Wafer storage rack

Abstract

The utility model discloses a wafer storage frame, including the storage box, the storage box one side is equipped with the storage room, the storage box one side and be located the storage room around is equipped with the slot, the storage box one side is fixedly connected with the heat abstractor, be provided with the heat abstractor on the heat abstractor, the storage box inside is provided with wafer storage subassembly, be provided with the transport box on the slot, the transport box both sides are equipped with the sliding slot. In the utility model, through the fin on the heat abstractor, the heat in the storage box is conducted to the heat abstractor, then through the heat dissipation fan and the air inlet, the air circulation on the fin is accelerated, thereby the heat exchange of the fin and the air is accelerated, avoids the air in the heat dissipation process and enters the storage room in the storage box and carries out the heat dissipation, thereby causes the dust in the air to enter the storage room, causes the pollution of wafer.

Description

Technical Field

[0001] This utility model relates to the field of wafer storage technology, and in particular to a wafer storage rack. Background Technology

[0002] A wafer is the core material in semiconductor manufacturing. Made of high-purity single-crystal silicon, it is a circular, thin sheet, typically 8 inches or 12 inches in diameter, with 12-inch wafers being the mainstream. Its manufacturing process includes silicon purification, single-crystal growth, slicing, grinding, and polishing, ultimately forming a substrate with a smooth surface and uniform structure. As the starting point for chip manufacturing, integrated circuits are built onto the wafer's surface through processes such as photolithography, etching, and ion implantation. It is then diced into individual dies, and finally packaged and tested to become chips.

[0003] Patent publication number CN213010074U discloses a cleanroom storage device for silicon carbide wafers, including a first conveyor belt and a storage chamber. A brush roller and an air blowing pipe are provided above the first conveyor belt. The storage chamber is provided with a first lifting conveyor device and a storage rack. The storage chamber has an inlet. The first conveyor belt is connected to one end of the first lifting conveyor device through the inlet. The other end of the first lifting conveyor device is connected to one end of the storage rack. The storage rack has several storage cavities. The lifting conveyor device can be raised and lowered to connect with the storage cavities. This utility model is a cleanroom storage device for silicon carbide wafers that can perform dust removal conveying and cleanroom storage.

[0004] Existing wafer storage devices use ambient air for heat exchange during wafer ventilation and cooling. However, even after dust removal processes, some impurities can still enter the device, causing wafer contamination. Furthermore, during wafer transportation, contact with the external environment inevitably leads to further contamination. To overcome these drawbacks, this invention provides a wafer storage rack. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a wafer storage rack.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a wafer storage rack, including a storage box, a storage chamber on one side of the storage box, a slot on one side of the storage box and around the storage chamber, a heat dissipation chamber fixedly connected to one side of the storage box, a heat dissipation component on the heat dissipation chamber, a storage box slidably connected to the storage chamber, a wafer storage component inside the storage box, a transport box on the slot, sliding grooves on both sides of the transport box, sliding rods slidably connected to the sliding grooves, magnetic suction components on the sliding rods, a first handle fixedly connected to the top of the transport box, and rotating blocks fixedly connected to both sides of the transport box, with rotating handles fixedly connected to the rotating blocks.

[0007] Furthermore, the heat dissipation component includes a fan vent on one side of the heat dissipation chamber, a cooling fan is fixedly connected to the fan vent, an air inlet is provided on one side of the heat dissipation chamber, and a plurality of heat sinks are fixedly connected to one side of the interior of the heat dissipation chamber, with one side of the heat sinks penetrating the storage box and located inside the storage chamber.

[0008] Furthermore, the wafer storage assembly includes a circular support frame fixedly connected to the bottom of the storage box, and the circular support frame has several slots.

[0009] Furthermore, the magnetic suction assembly includes an electromagnetic chamber fixedly connected to the sliding rod, an iron core fixedly connected inside the electromagnetic chamber, a coil fixedly connected to one side of the electromagnetic chamber and around the iron core, a magnet fixedly connected to one side of the storage box, and a power supply assembly provided inside one side of the transport box.

[0010] Furthermore, the power supply component includes a battery fixedly connected to one side of the inside of the transport box. A wire is fixedly connected to the power transmission end of the battery. One end of the wire passes through the electromagnetic chamber and is fixedly connected to the coil. A charging port is provided on one side of the transport box. A control button is fixedly connected to the side of the transport box and located at the charging port. The control button is electrically connected to the battery.

