A shutter structure and a coating equipment

Abstract

The utility model provides a kind of shutter structure and coating equipment, belong to semiconductor production equipment technical field, shutter structure includes multiple side shutters and multiple corner shutters, the corner shutter is detachably arranged between two adjacent side shutters, and multiple side shutters are connected to form a circumferentially closed shutter. Multiple side shutters, multiple corner shutters are formed by detachable splicing, the volume of single shutter is greatly reduced, facilitating production and processing. Detachable splicing is also convenient for disassembly and replacement in the coating space, solving the problem of high processing cost of integrated shutter structure, with the advantage of convenient disassembly, can ensure the shielding effect in coating environment.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a mask structure and coating equipment. Background Technology

[0002] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0003] In the coating environment, target ions adhere to surrounding objects, accumulating over time. When adhesion weakens, large clumps detach, contaminating the coating environment. Existing technologies address this by placing removable baffles around the coating environment of the vacuum chamber, replacing them periodically. These baffles undergo surface roughening treatments such as sandblasting, aluminum spraying, surface embossing, and machining to improve adhesion. However, in these existing technologies, the baffles are integral structures, resulting in high manufacturing costs. Utility Model Content

[0004] The present invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, the present invention provides a shield structure with a split design, which solves the problem of high processing costs.

[0005] Secondly, this utility model provides a coating equipment that applies the above-mentioned shielding structure.

[0006] According to a first aspect of the present invention, the shield structure includes a plurality of side shields and a plurality of corner shields, wherein the corner shields are detachably disposed between two adjacent side shields, and the plurality of side shields are connected to form a circumferentially closed shield.

[0007] The mask structure according to the present utility model has at least the following beneficial effects: The mask structure of the present embodiment, by using multiple side mask plates and multiple corner mask plates to splice together to form a ring mask, can ensure the masking effect in the coating environment, and also solves the problem of high processing cost of integrated mask structure.

[0008] According to some embodiments of the present invention, the shield structure further includes an insulating part, which is detachably disposed on the outside of the side shield and is provided with connecting screws for connecting to the vacuum chamber.

[0009] According to some embodiments of this utility model, the insulating part has a built-in metal reinforcing member.

[0010] According to some embodiments of the present invention, the insulating part has a recess on one side that is in contact with the side cover plate, the metal reinforcing member is disposed in the recess, and the metal reinforcing member and / or the insulating part are detachably connected to the side cover plate.

[0011] According to some embodiments of this utility model, the connecting screw is vertically inserted into the insulating part.

[0012] According to some embodiments of the present invention, the outer side wall of the side shield is provided with a plurality of insulating portions along both the first and second directions, wherein the first and second directions intersect.

[0013] According to some embodiments of the present invention, the corner shield includes a main body and a splicing part. The splicing part is connected to one side of the main body. The splicing part is provided with an oblong hole. The splicing part fits into the side shield and is connected to the side shield by screws passing through the oblong hole.

[0014] The corner baffle and the side baffle can be moved and adjusted along the length of the waist-shaped hole, thereby changing the circumference of the baffle.

[0015] According to some embodiments of the present invention, the corner shield is connected to the inner side of the side shield.

[0016] According to some embodiments of the present invention, the cover structure further includes a plurality of bottom cover plates, which are connected to the bottom of the side cover plates and extend inward to the inside of the side cover plates.

[0017] The coating apparatus according to a second aspect of the present invention includes the masking structure of any of the above embodiments.

[0018] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 This is a schematic diagram of one possible assembly of the shielding plate in this utility model;

[0021] Figure 2 This is a schematic diagram of one structure of the insulating part in this utility model;

[0022] Figure 3 This is a schematic diagram of the installation of the insole cover plate of this utility model;

[0023] Figure 4 This is a schematic diagram illustrating one arrangement of the insulating part in this utility model;

[0024] Figure 5 This is a schematic diagram of one connection of the corner shield in this utility model. Detailed Implementation

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0028] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0029] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0030] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0031] In the coating environment, target ions adhere to surrounding objects, accumulating over time. When adhesion weakens, large clumps detach, contaminating the coating environment. Existing technologies address this by placing removable baffles around the coating environment of the vacuum chamber, replacing them periodically. These baffles undergo surface roughening treatments such as sandblasting, aluminum spraying, surface embossing, and machining to improve adhesion. However, in these existing technologies, the baffles are integral structures, resulting in high manufacturing costs.

[0032] In this regard, refer to Figures 1 to 5 The present invention provides a shield structure including multiple side shields 100 and multiple corner shields 200. The corner shields 200 are detachably disposed between two adjacent side shields 100, and the multiple side shields 100 are connected to form a circumferentially closed shield.

