Auxiliary clamping device for electrostatic chuck maintenance

Abstract

The utility model discloses an auxiliary clamping device for electrostatic chuck maintenance belongs to clamping device technical field, including work panel, bottom support board, the work panel with bottom support board is connected through a plurality of support rod, be equipped with the clamping assembly for clamping electrostatic chuck on the work panel, be equipped with the clamping drive assembly for driving clamping assembly on bottom support board, clamping drive assembly with clamping assembly swing joint. This application can be clamped to electrostatic chuck through the setting clamping assembly, and it is convenient for maintenance personnel to carry out maintenance on the work panel, through setting clamping drive assembly, so that can drive clamping assembly clamping electrostatic chuck, or loosen electrostatic chuck, convenient to use, clamping stable and reliable, improve work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of clamping device technology, and in particular to an auxiliary clamping device for electrostatic chuck repair. Background Technology

[0002] In wafer fabrication, the surface protrusion microstructure, temperature control, and helium leakage of an electrostatic chuck have a significant impact on the flatness and adhesion of the wafers it holds. However, after a period of use, these properties deteriorate considerably, leading to uneven adhesion distribution, erratic surface temperatures, and wafer deformation, thus compromising wafer processing accuracy. Furthermore, electrostatic chucks are expensive, and to reduce production costs, companies often send substandard chucks for repair. Therefore, an auxiliary clamping device capable of quickly holding electrostatic chucks awaiting repair is needed. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide an auxiliary clamping device for electrostatic chuck repair, which can quickly clamp the electrostatic chuck to be repaired and improve work efficiency.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0005] An auxiliary clamping device for electrostatic chuck maintenance includes a working panel and a bottom support plate. The working panel and the bottom support plate are connected by a plurality of support rods. The working panel is provided with a clamping assembly for clamping the electrostatic chuck, and the bottom support plate is provided with a clamping drive assembly for driving the clamping assembly. The clamping drive assembly is movably connected to the clamping assembly.

[0006] Preferably, the clamping assembly includes a first clamping member and a second clamping member, the first clamping member being slidably disposed on one side of the working panel, and the second clamping member being slidably disposed on the other side of the working panel.

[0007] Preferably, the sliding direction of the first clamping member is away from or towards the second clamping member, and the sliding direction of the second clamping member is away from or towards the first clamping member.

[0008] Preferably, the working panel is further slidably provided with a third clamping member and a fourth clamping member, the third clamping member and the fourth clamping member being disposed between the first clamping member and the second clamping member.

[0009] Preferably, the sliding direction of the third clamping member is away from or towards the fourth clamping member, and the sliding direction of the fourth clamping member is away from or towards the third clamping member.

[0010] Preferably, the clamping drive assembly includes a telescopic rod and four connecting rods. The telescopic rod is mounted on the bottom support plate, and a support plate is provided at the telescopic end of the telescopic rod. One end of each of the four connecting rods is movably connected to the support plate, and the other end of each of the four connecting rods is movably connected to the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member, respectively.

[0011] Preferably, the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are all provided with L-shaped grooves for positioning.

[0012] Preferably, the L-shaped groove includes a flexible pad that directly contacts the electrostatic chuck.

[0013] Preferably, the bottom support plate is further provided with several limiting frames, each limiting frame is provided with a counterweight, and the bottom sidewall of the bottom support plate is provided with several support columns.

[0014] The above technical solution has the following beneficial effects:

[0015] This application, by setting up a clamping component, can clamp the electrostatic chuck, making it convenient for maintenance personnel to perform maintenance on the work panel. By setting up a clamping drive component, the electrostatic chuck can be clamped or released by driving the clamping component, which is convenient to use, provides stable and reliable clamping, and improves work efficiency. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of an auxiliary clamping device for electrostatic chuck repair according to the present invention;

[0017] Figure 2 This is another three-dimensional structural diagram of an auxiliary clamping device for electrostatic chuck repair according to the present invention.

