A high efficiency tgv pore forming device

Abstract

The utility model discloses a kind of high-efficiency TGV pore-forming devices, including the drive pedestal being arranged above TGV processing table, TGV laser emission head is installed in the front surface of drive pedestal, further include two hanging blocks fixed symmetrically in the two sides surface of TGV laser emission head, the hanging seat fixed symmetrically in the front surface of drive pedestal and position corresponds with hanging block;Further include the quick clamping structure being arranged between hanging seat and hanging block;The utility model improves optimization to TGV pore-forming device in prior art, design hanging block and hanging seat between TGV laser emission head and drive pedestal, and cooperate quick clamping structure, can substantially improve the dismounting convenience between TGV laser emission head and drive pedestal, so that the installation efficiency of TGV laser emission head is more efficient, facilitate subsequent operator to the efficient dismounting maintenance of TGV laser emission head, solve the problem of low maintenance efficiency in later period caused by TGV laser emission head dismounting inconvenience in prior art.

Description

Technical Field

[0001] This utility model belongs to the field of TGV hole forming technology, specifically relating to a high-efficiency TGV hole forming device. Background Technology

[0002] Through-Glass Via (TGV) technology, as a key technology for vertical interconnection between chips in glass interposers, has received widespread attention in recent years. TGV technology creates through-holes in a glass substrate and fills the holes with conductive material to achieve electrical connections between chips or circuits on different layers. Millions of micro-holes can be created on a piece of glass the size of a fingernail to construct intricate and efficient integrated circuit interconnect structures, which is of great significance for improving the performance and integration density of integrated circuits. Currently, laser etching technology has become the mainstream method for TGV hole formation due to its advantages of high precision, high efficiency, and non-contact processing. In laser processing equipment, the TGV laser emitter is a core component, and its performance and stability directly affect the quality and efficiency of hole formation. For example, the existing patent with publication number CN119057273A discloses "a TGV through-hole processing device and processing method, the device including a laser, a beam shaping unit, an optical zoom system, a microlens array, a focusing unit, and a three-dimensional motion platform, utilizing a femtosecond-level ultrafast pulse beam generated by the laser."

[0003] However, in existing TGV drilling devices, the connection between the TGV laser emitter and the drive base mostly adopts traditional methods such as bolt fastening or welding. During the installation process, operators need to use multiple tools and perform multiple operations, such as tightening bolts and welding fixation, which makes the installation efficiency of the TGV laser emitter low. Secondly, when the TGV laser emitter malfunctions or needs maintenance, the disassembly process is also inconvenient due to the complexity of the connection method, which increases the labor intensity of operators and further increases maintenance costs and time costs. Therefore, this utility model proposes an efficient TGV drilling device. Utility Model Content

[0004] The purpose of this invention is to provide a high-efficiency TGV hole-forming device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a high-efficiency TGV drilling device, comprising a drive base disposed above a TGV processing stage, a TGV laser emitter mounted on the front surface of the drive base, a lens disposed at the bottom of the TGV laser emitter, and a glass substrate placed above the TGV processing stage relative to below the lens, and further comprising...

[0006] Two hanging blocks are symmetrically fixed on both sides of the TGV laser transmitter head, and a hanging seat is symmetrically fixed on the front surface of the drive base and its position corresponds to the hanging blocks. The top surface of the hanging seat is provided with a rectangular hanging groove for the hanging blocks to enter.

[0007] It also includes a quick-locking structure set between the mounting bracket and the mounting block.

[0008] Preferably, the quick-locking structure includes a bottom movable plate movably installed on the bottom surface of the hanger, a side movable plate disposed on the side of the hanger and fixed at its bottom end to the bottom movable plate, a transverse locking block fixed on the top side of the side movable plate, and a transverse locking hole opened on the surface of the hanger corresponding to the transverse locking block. The end of the transverse locking block extends through to the inside of the rectangular hanging groove and is inserted into the transverse locking hole.