[0033] Specifically, the number of side panels 100 can be flexibly set according to actual needs, such as two, three, four, etc. Corner panels 200 are set corresponding to the number of side panels 100 to connect two side panels 100.

[0034] Since the target and substrate stage are positioned vertically relative to each other in the coating environment, the masking plate only needs to provide circumferential shielding. In this embodiment, by splicing multiple side masking plates 100 and multiple corner masking plates 200 to form a ring-shaped masking plate, the shielding effect in the coating environment can be ensured.

[0035] Compared to the traditional one-piece design, the shield in this embodiment is formed by detachable splicing of multiple side shields 100 and multiple corner shields 200, which greatly reduces the volume of a single shield and facilitates production and processing. The detachable splicing also facilitates disassembly and replacement within the coating space. Therefore, it solves the problem of high processing costs associated with one-piece shield structures and offers the advantage of convenient disassembly and assembly.

[0036] Reference Figure 2 In some embodiments of this utility model, the shield structure further includes an insulating part 101, which is detachably disposed on the outside of the side shield 100, and the insulating part 101 is provided with a connecting screw 103 for connecting the vacuum chamber.

[0037] It is understood that in this embodiment, the vacuum chamber is connected by connecting screws 103. Since the connecting screws 103 are located on the insulating part 101, the side shield 100 and the vacuum chamber are kept insulated from each other, thereby preventing charge accumulation and interference with the coating.

[0038] During assembly and disassembly, the insulating part 101 can be fixed to the vacuum chamber and disassembled by separating it from the insulating part 101 through the side cover 100, or the insulating part 101 can be disassembled from the vacuum chamber.

[0039] Multiple side shields 100 are provided. By providing insulating parts 101 on the side shields 100 to connect to the vacuum chamber, the installation stability can be effectively ensured. The number of insulating parts 101 and the number of connecting screws 103 can be flexibly set as needed, and no specific limitation is made here.

[0040] Considering the limited structural strength of insulating materials, fatigue damage can easily occur with frequent disassembly and reassembly of the shield, affecting installation stability. Therefore, in some embodiments of this invention, the insulating part 101 incorporates a metal reinforcing member 102. By providing the metal reinforcing member 102, the structural strength of the insulating part 101 is effectively improved, thus preventing fatigue damage and effectively enhancing installation stability.

[0041] It is understandable that the connecting screw 103 can either pass through the metal reinforcement 102 to connect to the vacuum chamber, or it can only pass through the insulation part 101 to connect to the vacuum chamber. Since the metal reinforcement 102 is located inside the insulation part 101, the way the connecting screw 103 is located will not hinder the realization of the aforementioned effect.

[0042] Combination Figure 2 In some embodiments of this utility model, the insulating part 101 has a recess on one side of the side cover 100, the size of which matches the metal reinforcement 102, so that the metal reinforcement 102 is embedded in the recess. At the same time, the metal reinforcement 102 and the insulating part 101 are connected and fixed, and the metal reinforcement 102 is connected to the side cover 100 by screws.

[0043] With the structural configuration of this embodiment, the metal reinforcement 102 is wrapped by the insulating part 101, which does not affect the insulation between the shield and the vacuum cavity. Furthermore, the metal reinforcement 102 is directly connected to the side shield 100, and the insulating part 101 can also be directly connected to the side shield 100. The metal reinforcement 102 and the insulating part 101 are fitted together through dimensional matching, ensuring both the installation strength and stability between them and the side shield 100, while also effectively improving the structural strength of the insulating part 101 through the metal reinforcement 102.

[0044] Combination Figure 2As shown, along the direction away from the side shield 100, the insulating portion 101 includes a first recess and a second recess. The second recess is smaller than the first recess, thus forming a step between them. The second recess extends through the insulating portion 101. The metal reinforcing member 102 has a convex cross-section and matches the first and second recesses respectively. The thickness of the metal reinforcing member 102 is less than the thickness of the insulating portion 101, thus embedding it relative to the second recess, thereby preventing the metal reinforcing member 102 from contacting the vacuum cavity.

[0045] In some embodiments of this utility model, the connecting screw 103 vertically passes through the insulating part 101 and extends downward to connect the vacuum cavity. In this embodiment, since the metal reinforcing member 102 is disposed inside the insulating part 101, if the connecting screw 103 is arranged horizontally to connect the vacuum cavity, the disassembly and assembly would be relatively difficult, and the insulation would be easily damaged. This embodiment, by vertically arranging the connecting screw 103, can effectively improve the structural strength of the insulating part 101. Since the metal reinforcing member 102 is circumferentially fitted and fixed to the insulating part 101, and the connecting screw 103 is matched with the hole position in the insulating part 101, the installation strength can be effectively improved.

