of the through-hole 2111 and the perforation 2211 not only promotes gas flow but also makes the gas distribution more uniform throughout the inner tube 300.
[0051] In one specific embodiment, see Figure 2 The perforation 2211 and the through hole 2111 are staggered in the vertical direction. In this embodiment, since ionization usually occurs in areas with high electric field strength, the staggered arrangement of the perforation 2211 and the through hole in the vertical direction helps to disperse the electric field, prevent the electric field from concentrating in a certain area, and prevent the gas from ionizing and arcing in the inner tube 300.
[0052] In one embodiment, see Figure 2 and Figure 3 The first anti-arc component 210 includes a horizontally arranged first plate portion 211 and a first tube portion 212 fixedly connected to the first plate portion 211 along its edge. The first plate portion 211 and the first tube portion 212 are insulating. The first tube portion 212 is tubular and adapted to the inner tube 300. The first tube portion 212 is disposed on the inner wall of the inner tube 300, and a through hole 2111 is disposed on the first plate portion 211. In this embodiment, the first tube portion 212 is insulating and disposed on the inner wall of the inner tube 300, reducing the chance of gas molecules colliding with the inner wall of the inner tube 300 and preventing gas from ionizing and arcing at the inner wall of the inner tube 300.
[0053] In one embodiment, see Figure 2 and Figure 4 The second anti-arc component 220 includes a horizontally arranged second plate portion 221 and a second tube portion 222 fixedly connected to the second plate portion 221 along its edge. The second plate portion 221 and the second tube portion 222 are insulating. The second tube portion 222 is tubular and adapted to the inner tube 300. The second tube portion 222 is disposed on the inner wall of the inner tube 300, and a perforation 2211 is provided on the second plate portion 221. In this embodiment, the second tube portion 222 is insulating and disposed on the inner wall of the inner tube 300, reducing the chance of gas molecules colliding with the inner wall of the inner tube 300 and preventing gas ionization and arcing at the inner wall of the inner tube 300.
[0054] In one specific embodiment, see Figure 2In two adjacent first anti-arc-strike components 210 and second anti-arc-strike components 220, the end face of the first tube portion 212 of the first anti-arc-strike component 210 and the end face of the second tube portion 222 of the second anti-arc-strike component 220 are attached to each other, so that the first tube portions 212 of the first anti-arc-strike components 210 and the second tube portions 222 of the second anti-arc-strike components 220 are continuously laid on the inner wall of the outer tube 100. When the gas passes through the area where the first anti-arc-strike components 210 and the second anti-arc-strike components 220 are installed in the inner tube 300, it will not directly contact the inner wall of the inner tube 300. Since the first tube portion 212 and the second tube portion 222 are insulating, gas molecules are not easily ionized when passing through, preventing ionization and arcing of the gas at the inner wall of the inner tube 300.
[0055] In one embodiment, Figure 5 This is a perspective cross-sectional view of the outer tube of the air intake pipe device of this utility model in one embodiment. Figure 6 This is a schematic diagram of the third anti-arc component in the intake pipe device of this utility model. (See attached diagram) Figure 5 and Figure 6 The outer anti-arc component 400 includes a plurality of third anti-arc elements 410 disposed at intervals along the extension direction of the outer tube 100 on the inner wall of the outer tube 100. The third anti-arc elements 410 are sleeved outside the inner tube 300 and have insulation. A plurality of flow holes 4111 are provided at intervals on the third anti-arc elements 410. The flow holes 4111 are located on the side of the third anti-arc elements 410 close to the outer tube 100. The flow holes 4111 form a flow opening 4112 on the side of the third anti-arc elements 410 close to the outer tube 100. In this embodiment, the third anti-arc component 410 is supported between the inner tube 300 and the outer tube 100. The third anti-arc component 410 has insulation properties, that is, the third anti-arc component 410 has a high resistivity. The high resistivity can prevent current flow and effectively prevent the propagation of electric arc in the outer space 110, greatly reducing the adhesion and diffusion of electric arc in the outer space 110, and preventing gas from ionizing and arcing in the outer space 110.