[0009] Preferably, the quick-positioning structure further includes a rectangular groove formed on the bottom surface of the mounting base and a rectangular slider fixed to the top surface of the bottom movable plate and slidably located within the rectangular groove.

[0010] Preferably, the quick-positioning structure further includes an inner groove formed on the inner wall at the center of the rectangular slide, a spring installed in the inner groove, and a semi-circular telescopic block. The semi-circular telescopic block is movably installed in the inner groove by the spring, and the bottom end of the semi-circular telescopic block pops out to the inner side of the rectangular slide. The rectangular slider is located on one side of the bottom end of the semi-circular telescopic block.

[0011] Preferably, the top end of the spring is fixed to the inner wall of the top end of the inner groove, and the bottom end of the spring is fixed to the semi-circular telescopic block.

[0012] Preferably, the outer surface of the hanger has a side hole for the transverse locking block to pass through and move, and the side hole communicates with the rectangular hanging groove.

[0013] Preferably, the inner wall of the bottom end of the rectangular hanging groove is also equipped with a pressing pad, and the pressing pad is in close contact with the hanging block.

[0014] Preferably, the interior of the abutting pad has an elliptical deformation cavity.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: By improving and optimizing the TGV hole-forming device in the prior art, this utility model designs a hanging block and a hanging seat between the TGV laser emitter and the driving base, and cooperates with a quick-locking structure, which can greatly improve the ease of disassembly and assembly between the TGV laser emitter and the driving base, making the installation efficiency of the TGV laser emitter more efficient, and facilitating the efficient disassembly, assembly and maintenance of the TGV laser emitter by subsequent operators. This solves the problem of inconvenient disassembly and assembly of the TGV laser emitter in the prior art, which leads to low maintenance efficiency in the later stage. Attached Figure Description

[0016] Figure 1This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This utility model Figure 1 A magnified view of a portion of region A in the middle;

[0018] Figure 3 This is a cross-sectional view of the quick-positioning structure of this utility model;

[0019] Figure 4 This utility model Figure 3 A magnified view of a portion of region B in the middle;

[0020] In the diagram: 1. Drive base; 11. Hanger; 111. Rectangular hanging groove; 112. Anti-locking pad; 2. TGV laser emitter; 21. Hanging block; 3. Lens; 4. Glass substrate; 5. TGV processing table; 7. Quick-positioning structure; 71. Side movable plate; 72. Lateral locking block; 73. Lateral locking hole; 74. Bottom movable plate; 75. Rectangular slider; 76. Rectangular sliding groove; 77. Inner groove; 78. Spring; 79. Semi-circular telescopic block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example 1

[0023] Please see Figures 1 to 4 This is the first embodiment of the present invention, which provides a technical solution: a high-efficiency TGV drilling device, including a drive base 1 disposed above a TGV processing stage 5, a TGV laser emitter 2 mounted on the front surface of the drive base 1, and a lens 3 disposed at the bottom of the TGV laser emitter 2. A glass substrate 4 is placed above the TGV processing stage 5 relative to the bottom of the lens 3. The above structures are all prior art. For the specific structural principle, please refer to the prior art patent with publication number CN119057273A, which will not be elaborated here. Simply put, the lens 3 at the bottom of the TGV laser emitter 2 emits laser pulses to the glass substrate 4, thereby creating an opening on the surface of the glass substrate 4.

[0024] Two hanging blocks 21 are symmetrically fixed on both sides of the TGV laser emitter 2, and a hanging seat 11 is symmetrically welded and fixed on the front surface of the drive base 1 and its position corresponds to the hanging blocks 21. The top surface of the hanging seat 11 is provided with a rectangular hanging groove 111 for the hanging blocks 21 to enter, so that after the hanging blocks 21 slide into the rectangular hanging groove 111, the TGV laser emitter 2 can be directly hung on the front surface of the drive base 1.

