Precise motion platform and testing device

Abstract

This utility model relates to a precision motion platform and testing equipment. The precision motion platform includes a base, a first worktable, and a second worktable arranged side-by-side along the X-direction on the base. A wafer carrier for carrying a device under test (DUT) can be mounted on both the first and second worktables. When the first and second worktables are respectively located at a first origin and a second origin, the DUT can be loaded onto their respective wafer carriers. After loading, the first worktable moves to the testing position for testing; after the DUT is tested, the first worktable returns to the first origin position, while the second worktable moves to the testing position for testing. The alternating operation of the first and second worktables allows the DUT to be alternately delivered to the testing position for testing, thereby shortening the testing waiting time. Furthermore, an anti-collision sensor effectively prevents collisions between the first and second worktables. Therefore, the aforementioned precision motion platform and testing equipment can significantly improve efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a precision motion platform and testing equipment. Background Technology

[0002] As a core subsystem of semiconductor testing equipment, the performance of a precision motion platform directly determines the testing efficiency and reliability of the equipment. Precision motion platforms must meet stringent requirements such as sub-micron positioning accuracy, high dynamic response, high operating speed, and ultra-smooth motion, and are widely used in the motion actuators of wafer and unpackaged chip (bare die) testing equipment. Currently, common precision motion platforms typically employ a single-stage design, resulting in long waiting times during testing and reducing the overall efficiency of the equipment. Utility Model Content

[0003] Therefore, it is necessary to provide a precision motion platform and testing equipment that can improve efficiency in response to the above problems.

[0004] A precision motion platform includes a base, a first worktable and a second worktable arranged side-by-side along the X direction on the base, both of which are capable of sliding relative to the base along the X and Y directions. The base has a test position, a first origin position and a second origin position located on both sides of the test position along the X direction. The first worktable is capable of reciprocating between the first origin position and the test position along the X direction, and the second worktable is capable of reciprocating between the second origin position and the test position along the X direction. At least one of the first worktable and the second worktable is provided with an anti-collision sensor, and the anti-collision sensor is triggered when the distance between the first worktable and the second worktable is less than a threshold value.

[0005] In one embodiment, the anti-collision sensor is provided on both the first workbench and the second workbench.

[0006] In one embodiment, the base is provided with an X-axis linear motor and an X-axis linear guide extending along the X direction. The first worktable and the second worktable are slidably mounted on the X-axis linear guide via two mounting seats and connected to the corresponding X-axis linear motor. Each mounting seat is provided with a Y-axis linear motor and a Y-axis linear guide extending along the Y direction. The first worktable and the second worktable are slidably mounted on the Y-axis linear guide on the corresponding mounting seat and connected to the Y-axis linear motor.

[0007] In one embodiment, the X-axis linear guide rail includes a plurality of guide rail segments arranged sequentially along the X direction, and there is an expansion gap between two adjacent guide rail segments.

[0008] In one embodiment, the precision motion platform further includes a cooling mechanism for cooling the X-axis linear motor and the Y-axis linear motor.

[0009] In one embodiment, the cooling mechanism includes a heat sink and a cooling fan. The heat sink has cooling channels formed inside and is mounted on the movers of the X-axis linear motor and the Y-axis linear motor. The air outlet of the cooling fan is oriented towards the X-axis linear motor and the Y-axis linear motor.

[0010] In one embodiment, the base is provided with a first X-axis limiting block and a second X-axis limiting block at both ends along the X direction, and the two mounting seats can slide in opposite directions along the X direction to abut against the first X-axis limiting block and the second X-axis limiting block respectively, so that the first worktable and the second worktable can be moved to the first X-axis limit position and the second X-axis limit position respectively.

[0011] In one embodiment, the base is provided with a first X-axis position sensor and a second X-axis position sensor at both ends along the X direction; the first X-axis position sensor includes a first origin position sensor and a first limit position sensor, which can be triggered when the first worktable moves to the first origin position and the first X-axis limit position, respectively; the second X-axis position sensor includes a second origin position sensor and a second limit position sensor, which can be triggered when the second worktable moves to the second origin position and the second X-axis limit position, respectively.

