A cooling water circulating device suitable for a vacuum pump matched with a cutting device

Abstract

The utility model provides a cooling water circulating equipment suitable for cutting equipment matched vacuum pump, including water storage tank, the one end of water storage tank is connected from the UPW hot water of vacuum pump outflow through pipeline, the both ends of multistage cooling unit are connected on the water outlet end of water storage tank and the water inlet end of pump body through pipeline, reduces the temperature to 22 DEG C from 35 DEG C with UPW hot water, still is installed one -way valve on the pipeline between the water inlet end of pump body and vacuum pump, still is connected with initiative cooling unit between water storage tank and the water inlet end of vacuum pump, carries out manual water inlet to vacuum pump. The utility model provides small -size high -efficient transducer equipment, uses two -section type cooling, first stage uses PCW water high -efficient heat exchange module cooling, second stage uses semiconductor refrigeration module to supplement cooling and accurate temperature control, increases water pump, promotes the circulation of cooling water in the system, and the operation energy consumption is very low, and stable durable, safe and reliable, and cooperates water quality and water temperature monitoring devices, when UPW water quality does not reach the requirement, it is convenient to change water.

Description

Technical Field

[0001] The utility model relates to the fields of electrical engineering and mechanical engineering, especially to the field of water circulation cooling technology, and specifically relates to a cooling water circulation device suitable for a vacuum pump supporting a cutting device. Background Art

[0002] During the operation of the vacuum pump supporting the SG cutting device, a lot of heat is generated and needs to be cooled in real time to maintain a constant temperature to work stably. At present, the vacuum pump uses UPW for cooling and then directly discharges the cooling water, resulting in a large waste of water resources. The working temperature of the SG engineering vacuum pump needs to be maintained below 40°C. By introducing 22°C UPW to absorb the heat generated during the operation of the vacuum pump and discharge it, the discharged UPW temperature is about 35°C.

[0003] However, the 35°C UPW cannot meet the cooling requirement of the vacuum pump and cannot cool the vacuum pump again. The 35°C UPW is directly discharged. The amount of money for the discharged UPW of the SG project is $360,000 per year. In addition, chemical agents are used in the manufacturing process of UPW, and the manufacturing and discharge of UPW increase the burden on the environment.

[0004] Although there are simple similar products on the market, their disadvantages are single functions, ordinary accessory quality, and large volume, which are not suitable for production line sites with high requirements and cannot meet the requirements. According to the requirements, the water quality of UPW cannot meet the requirements after being used for a period of time, and neither the water quality nor the water temperature can be monitored, so the burden on the environment caused by the manufacturing and discharge of UPW cannot be effectively reduced. Summary of the Invention

[0005] In view of the above disadvantages of the prior art, the purpose of the utility model is to provide a cooling water circulation device suitable for a vacuum pump supporting a cutting device to solve the difficulties of the prior art.

[0006] To achieve the above purpose and other related purposes, the utility model provides a cooling water circulation device suitable for a vacuum pump supporting a cutting device, including:

[0007] A water storage tank 1, one end of the water storage tank 1 is connected through a pipeline to the UPW hot water flowing out from the vacuum pump;

[0008] A multi-stage cooling unit, both ends of the multi-stage cooling unit are respectively connected through pipelines to the water outlet end of the water storage tank 1 and the water inlet end of the pump body 2. The UPW hot water flowing out from the vacuum pump is cooled from 35°C to 22°C through the multi-stage cooling unit;

[0009] A check valve 3, a check valve 3 is also installed on the pipeline between the pump body 2 and the water inlet end of the vacuum pump;

[0010] An active cooling unit is also connected between the water storage tank 1 and the water inlet of the vacuum pump. The vacuum pump is manually fed with water through the UPW manual water inlet pipe 4 via the active cooling unit.

[0011] According to the preferred design, an audible and visual alarm and a filter element are also installed.

[0012] According to the preferred embodiment, the multi-stage cooling unit includes a heat exchanger 5 and a semiconductor cooling plate 6, with the water inlet ends of the heat exchanger 5 and the semiconductor cooling plate 6 connected to the water storage tank 1.

[0013] The outlet of heat exchanger 5 is connected to semiconductor cooling plate 6 and pump body 2 respectively;

[0014] The outlet of the semiconductor cooling plate 6 is also connected to the pump body 2.

[0015] According to the preferred scheme, if the temperature of the UPW hot water after passing through the heat exchanger 5 reaches 22°C or below, it flows into the vacuum pump through the pump body 2 for vacuum pump cooling.

[0016] If the water temperature after passing through heat exchanger 5 does not reach 22°C or below, the substandard water flows into semiconductor cooling plate 6 for cooling.