[0046] It is also understandable that the connecting screw 103 is vertically inserted into the insulating part 101 to connect to the vacuum cavity. Therefore, the insulating part 101 is supported on the vacuum cavity. During installation, it is only necessary to put the cover into the vacuum cavity, and then place it on the corresponding structure of the vacuum cavity through the protruding insulating part 101 and fix it. The operation is simple, convenient for disassembly and replacement, and helps to improve the installation stability of the cover.

[0047] Considering that the side shield 100 has a certain length and height, in order to improve the installation stability of the side shield 100, in some embodiments of this utility model, the outer side wall of the side shield 100 is provided with a plurality of insulating parts 101 along the length direction and the height direction.

[0048] During installation, the side shield 100 can be supported on the vacuum chamber by multiple insulating parts 101 to improve installation stability. Since multiple insulating parts 101 are provided along the length and height directions of the side shield 100, there are multiple connection points between the insulating parts 101 and the vacuum chamber along the length and height directions, resulting in good installation stability.

[0049] Specifically, in combination Figure 4 In one embodiment, the side shield 100 is provided with a first insulating portion and a second insulating portion along the height direction, and the first insulating portion and the second insulating portion are aligned at their centers along the vertical direction. Along the length direction of the side shield 100, the length dimension of the first insulating portion is greater than the length dimension of the second insulating portion along the side shield 100. Furthermore, the connecting screw 103 provided on the first insulating portion is located outside the second insulating portion.

[0050] With the structural configuration of this embodiment, a clearance opening can be made on the vacuum cavity at the position supporting the first insulating part for the second insulating part to pass through. The first insulating part can abut against this position and be connected and fixed, while the second insulating part can also pass through smoothly, avoiding interference.

[0051] Alternatively, the side cover 100 can be disassembled and replaced by separating the insulating part 101 from the side cover 100, while the insulating part 101 remains connected and fixed to the vacuum chamber.

[0052] Combination Figure 5 In some embodiments of this utility model, the corner shield 200 includes a main body 202 and a splicing part 203. The splicing part 203 is connected to one side of the main body 202 and is provided with an oblong hole 201. The splicing part 203 fits against the side shield 100 and is connected to the side shield 100 by screws passing through the oblong hole 201. Due to the oblong hole 201, the corner shield 200 and the side shield 100 can be adjusted along the length direction of the oblong hole 201 when the screw is not fully tightened, thereby allowing the corner shield 200 to be adjusted along the length direction of the side shield 100, and thus changing the circumference of the shield.

[0053] With the structural configuration of this embodiment, the corner baffle 200 and the side baffle 100 can be adjusted relative to each other through the oblong hole 201, allowing the outer perimeter of the assembled baffle to be increased or decreased. During assembly and disassembly, the outer perimeter of the baffle can be reduced first, thereby increasing the gap between the baffle and the vacuum chamber. This effectively avoids friction and collision when the baffle is placed into or removed from the vacuum chamber, thus preventing particle generation and protecting the coating environment. After the baffle is placed in, the relative position between the side baffle 100 and the corner baffle 200 is moved to a set position to increase the outer perimeter of the baffle. Then, the corner baffle 200 and the side baffle 100 are completely fixed, and the side baffle 100 is also fixed to the vacuum chamber.

[0054] It is understood that the corner shield 200 can be adjusted in position with only one connected side shield 100, or it can be adjusted in position with both connected side shields 100 simultaneously. Those skilled in the art can make the settings as needed.

[0055] In some embodiments of this utility model, the corner shield 200 is positionally adjustable to the two connected side shields 100. Specifically, the corner shield 200 includes a main body 202 and two splicing parts 203, which are connected to both sides of the main body 202. The two splicing parts 203 have oblong holes 201 arranged horizontally, and the side shields 100 are connected by screws passing through the oblong holes 201. Even when the screws are not fully tightened, the splicing parts 203 and the side shields 100 can be adjusted along the length of the side shields 100 through the oblong holes 201.

[0056] In some embodiments of this utility model, the corner shield 200 is connected to the inner side of the side shield 100.

[0057] It is understandable that since the corner baffle 200 needs to connect to the two side baffles 100, by connecting the corner baffle 200 to the inside of the side baffles 100, it is convenient for the corner baffle 200 to move and adjust with the two side baffles 100, thus avoiding interference.

[0058] As shown in the figure, the two splicing parts 203 are arranged at a 90° angle on both sides of the main body 202. The inner sides of the splicing parts 203 and the main body 202 are smoothly transitioned arc surfaces. The outer sides of the splicing parts 203 are flat surfaces that fit against the side shield 100. With the structural arrangement of this embodiment, the corner shield 200 can fit well against the side shield 100 for connection and fixation. At the same time, the inner side of the shield can smoothly transition the corner positions of the shield, which helps to improve the adhesion effect.