[0012] In one embodiment, the precision motion platform further includes an X-axis grating ruler and a Y-axis grating ruler. The X-axis grating ruler is capable of measuring the movement distance of the first worktable and the second worktable relative to the first origin position and the second origin position along the X direction, respectively. The Y-axis grating ruler is capable of measuring the movement distance of the first worktable and the second worktable relative to the first origin position and the second origin position along the Y direction, respectively.

[0013] A testing device, characterized in that it includes a precision motion platform as described in any of the preferred embodiments above.

[0014] The aforementioned precision motion platform and testing equipment can have wafer carriers mounted on both the first and second worktables to support the devices under test (DUTs). When the first and second worktables are located at the first and second origin positions respectively, the DUTs can be loaded onto their respective carriers. After loading, the first worktable moves to the testing position for testing; after testing, the first worktable returns to the first origin position, while the second worktable moves to the testing position for testing. The alternating operation of the first and second worktables allows for the alternate delivery of the DUTs to the testing positions, thereby shortening the testing wait time. Furthermore, anti-collision sensors effectively prevent collisions between the first and second worktables. Therefore, the aforementioned precision motion platform and testing equipment significantly improves efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of the precision motion platform in one embodiment of the present invention;

[0017] Figure 2 for Figure 1 A schematic diagram of the precision motion platform from another angle;

[0018] Figure 3 for Figure 1 A schematic diagram of another working state of the precision motion platform shown;

[0019] Figure 4 for Figure 3 An enlarged schematic diagram of part A in the precision motion platform shown;

[0020] Figure 5 for Figure 3 An enlarged schematic diagram of part B in the precision motion platform shown;

[0021] Figure 6 for Figure 3 The diagram shown is a precision motion platform with the first and second worktables omitted. Detailed Implementation

[0022] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0023] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0028] Please see Figure 1 This utility model provides a precision motion platform 10. Furthermore, this utility model also provides a testing device. The testing device includes the precision motion platform 10.

[0029] The aforementioned testing equipment is generally used for testing semiconductor devices, such as wafers and bare chips. This equipment typically also includes a loading device (not shown) and a testing module (not shown), on which a test board is mounted. During the testing process, the precision motion platform 10 moves the device under test (DUT) to the working range of the testing module and aligns it with the test board. The DUT is then docked with the test board to perform the testing.

[0030] Please refer to the following: Figure 2 and Figure 3 In one embodiment of the present invention, the precision motion platform 10 includes a base 11, a first worktable 12 and a second worktable 13.

[0031] The base 11 provides support, and both the first worktable 12 and the second worktable 13 are mounted on it. To ensure high motion accuracy and anti-interference performance of the precision motion platform 10, the base 11 requires high stability. Specifically, in this embodiment, the base 11 is a marble platform. Compared to castings, marble has a low coefficient of thermal expansion, high hardness, high processing precision, and good vibration resistance, effectively isolating external interference and providing a stable and reliable foundation support for the precision motion platform 10.

[0032] The shape of the base 11 can be customized according to the actual application scenario, and is usually rectangular. In addition, the bottom of the base 11 is equipped with casters 116 and feet 117. Due to the significant weight of the precision motion platform 10, casters 116 are provided to facilitate its overall movement. Feet 117 support the base 11 and can adjust its level. Specifically, each foot 117 can be individually extended or retracted via electric or hydraulic drive to achieve support and leveling.

[0033] The first worktable 12 and the second worktable 13 generally adopt the same structure and can both be made of rectangular metal plates. A wafer stage (not shown) can be mounted on both the first worktable 12 and the second worktable 13, which can hold the device under test. The first worktable 12 and the second worktable 13 are arranged side-by-side on the base 11 along the X-direction, and both the first worktable 12 and the second worktable 13 can slide relative to the base 11 along the X and Y directions. The X and Y directions are generally perpendicular to each other.