[0025] It also includes a quick-locking structure 7 set between the mounting bracket 11 and the mounting block 21, which is used to quickly and stably limit the mounting block 21 and the TGV laser transmitter 2. This not only ensures the installation stability of the TGV laser transmitter 2, but also facilitates the efficient and rapid disassembly and assembly of the TGV laser transmitter 2 in the future, thereby improving the initial installation efficiency of the TGV laser transmitter 2 and the subsequent disassembly and maintenance efficiency of the TGV laser transmitter 2.

[0026] In this embodiment, preferably, the quick-locking structure 7 includes a bottom movable plate 74 movably mounted on the bottom surface of the hanger 11, a side movable plate 71 disposed on the side of the hanger 11 and fixed at its bottom end to the bottom movable plate 74, a transverse locking block 72 welded and fixed to the top side of the side movable plate 71, and a transverse locking hole 73 opened on the surface of the hanger 21 corresponding to the transverse locking block 72. The end of the transverse locking block 72 penetrates into the inner side of the rectangular hanging groove 111 and is inserted into the transverse locking hole 73, which can realize the stable positioning of the hanger 21 and the TGV laser emitter 2, and ensure the installation stability of the TGV laser emitter 2.

[0027] In this embodiment, preferably, the quick-locking structure 7 further includes a rectangular groove 76 formed on the bottom surface of the bracket 11 and a rectangular slider 75 fixed to the top surface of the bottom movable plate 74 and slidably located within the rectangular groove 76, so that the bottom movable plate 74 can slide stably on the bottom surface of the bracket 11, and when the bottom movable plate 74 slides laterally, the lateral locking block 72 will also slide along with it, while playing a guiding and supporting role for the side movable plate 71 and the bottom movable plate 74, preventing the side movable plate 71 and the bottom movable plate 74 from falling vertically.

[0028] In this embodiment, preferably, the quick-locking structure 7 further includes an inner groove 77 formed on the inner wall of the center of the rectangular slide 76, a spring 78 installed in the inner groove 77, and a semi-circular telescopic block 79. The semi-circular telescopic block 79 is movably installed in the inner groove 77 by the spring 78, and the bottom end of the semi-circular telescopic block 79 pops out to the inner side of the rectangular slide 76. The rectangular slider 75 is located on one side of the bottom end of the semi-circular telescopic block 79. The popped-out semi-circular telescopic block 79 can block and limit the rectangular slider 75, preventing the rectangular slider 75 and the bottom movable plate 74 from moving laterally on their own during daily use. When it is necessary to remove the TGV laser emitter 2 from the drive base 1 for maintenance, simply pull the side movable plate 71 to the side, so that the lateral locking block 72 moves the rectangular slider 75 laterally, and the rectangular slider 75 moves laterally. The slider 75 gradually pushes the bottom end of the semi-circular telescopic block 79 into the inner groove 77, compressing the spring 78 until the rectangular slider 75 slides past the semi-circular telescopic block 79 to the other end of the rectangular slide groove 76. At this time, the bottom end of the semi-circular telescopic block 79 will pop out again to limit the sliding of the rectangular slider 75. At this time, the end of the horizontal locking block 72 has slid out from the horizontal locking hole 73, so it no longer limits the TGV laser emitter 2 and the hanging block 21. At this time, the TGV laser emitter 2 is lifted, so that the hanging block 21 is removed from the top opening of the rectangular hanging groove 111. This allows for quick disassembly and maintenance of the TGV laser emitter 2, making the disassembly and maintenance of the TGV laser emitter 2 more efficient and solving the problem of low disassembly and maintenance efficiency of the TGV laser emitter 2 in the original device.

[0029] In this embodiment, preferably, the top end of the spring 78 is fixed to the top inner wall of the inner groove 77, and the bottom end of the spring 78 is fixed to the semi-circular telescopic block 79.

[0030] In this embodiment, preferably, the outer surface of the hanger 11 is provided with a side hole for the transverse locking block 72 to pass through and move, and the side hole communicates with the rectangular hanging groove 111.

