A water baffle suitable for high-temperature end device sealing and a CVD device

Abstract

The utility model discloses a kind of water baffle suitable for high-temperature end equipment sealing and CVD equipment, belong to high-temperature end equipment sealing technical field, water baffle, including sealing cover plate;Sealing cover plate one side to sealing cover plate interior sinking design has sealing surface, for installing sealing ring;The side surface inside of the sealing cover plate around sealing surface is provided with circulating flow channel, and the circulating flow channel is around the outer circumferential side of sealing surface, and the circulating flow channel connects circulating water equipment.The utility model can locally reduce the temperature of sealing cover plate under the action of cooling water in circulating water equipment and circulating flow channel, thereby reduce the temperature of the working environment of rubber sealing ring, improve the sealing performance of rubber sealing ring and prolong service life.

Description

Technical Field

[0001] This utility model relates to the field of sealing technology for high-temperature end equipment, specifically to a water baffle and CVD equipment suitable for sealing high-temperature end equipment. Background Technology

[0002] Existing equipment port sealing structures typically employ O-Ring rubber sealing rings. In high-temperature equipment, such as CVD evaporation equipment, the internal operating temperature can reach 360°C or even higher, and the temperature of the equipment port sealing cover is also very high.

[0003] High temperatures place particularly high demands on the performance of O-Rings. When rubber materials lose elasticity due to heat, their deformation increases, meaning their sealing performance decreases. Ordinary fluororubber and other products exhibit a sharp increase in deformation rate over time at 240℃.

[0004] Existing technologies include sealing rings made of perfluoroether (PFEA). PFEA products consistently maintain a compression set below 50% and retain good elasticity even at high temperatures. However, PFEA sealing rings are very expensive, and their service life is relatively shorter at high temperatures. Therefore, in high-temperature environments, sealing rings inside high-temperature equipment are prone to losing elasticity, leading to a shortened service life—a problem that urgently needs to be addressed. Utility Model Content

[0005] The purpose of this invention is to provide a water baffle plate and CVD equipment suitable for sealing high-temperature end equipment, and to solve the problem that the sealing rings in high-temperature end equipment in the prior art are prone to lose elasticity and have a shorter service life in high-temperature environments.

[0006] To achieve the above objectives, this utility model provides a water baffle suitable for sealing high-temperature equipment, including a sealing cover plate; one side of the sealing cover plate is recessed into the sealing cover plate to form a sealing surface for installing a sealing ring; a circulation channel is provided inside the side of the sealing cover plate surrounding the sealing surface, the circulation channel surrounds the outer periphery of the sealing surface, and the circulation channel is connected to a circulating water device.

[0007] Furthermore, the circulating flow channel includes a first flow channel, a second flow channel, and a third flow channel, wherein the first flow channel is connected to the third flow channel, and the third flow channel is connected to the second flow channel.

[0008] Furthermore, the sealing cover plate has a first drilling port on its first directional side, and a first flow channel extends from the first drilling port along the first direction; the sealing cover plate has a second drilling port on its second directional side, and a second flow channel extends from the second drilling port along the second direction; the sealing cover plate has a third drilling port on its third directional side, and a third flow channel extends from the third drilling port along the third direction.

[0009] Furthermore, the third drilling port is located at the connection between the first flow channel and the third flow channel and / or the connection between the second flow channel and the third flow channel.

[0010] Furthermore, the third drill port is sealed by a sealing block.

[0011] Furthermore, the sealing cover has a square structure, with the first direction and the second direction being parallel and in the same direction, and the third direction being perpendicular to the first direction and the second direction.

[0012] Furthermore, one of the first and second drilling ports is a cooling water inlet and the other is a cooling water outlet. The cooling water inlet and the cooling water outlet are connected to a circulating water device, and the diameters of the cooling water inlet and the cooling water outlet are both larger than the inner diameter of the circulating channel.

[0013] Furthermore, the sealing surface is a circular stepped surface and is centrally located on the sealing cover plate.

[0014] Furthermore, a flange is connected to one side of the sealing cover plate, the flange is recessed into the sealing cover plate, and the outer periphery of the flange completely covers the outer periphery of the sealing surface.

[0015] This utility model also provides a CVD device, including the aforementioned baffle plate suitable for sealing high-temperature end equipment.

[0016] Compared with existing known technologies, the technical solution provided by this utility model has the following beneficial effects:

[0017] This invention relates to a water-blocking plate suitable for sealing high-temperature equipment. The sealing cover plate has a circulating flow channel inside its side, surrounding the sealing surface. This channel is connected to a circulating water system. Cooling water flows around the outer periphery of the sealing surface, i.e., the outer periphery of the rubber sealing ring, under the action of the circulating water system and the circulating flow channel. The cooling water locally lowers the temperature of the sealing cover plate, thereby reducing the working environment temperature of the rubber sealing ring, improving its sealing performance, and extending its service life.