[0011] Furthermore, support legs are fixedly connected to the four corners of the bottom of the storage box.

[0012] The beneficial effects of this utility model are:

[0013] In use, this invention conducts heat from the storage box to the heat dissipation chamber through the heat sink on the heat dissipation component. The cooling fan and air inlet then accelerate the airflow on the heat sink, thereby speeding up the heat exchange between the heat sink and the air. This prevents air from entering the storage chamber during the heat dissipation process, which could lead to dust entering the storage chamber and contaminating the wafer. The transport box is located in a slot at one end, so the storage box can be removed without contact with the external environment, thus preventing wafer contamination during transportation. Attached Figure Description

[0014] To more clearly illustrate the technical solution of this utility model, the drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 : A perspective view of this utility model;

[0016] Figure 2 The present utility model Figure 1 Enlarged schematic diagram of the structure at point A in the middle;

[0017] Figure 3 : Schematic diagram of the internal structure of the heat dissipation chamber of this utility model;

[0018] Figure 4 : A schematic diagram of the transport box structure of this utility model;

[0019] Figure 5 : Schematic diagram of the internal structure of the transport box of this utility model;

[0020] Figure 6 The present utility model Figure 5 Enlarged schematic diagram of the structure at point B.

[0021] The attached figures are labeled as follows:

[0022] 1. Storage box; 2. Support leg; 3. Storage chamber; 4. Slot; 5. Storage box; 6. Circular support frame; 7. Groove; 8. Magnet; 9. Heat dissipation chamber; 10. Fan vent; 11. Cooling fan; 12. Air inlet; 13. Heat sink; 14. Transport box; 15. First handle; 16. Rotating block; 17. Rotating handle; 18. Slide groove; 19. Sliding rod; 20. Electromagnetic chamber; 21. Iron core; 22. Coil; 23. Battery; 24. Wire; 25. Charging port; 26. Control button. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figure 1-6As shown, a wafer storage rack is disclosed, including a storage box 1, a storage chamber 3 on one side of the storage box 1, a slot 4 on one side of the storage box 1 and around the storage chamber 3, a heat dissipation chamber 9 fixedly connected to one side of the storage box 1, a heat dissipation component on the heat dissipation chamber 9, a storage box 5 slidably connected to the storage chamber 3, a wafer storage component inside the storage box 5, a transport box 14 on the slot 4, sliding grooves 18 on both sides of the transport box 14, sliding rods 19 slidably connected to the sliding grooves 18, a magnetic suction component on the sliding rods 19, a first handle 15 fixedly connected to the top of the transport box 14, and rotating blocks 16 fixedly connected to both sides of the transport box 14, with rotating handles 17 fixedly connected to the rotating blocks 16.

[0025] As shown in the figure, the heat dissipation component includes a fan vent 10 on one side of the heat dissipation chamber 9, a cooling fan 11 fixedly connected to the fan vent 10, an air inlet 12 on one side of the heat dissipation chamber 9, and several heat sinks 13 fixedly connected to one side inside the heat dissipation chamber 9. One side of the heat sinks 13 penetrates the storage box 1 and is located inside the storage chamber 3, and is used to dissipate heat from the storage box 1.

[0026] As shown in the figure, the wafer storage assembly includes a circular support frame 6 that is fixedly connected to the bottom of the storage box 5. The circular support frame 6 has several slots 7, which facilitate the retrieval of wafers in the storage box 5.

[0027] As shown in the figure, the magnetic attraction assembly includes an electromagnetic chamber 20 fixedly connected to the sliding rod 19. An iron core 21 is fixedly connected inside the electromagnetic chamber 20. A coil 22 is fixedly connected to one side of the electromagnetic chamber 20 and around the iron core 21. A magnet 8 is fixedly connected to one side of the storage box 5. A power supply assembly is provided on one side of the transport box 14 for attracting the magnet 8 on one side of the storage box 5.

[0028] As shown in the figure, the power supply component includes a battery 23 fixedly connected to one side of the inside of the transport box 14. A wire 24 is fixedly connected to the power transmission end of the battery 23. One end of the wire 24 passes through the electromagnetic chamber 20 and is fixedly connected to the coil 22. A charging port 25 is opened on one side of the transport box 14. A control button 26 is fixedly connected to one side of the transport box 14 and located at the charging port 25. The control button 26 and the battery 23 are electrically connected.

