An inorganic alignment film-based light modulation LCOS light valve
By replacing the traditional PI alignment film with an inorganic alignment film, and combining it with a soda-lime glass or quartz glass substrate, the problems of static electricity, dust and stability of the liquid crystal light valve are solved, realizing a liquid crystal light valve with high transmittance and high reliability, which is suitable for high temperature and high humidity and laser application scenarios.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHONGQING JINGFAN OPTOELECTRONICS TECHNOLOGY CO LTD
- Filing Date
- 2025-09-12
- Publication Date
- 2026-06-16
AI Technical Summary
Traditional PI alignment films for existing liquid crystal light valves suffer from static electricity and dust contamination, poor flatness, and poor stability. Their performance is particularly limited under high temperature, high humidity, and ultraviolet light environments, and they also have high light absorption, which restricts their applications.
An inorganic alignment film is used to replace the traditional PI alignment film. It includes a first and a second inorganic alignment film layer, combined with a soda-lime glass or quartz glass substrate, and a silicon dioxide film layer is prepared by evaporation or sputtering to achieve high transmittance and stability of the liquid crystal light valve.
It improves the transmittance of the liquid crystal light valve in the far-infrared band, enhances its reliability and stability in high-temperature, high-humidity and laser application scenarios, and extends its service life.
Smart Images
Figure CN224366289U_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of liquid crystal light valve technology, specifically relating to a light-modulated LCOS (Liquid Crystallon Silicon) light valve based on an inorganic alignment film. Background Technology
[0002] A common spatial modulator is the liquid crystal spatial light modulator (LC SLM), also known as a liquid crystal light valve (LCLV). Under the control of time-varying electrical drive signals or other signals, the liquid crystal light valve can change the amplitude, intensity, phase, polarization state, or wavelength of light distribution in space, thereby processing optical information; it can serve as a key component in systems such as real-time optical information processing, light field manipulation, optical computing, and optical neural networks.
[0003] Currently, most liquid crystal light valves on the market use traditional rub-aligned PI (polyimide) films. On the one hand, due to the rub-alignment process, these films are prone to static electricity and dust generation, and suffer from film damage and poor flatness. On the other hand, PI films are organic films, which exhibit poor stability under high temperature, high humidity, and ultraviolet light conditions. Furthermore, PI organic films have significant light absorption in the ultraviolet or far-infrared regions, severely limiting their application in scenarios requiring high-reflectivity or high-transmittance liquid crystal light valves. Utility Model Content
[0004] To address the above issues, this application provides a light-modulated LCOS light valve based on an inorganic alignment film, thereby achieving high reliability, high stability, and high transmittance performance of the liquid crystal light valve.
[0005] The technical solution adopted in this utility model is as follows:
[0006] This application provides an optical modulation LCOS light valve based on an inorganic alignment film, the LCOS light valve comprising:
[0007] A liquid crystal cell, which contains a first inorganic alignment film layer and a second inorganic alignment film layer;
[0008] A liquid crystal layer is located between the first inorganic alignment film layer and the second inorganic alignment film layer;
[0009] The first inorganic alignment film layer includes a first inorganic alignment film underlayer located on the first inner surface of the liquid crystal cell and a first inorganic alignment film alignment layer located on the lower surface of the first inorganic alignment film underlayer.
[0010] The second inorganic alignment film layer includes a second inorganic alignment film underlayer located on the second inner surface of the liquid crystal cell and a second inorganic alignment film alignment layer located on the upper surface of the second inorganic alignment film underlayer;
[0011] The first inner surface and the second inner surface are the upper and lower inner surfaces of the liquid crystal cell, respectively.
[0012] The first inorganic alignment film and the second inorganic alignment film are located on the upper and lower surfaces of the liquid crystal layer, respectively.
[0013] As an optional technical solution, the first inorganic alignment film bottom layer, the first inorganic alignment film alignment layer, the second inorganic alignment film bottom layer, and the second inorganic alignment film alignment layer are all silicon dioxide films.
[0014] As an optional technical solution, the liquid crystal cell further includes an upper packaging substrate and an upper transparent conductive film layer located on the lower surface of the upper packaging substrate; the first inorganic alignment film bottom layer is located on the lower surface of the upper transparent conductive film layer.
[0015] As an optional technical solution, the liquid crystal cell further includes a lower packaging substrate and a lower transparent conductive film layer located on the upper surface of the lower packaging substrate; the second inorganic alignment film bottom layer is located on the upper surface of the lower transparent conductive film layer.