[0018] It is obvious that the elements or features described in the above individual embodiments can be used alone or in combination in other embodiments. Attached Figure Description

[0019] The dimensions and scales in the accompanying drawings do not represent the dimensions and scales of the actual product. The drawings are for illustrative purposes only, and some non-essential elements or features have been omitted for clarity.

[0020] Figure 1 This is a schematic diagram of the structure of the water-baffle plate in an embodiment of this utility model;

[0021] Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure at point A-A'.

[0022] Explanation of reference numerals in the attached figures

[0023] 100. Sealing cover plate; 110. Sealing surface; 120. First drill port; 121. First flow channel; 130. Second drill port; 131. Second flow channel; 140. Third drill port; 141. Third flow channel; 142. Sealing block; 150. Flange. Detailed Implementation

[0024] The present invention will now be described in detail with reference to the accompanying drawings. The embodiments described herein are merely preferred embodiments of the present invention. Those skilled in the art can conceive of other ways to implement the present invention based on the preferred embodiments, and such other ways also fall within the scope of the present invention.

[0025] Reference Figure 1 and Figure 2 This embodiment provides a baffle plate suitable for sealing high-temperature equipment, including a sealing cover plate 100. For example, in a CVD device, the sealing cover plate 100 seals the port of the lower heating plate. A sealing surface 110 is recessed into one side of the sealing cover plate 100 for mounting a sealing ring, typically made of rubber. The outer circumference of the sealing surface 110 is smaller than that of the sealing cover plate 100. A circulation channel is provided inside the side of the sealing cover plate 100 surrounding the sealing surface 110, and this circulation channel is connected to a circulating water system. Cooling water flows around the outer circumference of the sealing surface 110, i.e., around the rubber sealing ring, under the action of the circulating water system and the circulation channel. The cooling water locally lowers the temperature of the sealing cover plate 100, thereby reducing the working temperature of the rubber sealing ring, improving its sealing performance, and extending its service life.

[0026] In some embodiments, such as Figure 1As shown, the circulation channel includes a first channel 121, a second channel 131, and a third channel 141. The first channel 121 is connected to the third channel 141, and the third channel 141 is connected to the second channel 131. The three channels are connected to form a circulation channel surrounding the outer periphery of the sealing surface 110. A first drilling port 120 is provided on the first direction side of the sealing cover plate 100, and the first channel 121 extends from the first drilling port 120 along the first direction. A second drilling port 130 is provided on the second direction side of the sealing cover plate 100, and the second channel 131 extends from the second drilling port 130 along the second direction. A third drilling port 140 is provided on the third direction side of the sealing cover plate 100, and the third channel 141 extends from the third drilling port 140 along the third direction. The first flow channel 121, the second flow channel 131, and the third flow channel 141 are formed by drilling holes at the first drill port 120, the second drill port 130, and the third drill port 140, respectively. This simple drilling process adds cooling circulation channels without requiring redesign or remanufacturing of the sealing cover plate 100 itself, thus reducing manufacturing costs.

[0027] It should be noted that during drilling, the drilling depth is pre-determined based on the required length of the flow channels, and the drilling port needs to be determined on one of the reference surfaces of the sealing cover plate 100. In some embodiments, the third drilling port 140 is located at the connection between the second flow channel 131 and the third flow channel 141. The third flow channel 141 is machined through the third drilling port 140, and the other end of the third flow channel 141 extends to the position of the first flow channel 121, thereby realizing the connection of the three flow channels. It is understood that in some other embodiments, the third drilling port 140 is located at the connection between the first flow channel 121 and the third flow channel 141. Similarly, the connection of the three flow channels can be realized, only the reference surface for drilling is different. Of course, in some other embodiments, holes can be drilled on two opposite reference surfaces of the sealing cover plate 100, and the two third drilling ports 140 can be respectively set at the connection between the first flow channel 121 and the third flow channel 141 and the connection between the second flow channel 131 and the third flow channel 141. When setting two third drilling ports 140, attention should be paid to controlling the machining accuracy to prevent the flow channels on both sides from deviating.

[0028] Understandably, the third drill port 140 needs to be sealed by the sealing block 142 to prevent cooling water from flowing out from the location of the third drill port 140 during operation. The sealing block 142 and the third drill port 140 are sealed by welding, resulting in a strong connection and high sealing performance.