[0017] According to the preferred embodiment, the exchange medium in heat exchanger 5 is PCW circulating water.

[0018] According to the preferred embodiment, the active cooling unit includes:

[0019] UPW manual water inlet pipe 4, one end of UPW manual water inlet pipe 4 is connected to the water inlet of the vacuum pump, and the other end is connected to the water supply pipe 7 of the water storage tank 1;

[0020] Emergency manual valve 8 is installed on the end of the UPW manual water inlet pipe 4 near the water supply pipe 7.

[0021] According to the preferred scheme, a water supply solenoid valve 9 and a circulation flow meter are installed on the water supply pipe 7.

[0022] According to the preferred scheme, a water quality detector and a water level detector are installed inside the water storage tank 1.

[0023] According to the preferred scheme, water quality and water level are monitored, and UPW circulating water is automatically replaced and replenished when the set value is exceeded.

[0024] According to the preferred embodiment, a circulating flow meter is installed on the outlet pipe of the vacuum pump.

[0025] According to the preferred embodiment, temperature probes are installed between the water storage tank 1 and the vacuum pump, and at the outlet of the heat exchanger 5 and the semiconductor refrigeration module.

[0026] According to the preferred embodiment, an overflow port 10 is also installed above the end of the water storage tank 1 that is away from the water inlet.

[0027] This utility model relates to a small and efficient energy conversion device. This cooling device uses a two-stage cooling process. The first stage uses a PCW water high-efficiency heat exchange module for cooling, and the second stage uses a semiconductor refrigeration module for supplemental cooling and precise temperature control. A water pump is added to drive the cooling water to circulate in the system. The operating energy consumption is very low, and it is stable, durable, safe and reliable. In addition, it is equipped with a water quality and water temperature monitoring device, which facilitates water replacement when the UPW water quality does not meet the requirements.

[0028] The preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the present invention. Attached Figure Description

[0029] Figure 1 The diagram shown is a structural schematic of this utility model.

[0030] Label Explanation

[0031] 1. Water storage tank; 2. Pump body; 3. Check valve; 4. UPW manual water inlet pipe; 5. Heat exchanger; 6. Semiconductor cooling plate; 7. Water supply pipe; 8. Emergency manual valve; 9. Water supply solenoid valve; 10. Overflow port. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0033] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this utility model may have fewer components, have other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components shown in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0034] Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the field to which this utility model pertains. The terms "first", "second" and similar terms used in the description and claims of this utility model patent application do not denote any order, quantity or importance, but are only used to distinguish different components. Similarly, terms such as "a" or "an" do not necessarily denote a quantity limitation. Terms such as "comprising" or "including" mean that the elements or items appearing before this term cover the elements or items listed after this term and their equivalents, without excluding other elements or items. Terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as "upper", "lower", "left", "right" are only used to indicate relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0035] The present utility model provides a cooling water circulation device suitable for a vacuum pump supporting a cutting device, which is used in electrical engineering and mechanical engineering. The present utility model does not limit the type of the vacuum pump, but the structure of the cooling water circulation device suitable for the vacuum pump supporting the cutting device is particularly suitable for the vacuum pump used in semiconductor production.

[0036] Generally speaking, the cooling water circulation device suitable for the vacuum pump supporting the cutting device proposed by the present utility model mainly includes a water storage tank 1, a multi-stage cooling unit, a check valve 3, and an active cooling unit. Among them, reference can be made to Figure 1 , which shows the layout relationship of the water storage tank 1, the multi-stage cooling unit, the check valve 3, and the active cooling unit.

[0037] In order to achieve the purpose of recycling UPW and reducing the cost of UPW production, and to solve the problems in the background technology that although there are similar simple products on the market, their disadvantages are single functions, ordinary accessory quality, and large volume, which are not suitable for production line sites with high requirements and cannot meet the requirements. According to the requirements, after UPW is used for a period of time, the water quality does not meet the requirements, and neither the water quality nor the water temperature can be monitored, and the burden on the environment caused by UPW production and emission cannot be effectively reduced. Therefore, in the technical solution provided in this embodiment, a small and efficient energy conversion device is provided. This cooling device uses two-stage cooling. In the first stage, the PCW water high-efficiency heat exchange module is used for cooling, and in the second stage, the semiconductor refrigeration module is used for supplementary cooling and precise temperature control. A water pump is added to promote the circulation of cooling water in the system. The operation energy consumption is very low, and it is stable, durable, safe and reliable; and it is coordinated with the water quality and water temperature monitoring device, which is convenient for changing water when the UPW water quality does not meet the requirements.