[0031] Example 2

[0032] Please see Figures 1 to 4 This is the second embodiment of the present invention. This embodiment is based on the previous embodiment, but the difference is that a pressing pad 112 is also installed on the inner wall of the bottom end of the rectangular hanging groove 111, and the pressing pad 112 is in close contact with the hanging block 21, which can press the hanging block 21 to ensure the installation stability of the hanging block 21 and prevent loosening.

[0033] In this embodiment, preferably, the inner part of the pressing pad 112 is provided with an elliptical deformation cavity. The pressing pad 112 is made of rubber material. The design of the elliptical cavity makes the pressing pad 112 easy to undergo elastic deformation when squeezed, thereby facilitating the squeezing of the pressing pad 112 when the hanging block 21 is installed.

[0034] Although embodiments of the present invention have been shown and described (see the detailed description above), it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency TGV drilling apparatus, comprising a drive base (1) disposed above a TGV processing stage (5), a TGV laser emitter (2) mounted on the front surface of the drive base (1), and a lens (3) disposed at the bottom end of the TGV laser emitter (2), wherein a glass substrate (4) is placed above the TGV processing stage (5) relative to the bottom of the lens (3), characterized in that: Also includes Two hanging blocks (21) are symmetrically fixed on both sides of the TGV laser transmitter (2), and a hanging seat (11) is symmetrically fixed on the front surface of the drive base (1) and its position corresponds to the hanging blocks (21). The top surface of the hanging seat (11) is provided with a rectangular hanging groove (111) for the hanging blocks (21) to enter. It also includes a quick-release mechanism (7) set between the mounting bracket (11) and the mounting block (21).

2. The high-efficiency TGV drilling device according to claim 1, characterized in that: The quick-locking structure (7) includes a bottom movable plate (74) movably installed on the bottom surface of the hanger (11), a side movable plate (71) set on the side of the hanger (11) and fixed at the bottom end to the bottom movable plate (74), a transverse locking block (72) fixed on the top side of the side movable plate (71), and a transverse locking hole (73) opened on the surface of the hanger (21) corresponding to the transverse locking block (72). The end of the transverse locking block (72) passes through the inner side of the rectangular hanging groove (111) and is inserted into the transverse locking hole (73).

3. The high-efficiency TGV drilling device according to claim 2, characterized in that: The quick-positioning structure (7) also includes a rectangular groove (76) formed on the bottom surface of the mounting base (11) and a rectangular slider (75) fixed on the top surface of the bottom movable plate (74) and slidably located in the rectangular groove (76).

4. The high-efficiency TGV drilling device according to claim 3, characterized in that: The quick-locking structure (7) also includes an inner groove (77) formed on the inner wall of the center of the rectangular slide (76), a spring (78) installed in the inner groove (77), and a semi-circular telescopic block (79). The semi-circular telescopic block (79) is movably installed in the inner groove (77) by the spring (78), and the bottom end of the semi-circular telescopic block (79) pops out to the inner side of the rectangular slide (76). The rectangular slider (75) is located on one side of the bottom end of the semi-circular telescopic block (79).

5. The high-efficiency TGV drilling apparatus according to claim 4, characterized in that: The top end of the spring (78) is fixed to the inner wall of the top end of the inner groove (77), and the bottom end of the spring (78) is fixed to the semi-circular telescopic block (79).

6. The high-efficiency TGV drilling apparatus according to claim 4, characterized in that: The outer surface of the bracket (11) is provided with a side hole for the transverse locking block (72) to pass through and move, and the side hole is connected to the rectangular hanging groove (111).

7. The high-efficiency TGV drilling apparatus according to claim 1, characterized in that: The inner wall of the bottom end of the rectangular hanging groove (111) is also equipped with a pressing pad (112), and the pressing pad (112) is in close contact with the hanging block (21).

8. The high-efficiency TGV drilling apparatus according to claim 7, characterized in that: The interior of the pressing pad (112) has an elliptical deformation cavity.

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