[0016] As an optional technical solution, both the upper and lower packaging substrates are sodium-calcium glass substrates or quartz glass substrates.
[0017] As an optional technical solution, the liquid crystal cell further includes a left sealing frame and a right sealing frame; the bottom of the left sealing frame is connected to the left end of the lower transparent conductive film layer, and the left ends of the upper encapsulation substrate and the upper transparent conductive film layer extend beyond the top of the left sealing frame to form an upper electrode, the width of which is 3mm-5mm; the top of the right sealing frame is connected to the right end of the upper transparent conductive film layer, and the right ends of the lower encapsulation substrate and the lower transparent conductive film layer extend beyond the bottom of the right sealing frame to form a lower electrode, the width of which is 3mm-5mm.
[0018] As an optional technical solution, the width of both the left and right sealing frames is 0.65mm-0.80mm.
[0019] As an optional technical solution, the thickness of both the upper transparent conductive film layer and the lower transparent conductive film layer is 10nm-30nm.
[0020] As an optional technical solution, the thickness of both the first inorganic orientation film bottom layer and the second inorganic orientation film bottom layer is 10nm-30nm.
[0021] As an optional technical solution, the thickness of both the first inorganic orientation film and the second inorganic orientation film is 30nm-70nm.
[0022] The beneficial effects of this invention are as follows: The optically modulated LCOS light valve based on an inorganic alignment film proposed in this invention overcomes the shortcomings of traditional rubbed PI alignment films, improving the transmittance of the liquid crystal light valve in the far-infrared band and its reliability and stability in various harsh environments with high temperature and humidity, as well as laser application scenarios. This is mainly reflected in: 1. Due to the use of an inorganic alignment film, controlling the columnar tilt structure and thickness of the film layer, higher transmittance can be obtained in the far-infrared band; 2. The two specially structured inorganic alignment films, in an anti-parallel bonding manner, can achieve sufficient alignment of the TN liquid crystal; 3. By applying an AC voltage to drive the liquid crystal light valve, the vertical deflection of the light polarization state can be accurately achieved; 4. The inorganic alignment film replaces the traditional PI organic film, effectively improving the service life of the liquid crystal light valve. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the structure of an optically modulated LCOS light valve based on an inorganic alignment film in an exemplary embodiment. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.
[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
[0026] Example
[0027] like Figure 1 As shown, this application provides an optical modulation LCOS light valve based on an inorganic alignment film. The LCOS light valve includes a liquid crystal cell and a liquid crystal layer 30. A first inorganic alignment film layer 10 and a second inorganic alignment film layer 20 are disposed inside the liquid crystal cell; the liquid crystal layer 30 is located between the first inorganic alignment film layer 10 and the second inorganic alignment film layer 20.
[0028] The first inorganic alignment film layer 10 includes a first inorganic alignment film underlayer 101 located on the first inner surface of the liquid crystal cell and a first inorganic alignment film alignment layer 102 located on the lower surface of the first inorganic alignment film underlayer 101; the second inorganic alignment film layer 20 includes a second inorganic alignment film underlayer 201 located on the second inner surface of the liquid crystal cell and a second inorganic alignment film alignment layer 202 located on the upper surface of the second inorganic alignment film underlayer 201; the first inner surface and the second inner surface are respectively the upper and lower inner surfaces of the liquid crystal cell; the first inorganic alignment film alignment layer 102 and the second inorganic alignment film alignment layer 202 are respectively located on the upper and lower surfaces of the liquid crystal layer 30. As an optional embodiment, the first inorganic alignment film underlayer 101, the first inorganic alignment film alignment layer 102, the second inorganic alignment film underlayer 201, and the second inorganic alignment film alignment layer 202 are all silicon dioxide films.
[0029] As an optional implementation, the liquid crystal cell further includes an upper encapsulation substrate 40 and an upper transparent conductive film layer 50 located on the lower surface of the upper encapsulation substrate 40; the first inorganic alignment film bottom layer 101 is located on the lower surface of the upper transparent conductive film layer 50.
[0030] As an optional implementation, the liquid crystal cell further includes a lower encapsulation substrate 60 and a lower transparent conductive film layer 70 located on the upper surface of the lower encapsulation substrate 60; the second inorganic alignment film bottom layer 201 is located on the upper surface of the lower transparent conductive film layer 70.
[0031] As an optional implementation, both the upper packaging substrate 40 and the lower packaging substrate 60 are soda-lime glass substrates or quartz glass substrates.