[0034] Furthermore, the base 11 has a test position, a first origin position, and a second origin position, located on either side of the test position along the X direction. The first worktable 12 can reciprocate between the first origin position and the test position along the X direction, and the second worktable 13 can reciprocate between the second origin position and the test position along the X direction. The test position corresponds to the test module. When the first worktable 12 and the second worktable 13 move to the test position, the device under test (DUT) on them can enter the working range of the test module. Then, by fine-tuning in the X and Y directions, the DUT can be aligned with the test board of the test module.

[0035] When the first worktable 12 and the second worktable 13 move to the first origin position and the second origin position respectively, the device under test (DUT) can be loaded onto their respective carriers via the loading device. During normal test execution, after loading, the first worktable 12 moves to the test position for testing; after the DUT on the first worktable 12 has been tested, the first worktable 12 returns to the first origin position, while the second worktable 13 moves to the test position for testing. The alternating operation of the first worktable 12 and the second worktable 13 allows the DUT to be alternately delivered to the test position for testing, thereby shortening the testing waiting time.

[0036] In this embodiment, the precision motion platform 10 further includes an X-axis grating ruler 114 and a Y-axis grating ruler 115. The X-axis grating ruler 114 can measure the movement distance of the first worktable 12 and the second worktable 13 relative to the first origin position and the second origin position along the X direction, respectively. The Y-axis grating ruler 115 can measure the movement distance of the first worktable 12 and the second worktable 13 relative to the first origin position and the second origin position along the Y direction, respectively.

[0037] Specifically, two X-axis grating rulers 114 are generally provided to measure the movement distance of the first worktable 12 and the second worktable 13 along the X direction, respectively; two Y-axis grating rulers 115 are also generally provided to measure the movement distance of the first worktable 12 and the second worktable 13 along the Y direction, respectively. By detecting and providing feedback on the movement distance of the first worktable 12 and the second worktable 13 through the X-axis grating rulers 114 and the Y-axis grating rulers 115, closed-loop control of the movement process of the first worktable 12 and the second worktable 13 can be achieved, thereby ensuring that the motion accuracy of the precision motion platform 10 meets the requirements.

[0038] At least one of the first worktable 12 and the second worktable 13 is equipped with an anti-collision sensor 14, which is triggered when the distance between the first worktable 12 and the second worktable 13 is less than a threshold. This threshold represents the minimum distance at which the first worktable 12 and the second worktable 13 can approach each other; if the distance is less than this, a collision is likely to occur between the first worktable 12 and the second worktable 13. When the anti-collision sensor 14 is triggered, it indicates that the distance between the first worktable 12 and the second worktable 13 is too small, and the precision motion platform 10 can be controlled to stop urgently, thereby preventing a collision between the first worktable 12 and the second worktable 13.

[0039] Specifically, in this embodiment, both the first worktable 12 and the second worktable 13 are equipped with anti-collision sensors 14. When one of the two anti-collision sensors 14 is triggered, the precision motion platform 10 can be controlled to stop in an emergency. Moreover, when one anti-collision sensor 14 fails, the other anti-collision sensor 14 can still work normally, thus improving the reliability of the anti-collision warning.

[0040] When the model of the device being tested changes, the test board on the test module also needs to be replaced. The card replacement operation is generally performed by the automatic card replacement module. The precision motion platform 10 moves the automatic card replacement module to below the test module and aligns it. The specific process is as follows:

[0041] First, the automatic card changing module is placed on the second workbench 13, while the first workbench 12 moves to the first origin position and remains stationary. Next, the second workbench 13 moves the automatic card changing module to the test position. The second workbench 13 adjusts the position of the automatic card changing module by moving along the X direction to align it with the test module. At this point, the automatic card changing module can replace the test card for the test module. Finally, the second workbench 13 returns to the second origin position, and the automatic card changing process ends. During the card changing process, the second workbench 13 moves towards the first workbench 12. To prevent collisions between the first workbench 12 and the second workbench 13, when the anti-collision sensor 14 sends a trigger signal, it indicates that the second workbench 13 has reached its limit position and must be stopped immediately to prevent a collision.