[0018] Figure 3 for Figure 2 A magnified structural diagram of A in the middle;

[0019] Figure 4 This is a schematic diagram of the main structure of an auxiliary clamping device for electrostatic chuck repair according to the present invention;

[0020] Figure 5 This is a top view of the auxiliary clamping device for electrostatic chuck repair according to the present invention.

[0021] Figure 6 for Figure 5 A magnified structural diagram of B in the diagram;

[0022] Figure 7 This is a schematic diagram of the main structure of an auxiliary clamping device for electrostatic chuck repair according to the present invention;

[0023] Figure 8 This is a three-dimensional structural diagram of an auxiliary clamping device for electrostatic chuck repair according to the present invention, which clamps an electrostatic chuck.

[0024] Figure 9 This is a cross-sectional enlarged structural schematic diagram of the first clamping component. Detailed Implementation

[0025] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding of this utility model, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0026] refer to Figures 1-9 An auxiliary clamping device for electrostatic chuck maintenance includes a working panel 2 and a bottom support plate 1. The working panel 2 and the bottom support plate 1 are connected by several support rods 3. The working panel 2 is provided with a clamping component for clamping the electrostatic chuck 22. The bottom support plate 1 is provided with a clamping drive component for driving the clamping component. The clamping drive component is movably connected to the clamping component.

[0027] Specifically, the bottom support plate 1 supports the working panel 2 through several support rods 3 and is used to support the clamping drive assembly. There can be four support rods 3, which can form a square structure, that is, the four support rods 3 are located at the four corners of the square structure. The working panel 2 is used to set the clamping assembly. The clamping drive assembly is used to quickly drive the clamping assembly to clamp or release the electrostatic chuck 22 to be repaired, thereby improving the clamping efficiency of the electrostatic chuck 22 to be repaired.

[0028] In some embodiments, the clamping assembly includes a first clamping member 4 and a second clamping member 5, the first clamping member 4 being slidably disposed on one side of the working panel 2 and the second clamping member 5 being slidably disposed on the other side of the working panel 2.

[0029] Specifically, the work panel 2 can be a square structure. The first clamping member 4 and the second clamping member 5 are slidably disposed on the work panel 2. The structure of the first clamping member 4 is the same as that of the second clamping member 5, which is easy to manufacture. The positions of the first clamping member 4 and the second clamping member 5 are changed by sliding on the work panel 2, thereby clamping the electrostatic chuck 22 to be repaired placed on it.

[0030] In some embodiments, the sliding direction of the first clamping member 4 is away from or towards the second clamping member 5, and the sliding direction of the second clamping member 5 is away from or towards the first clamping member 4.

[0031] Specifically, in order to stably and reliably clamp the electrostatic chuck 22 to be repaired, the first clamping member 4 and the second clamping member 5 move in opposite directions. When clamping the electrostatic chuck 22 to be repaired, first hold the electrostatic chuck 22 to be repaired to the corresponding position, and then control the first clamping member 4 and the second clamping member 5 to move closer to each other through the clamping drive assembly to clamp the electrostatic chuck 22 to be repaired. If it is necessary to remove the clamped electrostatic chuck 22 to be repaired, the first clamping member 4 and the second clamping member 5 are separated by controlling the clamping drive assembly, and the electrostatic chuck 22 to be repaired can be removed. The structure is simple and the operation is convenient.

[0032] In some embodiments, the work panel 2 is also slidably provided with a third clamping member 6 and a fourth clamping member 7, the third clamping member 6 and the fourth clamping member 7 being disposed between the first clamping member 4 and the second clamping member 5.

[0033] Specifically, the third clamping member 6 and the fourth clamping member 7 are symmetrically arranged about the line connecting the first clamping member 4 and the second clamping member 5. The first clamping member 4 and the second clamping member 5 are also symmetrically arranged about the line connecting the third clamping member 6 and the fourth clamping member 7. The working panel 2 can be a square plate. After installation, the distances between the first clamping member 4, the second clamping member 5, the third clamping member 6, the fourth clamping member 7 and the center of the square working panel 2 are equal. During clamping, the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 will move towards the center of the working panel 2 for clamping. The first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 are respectively located on the two diagonals of the square working panel 2. The structure of the third clamping member 6 and the fourth clamping member 7 is the same as the structure of the first clamping member 4, which is convenient for manufacturing.

