Anti-shake stage chuck device

Abstract

The utility model relates to the technical field of semiconductor plating equipment, concretely to a kind of anti-shaking stage chuck device, including stage chuck body, stage chuck body includes pedestal and the I-shaped slot of setting on pedestal, pedestal is placed on operation table, horizontal limit rod is equipped on pedestal, and horizontal limit rod is located in the side of I-shaped slot, the two sides of the pedestal are respectively equipped with first fixed rod and second fixed rod, first fixed rod and second fixed rod are detachably connected with operation table, the two sides of horizontal limit rod are respectively equipped with first limit rod and second limit rod, first limit rod and second limit rod are mutually parallel arrangement, first limit rod, second limit rod and horizontal limit rod are collectively enclosed and form the U-shaped constraint space for limiting the U-shaped constraint space of hanger handle shaking, the utility model solves the security risk and production accident risk in wafer loading process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor electroplating equipment technology, specifically to an anti-shaking platform chuck device. Background Technology

[0002] In the 8-inch wafer electroplating process, the mounting bracket needs to be loaded and unloaded via a stage chuck, such as Figure 1 The diagram shows the existing stage chuck structure. The hanger needs to be placed on the stage chuck, and then the operator needs to forcefully rotate a torque wrench to tighten the hanger's outer ring. During the rotation of the torque wrench, because the stage chuck base is placed directly on the workbench without being fixedly connected, the force exerted on the hanger by the operator during rotation is far greater than the friction between the base and the workbench. This causes the base to slide on the workbench, leading to wafer positioning deviations or even dropping. The original structure only has a single horizontal limiting rod above the hanger handle. During the aforementioned processing, while the horizontal limiting rod prevents the hanger handle from moving longitudinally while the operator rotates the torque wrench, it cannot restrain the hanger handle from moving horizontally. The oscillation of the base causes the hanger to rotate on the stage chuck, which is detrimental to wafer positioning. The bottom of the base and the top of the table are relatively smooth, resulting in a low coefficient of friction and thus low frictional force. Therefore, the torque wrench's rotational force easily overcomes this friction, causing the base to slide on the table. These problems not only reduce work efficiency but also increase the risk of production accidents and customer complaints. There is an urgent need to optimize the structure of the existing stage chuck to make it more stable during the electroplating process. Therefore, achieving zero-displacement fixation of the stage chuck and full-degree-of-freedom constraint of the hanger handle, while simultaneously meeting the high precision and safety requirements of semiconductor equipment, is a pressing technical problem that needs to be solved. Utility Model Content

[0003] The purpose of this invention is to provide an anti-shaking platform chuck device to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: an anti-shaking platform chuck device, comprising a platform chuck body, the platform chuck body including a base and an I-shaped slot disposed on the base, the base being placed on an operating table, a horizontal limiting rod being provided on the base, and the horizontal limiting rod being located beside the I-shaped slot, a first fixing rod and a second fixing rod being respectively provided on both sides of the base, the first fixing rod and the second fixing rod being detachably connected to the operating table, the first limiting rod and the second limiting rod being respectively provided on both sides of the horizontal limiting rod, the first limiting rod and the second limiting rod being arranged parallel to each other, the first limiting rod, the second limiting rod and the horizontal limiting rod together forming a U-shaped constraint space for limiting the shaking of the hanger handle.

[0005] Preferably, the length of the first fixing rod and the second fixing rod is 20-30mm, and the thickness of the first fixing rod and the second fixing rod is not less than the thickness of the base.

[0006] Preferably, the distance between the first limiting rod and the second limiting rod is 5-10 mm larger than the width of the hanger handle.

[0007] Preferably, the lengths of the first limiting rod and the second limiting rod are 10-15mm.

[0008] Preferably, the first fixing rod, the second fixing rod, the first limiting rod, and the second limiting rod are made of rigid plastic or engineering plastic.