[0056] In one embodiment, Figure 7 This is a schematic diagram of the fourth anti-arc component in the intake pipe device of this utility model. See [reference needed]. Figure 2 , Figure 5 as well as Figure 7The outer anti-arc component 400 includes a plurality of fourth anti-arc elements 420 spaced apart on the inner wall of the outer tube 100 along the extension direction of the outer tube 100. The fourth anti-arc elements 420 are sleeved on the inner tube 300 and have insulation. A plurality of guide holes 4211 are spaced apart on the fourth anti-arc elements 420. The guide holes 4211 are located on the side of the fourth anti-arc elements 420 close to the inner tube 300. The guide holes 4211 form a guide port 4212 on the side of the fourth anti-arc elements 420 close to the inner tube 300. In this embodiment, the fourth anti-arc component 420 is supported between the inner tube 300 and the outer tube 100. The fourth anti-arc component 420 has insulation properties, that is, the fourth anti-arc component 420 has a high resistivity. The high resistivity can prevent the current flow, effectively prevent the propagation of the electric arc in the outer space 110, greatly reduce the adhesion and diffusion of the electric arc in the outer space 110, and prevent the gas from ionizing and arcing in the outer space 110.
[0057] In one embodiment, see Figure 2 , Figure 5 , Figure 6 as well as Figure 7 The outer anti-arc component 400 includes a plurality of third anti-arc components 410 and a plurality of fourth anti-arc components 420 spaced apart on the inner wall of the outer tube 100 along the extension direction of the outer tube 100. The third anti-arc components 410 and fourth anti-arc components 420 are alternately arranged and all have insulation properties. The third anti-arc components 410 and fourth anti-arc components 420 are sleeved on the outer wall of the inner tube 300. The third anti-arc component 410 is provided with a plurality of flow holes 4111 spaced apart. 1. On the side of the third anti-arc component 410 near the outer tube 100, a flow hole 4111 is formed with a flow opening 4112 on the side of the third anti-arc component 410 near the outer tube 100. A number of guide holes 4211 are provided on the fourth anti-arc component 420 at intervals. The guide holes 4211 are located on the side of the fourth anti-arc component 420 near the inner tube 300, and the guide holes 4211 are formed with a flow opening 4212 on the side of the fourth anti-arc component 420 near the inner tube 300. In this embodiment, the third anti-arc component 410 and the fourth anti-arc component 420 are insulating, meaning they have high resistivity. This high resistivity prevents current flow, effectively inhibiting the propagation of the electric arc within the inner tube 300 and reducing arc adhesion and diffusion. The alternating arrangement of the third and fourth anti-arc components 410 and 420 provides stronger insulation, preventing gas ionization and arcing within the inner tube 300. The combination of the flow hole 4111 and the guide hole 4211 optimizes the gas flow path, contributing to the uniform distribution of plasma.
[0058] In one embodiment, see Figure 2 , Figure 5 as well as Figure 6 The third anti-arc component 410 includes a horizontally arranged third plate portion 411 and a third tube portion 412 fixedly connected to the third plate portion 411 along its edge. The third plate portion 411 and the third tube portion 412 are insulated. The third tube portion 412 is tubular and adapted to the outer tube 100. The third tube portion 412 is located on the inner wall of the outer tube 100. A flow hole 4111 is located on the third plate portion 411 and on the side of the third plate portion 411 close to the outer tube 100. A flow port 4112 is located on the third tube portion 412. The third plate portion 411 is provided with a first sleeve hole 4113 adapted to the inner tube 300. The third plate portion 411 is sleeved on the outer side of the inner tube 300 through the first sleeve hole 4113. In this embodiment, the third tube 412 is insulating and located on the inner wall of the outer tube 100, which reduces the chance of gas molecules colliding with the inner wall of the outer tube 100 and prevents the gas from ionizing and arcing at the inner wall of the outer tube 100.