[0029] In some embodiments, such as Figure 1As shown, the sealing cover 100 has a square structure, with the first direction parallel and in the same direction as the second direction, and the third direction perpendicular to both the first and second directions. One of the first drill port 120 and the second drill port 130 is a cooling water inlet, and the other is a cooling water outlet. The cooling water inlet and outlet are connected to a circulating water system to achieve cooling water circulation. Specifically, in this embodiment, the cooling water inlet is located at the second drill port 130, and the cooling water outlet is located at the first drill port 120. The diameters of both the cooling water inlet and outlet are larger than the inner diameter of the circulating flow channel, facilitating the installation of components connecting to the circulating water system at the cooling water inlet and outlet.

[0030] In some embodiments, the sealing surface 110 is a circular stepped surface and is centrally located on the sealing cover plate 100. The circular stepped surface structure facilitates the installation of the sealing ring and provides space for the sealing ring, resulting in a good sealing effect. A flange 150 is connected to one side of the sealing cover plate 100. The flange 150 is recessed into the sealing cover plate 100, and its outer periphery completely covers the outer periphery of the sealing surface 110. The flange 150 mainly functions as a connector, allowing the entire baffle plate to be connected to the equipment at the other end.

[0031] Another aspect of this application provides a CVD apparatus, including the aforementioned baffle plate suitable for sealing high-temperature end equipment.

[0032] In the description of this utility model, it should be noted that the terms "front," "rear," "left," "right," "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The scope of protection of this utility model is defined only by the claims. Thanks to the teachings of this utility model, those skilled in the art will readily recognize that alternative structures to the disclosed structure can be used as feasible alternative implementations, and that the disclosed implementations can be combined to produce new implementations, which also fall within the scope of the appended claims.

Claims

1. A water-retaining plate suitable for sealing high-temperature equipment, comprising a sealing cover plate (100); characterized in that, One side of the sealing cover (100) is recessed into the sealing cover (100) to form a sealing surface (110) for installing a sealing ring; the sealing cover (100) has a circulation channel inside the side of the sealing surface (110), the circulation channel surrounds the outer periphery of the sealing surface (110), and the circulation channel is connected to a circulating water device.

2. A water-baffle plate suitable for sealing high-temperature equipment according to claim 1, characterized in that, The circulation channel includes a first channel (121), a second channel (131) and a third channel (141), wherein the first channel (121) is connected to the third channel (141) and the third channel (141) is connected to the second channel (131).

3. A water-baffle plate suitable for sealing high-temperature equipment according to claim 2, characterized in that, The sealing cover plate (100) has a first drilling port (120) on its first direction side, and a first flow channel (121) extends from the first drilling port (120) along the first direction; the sealing cover plate (100) has a second drilling port (130) on its second direction side, and a second flow channel (131) extends from the second drilling port (130) along the second direction; the sealing cover plate (100) has a third drilling port (140) on its third direction side, and a third flow channel (141) extends from the third drilling port (140) along the third direction.

4. A water-baffle plate suitable for sealing high-temperature equipment according to claim 3, characterized in that, The third borehole port (140) is located at the connection between the first flow channel (121) and the third flow channel (141) and / or at the connection between the second flow channel (131) and the third flow channel (141).

5. A water-baffle plate suitable for sealing high-temperature equipment according to claim 4, characterized in that, The third borehole port (140) is sealed by a sealing block (142).

6. A water-baffle plate suitable for sealing high-temperature equipment according to claim 5, characterized in that, The sealing cover (100) has a square structure, with the first direction and the second direction being parallel and in the same direction, and the third direction being perpendicular to the first direction and the second direction.

7. A water-baffle plate suitable for sealing high-temperature equipment according to claim 5, characterized in that, One of the first drilling port (120) and the second drilling port (130) is a cooling water inlet and the other is a cooling water outlet. The cooling water inlet and the cooling water outlet are connected to a circulating water device. The diameters of the cooling water inlet and the cooling water outlet are both larger than the inner diameter of the circulating channel.

8. A water-baffle plate suitable for sealing high-temperature equipment according to claim 1, characterized in that, The sealing surface (110) is a circular stepped surface and is centrally located on the sealing cover plate (100).

9. A water-baffle plate suitable for sealing high-temperature equipment according to claim 1, characterized in that, A flange (150) is connected to one side of the sealing cover plate (100). The flange (150) is recessed into the sealing cover plate (100), and the outer periphery of the flange (150) completely covers the outer periphery of the sealing surface (110).

10. A CVD device, characterized in that, Includes the water baffle plate suitable for sealing high-temperature end equipment as described in any one of claims 1-9.

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