[0009] Compared with existing technologies, this utility model provides an anti-sway platform chuck device with the following advantages: By setting a first limiting rod and a second limiting rod, the torque wrench is limited during rotation by these rods, preventing the base from sliding on the tabletop. The hanger handle is also confined within the U-shaped space. During rotation, the torque wrench does not deviate due to the constraint space formed by the first, second, and horizontal limiting rods. Through double rigid reinforcement and three-dimensional spatial constraint design, operational safety and stability are significantly improved. The 20-30mm thick fixing rods on both sides of the base, combined with a bolt locking scheme, ensure that the platform chuck's anti-displacement capability meets industrial-grade fixing standards, completely eliminating the risk of slippage. The U-shaped constraint space (formed by the horizontal limiting rod and the two vertical limiting rods on both sides) precisely controls the hanger handle's movement clearance within 5-10mm, effectively suppressing swaying during torque loading. Production line verification shows that the device reduces wafer breakage rate and shortens single loading time. Furthermore, due to the use of engineering plastic components, it ensures mechanical strength while avoiding the risk of metal contamination. Even when the stage chuck is not in use, it will not slip due to operator accidental contact. Attached Figure Description

[0010] Figure 1 A top view of the existing stage chuck;

[0011] Figure 2 This is a top view of the platform chuck of this utility model;

[0012] Figure 3 This is a top view of the hanger involved in this utility model;

[0013] Figure 4 This is a top view of the torque wrench involved in this utility model.

[0014] Explanation of reference numerals in the attached drawings: 1. Platform chuck body; 11. Base; 12. I-shaped slot; 2. Operating table; 3. Horizontal limit rod; 4. First fixing rod; 5. Second fixing rod; 6. Bolt; 7. First limit rod; 8. Second limit rod; 9. Hanger handle; 10. U-shaped constraint space; 13. Hanger; 14. Hanger outer ring; 15. Torque wrench. Detailed Implementation

[0015] The technical solutions of the present utility model will now be described with reference to the accompanying drawings in the embodiments of the present utility model:

[0016] like Figure 1 As shown, in the operation of the chuck of an existing 8-inch wafer electroplating machine, its structure typically only includes a base 11 and an I-shaped slot 12. The base 11 is placed directly on the operating table 2 but is not rigidly fixed. During loading, the operator needs to insert the outer ring 14 of the hanger 13 into the I-shaped slot 12 and tighten the outer ring using a torque wrench 15. However, this structure has significant defects: risk of base slippage: when the operator applies torque to tighten the outer ring 14 of the hanger, the force generated by the torque wrench during rotation will push the unfixed base 11 to slide on the operating table 2, causing wafer positioning inaccuracy or even falling; hazard of hanger handle 9 swinging: the existing device only has a single horizontal limit rod 3 above the hanger handle 9, which cannot restrain the left and right swing of the hanger handle 9 in the horizontal direction. When torque is applied, the hanger handle 9 shakes violently, which not only reduces work efficiency but also easily causes safety accidents such as operator hand injuries. To address the above problems, such as Figure 2-4 As shown, this utility model provides an anti-shaking platform chuck device, including a platform chuck body 1. The platform chuck body 1 includes a base 11 and an I-shaped slot 12 disposed on the base 11. The base 11 is placed on the operating table 2, providing a basic support platform for the entire device.

[0017] A horizontal limiting rod 3 is provided on the base 11, and the horizontal limiting rod 3 is located on one side of the I-shaped slot 12. A first fixing rod 4 and a second fixing rod 5 are respectively provided on both sides of the base 11. The length of the first fixing rod 4 and the second fixing rod 5 is L, which is 20-30mm. The thickness of the first fixing rod 4 and the second fixing rod 5 is not less than the thickness of the base 11 and not higher than the height of the I-shaped slot 12 to prevent obstruction of the rotation of the torque wrench. The first fixing rod 4 and the second fixing rod 5 are detachably connected to the operating table 2 by bolts 6 to completely eliminate the risk of slippage of the base 11.

[0018] The horizontal limiting rod 3 has a first limiting rod 7 and a second limiting rod 8 on each side. The first fixing rod 4, the second fixing rod 5, the first limiting rod 7, and the second limiting rod 8 are made of hard plastic or engineering plastic to prevent metal ion contamination of the wafer and to resist corrosion from electroplating solution. The first limiting rod 7 and the second limiting rod 8 are arranged parallel to each other. The distance between the first limiting rod 7 and the second limiting rod 8 is 5-10mm larger than the width of the hanger handle 9. The length of the first limiting rod 7 and the second limiting rod 8 is D, which is 10-15mm. The first limiting rod 7 and the second limiting rod 8 are detachably connected to the base 11 by bolts 6. The first limiting rod 7, the second limiting rod 8, and the horizontal limiting rod 3 together form a U-shaped constraint space 10 to limit the swaying of the hanger handle 9.