[0059] In one embodiment, see Figure 2 , Figure 5 as well as Figure 7 The fourth anti-arc component 420 includes a horizontally arranged fourth plate portion 421 and a fourth tube portion 422 fixedly connected to the fourth plate portion 421 along its edge. The fourth plate portion 421 and the fourth tube portion 422 are insulated. The fourth tube portion 422 is tubular and adapted to the outer tube 100. The fourth tube portion 422 is located on the inner wall of the outer tube 100. The fourth plate portion 421 is provided with a second sleeve hole 4213 adapted to the inner tube 300. The fourth plate portion 421 is sleeved on the outer side of the inner tube 300 through the second sleeve hole 4213. A flow guide hole 4211 is provided on the fourth plate portion 421 and located on the side of the fourth plate portion 421 close to the inner tube 300. The flow guide hole 4211 communicates with the second sleeve hole 4213. A flow guide port 4212 is provided on the inner wall of the second sleeve hole 4213. In this embodiment, the fourth tube 422 is insulating and located on the inner wall of the outer tube 100, which reduces the chance of gas molecules colliding with the inner wall of the outer tube 100 and prevents the gas from ionizing and arcing at the inner wall of the outer tube 100.
[0060] In one specific embodiment, see Figure 2 and Figure 5In two adjacent third anti-arc-strike components 410 and fourth anti-arc-strike components 420, the end face of the third tube portion 412 of the third anti-arc-strike component 410 and the end face of the fourth tube portion 422 of the fourth anti-arc-strike component 420 are attached to each other, so that the third tube portions 412 of the third anti-arc-strike component 410 and the fourth tube portions 422 of the fourth anti-arc-strike component 420 are continuously laid on the inner wall of the outer tube 100. When the gas passes through the area where the third anti-arc-strike components 410 and fourth anti-arc-strike components 420 are installed in the outer tube 100, it will not directly contact the inner wall of the outer tube 100. Since the third tube portion 412 and the fourth tube portion 422 are insulating, gas molecules are not easily ionized when passing through, preventing ionization and arcing of the gas at the inner wall of the outer tube 100.
[0061] In one specific embodiment, the outer anti-arc component 400 and the inner anti-arc component 200 are made of ceramic or other insulating materials.
[0062] In one specific embodiment, see Figure 1 and Figure 2 The outer tube 100 and the inner tube 300 are circular tubes. The first plate portion 211, the second plate portion 221, the third plate portion 411, and the fourth plate portion 421 are all circular in shape. The first tube portion 212, the second tube portion 222, the third tube portion 412, and the fourth tube portion 422 are all circular in shape. The outer tube 100, the inner tube 300, the first plate portion 211, the second plate portion 221, the third plate portion 411, the fourth plate portion 421, the first tube portion 212, the second tube portion 222, the third tube portion 412, and the fourth tube portion 422 are arranged concentrically. The concentric arrangement can ensure that the gas flows more evenly in the air intake pipeline device.
[0063] In addition, the present invention also provides a semiconductor device, such as an atomic layer deposition (ALD) device, a chemical vapor deposition (CVD) device, or a plasma enhanced chemical vapor deposition (PECVD) device, etc., and the semiconductor device includes: an air inlet pipeline device as in any of the above embodiments.
[0064] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.
[0065] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0066] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0067] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.
Claims
1. An air intake plumbing arrangement, characterized by, include: Outer tube; An outer anti-arc component is disposed on the inner wall of the outer tube and has insulation properties; An inner tube is disposed inside the outer tube, and an outer space is formed between the outer tube and the inner tube. The outer anti-arc component is located within the outer space. The inner anti-arc component is located inside the inner tube and has insulation properties.
2. The air intake plumbing apparatus of claim 1, wherein, The inner anti-arc component includes a plurality of first anti-arc elements disposed at intervals on the inner wall of the inner tube along the extension direction of the inner tube. The first anti-arc elements are insulating and have a through hole in the middle.
3. The intake pipe device according to claim 1, characterized in that, The inner anti-arc component includes a plurality of second anti-arc elements disposed at intervals on the inner wall of the inner tube along the extension direction of the inner tube. The second anti-arc elements are insulating and have a plurality of perforations at intervals.