[0034] In some embodiments, the sliding direction of the third clamping member 6 is away from or towards the fourth clamping member 7, and the sliding direction of the fourth clamping member 7 is away from or towards the third clamping member 6.

[0035] Specifically, the clamping methods of the third clamping member 6 and the fourth clamping member 7 are the same as those of the first clamping member 4 and the second clamping member 5. The four clamp the electrostatic chuck 22 from multiple directions, which can ensure the stability of the clamping.

[0036] In some embodiments, the clamping drive assembly includes a telescopic rod 8 and four connecting rods 12. The telescopic rod 8 is disposed on the bottom support plate 1, and a support plate 16 is provided at the telescopic end of the telescopic rod 8. One end of each of the four connecting rods 12 is movably connected to the support plate 16, and the other end of each of the four connecting rods 12 is movably connected to the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7, respectively.

[0037] Specifically, the telescopic rod 8 is mounted on the base support plate 1. It can be an electrically powered telescopic rod 8, powered by a battery, which can be mounted on the base support plate 1. The extension and retraction of the telescopic rod 8 is controlled by a controller, which can be mounted on the support rod 3 for user operation. A support plate 16 is mounted at the movable end of the telescopic rod 8, and is fixedly mounted at the telescopic end. It is then movably connected to the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 via four connecting rods 12. When the telescopic rod 8 is in its normal working range, all four connecting rods 12 are inclined. When the telescopic rod 8 extends, it will push the four connecting rods 12, which will push the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 outward, thus releasing the electrostatic chuck 22 to be repaired. When the telescopic rod 8 retracts, it will pull the four connecting rods 12, which will cause the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 to move closer to the center of the work panel 2, thus clamping the electrostatic chuck 22 to be repaired.

[0038] Specifically, one end of each of the four connecting rods 12 is movably connected to the support plate 16, and the other end of each of the four connecting rods 12 is movably connected to the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7, respectively. Specifically, when the telescopic rod 8 moves in a telescopic motion, the connecting rod 12 can rotate relative to the support plate 16, and also needs to be able to rotate relative to the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7. Specifically, the support plate 16 can be provided with holes, and the end of the connecting rod 12 can be provided with a bent hook that hooks into the hole on the support plate 16. The bottom of the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 can be provided with rings, allowing the hooks on the connecting rod 12 to hook into the rings, so that the two can rotate relative to each other.

[0039] In some embodiments, the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 are all provided with L-shaped grooves 20 for positioning.

[0040] Specifically, by setting the L-shaped groove 20, when clamping the electrostatic chuck 22, the bottom of the L-shaped groove 20 can fit against the bottom of the electrostatic chuck 22, better supporting the electrostatic chuck 22. The side wall of the L-shaped groove 20 can fit against the outer side wall of the electrostatic chuck 22, better clamping the electrostatic chuck 22. Since the electrostatic chuck 22 is disc-shaped, the side wall of the L-shaped groove 20 can be arc-shaped to better support the disc-shaped electrostatic chuck 22.

[0041] In some embodiments, the L-shaped groove 20 includes a flexible pad 21 that is in direct contact with the electrostatic chuck 22.

[0042] Specifically, the flexible pad 21 can be made of foam material. Foam material is elastic and can better protect the electrostatic chuck. The flexible pad 21 can be bonded to the L-shaped groove 20. A pressure sensor can also be set between the L-shaped groove 20 and the flexible pad 21. After the pressure is set, the first clamping member 4, the second clamping member 5, the third clamping member 6, and the fourth clamping member 7 are controlled to clamp the electrostatic chuck 22. The clamping stops automatically after the set pressure is reached, thus completing the clamping of the electrostatic chuck 22.