[0032] As an optional implementation, the liquid crystal cell further includes a left sealing frame 801 and a right sealing frame 802; the bottom of the left sealing frame 801 is connected to the left end of the lower transparent conductive film layer 70, and the left ends of the upper encapsulation substrate 40 and the upper transparent conductive film layer 50 extend to the left beyond the top of the left sealing frame 801 to form an upper electrode 901, the width of which is 3mm-5mm; the top of the right sealing frame 802 is connected to the right end of the upper transparent conductive film layer 50, and the right ends of the lower encapsulation substrate 60 and the lower transparent conductive film layer 70 extend to the right beyond the bottom of the right sealing frame 802 to form a lower electrode 902, the width of which is 3mm-5mm.
[0033] As an optional implementation, the width of both the left sealing frame 801 and the right sealing frame 802 is 0.65mm-0.80mm.
[0034] As an optional implementation, the thickness of both the upper transparent conductive film layer 50 and the lower transparent conductive film layer 70 is 10nm-30nm.
[0035] As an optional implementation, the thickness of both the first inorganic orientation film bottom layer 101 and the second inorganic orientation film bottom layer 201 is 10nm-30nm.
[0036] As an optional implementation, the thickness of both the first inorganic orientation film 102 and the second inorganic orientation film 202 is 30nm-70nm.
[0037] In this embodiment, an inorganic alignment film is used instead of the original PI alignment film, overcoming the disadvantages of PI alignment film, such as easy generation of static electricity and dust, film damage, and low flatness. The upper packaging substrate 40 and the lower packaging substrate 60 can be made of soda-lime glass or quartz glass with high transmittance in the infrared region. When used as a reflective substrate, patterned silicon wafers can also be used. During fabrication, a first inorganic alignment film layer 10 and a second inorganic alignment film layer 20 are first deposited or sputtered on the upper packaging substrate 40 and the lower packaging substrate 60, respectively. Then, the upper packaging substrate 40 and the lower packaging substrate 60 are connected by a thermosetting adhesive, which forms a left sealing frame 801 and a right sealing frame 802. Afterward, crystal filling and sealing are performed to complete the fabrication of the liquid crystal light valve. The liquid crystal light valve in this embodiment achieves a transmittance of over 94% in the far-infrared region (e.g., 1550nm wavelength) and can achieve vertical (90°) deflection of the far-infrared laser polarization state through pulse voltage control. Because it uses an inorganic membrane, it can work stably in environments with high temperature, high humidity, and ultraviolet light, and has high reliability.
[0038] To better understand this embodiment, the preparation method of the liquid crystal light valve provided in this embodiment will be further explained below.
[0039] The packaged single liquid crystal light valve is a 50mm × 50mm square with a cell thickness of 8µm. The electrode pad width (D1, D2) is 3mm-5mm; in this embodiment, 4mm is used. A schematic diagram is shown below. Figure 1As shown, the upper packaging substrate 40 is made of soda-lime glass or quartz glass, and its inner surface is sputtered with a 10nm-30nm ITO conductive film (i.e., the upper transparent conductive film layer 50, which is controlled to be 20nm in this embodiment), with a sheet resistance of 400Ω. This film serves two purposes: firstly, to drive the flipping of the liquid crystal in the liquid crystal cell, and secondly, to act as the upper electrode 901 of the external conductive lead Pad. Before depositing the first inorganic alignment film layer 10, the Pad position of the upper electrode 901 needs to be masked with an Al or chromium strip to prevent the inorganic film from being deposited, which would affect the conductivity. Then, the first inorganic alignment film underlayer 101 and the first inorganic alignment film alignment layer 102 are prepared on the upper transparent conductive film layer 50 by oblique evaporation or sputtering. The film material is silicon dioxide (SiO2). The thickness of the first inorganic alignment film bottom layer 101 is controlled between 10nm and 30nm, and in this embodiment, 20nm can be used. The angle between the incident atom direction and the substrate is controlled at 20°. Then, a first inorganic alignment film alignment layer 102 is prepared on the first inorganic alignment film bottom layer 101, with a thickness controlled between 30nm and 70nm, and in this embodiment, 50nm can be used. The angle between the incident atom direction and the substrate is controlled at 30°. The preparation methods of the lower transparent conductive film layer 70, the second inorganic alignment film bottom layer 201, and the second inorganic alignment film alignment layer 202 on the lower packaging substrate 60 are the same as those on the upper packaging substrate 40, and will not be described again here.