[0042] Specifically, in this embodiment, an X-axis linear motor 15 and an X-axis linear guide rail 16 extending along the X direction are provided on the base 11. The first worktable 12 and the second worktable 13 are slidably mounted on the X-axis linear guide rail 16 through two mounting seats 17 and are connected to the corresponding X-axis linear motor 15.

[0043] At least two X-axis linear motors 15 are provided, each capable of driving the mounting bases 17 of the first worktable 12 and the second worktable 13 to slide along the X-axis linear guide rails 16, thereby causing the first worktable 12 and the second worktable 13 to slide in the X direction. Specifically, multiple X-axis linear guide rails 16 are generally provided, and each mounting base 17 can be simultaneously mounted on multiple X-axis linear guide rails 16 via a slider. In this way, the stability of the mounting base 17 is significantly improved.

[0044] The X-axis linear guide 16 is relatively long, allowing the first worktable 12 and the second worktable 13 to have a large travel distance in the X direction. Specifically, in this embodiment, the X-axis linear guide 16 includes multiple guide rail segments arranged sequentially along the X direction, with expansion gaps between adjacent guide rail segments. In other words, the X-axis linear guide 16 is constructed using a multi-segment splicing method, with each individual guide rail segment being relatively short. The expansion gaps provide space for the X-axis linear guide 16 to expand and contract, preventing it from warping due to heat during high and low temperature cycling, thus ensuring the accuracy of the movement of the first worktable 12 and the second worktable 13 in the X direction.

[0045] Furthermore, each mounting base 17 is equipped with a Y-axis linear motor 18 and a Y-axis linear guide rail 19 extending along the Y direction. The first worktable 12 and the second worktable 13 are slidably mounted on the Y-axis linear guide rail 19 on the corresponding mounting base 17 and connected to the Y-axis linear motor 18. The first worktable 12 and the second worktable 13 can be slidably mounted on the corresponding Y-axis linear guide rail 19 via sliders, and the Y-axis linear motor 18 can drive the corresponding first worktable 12 and second worktable 13 to slide along the Y direction.

[0046] Both the first worktable 12 and the second worktable 13 employ linear motors and linear guides to move in the X and Y directions, with large strokes in both directions. Furthermore, the high precision of the linear motors and guides ensures high motion accuracy for both the first worktable 12 and the second worktable 13.

[0047] Please refer to the following: Figure 6In this embodiment, the precision motion platform 10 also includes a cooling mechanism for cooling the X-axis linear motor 15 and the Y-axis linear motor 18. The X-axis linear motor 15 and the Y-axis linear motor 18 generate significant heat during high-speed operation, which can easily lead to overheating. The cooling mechanism accelerates heat dissipation from the X-axis linear motor 15 and the Y-axis linear motor 18, preventing thermal deformation of surrounding mechanical parts due to overheating. This avoids affecting the measurement accuracy of the X-axis grating ruler 114 and the Y-axis grating ruler 115 due to thermal deformation of mechanical parts, thereby ensuring the repeatability and positioning accuracy of the precision motion platform 10.

[0048] Furthermore, in this embodiment, the cooling mechanism includes a heat sink 120 and a cooling fan 121. The heat sink 120 has a cooling channel formed inside and is mounted on the movers of the X-axis linear motor 15 and the Y-axis linear motor 18. The air outlet of the cooling fan 121 is arranged facing the X-axis linear motor 15 and the Y-axis linear motor 18.

[0049] Specifically, compressed air can be introduced into the heat sink 120. When the compressed air flows through the cooling channel, it can exchange heat with the movers of the X-axis linear motor 15 and the Y-axis linear motor 18, thereby quickly reducing the temperature of the movers. The cooling fan 121 can accelerate the airflow around the X-axis linear motor 15 and the Y-axis linear motor 18, thereby quickly removing heat.