[0043] In some embodiments, the bottom support plate 1 is further provided with a plurality of limiting frames 9, each of which contains a counterweight 10, and a plurality of support columns 11 are provided on the bottom sidewall of the bottom support plate 1.

[0044] Specifically, the counterweight 10 can be a metal block, such as an iron block. By setting the counterweight 10, the entire device can be kept stable and reliable when repairing the electrostatic chuck 22. The number of limit frames 9 can be four. In other embodiments of this example, a battery for powering the telescopic rod 8 can be placed in the limit frame 9, so that the counterweight function can be realized while also providing power.

[0045] This application provides a clamping component to clamp the electrostatic chuck 22, making it convenient for maintenance personnel to perform maintenance on the work panel 2. By providing a clamping drive component, the electrostatic chuck 22 can be clamped or released by driving the clamping component, making it convenient to use and providing stable and reliable clamping.

[0046] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings, but this utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this utility model, and these variations still fall within the protection scope of this utility model.

Claims

1. An auxiliary clamping device for electrostatic chuck maintenance, characterized in that, It includes a working panel (2) and a bottom support plate (1). The working panel (2) and the bottom support plate (1) are connected by several support rods (3). The working panel (2) is provided with a clamping assembly for clamping an electrostatic chuck (22). The bottom support plate (1) is provided with a clamping drive assembly for driving the clamping assembly. The clamping drive assembly is movably connected to the clamping assembly. The clamping drive assembly includes a telescopic rod (8) and four connecting rods (12). The telescopic rod (8) is mounted on the bottom support plate (1). The telescopic end of the telescopic rod (8) is provided with a support plate (16). One end of each of the four connecting rods (12) is movably connected to the support plate (16).

2. The auxiliary clamping device for electrostatic chuck maintenance according to claim 1, characterized in that, The clamping assembly includes a first clamping member (4) and a second clamping member (5). The first clamping member (4) is slidably disposed on one side of the working panel (2), and the second clamping member (5) is slidably disposed on the other side of the working panel (2).

3. The auxiliary clamping device for electrostatic chuck maintenance according to claim 2, characterized in that, The sliding direction of the first clamping member (4) is away from or close to the second clamping member (5), and the sliding direction of the second clamping member (5) is away from or close to the first clamping member (4).

4. The auxiliary clamping device for electrostatic chuck maintenance according to claim 3, characterized in that, The working panel (2) is also slidably provided with a third clamping member (6) and a fourth clamping member (7), the third clamping member (6) and the fourth clamping member (7) being disposed between the first clamping member (4) and the second clamping member (5).

5. The auxiliary clamping device for electrostatic chuck maintenance according to claim 4, characterized in that, The sliding direction of the third clamping member (6) is away from or close to the fourth clamping member (7), and the sliding direction of the fourth clamping member (7) is away from or close to the third clamping member (6).

6. The auxiliary clamping device for electrostatic chuck maintenance according to claim 5, characterized in that, The other ends of the four connecting rods (12) are respectively movably connected to the first clamping member (4), the second clamping member (5), the third clamping member (6), and the fourth clamping member (7).

7. The auxiliary clamping device for electrostatic chuck maintenance according to claim 6, characterized in that, The first clamping member (4), the second clamping member (5), the third clamping member (6), and the fourth clamping member (7) are all provided with L-shaped grooves (20) for positioning.

8. The auxiliary clamping device for electrostatic chuck maintenance according to claim 7, characterized in that, The L-shaped groove (20) includes a flexible pad (21) that is in direct contact with the electrostatic chuck (22).

9. The auxiliary clamping device for electrostatic chuck maintenance according to claim 1, characterized in that, The bottom support plate (1) is also provided with several limiting frames (9), and the limiting frames (9) are provided with counterweights (10), and the bottom sidewall of the bottom support plate (1) is provided with several support columns (11).

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