[0059] In some embodiments of this utility model, the cover structure further includes a plurality of bottom cover plates 300, which are connected to the bottom of the side cover plate 100 and extend to the inner side of the side cover plate 100.

[0060] Since there is a certain gap between the side wall of the vacuum chamber and the substrate stage in the vacuum chamber, this embodiment can cover the gap by setting a bottom cover plate 300 and extending the bottom cover plate 300 into the side cover plate 100. The extension distance of the bottom cover plate 300 is adapted to the distance between the substrate stage and the side cover plate 100.

[0061] The bottom cover plate 300 is tapered at both ends, so that when the two side cover plates 100 are spliced ​​together by the corner cover plate 200, there will be no interference between the two bottom cover plates 300.

[0062] In some embodiments of this utility model, a horizontal extension 204 is provided at the lower end of the corner shield 200, and the horizontal extension 204 extends inward from the lower end of the main body 202 and the splicing part 203. The horizontal extension 204 abuts against the upper end of the bottom shield 300.

[0063] In this embodiment, the corner shield 200 is provided with a horizontal extension 204, which can cover the splicing gap between the bottom shields 300 and improve the structural strength of the corner shield 200.

[0064] Reference Figures 1 to 5 In some embodiments of this utility model, the baffle structure includes four side baffles 100, four corner baffles 200, and four bottom baffles 300. Each corner baffle 200 includes a main body 202, a splicing part 203, and a horizontal extension 204. The splicing part 203 extends from both sides of the main body 202 at a 90° angle, and the inner sides of the splicing part 203 and the main body 202 are smoothly transitioned arc surfaces. The horizontal extension 204 extends horizontally inward from the bottom of the main body 202 and the splicing part 203. Furthermore, the main body 202, the splicing part 203, and the horizontal extension 204 are an integral structure. It should be noted that in this embodiment, the inner side refers to the side facing the center of the vacuum cavity, while the outer side refers to the side away from the center of the vacuum cavity. The outer sides of the two splicing parts 203 are planes forming a 90° angle with each other. The two splicing parts 203 are provided with oblong holes 201 along their extension direction. Four side shields 100 are arranged in a rectangle and connected at the four corner shields 200 at the four apex positions. The side shields 100 and corner shields 200 are connected and fixed by screws installed in the oblong holes 201. Four bottom shields 300 are installed at the bottom of the four side shields 100 and extend inward relative to the side shields 100, so that the bottom of the shield forms a rectangular aperture adapted to the size of the substrate stage. Four insulating parts 101 are provided on the outer side of the side shields 100 along the length and height directions in a 2*2 pattern. Connecting screws 103 are provided on the insulating parts 101 for connecting to the vacuum chamber.

[0065] The present invention also proposes a coating apparatus, which includes the masking structure of any of the above embodiments.

[0066] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A baffle structure, characterized in that, It includes multiple side panels and multiple corner panels, wherein the corner panels are detachably disposed between two adjacent side panels, and the multiple side panels are connected to form a circumferentially closed panel.

2. The baffle structure according to claim 1, characterized in that, The shield structure also includes an insulating part, which is detachably disposed on the outside of the side shield and is provided with connecting screws for connecting to the vacuum chamber.

3. The baffle structure according to claim 2, characterized in that, The insulating part has a built-in metal reinforcement.

4. The baffle structure according to claim 3, characterized in that, The insulating part has a recess on one side that is in contact with the side cover plate, and the metal reinforcement is disposed in the recess. The metal reinforcement and / or the insulating part are detachably connected to the side cover plate.

5. The baffle structure according to claim 3, characterized in that, The connecting screw is vertically inserted into the insulating part.

6. The baffle structure according to claim 2, characterized in that, The outer side wall of the side shield is provided with a plurality of insulating portions along both the first and second directions, the first and second directions intersecting each other.

7. The baffle structure according to claim 1, characterized in that, The corner shield includes a main body and a splicing part. The splicing part is connected to one side of the main body and has an oblong hole. The splicing part fits into the side shield and is connected to the side shield by screws passing through the oblong hole. The corner baffle and the side baffle can be moved and adjusted along the length of the waist-shaped hole, thereby changing the circumference of the baffle.

8. The baffle structure according to claim 7, characterized in that, The corner shield is connected to the inside of the side shield.

9. The baffle structure according to claim 1, characterized in that, The shield structure also includes multiple bottom shields, which are connected to the bottom of the side shields and extend inward to the side shields.

10. A coating apparatus, characterized in that, Includes the shield structure as described in any one of claims 1 to 9.

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