[0050] Please refer to it again. Figure 1 and Figure 2 In this embodiment, the base 11 is provided with a first X-axis limiting block 110 and a second X-axis limiting block 111 at both ends along the X direction. The two mounting seats 17 can slide in opposite directions along the X direction to abut against the first X-axis limiting block 110 and the second X-axis limiting block 111 respectively, so that the first worktable 12 and the second worktable 13 can move to the first X-axis limit position and the second X-axis limit position respectively.

[0051] The first X-axis limiting block 110 and the second X-axis limiting block 111 can adopt the same structure and can be fixed to the surface of the base 11 by means of threaded fastening or other methods. The first X-axis limiting block 110 and the second X-axis limiting block 111 achieve limiting through hard contact, which can prevent the first worktable 12 and the second worktable 13 from going out of the X-axis linear guide rail 16. The first X-axis limit position indicates the farthest position that the first worktable 12 can be away from the test position, and the second X-axis limit position indicates the farthest position that the second worktable 13 can be away from the test position.

[0052] Furthermore, a first X-axis position sensor 118 and a second X-axis position sensor 119 are provided at both ends of the base 11 along the X direction. The first X-axis position sensor 118 includes a first origin position sensor and a first limit position sensor, which can be triggered when the first worktable 12 moves to the first origin position and the first X-axis limit position, respectively. The second X-axis position sensor 119 includes a second origin position sensor and a second limit position sensor, which can be triggered when the second worktable 13 moves to the second origin position and the second X-axis limit position, respectively.

[0053] The first origin position sensor, the first extreme position sensor, the second origin position sensor, and the second extreme position sensor can all use the same sensor, differing only in their installation positions. By setting the first X-axis position sensor 118 and the second X-axis position sensor 119, the positions of the first worktable 12 and the second worktable 13 can be monitored in real time, thereby enabling control of their movements to prevent collisions.

[0054] In addition, please refer to the following: Figure 4 and Figure 5 In this embodiment, a first Y-axis limiting block 112 and a second Y-axis limiting block 113 are respectively provided on the two mounting bases 17. The first worktable 12 can slide along the Y direction to abut against the first Y-axis limiting block 112, and the second worktable 13 can slide along the Y direction to abut against the second Y-axis limiting block 113.

[0055] At least two first Y-axis limiting blocks 112 are provided and spaced apart at both ends of the mounting base 17 along the Y direction. The first worktable 12 can slide along the Y direction to abut against the first Y-axis limiting blocks 112 at both ends, and the first Y-axis limiting blocks 112 can prevent the first worktable 12 from going out of the Y-axis linear guide rail 19. Similarly, at least two second Y-axis limiting blocks 113 are provided and spaced apart at both ends of the mounting base 17 along the Y direction. The second worktable 13 can slide along the Y direction to abut against the second Y-axis limiting blocks 113 at both ends, and the second Y-axis limiting blocks 113 can prevent the second worktable 13 from going out of the Y-axis linear guide rail 19.

[0056] The aforementioned precision motion platform 10 and testing equipment can each be equipped with a wafer carrier for carrying the device under test (DUT). When the first worktable 12 and the second worktable 13 are respectively located at the first origin position and the second origin position, the DUT can be loaded onto their respective wafer carriers. After loading, the first worktable 12 moves to the testing position for testing; after the DUT is tested, the first worktable 12 returns to the first origin position, while the second worktable 13 moves to the testing position for testing. The alternating operation of the first worktable 12 and the second worktable 13 can alternately deliver the DUT to the testing position for testing, thereby shortening the testing waiting time. Moreover, the anti-collision sensor 14 can effectively prevent collisions between the first worktable 12 and the second worktable 13. Therefore, the aforementioned precision motion platform 10 and testing equipment can significantly improve efficiency.