[0029] As shown in the figure, support legs 2 are fixedly connected to the four corners of the bottom of the storage box 1 to support the device.

[0030] Working principle: During use, first check that the entire device is intact. After inspection, insert the storage box 5 containing the wafers into the transport box 14. Move the transport box 14 to the storage chamber 1 by turning the handle 17. Then, insert one end of the transport box 14 into the slot 4 using the first handle 15. Next, push the storage box 5 containing the wafers into the storage chamber 3 of the storage chamber 1 using the sliding rod 19 for wafer storage. When the temperature in the storage chamber 1 becomes too high, the heat is transferred to the heat dissipation chamber 9 through the heat sink 13. Then, the cooling fan 11 is activated to further increase the temperature. The airflow in the fast heat dissipation chamber 9 is increased, thereby accelerating the heat exchange between the heat sink 13 and the air, thus achieving heat dissipation. When it is necessary to remove the wafer from the storage box 1, the first handle 15 is used to insert one end of the transport box 14 into the slot 4. Then, the sliding rod 19 is pushed so that the electromagnetic chamber 20 is positioned on the magnet 8 on one side of the storage box 5. Then, the control button 26 is pressed so that the battery 23 supplies power to the coil 22 through the wire 24, thereby causing the iron core 21 to generate a magnetic field to attract the magnet 8. Then, the sliding rod 19 is pulled to make the storage box 5 enter the transport box 14, thus completing the removal of the wafer.

[0031] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A wafer storage rack, comprising a storage box (1), characterized in that: The storage box (1) has a storage chamber (3) on one side, and a slot (4) is provided on one side of the storage box (1) and around the storage chamber (3). A heat dissipation chamber (9) is fixedly connected to one side of the storage box (1). A heat dissipation component is provided on the heat dissipation chamber (9). A storage box (5) is slidably connected to the storage chamber (3). A wafer storage component is provided inside the storage box (5). A transport box (14) is provided on the slot (4). A sliding groove (18) is provided on both sides of the transport box (14). A sliding rod (19) is slidably connected to the sliding groove (18). A magnetic suction component is provided on the sliding rod (19). A first handle (15) is fixedly connected to the top of the transport box (14). A rotating block (16) is fixedly connected to both sides of the transport box (14). A rotating handle (17) is fixedly connected to the rotating block (16).

2. A wafer storage rack according to claim 1, characterized in that: The heat dissipation assembly includes a fan opening (10) on one side of the heat dissipation chamber (9), a cooling fan (11) is fixedly connected to the fan opening (10), an air inlet (12) is opened on one side of the heat dissipation chamber (9), and a number of heat sinks (13) are fixedly connected to one side inside the heat dissipation chamber (9). One side of the heat sinks (13) penetrates the storage box (1) and is located inside the storage chamber (3).

3. A wafer storage rack according to claim 1, characterized in that: The wafer storage assembly includes a circular support frame (6) that is fixedly connected to the bottom of the storage box (5), and the circular support frame (6) has several slots (7).

4. A wafer storage rack according to claim 1, characterized in that: The magnetic suction assembly includes an electromagnetic chamber (20) fixedly connected to the sliding rod (19), an iron core (21) fixedly connected inside the electromagnetic chamber (20), a coil (22) fixedly connected to one side of the electromagnetic chamber (20) and around the iron core (21), a magnet (8) fixedly connected to one side of the storage box (5), and a power supply assembly provided on one side of the transport box (14).

5. A wafer storage rack according to claim 4, characterized in that: The power supply component includes a battery (23) fixedly connected to one side of the inside of the transport box (14). A wire (24) is fixedly connected to the power transmission end of the battery (23). One end of the wire (24) passes through the electromagnetic chamber (20) and is fixedly connected to the coil (22). A charging port (25) is opened on one side of the transport box (14). A control button (26) is fixedly connected to one side of the transport box (14) and located at the charging port (25). The control button (26) and the battery (23) are electrically connected.

6. A wafer storage rack according to claim 1, characterized in that: The storage box (1) is fixedly connected to four corners at the bottom with support legs (2).

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