[0040] Then, the upper packaging substrate 40 with an inorganic alignment film layer is laminated to the lower packaging substrate 60 in antiparallel fashion. Before lamination, 8µm spacer powder (spacer) needs to be uniformly sprayed onto the inorganic alignment film layer at a density of 30ea / mm. 2 To ensure uniformity of cell thickness, the width of the sealed frame (801, 802) of the laminated liquid crystal light valve is 0.65mm-0.80mm. In this embodiment, 0.7mm is used to ensure good sealing of the encapsulation cell. After the liquid crystal empty cell is sealed by heat pressing, TN liquid crystal 6 is poured in, and then leveled using a leveling fixture. Then, the liquid crystal transmission cell is sealed to complete the preparation of the liquid crystal transmission cell. After cleaning the prepared liquid crystal transmission cell, it is baked for secondary orientation. Lead wires are bonded to the upper electrode 901 and the lower electrode 902 by applying silver paste, thus completing the preparation of the entire optically modulated silicon-based liquid crystal light valve.
[0041] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. All technical solutions that fall within the scope of the claims of this utility model are within the scope of protection of this utility model.
Claims
1. A light-modulated LCOS light valve based on an inorganic alignment film, characterized in that, include: A liquid crystal cell, which contains a first inorganic alignment film layer and a second inorganic alignment film layer; A liquid crystal layer is located between the first inorganic alignment film layer and the second inorganic alignment film layer; The first inorganic alignment film layer includes a first inorganic alignment film underlayer located on the first inner surface of the liquid crystal cell and a first inorganic alignment film alignment layer located on the lower surface of the first inorganic alignment film underlayer. The second inorganic alignment film layer includes a second inorganic alignment film underlayer located on the second inner surface of the liquid crystal cell and a second inorganic alignment film alignment layer located on the upper surface of the second inorganic alignment film underlayer; The first inner surface and the second inner surface are the upper and lower inner surfaces of the liquid crystal cell, respectively. The first inorganic alignment film and the second inorganic alignment film are located on the upper and lower surfaces of the liquid crystal layer, respectively.
2. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 1, characterized in that: The first inorganic alignment film bottom layer, the first inorganic alignment film alignment layer, the second inorganic alignment film bottom layer, and the second inorganic alignment film alignment layer are all silicon dioxide films.
3. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 1, characterized in that: The liquid crystal cell further includes an upper encapsulation substrate and an upper transparent conductive film layer located on the lower surface of the upper encapsulation substrate; the first inorganic alignment film bottom layer is located on the lower surface of the upper transparent conductive film layer.
4. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 3, characterized in that: The liquid crystal cell further includes a lower encapsulation substrate and a lower transparent conductive film layer located on the upper surface of the lower encapsulation substrate; the second inorganic alignment film bottom layer is located on the upper surface of the lower transparent conductive film layer.
5. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 4, characterized in that: Both the upper and lower packaging substrates are sodium-calcium glass substrates or quartz glass substrates.
6. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 5, characterized in that: The liquid crystal cell further includes a left sealing frame and a right sealing frame; the bottom of the left sealing frame is connected to the left end of the lower transparent conductive film layer, and the left ends of the upper encapsulation substrate and the upper transparent conductive film layer extend beyond the top of the left sealing frame to form an upper electrode, the width of which is 3mm-5mm; the top of the right sealing frame is connected to the right end of the upper transparent conductive film layer, and the right ends of the lower encapsulation substrate and the lower transparent conductive film layer extend beyond the bottom of the right sealing frame to form a lower electrode, the width of which is 3mm-5mm.
7. The optical modulation LCOS light valve based on an inorganic alignment film according to claim 6, characterized in that: The width of both the left and right sealing frames is 0.65mm-0.80mm.
8. The optical modulation LCOS light valve based on an inorganic alignment film according to any one of claims 4-7, characterized in that: The thickness of both the upper and lower transparent conductive film layers is 10nm-30nm.
9. The optical modulation LCOS light valve based on an inorganic alignment film according to any one of claims 1-7, characterized in that: The thickness of both the first inorganic orientation film substrate and the second inorganic orientation film substrate is 10nm-30nm.
10. The optical modulation LCOS light valve based on an inorganic alignment film according to any one of claims 1-7, characterized in that: The thickness of both the first inorganic orientation film and the second inorganic orientation film is 30nm-70nm.