[0019] Operating procedures:

[0020] 1. Installation Phase

[0021] Step 1: Place the base 11 of the chuck body 1 on the preset position of the operating table 2, and adjust the position of the base 11 so that the mounting holes of the first fixing rod 4 and the second fixing rod 5 are precisely aligned with the threaded holes of the operating table 2.

[0022] Step 2: Pass the bolt 6 through the mounting holes of the first fixing rod 4, the operating table 2, and the second fixing rod 5 in sequence, tighten the nut at the bottom of the operating table 2, and apply the rated torque until the base 11 and the operating table 2 form a rigid connection.

[0023] 2. Material feeding stage

[0024] Step 1: The operator holds the hanger 13 and vertically inserts the protrusion of the outer ring 14 of the hanger into the I-shaped slot 12 to complete the mechanical engagement.

[0025] Step 2: The hanger handle 9 is naturally embedded into the U-shaped constraint space 10. The horizontal limit rod 3 presses down on the top of the handle to prevent it from jumping up. The first limit rod 7 and the second limit rod 8 clamp the two sides of the handle (gap 5-10mm) to suppress left and right swinging.

[0026] 3. Tightening stage

[0027] Step 1: The operator engages the torque wrench 15 in the fastening position of the outer ring 14 of the bracket. The operator begins to rotate the torque wrench 15 to tighten the outer ring 14 of the bracket. The force generated by the torque wrench during rotation will be transmitted to the first fixed rod 4 and the second fixed rod 5 through the base 11. Because the bolt is rigidly fixed, the base 11 maintains zero displacement.

[0028] Step 2: During the tightening process, the torque wrench 15 may cause the hanger handle 9 to wobble slightly. However, because it is confined within the U-shaped constraint space 10, the hanger handle 9 will be blocked from swaying left and right by the first limit rod 7 and the second limit rod 8, and will be pressed down by the horizontal limit rod 3 if it tries to jump upwards. This ensures that the hanger 13 and the wafer clamped on it are very stable throughout the tightening process and will not move randomly.

[0029] 4. Material feeding stage

[0030] When wafer plating is complete or needs to be removed, the operator first loosens the torque wrench 15 and removes it. Then, the operator holds the hanger handle 9 with both hands or one hand and pulls it vertically. The hanger handle 9 smoothly disengages along the 5-10mm gap in the U-shaped constraint space 10, and the hanger 13 disengages from the I-shaped slot 12, completing the wafer unloading. Even when the stage chuck is not in use, it will not slip due to accidental contact by the operator.

[0031] The above embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A chuck device for preventing swaying, comprising a chuck body (1), the chuck body (1) comprising a base (11) and an I-shaped slot (12) disposed on the base (11), the base (11) being placed on an operating table (2), and a horizontal limiting rod (3) being provided on the base (11), the horizontal limiting rod (3) being located beside the I-shaped slot (12), characterized in that: The base (11) is provided with a first fixing rod (4) and a second fixing rod (5) on both sides respectively. The first fixing rod (4) and the second fixing rod (5) are detachably connected to the operating table (2). The horizontal limiting rod (3) is provided with a first limiting rod (7) and a second limiting rod (8) on both sides respectively. The first limiting rod (7) and the second limiting rod (8) are arranged parallel to each other. The first limiting rod (7), the second limiting rod (8) and the horizontal limiting rod (3) together form a U-shaped constraint space (10) for limiting the swing of the hanging rack handle (9).

2. The anti-sway platform chuck device according to claim 1, characterized in that: The length of the first fixing rod (4) and the second fixing rod (5) is 20-30mm, and the thickness of the first fixing rod (4) and the second fixing rod (5) is not less than the thickness of the base (11).

3. The anti-sway platform chuck device according to claim 1, characterized in that: The distance between the first limiting rod (7) and the second limiting rod (8) is 5-10 mm larger than the width of the hanger handle (9).

4. The anti-sway platform chuck device according to claim 3, characterized in that: The lengths of the first limiting rod (7) and the second limiting rod (8) are 10-15mm.

5. The anti-sway platform chuck device according to claim 1, characterized in that: The first fixing rod (4), the second fixing rod (5), the first limiting rod (7) and the second limiting rod (8) are made of hard plastic or engineering plastic.

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