4. The intake pipe device according to claim 1, characterized in that, The inner anti-arc component includes a plurality of first anti-arc components and a plurality of second anti-arc components disposed at intervals on the inner wall of the inner tube along the extension direction of the inner tube. The first anti-arc components and the second anti-arc components are alternately arranged and both have insulation properties. The first anti-arc component has a through hole in the middle, and the second anti-arc component has a plurality of perforations disposed at intervals.
5. The intake pipe device according to claim 4, characterized in that, The perforation is located near the edge of the second anti-arc component.
6. The intake pipe device according to claim 4, characterized in that, The perforation and the through hole are staggered in the vertical direction.
7. The intake pipe device according to claim 2 or 4, characterized in that, The first anti-arc component includes a first plate portion arranged horizontally and a first tube portion fixedly connected to the first plate portion along the edge of the first plate portion. The first plate portion and the first tube portion are insulated. The first tube portion is tubular and adapted to the inner tube. The first tube portion is disposed on the inner wall of the inner tube. The through hole is disposed on the first plate portion.
8. The intake pipe device according to claim 3 or 4, characterized in that, The second anti-arc component includes a horizontally arranged second plate and a second tube fixedly connected to the second plate along its edge. The second plate and the second tube are insulated. The second tube is tubular and adapted to the inner tube. The second tube is located on the inner wall of the inner tube. The perforation is located on the second plate.
9. The intake pipe device according to claim 1, characterized in that, The outer anti-arc component includes a plurality of third anti-arc elements disposed at intervals on the inner wall of the outer tube along the extension direction of the outer tube. The third anti-arc elements are sleeved on the outer tube and have insulation. The third anti-arc elements are provided with a plurality of flow holes at intervals, and the flow holes are located on the side of the third anti-arc elements closer to the outer tube.
10. The intake pipe device according to claim 1, characterized in that, The outer anti-arc component includes a plurality of fourth anti-arc elements disposed at intervals on the inner wall of the outer tube along the extension direction of the outer tube. The fourth anti-arc elements are sleeved on the outer tube and have insulation properties. The fourth anti-arc elements are provided with a plurality of flow guiding holes at intervals, and the flow guiding holes are located on the side of the fourth anti-arc elements closer to the inner tube.
11. The intake pipe device according to claim 1, characterized in that, The outer anti-arc component includes a plurality of third anti-arc elements and a plurality of fourth anti-arc elements disposed at intervals on the inner wall of the outer tube along the extension direction of the outer tube. The third and fourth anti-arc elements are alternately arranged and all have insulation properties. The third and fourth anti-arc elements are sleeved on the outer tube. The third anti-arc elements are provided with a plurality of flow holes at intervals, and the flow holes are located on the side of the third anti-arc element closer to the outer tube. The fourth anti-arc elements are provided with a plurality of guide holes at intervals, and the guide holes are located on the side of the fourth anti-arc element closer to the inner tube.
12. The intake pipe device according to claim 9 or 11, characterized in that, The third anti-arc component includes a horizontally arranged third plate and a third tube fixedly connected to the third plate along its edge. The third plate and the third tube are insulated. The third tube is tubular and adapted to the outer tube. The third tube is located on the inner wall of the outer tube. The flow hole is located on the third plate and on the side of the third plate closer to the outer tube. The third plate has a first sleeve hole adapted to the inner tube. The third plate is fitted onto the inner tube through the first sleeve hole.
13. The intake pipe device according to claim 10 or 11, characterized in that, The fourth anti-arc component includes a horizontally arranged fourth plate and a fourth tube fixedly connected to the fourth plate along its edge. The fourth plate and the fourth tube are insulated. The fourth tube is tubular and adapted to the outer tube. The fourth tube is located on the inner wall of the outer tube. The fourth plate has a second sleeve hole adapted to the inner tube. The fourth plate is fitted over the inner tube through the second sleeve hole. A flow guide hole is located on the fourth plate and on the side of the fourth plate closer to the inner tube. The flow guide hole communicates with the second sleeve hole.
14. A semiconductor device, characterized in that, include: The intake piping device as described in any one of claims 1-13.