[0057] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0058] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A precision motion platform (10), characterized in that, The system includes a base (11), a first worktable (12) and a second worktable (13) arranged side-by-side on the base (11) along the X direction. Both the first worktable (12) and the second worktable (13) are slidable relative to the base (11) along the X and Y directions. The base (11) has a test position, a first origin position and a second origin position located on both sides of the test position along the X direction. The first worktable (12) is slidable back and forth between the first origin position and the test position along the X direction, and the second worktable (13) is slidable back and forth between the second origin position and the test position along the X direction. At least one of the first worktable (12) and the second worktable (13) is provided with an anti-collision sensor (14), and the anti-collision sensor (14) is triggered when the distance between the first worktable (12) and the second worktable (13) is less than a threshold.

2. The precision motion platform (10) according to claim 1, characterized in that, The anti-collision sensor (14) is provided on both the first workbench (12) and the second workbench (13).

3. The precision motion platform (10) according to claim 1, characterized in that, The base (11) is provided with an X-axis linear motor (15) and an X-axis linear guide rail (16) extending along the X direction. The first worktable (12) and the second worktable (13) are slidably mounted on the X-axis linear guide rail (16) via two mounting seats (17) and connected to the corresponding X-axis linear motor (15). Each mounting seat (17) is provided with a Y-axis linear motor (18) and a Y-axis linear guide rail (19) extending along the Y direction. The first worktable (12) and the second worktable (13) are slidably mounted on the Y-axis linear guide rail (19) on the corresponding mounting seat (17) and connected to the Y-axis linear motor (18).

4. The precision motion platform (10) according to claim 3, characterized in that, The X-axis linear guide (16) includes multiple guide segments arranged sequentially along the X direction, and there is an expansion gap between two adjacent guide segments.

5. The precision motion platform (10) according to claim 3, characterized in that, The precision motion platform (10) also includes a cooling mechanism for cooling the X-axis linear motor (15) and the Y-axis linear motor (18).

6. The precision motion platform (10) according to claim 5, characterized in that, The cooling mechanism includes a heat sink (120) and a cooling fan (121). The heat sink (120) has a cooling channel inside and is mounted on the mover of the X-axis linear motor (15) and the Y-axis linear motor (18). The air outlet of the cooling fan (121) is directed toward the X-axis linear motor (15) and the Y-axis linear motor (18).

7. The precision motion platform (10) according to claim 3, characterized in that, The base (11) is provided with a first X-axis limiting block (110) and a second X-axis limiting block (111) at both ends along the X direction. The two mounting seats (17) can slide back along the X direction to abut against the first X-axis limiting block (110) and the second X-axis limiting block (111) respectively, so that the first worktable (12) and the second worktable (13) can move to the first X-axis limit position and the second X-axis limit position respectively.

8. The precision motion platform (10) according to claim 7, characterized in that, The base (11) is provided with a first X-axis position sensor (118) and a second X-axis position sensor (119) at both ends along the X direction; the first X-axis position sensor (118) includes a first origin position sensor and a first limit position sensor, which can be triggered when the first worktable (12) moves to the first origin position and the first X-axis limit position, respectively; the second X-axis position sensor (119) includes a second origin position sensor and a second limit position sensor, which can be triggered when the second worktable (13) moves to the second origin position and the second X-axis limit position, respectively.

9. The precision motion platform (10) according to claim 1, characterized in that, The precision motion platform (10) further includes an X-axis grating ruler (114) and a Y-axis grating ruler (115). The X-axis grating ruler (114) can measure the movement distance of the first worktable (12) and the second worktable (13) relative to the first origin position and the second origin position along the X direction, respectively. The Y-axis grating ruler (115) can measure the movement distance of the first worktable (12) and the second worktable (13) relative to the first origin position and the second origin position along the Y direction, respectively.

10. A testing device, characterized in that, Includes the precision motion platform (10) as described in any one of claims 1 to 9 above.

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