[0038] Specifically, as Figure 1As shown, one end of the water storage tank 1 is connected to UPW hot water flowing from the vacuum pump through a pipe, and an overflow port 10 is installed above the end away from the water inlet. Excess liquid is directly discharged through the overflow port 10, and there will be no excessive pressure caused by blockage of the circulating water circuit.

[0039] Next, the outlet of the water storage tank 1 is connected to a multi-stage cooling unit. The multi-stage cooling unit cools the UPW hot water flowing from the vacuum pump from 35°C to 22°C. The cooled liquid is then output to the vacuum pump through the pump body 2 for continuous cooling. A one-way valve 3 is also installed on the pipe between the pump body 2 and the inlet of the vacuum pump to prevent backflow of the liquid output from the vacuum pump 2 and ensure the stability of the liquid circulation. During equipment operation, it can be connected to the equipment and will issue an alarm signal and automatically stop the equipment in case of abnormality.

[0040] As mentioned above, the multi-stage cooling unit includes a heat exchanger 5 and a semiconductor cooling plate 6. In the first stage, a PCW water high-efficiency heat exchange module is used for cooling, and in the second stage, a semiconductor cooling module is used for supplementary cooling and precise temperature control. The exchange medium in the heat exchanger 5 is PCW circulating water, and the flow rate of the PCW water circuit can be manually adjusted. The water inlets of the heat exchanger 5 and the semiconductor cooling plate 6 are connected to the water storage tank 1. The water outlet of the heat exchanger 5 is connected to the semiconductor cooling plate 6 and the pump body 2, respectively. In addition, the water outlet of the semiconductor cooling plate 6 is also connected to the pump body 2. The purpose of this is that if the temperature reaches 22°C or below, the liquid at 22°C flows into the vacuum pump through the pump body 2 for vacuum pump cooling. If the water temperature after passing through the heat exchanger 5 does not reach 22°C or below, the water that does not meet the standard flows into the semiconductor cooling plate 6 for cooling. After the temperature reaches the required level, it flows into the vacuum pump through the pump body 2 to cool the vacuum pump.

[0041] It should be specifically noted that in the event of a malfunction, the system automatically exits the circulation mode and switches to the UPW coolant active cooling mode, directly outputting the cooled liquid without passing through the heat exchanger 5 and the semiconductor cooling plate 6. Alternatively, a manual switching mode can be selected. In this embodiment, an active cooling unit is connected between the water storage tank 1 and the water inlet of the vacuum pump. The active cooling unit uses the UPW manual water inlet pipe 4 to manually supply water to the vacuum pump. Specifically, the active cooling unit includes the UPW manual water inlet pipe 4 and an emergency manual valve 8. One end of the UPW manual water inlet pipe 4 is connected to the water inlet of the vacuum pump, and the other end is connected to the water supply pipe 7 of the water storage tank 1. The emergency manual valve 8 is installed on the end of the UPW manual water inlet pipe 4 near the water supply pipe 7. In use, the heat exchanger 5 and the semiconductor cooling plate 6 are closed, and the emergency manual valve 8 is opened. The UPW liquid enters from the top of the UPW manual water inlet pipe 4, enters from the bottom of the vacuum pump, and exits from the top into the water storage tank 1 to complete the cooling process. A filter element is also installed on the water pipe to filter out residual fine impurities from the UPW and PCW, preventing scale buildup.

[0042] Based on this, in order to achieve intelligent monitoring of the working status, water quality and water level monitoring, and provide active water replenishment function, a water quality detector and a water level detector are installed in the water storage tank 1 to monitor water quality and water level. When the water quality exceeds the set value, the UPW circulating water is automatically replaced and replenished. For this purpose, a water replenishment solenoid valve 9 and a circulation flow meter are also installed on the water replenishment pipe 7. When the water level in the water storage tank 1 is insufficient, the water replenishment solenoid valve 9 is opened to achieve timely replenishment. Continuous small-flow replenishment and regular active replacement of circulating UPW ensure the stability of the UPW liquid flow and quality used for cooling and circulation. The system detects the water quality in the water storage tank. If the water quality is unqualified, the water in the water storage tank 1 is automatically discharged, and qualified UPW enters the water storage tank from the UPW inlet pipe.

[0043] In addition, temperature probes are installed at the outlet of the heat exchanger 5 and the semiconductor refrigeration module between the water storage tank 1 and the vacuum pump. Multiple temperature probes are connected to the intelligent control motherboard to ensure a constant output water temperature. A circulating flow meter is installed on the outlet pipe of the vacuum pump. The circulating water flow meter and temperature detection are used to effectively monitor the working status of the pump, identify potential pump failures in advance and provide early warnings to avoid serious pump failures. The UPW water flow meter can collect usage data, which is convenient for cost analysis.

[0044] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

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